CN219933022U - Novel diaphragm type cylinder valve - Google Patents
Novel diaphragm type cylinder valve Download PDFInfo
- Publication number
- CN219933022U CN219933022U CN202321288272.7U CN202321288272U CN219933022U CN 219933022 U CN219933022 U CN 219933022U CN 202321288272 U CN202321288272 U CN 202321288272U CN 219933022 U CN219933022 U CN 219933022U
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- valve
- diaphragm
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- 238000007789 sealing Methods 0.000 claims description 34
- 239000012528 membrane Substances 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 5
- 230000001174 ascending effect Effects 0.000 abstract description 4
- 230000033228 biological regulation Effects 0.000 abstract description 3
- 230000001276 controlling effect Effects 0.000 description 7
- 230000001105 regulatory effect Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007723 die pressing method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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Abstract
The utility model relates to the technical field of valves, in particular to a novel diaphragm type cylinder valve, which comprises a valve body, a cylinder body and an adjusting screw, wherein the valve body is provided with a medium inlet and a medium outlet, a valve port is arranged between the medium inlet and the medium outlet, and a diaphragm is arranged on the valve port and used for controlling the opening and closing of the valve port; the cylinder body sets up on the valve body, one end is equipped with the cylinder cap, be equipped with adjusting screw on the cylinder cap, adjusting screw is equipped with the piston, the piston is connected with the diaphragm, piston upper portion is equipped with the spring, the lower part is equipped with the control atmospheric pressure mouth for offset the elasticity of spring, go deep into the distance of cylinder cap through adjusting screw, the ascending motion distance of control piston, thereby the stroke that the control diaphragm opened and shut reaches the purpose of controlling the flow of valve port, when the cylinder body flow needs to be reduced, adjusting screw is screwed into inside the cylinder cap, otherwise, when the cylinder body flow needs to be increaseed, adjusting screw is screwed out to the cylinder cap outside can, thereby realize flow regulation function, satisfy the operating mode of different flow requirements and use, and is easy to operate, convenient to use.
Description
Technical Field
The utility model relates to the technical field of valves, in particular to a novel diaphragm type cylinder valve.
Background
The diaphragm cylinder valve is one kind of valve commonly used in industrial production and consists of valve body, diaphragm and valve. The joint between the diaphragm and the valve has good sealing performance, the valve switch is flexible, the blocking phenomenon is less, the inner cavity of the valve body and the inner cavity of the valve cover can be separated by manual or pneumatic operation, and the diaphragm has good corrosion resistance, so the diaphragm is commonly used for devices and pipelines for corroding media.
However, the traditional pneumatic diaphragm valve cannot adjust the valve flow, cannot meet the working conditions of different flow requirements, and has limitation in use.
The information disclosed in this background section is only for enhancement of understanding of the general background of the utility model and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
Disclosure of Invention
The utility model provides a novel diaphragm type cylinder valve, thereby effectively solving the problems in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: a novel diaphragm cylinder valve, comprising:
the valve body is provided with a medium inlet and a medium outlet, a valve port is arranged between the medium inlet and the medium outlet, and a diaphragm is arranged on the valve port and used for controlling the opening and closing of the valve port;
the cylinder body, cylinder body one end set up perpendicularly on the valve body, the other end is equipped with the cylinder cap, be equipped with adjusting screw on the cylinder cap, the adjusting screw below is equipped with the piston, piston one end cover is equipped with the spring, the other end with the diaphragm is connected, the cylinder body is kept away from one side of spring is equipped with the control atmospheric pressure mouth, is used for counteracting the elasticity of spring, adjusting screw is used for control the stroke that the diaphragm opened and shut, thereby control the flow of valve port.
Further, a locking cover is arranged on the adjusting screw and used for locking the adjusting screw.
Further, the locking cover and the adjusting screw are hollow.
Further, a sealing angle a is arranged at the contact end of the valve port and the diaphragm, and the sealing angle a is 130-150 degrees.
Further, a blind hole is formed in the adjusting screw, a first boss is arranged on the piston, the first boss is arranged in the blind hole, a limiting surface is arranged at the bottom of the first boss, and the distance between the limiting surface and the bottom of the adjusting screw is the reset distance D of the piston.
Further, the piston is provided with a first connecting end connected with the cylinder cover, a second connecting end connected with the cylinder body, a plug disc is arranged between the first connecting end and the second connecting end, and the plug disc moves up and down along the inside of the cylinder body.
