CN219945875U - Tool clamp for processing semiconductor parts - Google Patents
Tool clamp for processing semiconductor parts Download PDFInfo
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- CN219945875U CN219945875U CN202320673578.8U CN202320673578U CN219945875U CN 219945875 U CN219945875 U CN 219945875U CN 202320673578 U CN202320673578 U CN 202320673578U CN 219945875 U CN219945875 U CN 219945875U
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- hole
- clamped
- fixing plate
- workpiece
- jaw mechanism
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 31
- 238000003754 machining Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 7
- 238000009434 installation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The utility model belongs to the technical field of machining and discloses a fixture for machining semiconductor parts, which comprises a clamping jaw mechanism, a fixing plate and a connecting piece, wherein the clamping jaw mechanism is arranged on a workbench, the fixing plate is provided with a through hole, the clamping jaw mechanism is clamped to the through hole, the fixing plate is provided with a first end face and a second end face, the first end face faces towards the clamping jaw mechanism, the second end face is used for fixing a workpiece to be clamped, the second end face is provided with a connecting hole, the workpiece to be clamped is provided with the first through hole, the connecting piece passes through the first through hole and is connected to the connecting hole, the clamping jaw mechanism is clamped to the through hole of the fixing plate, the fixing plate is fixed to the clamping jaw mechanism, then the workpiece to be clamped is aligned to and is placed on the second end face of the fixing plate, the connecting piece passes through the first through hole and is locked and clamped with the connecting hole of the fixing plate, the fixed clamping of the workpiece to be clamped is rapidly completed, the relative position of the workpiece to be clamped and the fixing plate is ensured to be accurate, and the reliability of repeated positioning of the fixture in an adjustment or replacement process is met.
Description
Technical Field
The utility model relates to the technical field of machining, in particular to a fixture for machining semiconductor parts.
Background
The fixture is a general name of tools such as a cutter, a die, a clamp and the like used in the manufacturing process, wherein the clamp is a process device used for rapidly fastening a workpiece during processing so as to keep the workpiece at a correct relative position. Driven by the development of machine tool technology to high speed, precision and high efficiency, clamp technology is developing to module, combination and general.
When the thin-wall semiconductor parts are machined on a lathe, the workpiece must be positioned and clamped before machining in order to make the surface of the workpiece to be clamped meet the technical requirements of the size, the geometric shape, the mutual position precision with other surfaces and the like specified in the drawing. However, the concentricity error of the workpiece to be clamped is larger after the lathe machining is finished, and the accuracy of the relative position of the side hole cannot be ensured, so that the positioning reliability of the workpiece to be clamped is poor.
Therefore, a tool jig for processing semiconductor parts is needed to solve the above-mentioned problems.
Disclosure of Invention
The utility model aims to provide a fixture for processing semiconductor parts, which can rapidly complete the fixed clamping of a workpiece to be clamped, ensure the accurate relative position of the workpiece to be clamped and a fixed plate and meet the reliability of repeated positioning of the fixture in the process of adjustment or replacement.
In order to solve the problems existing in the prior art, the utility model adopts the following technical scheme:
a frock clamp for processing semiconductor spare part includes:
the clamping jaw mechanism is arranged on the workbench;
the clamping jaw mechanism is clamped in the through hole, the fixing plate is provided with a first end face and a second end face, the first end face faces the clamping jaw mechanism, the second end face is used for fixing a workpiece to be clamped, the second end face is provided with a connecting hole, and the workpiece to be clamped is provided with a first through hole;
the connecting piece passes through the first through hole and is connected to the connecting hole.
Preferably, the number of the connecting pieces is multiple, the number of the connecting holes and the number of the first through holes are the same as the number of the connecting pieces, the multiple connecting holes and the multiple first through holes are arranged at intervals along the circumferential direction of the fixing plate, and the multiple connecting pieces respectively penetrate through the corresponding first through holes and are connected to the corresponding connecting holes.
Preferably, the fixing plate is of a circular ring structure.
Preferably, the central axis of the fixing plate coincides with the central axis of the workpiece to be clamped.
Preferably, the diameter of the fixing plate is larger than the diameter of the workpiece to be clamped.
