CN219936190U - Double-sided probe 3D microscope test platform - Google Patents
Double-sided probe 3D microscope test platform Download PDFInfo
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- CN219936190U CN219936190U CN202321121541.0U CN202321121541U CN219936190U CN 219936190 U CN219936190 U CN 219936190U CN 202321121541 U CN202321121541 U CN 202321121541U CN 219936190 U CN219936190 U CN 219936190U
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- 238000012360 testing method Methods 0.000 title claims abstract description 76
- 239000000523 sample Substances 0.000 title claims abstract description 24
- 239000004065 semiconductor Substances 0.000 abstract description 28
- 230000006378 damage Effects 0.000 abstract description 4
- 230000001012 protector Effects 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000003825 pressing Methods 0.000 description 6
- 238000013519 translation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005662 electromechanics Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The utility model belongs to the technical field of testing, and particularly relates to a two-sided probe 3D microscope testing platform which comprises a testing table and a supporting column, wherein a protecting device is arranged at the top end of the testing table, a fixing device is arranged on the outer wall of a placing circular plate, a connecting frame is fixedly arranged at the top end of the testing table, a testing device is arranged at the top end of the connecting frame, and a lighting device is arranged on the front face of the connecting frame. This two-sided probe 3D microscope test platform through setting up protector, can place the semiconductor that waits to test in the device that has safeguard function to avoided the semiconductor to expose and receive external factor's destruction easily, through setting up fixing device, can fix the semiconductor that waits to test, thereby make the semiconductor can place more stable, thereby promoted the precision of test result, through setting up lighting device, can provide the light source for the test, also further promoted the accuracy of test result.
Description
Technical Field
The utility model relates to the technical field of testing, in particular to a double-sided probe 3D microscope testing platform.
Background
The double-sided probe is mainly applied to testing in the semiconductor industry and the photoelectric industry. The material is mainly used in electron, electromechanics, chemical industry, material property research institute, photoelectric institute, nanometer machine, avionic and the like, and aims to ensure quality and manufacturability of devices and reduce research and development time and cost of device manufacturing process. However, the microscope of the probe station, especially a metallographic microscope, has a limited working distance of the lens, and the microscope needs to be lifted up to avoid touching the probe when the objective lens is replaced, and the existing replacing method uses the matching of a mechanical structure to make a tilting device on the base of the whole microscope, so as to achieve the purpose of replacing the objective lens, but the structure is inconvenient to use, the tilting rod needs to be held by one hand, and the objective lens needs to be replaced by the other hand, so that the microscope is easy to damage.
In the patent document with the publication number of CN211318868U, a probe platform with a pneumatic quick-adjusting object stage and a microscope is proposed, the device comprises a base, a needle seat platform, an object stage, a probe seat and a microscope, wherein the needle seat platform is provided with a through hole, the object stage is correspondingly arranged at the through hole formed by the needle seat platform, the probe seat is arranged on the needle seat platform and surrounds the through hole formed by the needle seat platform, the microscope is arranged on the base through a portal frame and is arranged above the needle seat platform, the object stage and the microscope are both arranged on an XY axis translation stage, and the object stage can quickly adjust the position of a semiconductor device to be tested through the XY axis translation stage and replace the semiconductor device to be tested; the microscope can rapidly adjust the distance between the microscope and the semiconductor device to be tested through the XY axis translation stage, find a proper focal length, replace the objective lens and greatly improve the detection efficiency of the semiconductor device.
However, the device is used for placing the tested semiconductor on the object stage in a bare manner during testing, so that the tested element is easily damaged by external factors.
For this reason, it is desirable to provide a dual-sided probe 3D microscope test platform.
Disclosure of Invention
The utility model aims to provide a double-sided probe 3D microscope test platform, which is used for solving the problem that a tested semiconductor is exposed on an objective table when the device is used for testing, so that a test element is easily damaged by external factors.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a two-sided probe 3D microscope test platform, includes testboard and support column, the testboard top is provided with protector, the testboard top is provided with places the plectane, place the plectane top and set up flutedly, it is provided with fixing device to place the plectane outer wall, testboard top fixed mounting has the link, the link top is provided with testing arrangement, the link openly is provided with lighting device.
The protection device comprises a sliding groove, a sliding rail, a sliding block, a protection cover, a baffle and a test hole, wherein the sliding groove is formed in the top end of the test board, the sliding rail is fixedly arranged on the inner wall of the sliding groove, the sliding block is connected to the outer wall of the sliding rail, the protection cover is fixedly arranged on the top end of the test board, the baffle is fixedly arranged on the front surface of the protection cover, and the test hole is formed in the top end of the protection cover.
