CN219935883U - Sample rack for semiconductor chip transmission electron microscope sample analysis - Google Patents
Sample rack for semiconductor chip transmission electron microscope sample analysis Download PDFInfo
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- CN219935883U CN219935883U CN202321631986.3U CN202321631986U CN219935883U CN 219935883 U CN219935883 U CN 219935883U CN 202321631986 U CN202321631986 U CN 202321631986U CN 219935883 U CN219935883 U CN 219935883U
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 31
- 238000004458 analytical method Methods 0.000 title claims abstract description 27
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 238000003860 storage Methods 0.000 claims description 19
- 238000005476 soldering Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 238000003825 pressing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004627 transmission electron microscopy Methods 0.000 description 2
- 241001424392 Lucia limbaria Species 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a sample holder for semiconductor chip transmission electron microscope sample analysis. The sample rack for analyzing the semiconductor chip transmission electron microscope sample comprises a sample rack body, wherein the sample rack body comprises two support arms, the two support arms are oppositely arranged, and Cheng Fangzhu for placing a sample is arranged between the two support arms; at least one of the support arms is provided with a clamping groove for clamping by forceps, and the side surface of the clamping groove is open and penetrates through the outer side edge of the support arm. By adopting the scheme, the problems that the existing sample rack is easy to bend, be damaged by clamping and fly by clamping when the sample rack is clamped by forceps are solved.
Description
Technical Field
The utility model relates to the technical field of semiconductor chips, in particular to a sample holder for analysis of a transmission electron microscope sample of a semiconductor chip.
Background
In the transmission electron microscope analysis of the semiconductor chip sample, an engineer firstly uses a Focused Ion Beam (FIB) to carry out precision sample preparation, the prepared transmission electron microscope analysis sheet sample is very small and is about 1/4 of the size of a hair, and the thickness of the sample is about 60 nm. Therefore, during the sample preparation process, a special sample holder is required to be used for placing the sample, and the prepared tiny flake sample is transferred from a Focused Ion Beam (FIB) instrument to a Transmission Electron Microscope (TEM) instrument for analysis. In transmission electron microscopy of samples, engineers use very sharp-headed forceps to hold the sample holder off the sample table and then transfer the sample to a specially made very small copper basket for transmission electron microscopy.
However, with the current sample holder, the sample holder is bent and damaged when the sample holder is clamped by forceps due to the small size of the sample holder, sometimes even the whole sample holder is clamped and the tiny transmission electron microscope analysis sheet sample is easy to be clamped and flown during transfer.
Disclosure of Invention
The utility model provides a sample holder for analyzing a semiconductor chip transmission electron microscope sample, which aims to solve the problems that the existing sample holder is easy to bend, be damaged and fly when being clamped by forceps.
According to one aspect of the utility model, there is provided a sample holder for analysis of a semiconductor chip transmission electron microscope sample, the sample holder for analysis of a semiconductor chip transmission electron microscope sample comprising a sample holder body, the sample holder body comprising two support arms, the two support arms being arranged opposite to each other, a Cheng Fangzhu for placing a sample being arranged between the two support arms;
at least one of the support arms is provided with a clamping groove for clamping by forceps, and the side surface of the clamping groove is open and penetrates through the outer side edge of the support arm.
In an alternative embodiment of the utility model, the clamping groove comprises a first groove side wall and a second groove side wall, one end of the first groove side wall is connected with one end of the second groove side wall, the other end of the first groove side wall extends to one end of the opening, and the other end of the second groove side wall extends to the other end of the opening.
In an alternative embodiment of the utility model, the distance from the junction of the first slot sidewall and the second slot sidewall to the outer edge of the arm is a first distance, the first distance being greater than 200 μm and less than 300 μm;
the vertical distance between the two ends of the opening is a second distance, and the second distance is more than 100 μm and less than 200 μm.
In an alternative embodiment of the utility model, the first distance is greater than 240 μm and less than 260 μm;
and/or, the second distance is greater than 150 μm and less than 160 μm.
In an alternative embodiment of the utility model, the first distance is 250.77 μm;
and/or, the second distance is 155.28 μm.
In an alternative embodiment of the present utility model, the clamping groove is a sector groove.
