CN219946257U

CN219946257U - Connecting rod type single-arm double-finger vacuum mechanical arm and vacuum chamber

Info

Publication number: CN219946257U
Application number: CN202321200821.0U
Authority: CN
Inventors: 张明辉; 孙长玲; 余涛
Original assignee: Lezi Xinchuang Semiconductor Equipment Shanghai Co ltd
Current assignee: Lezi Xinchuang Semiconductor Equipment Shanghai Co ltd
Priority date: 2023-05-17
Filing date: 2023-05-17
Publication date: 2023-11-03
Anticipated expiration: 2033-05-17

Abstract

The utility model provides a connecting rod type single-arm double-finger vacuum manipulator and a vacuum chamber, wherein the vacuum manipulator comprises: a drive mechanism and a linkage mechanism, the linkage mechanism comprising: the device comprises a first connecting rod unit, a second connecting rod unit and an arm transverse rod connected with the first connecting rod unit and the second connecting rod unit, wherein the arm transverse rod is provided with two extending parts, a first finger and a second finger are respectively connected with the arm transverse rod, and the first finger and the second finger are used for bearing a wafer; the driving mechanism comprises a first driving unit, a second driving unit and a third driving unit, wherein the first driving unit is connected with the first connecting rod unit and is used for driving the first connecting rod unit to perform telescopic movement; the second driving unit is connected to the second connecting rod unit and used for driving the second connecting rod unit to perform telescopic movement; the third driving unit is connected to the whole connecting rod mechanism and used for driving the whole to rotate.

Description

Connecting rod type single-arm double-finger vacuum mechanical arm and vacuum chamber

Technical Field

The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a connecting rod type single-arm double-finger vacuum manipulator and a vacuum chamber.

Background

The processes of etching, depositing, epitaxial growth and the like in the processing of the semiconductor wafer are required to be carried out in a vacuum reaction chamber, so that a vacuum manipulator is required to carry the wafer from a front-end wafer carrying module to the vacuum reaction chamber, the vacuum manipulator is generally arranged in a vacuum transmission chamber between the wafer carrying front-end module and the vacuum reaction chamber, the traditional clean atmosphere horizontal multi-joint manipulator (commonly called clean SCARA manipulator) cannot be applied to the vacuum environment due to the unique use environment, the atmosphere manipulator is generally composed of a screw rod, a synchronous belt, a harmonic reducer, an electric cable and the like, the structures have great harm to the vacuum environment due to the fact that particles pollute the movement in the vacuum environment or the ultra-high vacuum environment, and the movement shafting has poor air release property, so that the vacuum environment is built for a long time due to the existence of released gas sources when the vacuum chamber is vacuumized, and the economic feasibility is lost.

The conventional vacuum manipulator in the market is directly driven by a direct-drive motor, parts such as a screw rod, a synchronous belt, a harmonic reducer, an electric cable and the like are not used in a shafting in a vacuum environment, and generally, the arm motion mode of the vacuum manipulator is divided into a connecting rod motion mode and a steel belt motion mode, so that the reciprocating conveying function of wafers can be realized in the vacuum environment.

The advantages of the connecting rod motion are that: the arm is thin; the operation speed is high, and the device can be applied to a thin vacuum chamber, so that the space of the vacuum chamber is saved, and the phase change cost is saved. Disadvantages: the load is small; the single side can only be provided with a single finger, so that the productivity is low; the conveying distance is not far; the vacuum chamber, which requires long finger transport, cannot be accommodated because of structural limitations in that the fingers connected to the arm are short.

The advantage of steel band motion: the load is large; the conveying distance is far; double fingers can be arranged on one side of the arm, and the productivity is high. Disadvantages: the running speed is general; because of the existence of the steel belt in the arm, the design of the arm is very thick, so that the overall thickness of the vacuum chamber is increased, and the cost is increased.

Therefore, how to optimize the structure of the vacuum manipulator to make the applicability stronger is a problem to be solved at present.