Preferably, the bottom end of the supporting column is fixedly provided with a chassis, the bottom end of the chassis is movably connected with a rubber sleeve, so that the protection effect on the chassis is achieved, the stability of the device is improved, and the side edge of the test board is fixedly provided with a handle, so that the device can be moved conveniently.
Preferably, the fixing device comprises a fixing plate, a rotating groove, a rotating shaft, a fixing piece, a pressing block and a soft cushion, wherein the fixing plate is fixedly arranged on the outer wall of a placing circular plate, the rotating groove is formed in one end of the fixing plate, the rotating shaft is connected inside the rotating groove, the fixing piece is arranged on the outer wall of the rotating shaft, the pressing block is fixedly arranged on the top end of the fixing piece, and the soft cushion is movably connected on the top end of the pressing block.
Preferably, the testing device comprises a hanging groove, a hanging rail, a moving block, a connecting rod, a mounting plate, a rotating plate and a camera, wherein the hanging groove is formed below the top end of the connecting frame, the hanging rail is fixedly mounted on the inner wall of the hanging groove, the moving block is connected to the outer wall of the hanging rail, the connecting rod is fixedly mounted at the bottom end of the moving block, the mounting plate is fixedly mounted at the bottom end of the connecting rod, the rotating plate is connected to the bottom end of the mounting plate, and the camera is mounted at the bottom end of the rotating plate.
Preferably, the lighting device comprises a fixing rod, a fixing block, a rotating shaft, a mounting piece and a lighting lamp, wherein the fixing rod is fixedly mounted on the front surface of the connecting frame, the fixing block is fixedly mounted on the front surface of the fixing rod, the rotating shaft is connected inside the fixing block, the mounting piece is fixedly mounted on the outer wall of the rotating shaft, and the lighting lamp is movably mounted on the top end of the mounting piece.
Preferably, the slider is connected with the outer wall of the sliding rail in a sliding way, so that a semiconductor to be tested is conveniently sent into the protective cover, the area of the test hole is larger than the area of the top end of the placed circular plate, and then the semiconductor can be comprehensively tested.
Preferably, the movable block is in sliding connection with the outer wall of the hanging rail, so that the position of the camera is convenient to adjust, and therefore the semiconductor can be better tested, the rotating disc is in rotating connection with the bottom end of the mounting disc, different cameras can be replaced, the rotating shaft is in rotating connection with the inside of the fixed block, and the position of the illuminating lamp is convenient to adjust, so that a light source can be better provided.
Compared with the prior art, the utility model has the beneficial effects that:
1. this two-sided probe 3D microscope test platform through setting up protector, can place the semiconductor that waits to test in the device that has safeguard function to avoided the semiconductor to expose in the outside and receive the destruction of external factor easily, solved the device that proposes in the prior art when the test, place the semiconductor of test on the objective table with exposing, and then make the test element receive external factor easily and cause the problem of damage.
2. This two-sided probe 3D microscope test platform through setting up fixing device, can fix the semiconductor that waits to test to make the semiconductor can place more stable, thereby promoted the precision of test result, through setting up lighting device, can provide the light source for the test, also promoted the accuracy of test result further.
Drawings
FIG. 1 is a schematic elevational view of the present utility model;
FIG. 2 is a schematic top view of the present utility model;
FIG. 3 is a schematic view of the bottom view of the present utility model;
fig. 4 is a schematic structural view of a lighting device according to the present utility model.
In the figure: 1. a test bench; 2. a support column; 3. a chassis; 4. a rubber sleeve; 5. a handle; 6. a protective device; 601. a chute; 602. a slide rail; 603. a slide block; 604. a protective cover; 605. a baffle; 606. a test well; 7. placing a circular plate; 8. a groove; 9. a fixing device; 901. a fixing plate; 902. a rotary groove; 903. a rotating shaft; 904. a fixing member; 905. briquetting; 906. a soft cushion; 10. a connecting frame; 11. a testing device; 111. hanging grooves; 112. a hanger rail; 113. a moving block; 114. a connecting rod; 115. a mounting plate; 116. a rotating disc; 117. a camera; 12. a lighting device; 121. a fixed rod; 122. a fixed block; 123. a rotating shaft; 124. a mounting member; 125. an illuminating lamp.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a two-sided probe 3D microscope test platform, including testboard 1 and support column 2, support column 2 bottom fixed mounting has chassis 3, chassis 3 bottom swing joint has rubber sleeve 4, both play the guard action to chassis 3, the stability of the device has also been promoted, testboard 1 side fixed mounting has handle 5, be convenient for remove the device, testboard 1 top is provided with protector 6, testboard 1 top is provided with places plectane 7, place plectane 7 top and seted up flutedly 8, place plectane 7 outer wall and be provided with fixing device 9, testboard 1 top fixed mounting has link 10, link 10 top is provided with testing arrangement 11, link 10 openly is provided with lighting device 12.