In an alternative embodiment of the present utility model, a storage slot is formed between two support arms, the number of the storage columns is plural, and the plural storage columns are arranged in the storage slot between two support arms at intervals.
In an alternative embodiment of the utility model, the holding column is used for welding and fixing the sample;
the distance from the upper end of the support arm to the bottom of the storage groove is greater than the distance from the upper end of the accommodating column to the bottom of the storage groove;
and/or the support arm is provided with an inclined plane, and one end of the inclined plane, which is close to the outer side edge of the support arm, is higher than one end of the inclined plane, which is close to the storage groove.
In an alternative embodiment of the utility model, the width of the containing column is greater than 70 μm and less than 100 μm;
and/or, the distance between two adjacent containing columns is more than 200 μm and less than 250 μm.
In an alternative embodiment of the utility model, the width of the containing column is greater than 80 μm and less than 90 μm;
and/or, the distance between two adjacent containing columns is more than 220 μm and less than 230 μm.
According to the technical scheme of the embodiment of the utility model, the sample holder body comprises two support arms, the two support arms are oppositely arranged, and Cheng Fangzhu for placing a sample is arranged between the two support arms. At least one be equipped with the grip slot that supplies tweezers centre gripping on the support arm, grip slot side opening just runs through the outside edge of support arm to tweezers tip can be located the grip slot when holding the sample frame to tweezers, and tweezers tip can be blocked by the grip slot this moment, can make the atress more even, and the sample frame is difficult to by pressing from both sides and flying, also can reduce simultaneously and press from both sides the bight of sample frame and cause the damage to tweezers, thereby improves sample transfer and analysis's success rate greatly, also improves the number of times of use of sample frame simultaneously greatly, improves the rate of use greatly, greatly reduced use cost, in addition also can guarantee the safety of sample, the problem that current sample frame is easy to be pressed from both sides crooked when pressing from both sides the sample frame with tweezers, is pressed from both sides the damage and is pressed from both sides and fly by the clamp is solved.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the utility model or to delineate the scope of the utility model. Other features of the present utility model will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of a sample holder and tweezers for analysis of a semiconductor chip transmission electron microscope sample according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a sample holder for analysis of a transmission electron microscope sample of a semiconductor chip according to an embodiment of the present utility model;
fig. 3 is a schematic structural diagram of another sample holder for analysis of a semiconductor chip transmission electron microscope according to an embodiment of the present utility model.
Wherein: 1. a sample holder body; 11. a support arm; 111. an inclined plane; 12. cheng Fangzhu; 13. a storage groove; 2. a clamping groove; 21. a first slot sidewall; 22. a second groove sidewall; 23. an opening; 4. and tweezers.
Detailed Description
In order that those skilled in the art will better understand the present utility model, a technical solution in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the utility model described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic structural view of a sample holder and tweezers 4 for analyzing a semiconductor chip transmission electron microscope sample according to an embodiment of the present utility model, and fig. 2 is a schematic structural view of a sample holder for analyzing a semiconductor chip transmission electron microscope sample according to an embodiment of the present utility model, as shown in fig. 1 and fig. 2, the sample holder for analyzing a semiconductor chip transmission electron microscope sample includes a sample holder body 1, the sample holder body 1 includes two support arms 11, the two support arms 11 are disposed opposite to each other, and a holding column 12 for placing a sample is disposed between the two support arms 11.
At least one of the arms 11 is provided with a holding groove 2 for holding the forceps 4, and the side surface of the holding groove 2 is provided with an opening 23 which penetrates through the outer side edge of the arm 11.
The sample holder body 1 is a main body part of the sample holder, and can be bowl-like, the sample holder body 1 can be integrally formed, and a sample can be placed at the top end of the accommodating column 12, so that the sample can be conveniently prepared by using a Focused Ion Beam (FIB) and can also be conveniently analyzed by using a Transmission Electron Microscope (TEM) instrument. Focusing the ion beam, namely accelerating the ion beam generated by an ion source through an ion gun, and focusing the ion beam to act on the surface of a sample; a Transmission Electron Microscope (TEM) transmits an accelerated and focused electron beam to a very thin sample, and the electron collides with atoms of the sample to generate three-dimensional scattering, and the size of a scattering angle is related to the density and thickness of the sample, so that different effects of brightness and darkness can be formed, an image is amplified and focused on an imaging device to be displayed, and the sample holder according to the embodiment can be applied to two types of FIB and TEM devices. Preferably, a single sample can be welded to the top of the holding column 12 to prevent sample fall-off. Further, the width of the receiving column 12 may be about 1000 times that of the sample, facilitating the observation of very small sheet samples.