Disclosure of Invention

The utility model aims to provide a connecting rod type single-arm double-finger vacuum manipulator and a vacuum chamber, which can solve the problems of small load and low productivity of the connecting rod type manipulator.

In order to achieve the above object, the present utility model provides a link type single-arm double-finger vacuum manipulator, comprising:

a drive mechanism and a linkage mechanism, the linkage mechanism comprising:

the device comprises a first connecting rod unit, a second connecting rod unit and an arm transverse rod connected with the first connecting rod unit and the second connecting rod unit, wherein the arm transverse rod is provided with two extending parts, a first finger and a second finger are respectively connected with the arm transverse rod, and the first finger and the second finger are used for bearing a wafer;

the driving mechanism comprises a first driving unit, a second driving unit and a third driving unit, wherein the first driving unit is connected with the first connecting rod unit and is used for driving the first connecting rod unit to perform telescopic movement; the second driving unit is connected to the second connecting rod unit and used for driving the second connecting rod unit to perform telescopic movement; the third driving unit is connected to the whole connecting rod mechanism and used for driving the whole to rotate.

In an alternative, the first link unit includes: a lower arm driving connecting rod;

the lower arm driven connecting rod is connected with the lower arm driving connecting rod through a first bearing;

the second link unit includes: an upper arm driving connecting rod;

the upper arm driven connecting rod is connected with the upper arm driving connecting rod through a second bearing;

one end of the arm transverse rod is connected with the lower arm driven connecting rod through a third bearing, and the other end of the arm transverse rod is connected with the upper arm driven connecting rod through a fourth bearing.

In an alternative scheme, the first driving unit comprises a first stator coil and a first rotor which are mutually matched, and the first rotor surrounds the periphery of the first stator coil;

the first rotor is connected with the lower arm driving connecting rod through a first connecting piece;

the second driving unit comprises a second stator coil and a second rotor which are matched with each other, and the second rotor surrounds the periphery of the second stator coil;

the second rotor is connected with the upper arm driving connecting rod through a second connecting piece;

the third driving unit comprises a third stator coil and a third rotor which are matched with each other; the third rotor surrounds the periphery of the third stator coil;

the third rotor is integrally connected with the connecting rod mechanism through a third connecting piece.

In an alternative scheme, the manipulator further comprises a base and a sleeve, wherein the sleeve is positioned in the base, the sleeve is provided with an annular extension protruding along the circumferential direction, and the annular extension is in sliding sealing connection with the inner wall of the base, so that a vacuum environment is formed between the outer wall of the sleeve and the base;

the first rotor, the second rotor and the third rotor are in a vacuum environment, and the first stator coil, the second stator coil and the third stator coil are positioned inside the sleeve and are in an atmospheric environment.

In an alternative scheme, the manipulator further comprises a corrugated pipe, the upper end of the corrugated pipe is connected to the bottom surface of the annular extension, and the lower end of the corrugated pipe is connected to the bottom surface of the base.

In an alternative scheme, the manipulator further comprises a fourth driving unit;

the fourth driving unit includes:

the servo motor, the synchronous belt pulley and the screw rod are connected in sequence; the servo motor drives the synchronous belt and the synchronous pulley to rotate, and the synchronous pulley drives the screw rod to rotate.

In an alternative scheme, the lower arm driving connecting rod is consistent with the upper arm driving connecting rod in length, and the lower arm driven connecting rod is consistent with the upper arm driven connecting rod in length.

In an alternative scheme, the minimum included angle between the lower arm driving connecting rod and the lower arm driven connecting rod is larger than 30 degrees, and the minimum included angle between the upper arm driving connecting rod and the upper arm driven connecting rod is larger than 30 degrees.

In an alternative scheme, the first bearing, the second bearing and the third bearing are all vacuum bearings, and the surfaces of the vacuum bearings are provided with lubricating coatings.

The utility model also provides a vacuum chamber comprising:

the vacuum transmission cavity is internally provided with the connecting rod type single-arm double-finger vacuum manipulator;

the vacuum reaction cavity is positioned at the periphery of the vacuum transmission cavity and is connected with the vacuum transmission cavity through a vacuum gate valve;

and the wafer table is connected with the vacuum transmission cavity through a vacuum gate valve.