The protection device 6 comprises a chute 601, a slide rail 602, a slide block 603, a protective cover 604, a baffle 605 and a test hole 606, wherein the chute 601 is formed in the top end of the test board 1, the slide rail 602 is fixedly arranged on the inner wall of the chute 601, the slide block 603 is connected to the outer wall of the slide rail 602, the slide block 603 is slidably connected with the outer wall of the slide rail 602, a semiconductor to be tested is conveniently sent into the protective cover 604, the protective cover 604 is fixedly arranged on the top end of the test board 1, the baffle 605 is fixedly arranged on the front surface of the protective cover 604, the test hole 606 is formed in the top end of the protective cover 604, the area of the test hole 606 is larger than the area of the top end of the placed circular plate 7, and then the semiconductor can be comprehensively tested.
The fixing device 9 comprises a fixing plate 901, a rotating groove 902, a rotating shaft 903, a fixing piece 904, a pressing block 905 and a soft cushion 906, wherein the fixing plate 901 is fixedly arranged on the outer wall of the placing circular plate 7, the rotating groove 902 is formed at one end of the fixing plate 901, the rotating shaft 903 is connected inside the rotating groove 902, the fixing piece 904 is arranged on the outer wall of the rotating shaft 903, the pressing block 905 is fixedly arranged at the top end of the fixing piece 904, and the soft cushion 906 is movably connected at the top end of the pressing block 905.
The testing device 11 comprises a hanging groove 111, a hanging rail 112, a moving block 113, a connecting rod 114, a mounting plate 115, a rotating plate 116 and a camera 117, wherein the hanging groove 111 is arranged below the top end of the connecting frame 10, the hanging rail 112 is fixedly arranged on the inner wall of the hanging groove 111, the moving block 113 is connected to the outer wall of the hanging rail 112, the moving block 113 is slidably connected with the outer wall of the hanging rail 112, the position of the camera 117 is convenient to adjust, thus a semiconductor can be better tested, the connecting rod 114 is fixedly arranged at the bottom end of the moving block 113, the mounting plate 115 is fixedly arranged at the bottom end of the connecting rod 114, the rotating plate 116 is connected at the bottom end of the mounting plate 115, the rotating plate 116 is rotatably connected with the bottom end of the mounting plate 115, and then different cameras 117 can be replaced, and the camera 117 is arranged at the bottom end of the rotating plate 116.
The lighting device 12 includes dead lever 121, fixed block 122, axis of rotation 123, installed part 124 and light 125, and dead lever 121 fixed mounting is in the link 10 openly, and fixed block 122 fixed mounting is in the dead lever 121 openly, and axis of rotation 123 is connected in the fixed block 122 inside, and axis of rotation 123 is connected with the inside rotation of fixed block 122, is convenient for adjust the position of light 125 to can provide the light source better, installed part 124 fixed mounting is in the axis of rotation 123 outer wall, and light 125 movable mounting is in the installed part 124 top.