The sample holder is usually held by the forceps 4 when transferring the sample, and the holding groove 2 is a groove capable of accommodating the tip of the forceps 4, and since the side surface of the holding groove 2 is opened 23 and penetrates the outer edge of the arm 11, the tip of the forceps 4 can be positioned in the holding groove 2 when holding the forceps 4. In practical application, the clamping groove 2 can be formed in one support arm 11, the clamping grooves 2 can be formed in two support arms 11, the clamping groove 2 can be formed in one side of one support arm 11, and the clamping grooves 2 can be formed in two sides of one support arm 11. For example, the clamping groove 2 can be formed in the right side support arm 11, and most people are right-handed, so that the use requirements of most people can be met, and meanwhile, only one clamping groove 2 is required, so that the cost is low, and meanwhile, the processing is convenient. For example, the holding grooves 2 may be provided on both arms 11, so that both left-handed and right-handed persons can hold the sample holder with the forceps 4 conveniently. The number and positions of the clamping grooves 2 may be set according to the use requirement, and are not particularly limited herein, and the clamping grooves 2 are set on the right arm 11 in fig. 2 as an example.
According to the scheme, the sample holder body 1 comprises the two support arms 11, the two support arms 11 are arranged oppositely, and the containing column 12 for placing samples is arranged between the two support arms 11. The clamping groove 2 for clamping the tweezers 4 is formed in at least one support arm 11, the side face of the clamping groove 2 is provided with an opening 23 and penetrates through the outer side edge of the support arm 11, so that the tips of the tweezers 4 can be positioned in the clamping groove 2 when the tweezers 4 clamp a sample holder, at the moment, the tips of the tweezers 4 can be clamped by the clamping groove 2, the stress is more uniform, the sample holder is not easy to clamp and fly, meanwhile, the force applied to the tweezers 4 can be reduced, the sample holder is prevented from being bent and damaged, the success rate of sample transfer and analysis is greatly improved, the use number of the sample holder is greatly improved, the use rate is greatly reduced, the use cost is greatly reduced, the safety of samples is also ensured, and the problems that the existing sample holder is easy to be bent and damaged and fly by clamping when the tweezers 4 clamp the sample holder are solved.
In an alternative embodiment of the present utility model, as shown in fig. 1 and 2, the clamping groove 2 includes a first groove sidewall 21 and a second groove sidewall 22, one end of the first groove sidewall 21 is connected to one end of the second groove sidewall 22, the other end of the first groove sidewall 21 extends to one end of the opening 23, and the other end of the second groove sidewall 22 extends to the other end of the opening 23.
Wherein, first groove lateral wall 21 and second groove lateral wall 22 can form an angle, whole centre gripping groove 2 can be triangle-like or triangle-shaped, when the pointed end of tweezers 4 is located centre gripping groove 2, tweezers 4's both sides can be respectively with first groove lateral wall 21 and second groove lateral wall 22 contact, thereby can increase tweezers 4 and centre gripping groove 2's area of contact, make the atress more even, the sample frame is difficult to be pressed from both sides and fly, simultaneously also can reduce the effort to tweezers 4, avoid pressing from both sides the sample frame crooked and cause the damage, thereby improve sample transfer and analysis's success rate greatly, also improve sample frame's use number of times simultaneously greatly, and the rate of use is improved, greatly reduced use cost, in addition, also can guarantee the safety of sample.
On the basis of the above embodiment, as shown in fig. 1 and 3, the distance from the connection point of the first groove sidewall 21 and the second groove sidewall 22 to the outer edge of the arm 11 is a first distance, i.e., L1 in fig. 3, and the first distance is greater than 200 μm and less than 300 μm. The vertical distance between the two ends of the opening 23 is a second distance, i.e., L2 in fig. 3, which is greater than 100 μm and less than 200 μm.