Preferably, the inner side wall of the connecting hole is provided with an internal thread, and the connecting piece passes through the first through hole and is in threaded connection with the connecting hole.
Preferably, the fixture for processing semiconductor parts further comprises a positioning pin, the second end face is further provided with a positioning hole, the workpiece to be clamped is further provided with a second through hole, and the positioning pin penetrates through the second through hole and is connected to the positioning hole.
Preferably, the clamping jaw mechanism comprises a base and clamping jaws, wherein the base is installed on the workbench, the clamping jaws are connected to the base in a sliding mode, and the clamping jaws are used for fixing the fixing plate.
Preferably, the number of the clamping jaws is multiple, the clamping jaws are arranged at intervals along the circumferential direction of the base, and the clamping jaws can be abutted to the side wall of the through hole.
Preferably, the fixture for processing semiconductor parts further comprises a fixing piece, wherein the base is provided with a fixing groove, and the fixing piece penetrates through the fixing groove and is connected to the workbench.
The beneficial effects of the utility model are as follows:
the utility model provides a fixture for processing semiconductor parts, which is characterized in that a clamping jaw mechanism is arranged on a workbench, a through hole is formed in a fixing plate, the clamping jaw mechanism is clamped in the through hole, the fixing plate is provided with a first end face and a second end face, the first end face faces towards the clamping jaw mechanism, the second end face is used for fixing a workpiece to be clamped, a connecting hole is formed in the second end face, and the workpiece to be clamped is provided with the first through hole. The fixed plate is located between clamping jaw mechanism and the work piece that waits to press from both sides, and clamping jaw mechanism joint fixed plate's through-hole for the fixed plate is fixed at clamping jaw mechanism, then waits to press from both sides the work piece and aim at and place at the second terminal surface of fixed plate, and the connecting piece passes first through-hole and with the connecting hole locking clamping of fixed plate, accomplish fast and wait to press from both sides the fixed clamp of work piece, guarantee to wait to press from both sides the relative position accuracy of work piece and fixed plate, satisfy frock clamp in adjustment or change in-process repeatedly positioned's reliability.
Drawings
FIG. 1 is a schematic explosion diagram of a tool holder according to an embodiment of the present utility model;
fig. 2 is a schematic explosion diagram of a tool holder according to an embodiment of the utility model.
Reference numerals:
1. a jaw mechanism; 11. a base; 12. a clamping jaw;
2. a fixing plate; 21. a through hole; 22. a first end face; 23. a second end face; 24. a connection hole; 25. positioning holes;
3. a workpiece to be clamped; 31. a first through hole; 32. a second through hole;
4. a connecting piece;
5. and (5) positioning pins.
Detailed Description
The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
When the thin-wall semiconductor parts are machined on a lathe, the workpiece must be positioned and clamped before machining in order to make the surface of the workpiece to be clamped meet the technical requirements of the size, the geometric shape, the mutual position precision with other surfaces and the like specified in the drawing. However, the concentricity error of the workpiece to be clamped is larger after the lathe machining is finished, and the accuracy of the relative position of the side hole cannot be ensured, so that the positioning reliability of the workpiece to be clamped is poor. In this way, the utility model provides the fixture for processing the semiconductor parts, which can rapidly complete the fixed clamping of the workpiece to be clamped, ensure the accurate relative positions of the workpiece to be clamped and the fixed plate, and meet the reliability of repeated positioning of the fixture in the adjustment or replacement process.