When the semiconductor to be tested is placed in the groove 8, the fixing piece 904 is rotated through the rotation of the rotating shaft 903, so that the soft pad 906 is abutted against the semiconductor to be tested, the semiconductor can be fixed, the soft pad 906 can protect the semiconductor, the semiconductor is sent into the protective cover 604 through the sliding block 603 sliding along the outer wall of the sliding rail 602, the position of the camera 117 is adjusted through the sliding block 113 sliding along the outer wall of the hanging rail 112, the camera 117 is enabled to test the semiconductor in the optimal position, and the illuminating lamp 125 can provide a light source for testing, so that the accuracy of a test result can be improved.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
Claims (7)
1. The utility model provides a two-sided probe 3D microscope test platform, includes testboard (1) and support column (2), its characterized in that: the testing device comprises a testing table (1), wherein a protecting device (6) is arranged at the top end of the testing table (1), a placing circular plate (7) is arranged at the top end of the testing table (1), a groove (8) is formed in the top end of the placing circular plate (7), a fixing device (9) is arranged on the outer wall of the placing circular plate (7), a connecting frame (10) is fixedly arranged at the top end of the testing table (1), a testing device (11) is arranged at the top end of the connecting frame (10), and a lighting device (12) is arranged on the front surface of the connecting frame (10);
the protection device (6) comprises a sliding groove (601), a sliding rail (602), a sliding block (603), a protection cover (604), a baffle (605) and a test hole (606), wherein the sliding groove (601) is formed in the top end of the test board (1), the sliding rail (602) is fixedly arranged on the inner wall of the sliding groove (601), the sliding block (603) is connected to the outer wall of the sliding rail (602), the protection cover (604) is fixedly arranged on the top end of the test board (1), the baffle (605) is fixedly arranged on the front surface of the protection cover (604), and the test hole (606) is formed in the top end of the protection cover (604).
2. The dual-sided probe 3D microscope testing platform of claim 1, wherein: the test bench is characterized in that a chassis (3) is fixedly arranged at the bottom end of the supporting column (2), a rubber sleeve (4) is movably connected to the bottom end of the chassis (3), and a handle (5) is fixedly arranged on the side edge of the test bench (1).
3. The dual-sided probe 3D microscope testing platform of claim 1, wherein: fixing device (9) are including fixed plate (901), change groove (902), pivot (903), mounting (904), briquetting (905) and cushion (906), fixed plate (901) fixed mounting is in place plectane (7) outer wall, change groove (902) set up in fixed plate (901) one end, pivot (903) are connected in change groove (902) inside, mounting (904) are installed in pivot (903) outer wall, briquetting (905) fixed mounting is in mounting (904) top, cushion (906) swing joint is in briquetting (905) top.
4. The dual-sided probe 3D microscope testing platform of claim 1, wherein: the testing device (11) comprises a hanging groove (111), a hanging rail (112), a moving block (113), a connecting rod (114), a mounting plate (115), a rotating plate (116) and a camera (117), wherein the hanging groove (111) is arranged below the top end of the connecting frame (10), the hanging rail (112) is fixedly arranged on the inner wall of the hanging groove (111), the moving block (113) is connected to the outer wall of the hanging rail (112), the connecting rod (114) is fixedly arranged at the bottom end of the moving block (113), the mounting plate (115) is fixedly arranged at the bottom end of the connecting rod (114), the rotating plate (116) is connected to the bottom end of the mounting plate (115), and the camera (117) is arranged at the bottom end of the rotating plate (116).
5. The dual-sided probe 3D microscope testing platform of claim 1, wherein: the lighting device (12) comprises a fixing rod (121), a fixing block (122), a rotating shaft (123), a mounting piece (124) and a lighting lamp (125), wherein the fixing rod (121) is fixedly mounted on the front surface of the connecting frame (10), the fixing block (122) is fixedly mounted on the front surface of the fixing rod (121), the rotating shaft (123) is connected inside the fixing block (122), the mounting piece (124) is fixedly mounted on the outer wall of the rotating shaft (123), and the lighting lamp (125) is movably mounted on the top end of the mounting piece (124).
6. The dual-sided probe 3D microscope testing platform of claim 1, wherein: the sliding block (603) is in sliding connection with the outer wall of the sliding rail (602), and the area of the testing hole (606) is larger than the area of the top end of the placing circular plate (7).
7. The dual-sided probe 3D microscope testing platform of claim 4, wherein: the movable block (113) is in sliding connection with the outer wall of the hanging rail (112), the rotating disc (116) is in rotating connection with the bottom end of the mounting disc (115), and the rotating shaft (123) is in rotating connection with the inside of the fixed block (122).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321121541.0U CN219936190U (en) | 2023-05-11 | 2023-05-11 | Double-sided probe 3D microscope test platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321121541.0U CN219936190U (en) | 2023-05-11 | 2023-05-11 | Double-sided probe 3D microscope test platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219936190U true CN219936190U (en) | 2023-10-31 |
Family
ID=88490818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321121541.0U Active CN219936190U (en) | 2023-05-11 | 2023-05-11 | Double-sided probe 3D microscope test platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219936190U (en) |
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2023
- 2023-05-11 CN CN202321121541.0U patent/CN219936190U/en active Active
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