Under the condition that the second distance is fixed, when the first distance is too large, the front end of the tip of the forceps 4 may not contact the junction of the first groove side wall 21 and the second groove side wall 22, at this time, the contact area between the forceps 4 and the clamping groove 2 is smaller, and when the first distance is too small, two sides of the tip of the forceps 4 may not fully contact the first groove side wall 21 and the second groove side wall 22, at this time, the contact area between the forceps 4 and the clamping groove 2 is smaller, so that the stress is not uniform enough. In the case where the first distance is fixed, both sides of the tip of the forceps 4 may not be in sufficient contact with the first groove side wall 21 and the second groove side wall 22 when the second distance is too large, at this time, the contact area of the forceps 4 with the holding groove 2 is small, and the front end of the tip of the forceps 4 may not be in contact with the junction of the first groove side wall 21 and the second groove side wall 22 when the second distance is too small, at this time, the contact area of the forceps 4 with the holding groove 2 is small, i.e., the tip of the forceps 4 does not sufficiently enter the holding groove 2. Through making the first distance be greater than 200 mu m and less than 300 mu m, the second distance is greater than 100 mu m and less than 200 mu m, the pointed end of tweezers 4 can fully contact with clamping groove 2, and the engineer is when pressing from both sides the sample frame with tweezers 4 like this, and the sample frame is easily blocked, is difficult to press from both sides and flies, can avoid the accident emergence that the sample was pressed from both sides and flies, also can reduce the effort to tweezers 4 simultaneously, avoid pressing from both sides the sample frame crooked and cause the damage to improve the success rate of sample transfer and analysis greatly. Meanwhile, the use times of the sample rack are greatly improved, the use rate is improved, and the use cost is greatly reduced. More importantly, the safety of the sample can be ensured.
On the basis of the above embodiment, the first distance is more than 240 μm and less than 260 μm, so that the tip of the forceps 4 can be more matched with the holding groove 2. Preferably, the first distance is 250.77 μm.
On the basis of the above embodiment, the second distance is greater than 150 μm and less than 160 μm, so that the tip of the forceps 4 can be more matched with the holding groove 2. Preferably, the second distance is 155.28 μm.
In an alternative embodiment of the present utility model, the holding groove 2 is a fan-shaped groove, and the fan-shaped groove is more matched with the shape of the tip of the tweezers 4, so that when the tip of the tweezers 4 is positioned in the holding groove 2, the front end and two sides of the tip of the tweezers 4 can be more attached to the holding groove 2, so that the tip of the tweezers 4 can be fully contacted with the holding groove 2, and thus, when an engineer clamps the sample rack with the tweezers 4, the sample rack is easy to clamp and is not easy to fly, and the accident that the sample is clamped and flies can be avoided.
In an alternative embodiment of the present utility model, as shown in fig. 1 and 3, a storage slot 13 is formed between two support arms 11, the number of storage columns 12 is plural, and the plurality of storage columns 12 are disposed in the storage slot 13 between the two support arms 11 at intervals. The sample is extremely easy to pollute and extremely small, so that in order to clearly observe the sample, only one sample is usually arranged on the sample rack when the sample rack is analyzed by a Transmission Electron Microscope (TEM) instrument once, the containing column 12 with the sample placed after the analysis cannot be used for the second time, and the sample rack can be reused by arranging a plurality of containing columns 12, so that the use times of the sample rack are greatly improved, the use rate is improved, and the use cost is greatly reduced.
In an alternative embodiment of the present utility model, the accommodating column 12 is used for welding and fixing the sample, and the distance from the upper end of the support arm 11 to the bottom of the accommodating groove 13 is greater than the distance from the upper end of the accommodating column 12 to the bottom of the accommodating groove 13.
On the basis of the above embodiment, the accommodating column 12 is used for welding and fixing the sample, the support arm 11 is provided with a slope 111, and one end of the slope 111 near the outer side edge of the support arm 11 is higher than one end of the slope 111 near the storage groove 13. Therefore, the arm 11 is not easily damaged when the sample is welded and fixed to the accommodating column 12.
In an alternative embodiment of the present utility model, as shown in fig. 1 and 3, the width of the accommodating column 12 is greater than 70 μm and less than 100 μm, and the width of the accommodating column 12 is L3 in fig. 3. Preferably, the width of the receiving post 12 is greater than 80 μm and less than 90 μm, so that a better sample can be received and viewed when placed thereon.