As shown in fig. 1 to 2, in the present embodiment, a tool fixture for processing semiconductor parts includes a jaw mechanism 1, a fixing plate 2, and a connecting member 4. Wherein, clamping jaw mechanism 1 installs in the workstation, and through-hole 21 has been seted up to fixed plate 2, clamping jaw mechanism 1 joint in through-hole 21, and fixed plate 2 has first terminal surface 22 and second terminal surface 23, and first terminal surface 22 is towards clamping jaw mechanism 1, and second terminal surface 23 is used for fixed waiting to press from both sides work piece 3, and connecting hole 24 has been seted up to second terminal surface 23, waits to press from both sides work piece 3 and be provided with first through-hole 31, and connecting piece 4 passes first through-hole 31 and connects in connecting hole 24. Specifically, the fixing plate 2 is located between the clamping jaw mechanism 1 and the workpiece 3 to be clamped, and preferably, the fixing plate 2 is of a circular ring structure, and has the same cross-sectional shape as the workpiece 3 to be clamped, and is circular. The connecting piece 4 is arranged as a screw, the through hole 21 is positioned at the central position of the fixed plate 2, the clamping jaw mechanism 1 is clamped with the through hole 21 of the fixed plate 2, so that the fixed plate 2 is fixed on the clamping jaw mechanism 1, then the workpiece 3 to be clamped is aligned with and placed on the second end face 23 of the fixed plate 2, the connecting piece 4 passes through the first through hole 31 and is locked and clamped with the connecting hole 24 of the fixed plate 2, the fixed clamping of the workpiece 3 to be clamped is rapidly completed, the relative position of the workpiece 3 to be clamped and the fixed plate 2 is ensured to be accurate, and the repeated positioning reliability of the fixture in the adjustment or replacement process is met.
Further, with continued reference to fig. 1-2, the number of the connecting members 4 is provided with a plurality of connecting holes 24 and the number of the first through holes 31 are the same as the number of the connecting members 4, the plurality of connecting holes 24 and the plurality of first through holes 31 are each provided at intervals along the circumferential direction of the fixing plate 2, and the plurality of connecting members 4 respectively pass through the corresponding first through holes 31 and are connected to the corresponding connecting holes 24. Specifically, the number of the connecting pieces 4, the connecting holes 24 and the first through holes 31 is three, and the three connecting pieces 4 sequentially penetrate through the corresponding first through holes 31 and are fixedly connected to the connecting holes 24 of the fixed plate 2, so that the concentricity requirement of the workpiece 3 to be clamped is further improved, and the simple and quick operation in the clamping process is met.
Further, with continued reference to fig. 1-2, the central axis of the fixed plate 2 coincides with the central axis of the workpiece 3 to be clamped. Specifically, under the effect of a plurality of connecting pieces 4, the workpiece 3 to be clamped and the fixed plate 2 are locked and clamped, so that the requirements of high positioning accuracy of the workpiece 3 to be clamped and high coaxiality of the workpiece 3 to be clamped and the fixed plate 2 are met.
Further, with continued reference to fig. 1-2, the diameter of the fixing plate 2 is larger than the diameter of the workpiece 3 to be clamped, and the workpiece 3 to be clamped can be completely pressed on the fixing plate 2 on the premise of ensuring that a sufficient bearing capacity is provided for machining on the fixing plate 2.
Further, with continued reference to fig. 1-2, the inner sidewall of the connection hole 24 is provided with an internal thread, and the connection member 4 passes through the first through hole 31 and is screwed with the connection hole 24, so that quick detachment, installation and replacement are facilitated.
Further, with continued reference to fig. 1-2, the fixture for processing semiconductor parts further includes a positioning pin 5, the second end face 23 is further provided with a positioning hole 25, the workpiece 3 to be clamped is further provided with a second through hole 32, the positioning pin 5 passes through the second through hole 32 and is connected to the positioning hole 25, the positioning pin 5 has the function of positioning and foolproof, the angular tolerance of a side hole between the workpiece 3 to be clamped and the fixing plate 2 is ensured, and the positioning accuracy and foolproof measures of the workpiece 3 to be clamped in the use process are satisfied.
Further, with continued reference to fig. 1-2, the jaw mechanism 1 includes a base 11 and a jaw 12, the base 11 being mounted to the table, the jaw 12 being slidably connected to the base 11, the jaw 12 being adapted to secure the mounting plate 2. Specifically, the clamping jaw 12 is abutted to the through hole 21 of the fixing plate 2, so that the fixing plate 2 can be fixed on the base 11, and the clamping is firm and is not easy to loosen.
Further, with continued reference to fig. 1-2, the number of the clamping jaws 12 is plural, the plurality of clamping jaws 12 are arranged at intervals along the circumferential direction of the base 11, and the plurality of clamping jaws 12 can abut against the side wall of the through hole 21. Specifically, under the clamping action of the clamping jaws 12, the central axis of the fixing plate 2 coincides with the central axis of the bottom plate, the coaxiality is high, and meanwhile, the firmness of the fixing plate 2 relative to the bottom plate is further improved, and the installation is reliable.