The utility model has the beneficial effects that:

according to the vacuum manipulator disclosed by the utility model, two fingers can be arranged on one side, 2 wafers can be conveyed by the vacuum manipulator at a time, the vacuum chamber can be thinner, 2 wafers can be placed in the vacuum reaction chamber which is connected with the vacuum transmission chamber in a single-side hanging manner at a time, the productivity is higher, and the production cost is saved as a whole.

Furthermore, the utility model provides a novel direct-drive motor structure of the inner stator of the outer rotor, and because the rotor is arranged on the outer side, the output torque is larger, the arm load is increased, and the two fingers can be installed on one side of the arm only because of the increased load.

Drawings

The foregoing and other objects, features and advantages of the utility model will be apparent from the following more particular descriptions of exemplary embodiments of the utility model as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the utility model.

Fig. 1 is an isometric view of a link vacuum robot in an embodiment of the utility model, the vacuum robot being in an initial position (retracted position) with the arm not extended.

Fig. 2 is a diagram showing the construction of a driving mechanism according to an embodiment of the present utility model.

Fig. 3 is a top view of a vacuum robot installed in a vacuum chamber, the vacuum robot being in an initial position, and the arm not being extended, in an embodiment of the present utility model.

FIG. 4 is a top view of a vacuum robot installed in a vacuum chamber with the vacuum robot arm extended and a wafer being transferred to a vacuum reaction chamber in accordance with an embodiment of the present utility model.

Fig. 5a to 5k are views showing dynamic operation states of the connecting rod during the process from the initial position to the maximum extension position of the arm of the vacuum manipulator according to the embodiment of the present utility model.

Reference numerals illustrate:

1 a-a base; 2-lower arm driving connecting rod; 3-an upper arm driving connecting rod; 4-lower arm passive link; 5-upper arm passive link; 6-arm transverse bar; 7-a first finger; 8-a second finger; 9-a first wafer; 10-a second wafer, 11-a first rotor; 12-a first stator coil; 13-a first connector; 14-a second rotor; 15-a second stator coil; 16-a second connector; 17-a third rotor; 18-a third stator coil; 19-a third connector; 20-sleeve; 21-a bellows; 22-a servo motor; 23-synchronous belt; 24-screw rod; 25-synchronous pulleys; 26-a vacuum manipulator; 27-a vacuum transfer chamber; 28-a vacuum reaction chamber; 29-wafer stage; 30-vacuum reaction chamber; 31-a vacuum reaction chamber; 31 a-station; 31 b-station; 32-front end wafer handling module; 33-vacuum gate valve.

Detailed Description

The utility model is described in further detail below with reference to the drawings and the specific examples. The advantages and features of the present utility model will become more apparent from the following description and drawings, however, it should be understood that the inventive concept may be embodied in many different forms and is not limited to the specific embodiments set forth herein. The drawings are in a very simplified form and are to non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.

It will be understood that when an element or layer is referred to as being "on," "adjacent," "connected to," or "coupled to" another element or layer, it can be directly on, adjacent, connected, or coupled to the other element or layer, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present utility model.

Spatially relative terms, such as "under," "below," "beneath," "under," "above," "over," and the like, may be used herein for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use and operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "under" or "beneath" other elements would then be oriented "on" the other elements or features. Thus, the exemplary terms "below" and "under" may include both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

Example 1

Referring to fig. 1 to 5k, the present embodiment provides a link type single arm double finger vacuum robot, comprising:

a drive mechanism and a linkage mechanism, the linkage mechanism comprising:

Specifically, in this embodiment, the first link unit includes: a lower arm driving connecting rod 2; the lower arm driven connecting rod 4 is connected with the lower arm driving connecting rod 2 through a first bearing; the second link unit includes: an upper arm driving connecting rod 3; the upper arm driven connecting rod 5 is connected with the upper arm driving connecting rod 5 through a second bearing; one end of the arm transverse rod 6 is connected with the lower arm driven connecting rod 4 through a third bearing, and the other end of the arm transverse rod is connected with the upper arm driven connecting rod 5 through a fourth bearing. In this embodiment, the first bearing, the second bearing, and the third bearing are all vacuum bearings, and the vacuum bearings do not use a lubricant, but only do a lubrication coating on the surface, so as to prevent the release of the lubricant from polluting the vacuum environment. The first finger 7 and the second finger 8 are respectively mounted on two protruding parts of the arm transverse rod 6 through vacuum screws and are respectively used for bearing a first wafer 9 and a second wafer 10.

In this embodiment, the lower arm driving link 2 and the upper arm driving link 3 have the same length, and the lower arm driven link 4 and the upper arm driven link 5 have the same length. When the lower arm driving connecting rod 2 rotates anticlockwise at a certain speed, the upper arm driving connecting rod 3 rotates clockwise at the same speed, the lower arm driving connecting rod 2 and the upper arm driving connecting rod 3 respectively drive the lower arm driven connecting rod 4 and the upper arm driven connecting rod 5 to rotate, the rotation speeds of the lower arm driven connecting rod 4 and the upper arm driven connecting rod 5 are the same and opposite, the lower arm driven connecting rod 4 and the upper arm driven connecting rod 5 can simultaneously apply acting force to the arm transverse rod 6, and the resultant force of the two forces faces the direction of fingers because the lengths of the left driving connecting rod, the right driving connecting rod and the left driven connecting rod are consistent, so that the arm transverse rod 6, the first finger 7 and the second finger 8 are driven to do linear extending motion together until the arm transverse rod extends to the maximum extending position of the manipulator. After the vacuum manipulator arm is at the maximum extension position, the lower arm driving connecting rod 2 and the upper arm driving connecting rod 3 are respectively rotated clockwise and anticlockwise at the same speed, and the lower arm driven connecting rod 4 and the upper arm driven connecting rod 5 drive the arm transverse rod 6, the first finger 7 and the second finger 8 to perform linear retraction movement together until the vacuum manipulator arm is retracted to the initial position.

In this embodiment, the first driving unit includes a first stator coil 12 and a first rotor 11 that are mutually matched, and the first rotor 11 surrounds the outer periphery of the first stator coil 12; the first rotor 11 is connected with the lower arm driving connecting rod 2 through a first connecting piece 13, after the first stator coil 12 is electrified, the first rotor 11 is rotated, and the first rotor 11 drives the lower arm driving connecting rod 2 to rotate; the second driving unit comprises a second stator coil 15 and a second rotor 14 which are matched with each other, and the second rotor 14 surrounds the periphery of the second stator coil 15; the second rotor 14 is connected with the upper arm driving connecting rod 3 through a second connecting piece 16, and after the second stator coil 15 is electrified, the second rotor 14 is rotated, and the second rotor 14 drives the upper arm driving connecting rod 3 to rotate; the third driving unit comprises a third stator coil 18 and a third rotor 17 which are matched with each other; and the third rotor 17 surrounds the outer periphery of the third stator coil 18; the third rotor 17 is integrally connected with the link mechanism through a third connecting piece 19. After the third stator coil 18 is electrified, the third rotor 17 can be rotated, the third rotor 17 can drive the link mechanism to integrally rotate, the integral arm rotation function of the vacuum manipulator is realized, and wafers can be handed over from the vacuum manipulator to different directions.

The manipulator in this embodiment further includes a fourth driving unit; the fourth driving unit includes: the servo motor 22, the synchronous belt 23, the synchronous belt pulley 25 and the screw rod 24 are sequentially connected; the servo motor 22 drives the synchronous belt 23 and the synchronous belt pulley 25 to rotate, and the synchronous belt pulley 25 drives the screw rod 24 to rotate.