Further, the plug disc and the bottom of the cylinder body are provided with positioning pins for preventing the piston from rotating.
Further, a first groove is formed in the outer circular surface of the plug disc, and a first sealing ring is arranged in the first groove and used for sealing between the plug disc and the cylinder body.
Further, the cylinder body, the cylinder cover, the piston, the adjusting screw and the locking cover are all made of plastics.
Further, the adjusting screw is provided with a hand wheel, and anti-skid patterns are arranged on the hand wheel.
The beneficial effects of the utility model are as follows: according to the utility model, the valve body, the cylinder body and the adjusting screw are arranged, the valve body is provided with the medium inlet and the medium outlet, the valve port is arranged between the medium inlet and the medium outlet, and the valve port is provided with the diaphragm for controlling the opening and closing of the valve port; the cylinder body one end sets up perpendicularly on the valve body, the other end is equipped with the cylinder cap, be equipped with adjusting screw on the cylinder cap, adjusting screw is equipped with the piston, the piston is connected with the diaphragm, the piston is with the cavity on with the cylinder body internal portion, it is equipped with the spring to go up the cavity, the cavity is equipped with the control atmospheric pressure mouth down, be used for counteracting the elasticity of spring, through the distance that adjusting screw stretches into the cylinder cap, the ascending motion distance of control piston, thereby the stroke that the control diaphragm opened and shut reaches the purpose of the flow of control valve port, when the cylinder body flow needs to reduce, adjusting screw is screwed into to the cylinder cap inside, otherwise, when needs increase the cylinder body flow, adjusting screw is screwed out to the cylinder cap outside can, thereby realize flow regulation function, satisfy the operating mode of different flow requirements and use, and is easy to operate, convenient for use.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present utility model, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.
FIG. 1 is a schematic diagram of a novel diaphragm cylinder valve;
FIG. 2 is a cross-sectional view of the novel diaphragm cylinder valve taken along the center of the piston;
FIG. 3 is an enlarged view of a portion at A in FIG. 2;
FIG. 4 is a cross-sectional view of the valve body along the valve port;
FIG. 5 is a partial enlarged view at B in FIG. 4;
FIG. 6 is a schematic view of the piston;
fig. 7 is a schematic structural view of the adjusting screw.
Reference numerals: 1. a valve body; 11. a medium inlet; 12. a medium outlet; 13. a valve port; 131. sealing angle a; 2. a membrane; 3. a cylinder; 31. an upper cavity; 32. a lower cavity; 4. a cylinder cover; 41. a fourth seal ring; 5. adjusting a screw; 51. a locking cover; 52. a blind hole; 53. resetting the distance D; 54. a hand wheel; 541. anti-skid lines; 6. a piston; 61. a first boss; 611. a limiting surface; 62. a first connection end; 63. a second connection end; 64. a plug disc; 641. a first seal ring; 642. a second seal ring; 643. a third seal ring; 644. a first groove; 65. a positioning pin; 7. a spring; 8. and controlling the air pressure port.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated as being "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are directions or positional relationships based on the drawings are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, or may be internal communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1 to 7: a novel diaphragm cylinder valve, comprising:
the valve body 1, the valve body 1 has medium inlet 11 and medium outlet 12, valve port 13 that is equipped with between medium inlet 11 and medium outlet 12, there is membrane 2 on the valve port 13, is used for controlling opening and closing of the valve port 13;
the cylinder body 3, cylinder body 3 one end sets up perpendicularly on valve body 1, the other end is equipped with cylinder cap 4, be equipped with adjusting screw 5 on the cylinder cap 4, adjusting screw 5 is equipped with piston 6 in cylinder body 3 inside, the piston 6 other end is connected with diaphragm 2, piston 6 is with cylinder body 3 internal portion divide into cavity 31 and cavity 32 down, it is equipped with spring 7 to go up cavity 31, cavity 32 is equipped with control atmospheric pressure mouth 8 down, be used for counteracting spring 7's elasticity, adjusting screw 5 is used for controlling the stroke that diaphragm 2 opened and shut, thereby the flow of control valve port 13.