Further, with continued reference to fig. 1-2, the tool fixture for processing semiconductor parts further includes a fixing member, the base 11 is provided with a fixing slot, and the fixing member passes through the fixing slot and is connected to the workbench. Specifically, the mounting sets up to the bolt, and the workstation is seted up flutedly, and the recess is rectangular shape structure. Under the effect of mounting, the mounting passes the fixed slot and fixed connection in the recess of workstation, screws up the mounting for base 11 is fixed on the workstation, and the installation is firm, convenient to detach changes simultaneously.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.
Claims (10)
1. A frock clamp for processing semiconductor spare part, its characterized in that includes:
the clamping jaw mechanism (1), the clamping jaw mechanism (1) is installed on the workbench;
the clamping jaw mechanism comprises a fixing plate (2), wherein a through hole (21) is formed in the fixing plate (2), the clamping jaw mechanism (1) is clamped to the through hole (21), the fixing plate (2) is provided with a first end face (22) and a second end face (23), the first end face (22) faces the clamping jaw mechanism (1), the second end face (23) is used for fixing a workpiece (3) to be clamped, a connecting hole (24) is formed in the second end face (23), and the workpiece (3) to be clamped is provided with a first through hole (31);
-a connection piece (4), said connection piece (4) passing through said first through hole (31) and being connected to said connection hole (24).
2. The tool clamp for processing semiconductor parts according to claim 1, wherein the number of the connecting pieces (4) is plural, the number of the connecting holes (24) and the number of the first through holes (31) are the same as the number of the connecting pieces (4), the plurality of the connecting holes (24) and the plurality of the first through holes (31) are arranged at intervals in the circumferential direction of the fixing plate (2), and the plurality of the connecting pieces (4) respectively pass through the corresponding first through holes (31) and are connected to the corresponding connecting holes (24).
3. Tool clamp for processing semiconductor components according to claim 1, characterized in that the fixing plate (2) is of circular ring structure.
4. Tool clamp for processing semiconductor components according to claim 1, characterized in that the central axis of the fixing plate (2) coincides with the central axis of the workpiece (3) to be clamped.
5. Tool clamp for processing semiconductor components according to claim 1, characterized in that the diameter of the fixing plate (2) is larger than the diameter of the workpiece (3) to be clamped.
6. Tool clamp for processing semiconductor components according to claim 1, characterized in that the inner side wall of the connection hole (24) is provided with an internal thread, and the connection piece (4) passes through the first through hole (31) and is screwed with the connection hole (24).
7. The fixture for machining semiconductor parts according to claim 1, further comprising a positioning pin (5), wherein the second end surface (23) is further provided with a positioning hole (25), the workpiece (3) to be clamped is further provided with a second through hole (32), and the positioning pin (5) passes through the second through hole (32) and is connected to the positioning hole (25).
8. Tool clamp for processing semiconductor components according to claim 1, characterized in that the clamping jaw mechanism (1) comprises a base (11) and clamping jaws (12), the base (11) is mounted on the workbench, the clamping jaws (12) are slidably connected to the base (11), and the clamping jaws (12) are used for fixing the fixing plate (2).
9. The tool clamp for processing semiconductor parts according to claim 8, wherein the number of the clamping jaws (12) is plural, the plurality of clamping jaws (12) are arranged at intervals along the circumferential direction of the base (11), and the plurality of clamping jaws (12) can be abutted against the side wall of the through hole (21).
10. The tool clamp for processing semiconductor parts according to claim 8, further comprising a fixing member, wherein the base (11) is provided with a fixing groove, and the fixing member passes through the fixing groove and is connected to the table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320673578.8U CN219945875U (en) | 2023-03-30 | 2023-03-30 | Tool clamp for processing semiconductor parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320673578.8U CN219945875U (en) | 2023-03-30 | 2023-03-30 | Tool clamp for processing semiconductor parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219945875U true CN219945875U (en) | 2023-11-03 |
Family
ID=88552587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320673578.8U Active CN219945875U (en) | 2023-03-30 | 2023-03-30 | Tool clamp for processing semiconductor parts |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219945875U (en) |
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2023
- 2023-03-30 CN CN202320673578.8U patent/CN219945875U/en active Active
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