In this embodiment, the manipulator further includes a base 1a and a sleeve 20, where the sleeve 20 is located in the base 1a, and the sleeve 20 has an annular extension protruding along a circumferential direction, and the annular extension is slidably and sealingly connected with an inner wall of the base 1a, so that a vacuum environment is formed between an outer wall of the sleeve 20 and the base 1 a; the first rotor 11, the second rotor 15, and the third rotor 18 are in a vacuum environment, and the first stator coil 12, the second stator coil 14, and the third stator coil 17 are located inside the sleeve 20 and are in an atmospheric environment. The manipulator further comprises a corrugated pipe 21, wherein the upper end of the corrugated pipe 21 is connected to the bottom surface of the annular extension, and the lower end of the corrugated pipe is connected to the bottom surface of the base 1 a.

Screw 24 is engaged with sleeve 20 (preferably stainless steel) by screw thread, so that screw 24 rotates to change into linear movement of sleeve 20 (sleeve is connected with other parts, and then the connecting rod structure moves up and down integrally), and the technology is conventional and is not shown in fig. 2, and vacuum and atmosphere are isolated between sleeve 20 and base 1a by bottom mounting rigid bellows 21. The rigid corrugated pipe 21 is dynamically sealed, and when the screw rod 24 drives the sleeve 20 to move up and down linearly, the rigid corrugated pipe 21 stretches and contracts, so that the effect of dynamically isolating the vacuum environment is realized.

According to the embodiment, two fingers can be arranged on one side, 2 wafers can be conveyed by the vacuum manipulator at a time, the vacuum chamber can be thinner, 2 wafers can be placed in the vacuum reaction chamber with the single side of the vacuum transmission chamber in a hanging manner at a time, the productivity is higher, and the production cost is saved as a whole.

Further, this embodiment provides a novel direct-drive motor structure of outer rotor inner stator, because the rotor is in the outside, and output torque is bigger, and arm load increases, also because load increases just can realize that two finger are installed to arm unilateral.

Example 2

Referring to fig. 3 to 5k, the present embodiment provides a vacuum chamber including:

the vacuum transmission cavity 27 is provided with the connecting rod type single-arm double-finger vacuum manipulator 26;

at least one vacuum reaction chamber located at the periphery of the vacuum transmission chamber 27 and connected with the vacuum transmission chamber through a vacuum gate valve;

the wafer stage 29 is connected to the vacuum transfer chamber 27 through a vacuum gate valve.

Specifically, in this embodiment, there are 3 vacuum reaction chambers (vacuum reaction chamber 28, vacuum reaction chamber 30, vacuum reaction chamber 31), each vacuum reaction chamber is provided with 2 wafer stations (station 31a and station 31 b), and the processing, conveying and processing of 2 wafers can be completed at a time, so that the productivity is higher. The vacuum transmission chamber 27 and each vacuum reaction chamber, and the vacuum transmission chamber 27 and the wafer table 29 are connected through the vacuum gate valve 33, when the wafers are transported between each other, the corresponding vacuum gate valve 33 is opened, and the other vacuum gate valves 33 are closed, so that the stable gas environment in each chamber is ensured.

As shown in fig. 3, the left side of the wafer stage 29 is connected to the front end wafer stage 29 through a vacuum gate valve 33, and when a conventional wafer factory processes wafers, the front end wafer stage 29 and the front end wafer stage 32 are used to transfer the wafers, which is commonly called loading and unloading. After the wafer is fed to the wafer stage 29, the vacuum gate valve 33 on the left side of the wafer stage 29 is closed, an independent chamber environment is formed inside the wafer stage 29, the wafer stage 29 is usually vacuumized by a vacuum pump, after the vacuum degree reaches a target value (the target value is generally consistent with the vacuum degree of a chamber to be subsequently transferred, in order to ensure that vacuum gas cannot flow between the communicated chambers due to different pressures when the gate valve is opened and closed), then the vacuum gate valve 33 connected with the vacuum transmission cavity 27 on the right side of the wafer stage 29 is opened, the wafer manipulator 26 takes out the wafer from the wafer stage 29 through a motion connecting rod arm, the vacuum manipulator 26 returns to the position of fig. 3 to wait for transferring the wafer to the vacuum reaction cavity 31, and finally the vacuum gate valve 33 on the right side of the wafer stage 29 is closed.