By arranging the valve body 1, the cylinder body 3 and the adjusting screw 5, the valve body 1 is provided with a medium inlet 11 and a medium outlet 12, a valve port 13 is arranged between the medium inlet 11 and the medium outlet 12, and a diaphragm 2 is arranged on the valve port 13 and used for controlling the opening and closing of the valve port 13; the cylinder body 3 one end sets up perpendicularly on valve body 1, the other end is equipped with cylinder cap 4, be equipped with adjusting screw 5 on the cylinder cap 4, adjusting screw 5 is equipped with piston 6, piston 6 is connected with diaphragm 2, piston 6 is with cylinder body 3 internal portion divide into cavity 31 and cavity 32 down, it is equipped with spring 7 to go up cavity 31, cavity 32 is equipped with control atmospheric pressure mouth 8 down, be used for counteracting the elasticity of spring 7, through the distance that adjusting screw 5 stretches into cylinder cap 4, the ascending motion distance of control piston 6, thereby the stroke that control diaphragm 2 opened and shut reaches the purpose of controlling the flow of valve port 13, when the cylinder body 3 flow needs to reduce, adjusting screw 5 is twisted into to cylinder cap 4 inside, otherwise, when needs increase cylinder body 3 flow, adjusting screw 5 is twisted out to cylinder cap 4 outside can, thereby realize flow regulation function, satisfy the operating mode of different flow requirement and use, and is easy to operate, and convenient use.
The principle is as follows: the valve body 1 is closed in the initial state, the piston 6 is pressed on the valve port 13 of the valve body 1 by the sealing surface of the diaphragm 2 under the action of the pre-pressing force of the return spring 7 of the upper cavity 31, and the medium inlet is cut off;
when gas enters the lower cavity 32 of the piston 6 from the control gas pressure port 8, the piston 6 moves upwards to drive the diaphragm 2 to separate from the valve body 1, the valve port 13 is opened, and medium flows to the outlet.
When the control air pressure is removed, the valve is restored to the initial closed state.
From the above principle, the distance that the diaphragm 2 is separated from the valve body 1 is used to adjust the flow of the valve port 13, and the distance that the adjusting screw 5 goes deep into the cylinder cover 4 is used to control the upward movement distance of the piston 6, so as to control the opening and closing stroke of the diaphragm 2, and thus control the flow of the valve port 13.
Preferably, the adjusting screw 5 is provided with a locking cover 51 for locking the adjusting screw 5.
Similarly, as can be seen from the above principle, the valve port 13 is opened by air entering the lower cavity 32 of the piston 6 from the control air pressure port 8, and the air pressure counteracts the elastic force of the spring 7, so that the piston 6 moves upwards, and when the air pressure is too high, the adjusting screw 5 is easy to loosen due to the threaded connection between the adjusting screw 5 and the cylinder cover 4, and the locking cover 51 is locked after each adjustment of the adjusting screw 5, so that the accuracy of the flow of the valve port 13 is controlled, and the product stability is good.
The cylinder body 3, the cylinder cover 4, the piston 6, the adjusting screw 5 and the locking cover 51 are all made of plastics, the valve body 1 is made of stainless steel, the diaphragm is made of rubber, all parts are free of copper and zinc elements, and the requirements of special industries, especially the lithium battery industry on zinc and copper inhibition, are met.
In the embodiment, the locking cover 51 and the adjusting screw 5 are hollow, so that the weight is reduced, the plastic is formed by die pressing, the material used for producing single parts is reduced, the production cost is reduced, the weight of the whole diaphragm cylinder valve is reduced, and the burden of a pipeline is reduced.
Wherein, the contact end of the valve port 13 and the diaphragm 2 is provided with a sealing angle a131, and the sealing angle a131 is 130-150 degrees.
When the angle of the sealing angle a131 is too small, the sealing angle a131 is too sharp, the membrane 2 of the upper membrane 2 and the lower membrane 2 is easy to damage frequently, but when the angle of the sealing angle a131 is too large, the sealing surface is large and is unfavorable for sealing, the sealing angle a131 is between 130 and 150 degrees, preferably 140 degrees, the sealing performance of the valve port 13 is guaranteed, and the service life is guaranteed.
As a preferable example of the above embodiment, the adjusting screw 5 is provided with the blind hole 52, the piston 6 is provided with the first boss 61, the first boss 61 is disposed in the blind hole 52, the bottom of the first boss 61 is provided with the limit surface 611, and the distance between the limit surface 611 and the bottom of the adjusting screw 5 is the reset distance D53 of the piston 6.
The diameter of the blind hole 52 needs to be larger than that of the first boss 61, so that when the piston 6 approaches the adjusting screw 5, the first boss 61 does not interfere with the adjusting screw 5, and the effectiveness of the reset distance D53 from the limiting surface 611 to the bottom of the adjusting screw 5 is ensured.