In an alternative embodiment of the present utility model, the distance between two adjacent columns 12 is greater than 200 μm and less than 250 μm, and the distance between two adjacent columns 12 is L4 in fig. 3. Preferably, the distance between two adjacent posts 12 is greater than 220 μm and less than 230 μm, so that it is less likely to cause damage to the adjacent posts 12 when the weld is secured to one post 12.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present utility model may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present utility model are achieved, and the present utility model is not limited herein.
The above embodiments do not limit the scope of the present utility model. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included in the scope of the present utility model.
Claims (10)
1. The sample rack for analyzing the semiconductor chip transmission electron microscope sample is characterized by comprising a sample rack body (1), wherein the sample rack body (1) comprises two support arms (11), the two support arms (11) are oppositely arranged, and Cheng Fangzhu (12) for placing a sample is arranged between the two support arms (11);
at least one support arm (11) is provided with a clamping groove (2) for clamping the tweezers (4), and the side surface of the clamping groove (2) is provided with an opening (23) and penetrates through the outer side edge of the support arm (11).
2. Sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 1, characterized in that the clamping groove (2) comprises a first groove side wall (21) and a second groove side wall (22), one end of the first groove side wall (21) is connected with one end of the second groove side wall (22), the other end of the first groove side wall (21) extends to one end of the opening (23), and the other end of the second groove side wall (22) extends to the other end of the opening (23).
3. Sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 2, characterized in that the distance from the junction of the first slot side wall (21) and the second slot side wall (22) to the outer edge of the support arm (11) is a first distance, which is larger than 200 μm and smaller than 300 μm;
the vertical distance between the two ends of the opening (23) is a second distance, and the second distance is more than 100 μm and less than 200 μm.
4. The sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 3, wherein the first distance is more than 240 μm and less than 260 μm;
and/or, the second distance is greater than 150 μm and less than 160 μm.
5. The sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 4, wherein the first distance is 250.77 μm;
and/or, the second distance is 155.28 μm.
6. Sample holder for semiconductor chip transmission electron microscope sample analysis according to any of claims 1 to 5, characterized in that the clamping groove (2) is a sector-shaped groove.
7. Sample holder for analysis of a semiconductor chip transmission electron microscope sample according to any of claims 1 to 5, characterized in that a storage groove (13) is formed between two of the support arms (11), the number of Cheng Fangzhu (12) is plural, and a plurality of storage posts (12) are arranged in the storage groove (13) between two of the support arms (11) at intervals.
8. The sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 7, wherein the Cheng Fangzhu (12) is for soldering the sample;
the distance from the upper end of the support arm (11) to the bottom of the storage groove (13) is greater than the distance from the upper end of the Cheng Fangzhu (12) to the bottom of the storage groove (13);
and/or the support arm (11) is provided with an inclined surface (111), and one end of the inclined surface (111) close to the outer side edge of the support arm (11) is higher than one end of the inclined surface (111) close to the storage groove (13).
9. The sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 7, wherein the width of the Cheng Fangzhu (12) is greater than 70 μm and less than 100 μm;
and/or, the distance between two adjacent Cheng Fangzhu (12) is more than 200 μm and less than 250 μm.
10. The sample holder for semiconductor chip transmission electron microscope sample analysis according to claim 9, wherein the width of the Cheng Fangzhu (12) is greater than 80 μιη and less than 90 μιη;
and/or, the distance between two adjacent Cheng Fangzhu (12) is more than 220 μm and less than 230 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321631986.3U CN219935883U (en) | 2023-06-26 | 2023-06-26 | Sample rack for semiconductor chip transmission electron microscope sample analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321631986.3U CN219935883U (en) | 2023-06-26 | 2023-06-26 | Sample rack for semiconductor chip transmission electron microscope sample analysis |
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| Publication Number | Publication Date |
|---|---|
| CN219935883U true CN219935883U (en) | 2023-10-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321631986.3U Active CN219935883U (en) | 2023-06-26 | 2023-06-26 | Sample rack for semiconductor chip transmission electron microscope sample analysis |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219935883U (en) |
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- 2023-06-26 CN CN202321631986.3U patent/CN219935883U/en active Active
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