As shown in fig. 4, before the first wafer 9 and the second wafer 10 are sent to the stations 31a and 31b of the vacuum reaction chamber 31, the vacuum pump first vacuumizes the vacuum transmission chamber 27, and after the vacuum degree is identical to the vacuum degree of the vacuum reaction chamber 31, the gate valve 33 between the vacuum transmission chamber 27 and the vacuum reaction chamber 31 is opened. The vacuum robot 26 rotates the link arm to extend the fingers, carries the first wafer 9 and the second wafer 10 to the stations 31a and 31b of the vacuum reaction chamber 31, respectively, and then retracts the arm of the vacuum robot 26 to close the vacuum transfer chamber 27 and the gate valve 33 before the vacuum reaction chamber 31. The loading function of the wafer from the wafer front end conveying module 32 to the vacuum reaction chamber 31 is completed, otherwise, the process is performed in an opposite mode, the unloading process of the vacuum reaction chamber 31 to the wafer front end conveying module 32 can be completed, and the loading and unloading modes of other vacuum reaction chambers are consistent.

As shown in fig. 5a to 5k, there is a screenshot of the link dynamics during the arm of the vacuum robot from the retracted position to the maximum extended position. When the upper arm and the lower arm drive the driven connecting rod to rotate, the torque resultant force direction of the drive connecting rod and the driven connecting rod is consistent with the finger running direction, so that the situation of jamming can not occur; the diagram 5e is a screenshot when the included angle between the active connecting rod and the passive connecting rod is the smallest, the smallest included angle is larger than 30 degrees, and the whole output torque of the connecting rod faces the direction of the finger. The link operation functionality may be implemented.

The above description is only illustrative of the preferred embodiments of the present utility model and is not intended to limit the scope of the present utility model, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.

Claims

1. A connecting rod type single arm double finger vacuum manipulator, comprising:

a drive mechanism and a linkage mechanism, the linkage mechanism comprising:

2. The link single-arm two-finger vacuum robot of claim 1, wherein the first link unit comprises:

a lower arm driving connecting rod;

the second link unit includes:

an upper arm driving connecting rod;

3. The connecting rod type single-arm double-finger vacuum manipulator according to claim 2, wherein the first driving unit comprises a first stator coil and a first rotor which are mutually matched, and the first rotor surrounds the periphery of the first stator coil;

4. The link single-arm two-finger vacuum robot of claim 3, further comprising a base and a sleeve, the sleeve being positioned within the base, the sleeve having a circumferentially convex annular extension slidably and sealingly connected to an inner wall of the base such that a vacuum environment is formed between an outer wall of the sleeve and the base;

5. The single arm, two finger vacuum robot of claim 4, further comprising a bellows, an upper end of the bellows being connected to the bottom surface of the annular extension, and a lower end of the bellows being connected to the bottom surface of the base.

6. The link single-arm two-finger vacuum robot of claim 1, further comprising a fourth drive unit;

the fourth driving unit includes:

7. The single arm, single finger vacuum robot of claim 2, wherein the lower arm active link and the upper arm active link are of uniform length and the lower arm passive link and the upper arm passive link are of uniform length.

8. The single arm, two finger vacuum robot of claim 7, wherein the minimum angle between the lower arm drive link and the lower arm passive link is greater than 30 ° and the minimum angle between the upper arm drive link and the upper arm passive link is greater than 30 °.

9. The connecting rod single arm two finger vacuum manipulator of claim 2, wherein the first bearing, the second bearing, and the third bearing are all vacuum bearings, and the surfaces of the vacuum bearings are provided with a lubrication coating.

10. A vacuum chamber, comprising:

a vacuum transmission cavity, wherein the vacuum transmission cavity is provided with the connecting rod type single-arm double-finger vacuum manipulator as claimed in any one of claims 1 to 9;