In the present embodiment, the piston 6 is provided with a first connecting end 62 connected to the cylinder head 4, a second connecting end 63 connected to the cylinder 3, and a stopper plate 64 provided between the first connecting end 62 and the second connecting end 63, the stopper plate 64 moving up and down along the inside of the cylinder 3.
The diameter of the plug disc 64 is larger than that of the first connecting end 62 and the second connecting end 63, the first connecting end 62 is inserted into the cylinder cover 4, the end face of the first connecting end 62 is opposite to the end face of the adjusting screw 5, the second connecting end 63 extends out of the cylinder body 3, the end face of the second connecting end 63 is connected with the diaphragm 2, in this embodiment, threaded connection is adopted, and other fixing modes can be adopted.
Wherein, stopper dish 64 is equipped with locating pin 65 with cylinder body 3 bottom for prevent that piston 6 from rotating, locating pin 65 one end has the screw thread to be fixed on stopper dish 64 in this embodiment, and the other end of locating pin 65 inserts the corresponding hole of dodging of cylinder body 3, dodges and has certain clearance between hole and the locating pin 65, prevents to dodge hole and locating pin 65 frictional force big and too tight, and influences the steady operation of piston 6.
As a preference of the above embodiment, the outer circumferential surface of the plug disc 64 is provided with a first groove 644, a first sealing ring 641 is disposed in the groove for sealing between the upper cavity 31 and the lower cavity 32, the outer circumferential surface of the first connecting end 62 is provided with a second sealing ring 642 for sealing between the first connecting end 62 and the cylinder cover 4, the outer circumferential surface of the second connecting end 63 is provided with a second sealing ring 642 for sealing between the second connecting end 63 and the cylinder body 3, and the joint between the cylinder body 3 and the cylinder cover 4 is provided with a fourth sealing ring 41 for sealing between the cylinder body 3 and the cylinder cover 4, in this embodiment, the first sealing ring 641 is V-shaped, and the second sealing ring 642, the third sealing ring 643 and the fourth sealing ring 41 are O-shaped, or sealing rings of other forms can be adopted.
The adjusting screw 5 is provided with a hand wheel 54, the hand wheel 54 is provided with anti-skid threads 541, the hand wheel 54 and the anti-skid threads 541 on the hand wheel 54 are convenient for a user to operate, and the hand wheel 54 can adopt other modes besides the round shape in the embodiment, so long as the hand wheel 54 is convenient to rotate and grasp.
In the initial state of the valve, the piston 6 is pressed on the sealing surface of the diaphragm 2 by the pre-pressure of the return spring 7 to press the valve port 13 of the valve body 1, and the medium inlet 11 is cut off; when the control air pressure is introduced into the lower cavity of the piston 6, the piston 6 moves upwards to drive the diaphragm 2 to separate from the valve body 1, the valve port 13 is opened, and the medium flows to the outlet; when the control air pressure is removed, the valve is restored to the initial closed state.
When the flow of the valve port 13 is required to be regulated down, the regulating screw 5 is moved down, namely the reset distance D53 is reduced, and when the flow of the valve port 13 is required to be regulated up, the regulating screw 5 is moved up, namely the reset distance D53 is increased; when medium circulation is needed, air pressure is controlled to enter the lower cavity 32, when the air pressure is larger than the elastic force of the spring 7 of the upper cavity 31, the piston 6 drives the diaphragm 2 to move upwards until the limiting surface 611 of the piston 6 is attached to the bottom surface of the adjusting screw 5, namely, the reset distance D53 is zero, the distance of the upward movement of the diaphragm 2, namely, the distance of the reset distance D53, is changed by the ascending or descending of the adjusting screw 5, so that the upward opening and closing size of the diaphragm 2 is changed, the valve flow is adjusted, the locking cover 51 is used for locking after flow adjustment is finished to prevent the adjusting screw 5 from loosening under the air pressure, the valve flow adjusting function can meet the working conditions of different flow requirements, and the valve has the advantages of stable structure, convenience in operation and simplicity in use.
It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (10)
1. A novel diaphragm cylinder valve, comprising:
the valve comprises a valve body (1), wherein the valve body (1) is provided with a medium inlet (11) and a medium outlet (12), a valve port (13) is arranged between the medium inlet (11) and the medium outlet (12), and a membrane (2) is arranged on the valve port (13) and used for controlling the opening and closing of the valve port (13);
cylinder body (3), cylinder body (3) one end set up perpendicularly on valve body (1), the other end is equipped with cylinder cap (4), be equipped with adjusting screw (5) on cylinder cap (4), adjusting screw (5) are in cylinder body (3) inside is equipped with piston (6), the piston (6) other end with diaphragm (2) are connected, piston (6) will cylinder body (3) internal portion is cavity (31) and cavity (32) down, it is equipped with spring (7) to go up cavity (31), cavity (32) are equipped with control atmospheric pressure mouth (8) down, are used for counteracting the elasticity of spring (7), adjusting screw (5) are used for controlling the stroke that diaphragm (2) opened and shut, thereby control the flow of valve port (13).
2. The novel diaphragm cylinder valve according to claim 1, wherein a locking cover (51) is provided on the adjusting screw (5) for locking the adjusting screw (5).
3. The novel diaphragm cylinder valve according to claim 2, wherein the locking cover (51) and the adjusting screw (5) are hollow inside.
4. A novel diaphragm cylinder valve according to claim 1, characterized in that the contact end of the valve port (13) with the diaphragm (2) is provided with a sealing angle a (131), the sealing angle a (131) being 130 ° to 150 °.
5. The novel diaphragm cylinder valve according to claim 1, wherein a blind hole (52) is formed in the adjusting screw (5), the piston (6) is provided with a first boss (61), the first boss (61) is arranged in the blind hole (52), a limiting surface (611) is arranged at the bottom of the first boss (61), and the distance between the limiting surface (611) and the bottom of the adjusting screw (5) is the reset distance D (53) of the piston (6).
6. The novel diaphragm cylinder valve according to claim 1, wherein the piston (6) is provided with a first connecting end (62) connected with the cylinder cover (4), a second connecting end (63) connected with the cylinder body (3), a plug disc (64) is arranged between the first connecting end (62) and the second connecting end (63), and the plug disc (64) moves up and down along the inside of the cylinder body (3).
7. The novel diaphragm cylinder valve according to claim 6, wherein the stopper disc (64) and the bottom of the cylinder (3) are provided with a positioning pin (65) for preventing the piston (6) from rotating.
8. The novel diaphragm cylinder valve according to claim 6, wherein a first groove (644) is formed in the outer circumferential surface of the plug disc (64), and a first sealing ring (641) is disposed in the first groove (644) for sealing between the plug disc (64) and the cylinder body (3).
9. The novel diaphragm cylinder valve according to claim 2, wherein the cylinder block (3), the cylinder head (4), the piston (6), the adjusting screw (5) and the locking cover (51) are all plastic materials.
10. The novel diaphragm cylinder valve according to any one of claims 1 to 9, wherein the adjusting screw (5) is provided with a hand wheel (54), and the hand wheel (54) is provided with anti-skid threads (541).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321288272.7U CN219933022U (en) | 2023-05-23 | 2023-05-23 | Novel diaphragm type cylinder valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321288272.7U CN219933022U (en) | 2023-05-23 | 2023-05-23 | Novel diaphragm type cylinder valve |
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| Publication Number | Publication Date |
|---|---|
| CN219933022U true CN219933022U (en) | 2023-10-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321288272.7U Active CN219933022U (en) | 2023-05-23 | 2023-05-23 | Novel diaphragm type cylinder valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219933022U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117386854A (en) * | 2023-12-12 | 2024-01-12 | 海普瑞(常州)洁净系统科技有限公司 | Large-small flow switching valve for semiconductor and use method thereof |
| CN117386843A (en) * | 2023-12-06 | 2024-01-12 | 海普瑞(常州)洁净系统科技有限公司 | Anti-casting valve for semiconductor manufacture |
-
2023
- 2023-05-23 CN CN202321288272.7U patent/CN219933022U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117386843A (en) * | 2023-12-06 | 2024-01-12 | 海普瑞(常州)洁净系统科技有限公司 | Anti-casting valve for semiconductor manufacture |
| CN117386854A (en) * | 2023-12-12 | 2024-01-12 | 海普瑞(常州)洁净系统科技有限公司 | Large-small flow switching valve for semiconductor and use method thereof |
| CN117386854B (en) * | 2023-12-12 | 2024-02-23 | 海普瑞(常州)洁净系统科技有限公司 | Large-small flow switching valve for semiconductor and use method thereof |
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