CN219930230U - Positioning device and vacuum coating equipment - Google Patents
Positioning device and vacuum coating equipment Download PDFInfo
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- CN219930230U CN219930230U CN202321616952.7U CN202321616952U CN219930230U CN 219930230 U CN219930230 U CN 219930230U CN 202321616952 U CN202321616952 U CN 202321616952U CN 219930230 U CN219930230 U CN 219930230U
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 230000005540 biological transmission Effects 0.000 claims abstract description 47
- 230000000712 assembly Effects 0.000 claims abstract description 16
- 238000000429 assembly Methods 0.000 claims abstract description 16
- 230000008020 evaporation Effects 0.000 claims description 25
- 238000001704 evaporation Methods 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 17
- 238000004891 communication Methods 0.000 claims description 2
- 230000009351 contact transmission Effects 0.000 abstract description 3
- 238000013461 design Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000007888 film coating Substances 0.000 description 4
- 238000009501 film coating Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Abstract
The utility model relates to the technical field of vacuum coating, and particularly discloses a positioning device and vacuum coating equipment. The device comprises a revolution umbrella stand and a planetary disc assembly; the revolution umbrella stand comprises a revolution rotation shaft and an umbrella stand main body capable of rotating around the revolution rotation shaft; the plurality of planetary disc assemblies are circumferentially distributed on the umbrella stand main body around the revolution rotating shaft, each planetary disc assembly comprises a transmission wheel set and a magnetic wheel frame, and each transmission wheel set comprises a first rotating shaft, a second rotating shaft and a third rotating shaft which are sequentially connected in a transmission manner; the magnetic wheel frame can rotate around the second rotating shaft relative to the umbrella stand main body; the third rotating shaft is fixedly connected with a driving magnetic wheel, the magnetic wheel frame is rotationally connected with a driven magnetic wheel, the driving magnetic wheel is in transmission fit with the driven magnetic wheel, and the first rotating shaft can drive the driven magnetic wheel to rotate around the axis of the first rotating shaft. The device realizes flexible positioning of the substrate jig by means of revolution of the umbrella stand main body and autorotation of the driven magnetic wheels, and the purpose of non-contact transmission is achieved by matching the magnetic wheels.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to a positioning device and vacuum coating equipment.
Background
In the prior art, the positioning device of the vacuum coating equipment is not flexible enough, the positioning requirements of the substrate jig under different conditions are difficult to meet, the position adjustment after positioning is difficult, the rotation action around the axis of the substrate jig cannot be successfully completed, and the working requirements of vacuum coating are difficult to meet. In addition, the existing positioning structure depends on contact transmission, hidden danger is brought to the cleanliness degree near the positioning position of the substrate jig, the effect of the coating is affected, and the yield of the coating is reduced.
In view of the foregoing, there is a need for a positioning device. The device needs to realize flexible positioning of the substrate jig, improve the transmission mode of the positioning structure, and simultaneously has the capability of driving the substrate jig to rotate around the axis of the device.
Disclosure of Invention
The utility model aims to provide a positioning device and vacuum coating equipment, which can flexibly position a substrate jig by means of revolution of an umbrella stand main body and rotation of a driven magnetic wheel, and meet the rotation requirement of the substrate jig.
To achieve the purpose, the utility model adopts the following technical scheme:
the positioning device is used for positioning the substrate jig and comprises a revolution umbrella stand and a plurality of planetary disc assemblies; the revolution umbrella stand comprises a revolution rotating shaft and an umbrella stand main body sleeved on the revolution rotating shaft, and the umbrella stand main body can rotate around the revolution rotating shaft; the planetary disc assemblies are circumferentially distributed on the umbrella stand main body around the revolution rotating shaft, each planetary disc assembly comprises a rotation driving unit, a transmission wheel set and a magnetic wheel frame, each transmission wheel set comprises a first rotating shaft, a second rotating shaft and a third rotating shaft which are sequentially connected in a transmission mode, the first rotating shafts are rotationally connected with the umbrella stand main body, the third rotating shafts are rotationally connected with the magnetic wheel frame, the second rotating shafts are respectively perpendicular to the first rotating shafts and the third rotating shafts, and the magnetic wheel frame can rotate around the second rotating shafts relative to the umbrella stand main body; the third rotating shaft is fixedly connected with a driving magnetic wheel, the magnetic wheel frame is rotationally connected with a driven magnetic wheel, the driving magnetic wheel is in transmission fit with the driven magnetic wheel, and the rotation driving unit can drive the first rotating shaft to drive the driven magnetic wheel to rotate around the axis of the driven magnetic wheel; the substrate jig is coaxially and detachably connected with the driven magnetic wheel.
As a preferable technical scheme of the positioning device, one end of the first rotating shaft is coaxially and fixedly provided with a rotation driving wheel, the other end of the first rotating shaft is coaxially and fixedly provided with a first bevel gear, and the rotation driving unit is in transmission connection with the rotation driving wheel; one end of the second rotating shaft is fixedly provided with a second bevel gear, one end of the third rotating shaft is coaxially and fixedly provided with a third bevel gear, and the other end of the third rotating shaft is coaxially and fixedly provided with the driving magnetic wheel; the first bevel gear, the second bevel gear and the third bevel gear are sequentially meshed and connected.
As the preferential technical scheme of positioner, the rigid coupling has the star fixed block of wandering on the umbrella stand main part, first pivot pass star fixed block of wandering and with star fixed block of wandering rotates to be connected, star fixed block rigid coupling has the wheelset protection frame, the other end of second pivot rotate connect in the wheelset protection frame, the wheelset protection frame encloses into the wheelset protection chamber, first bevel gear the second bevel gear with the third bevel gear is all arranged in the wheelset protection intracavity.
As the preferential technical scheme of positioner, the lateral wall of initiative magnetic force wheel with driven magnetic force wheel's up end transmission cooperation, the storage tank has still been seted up at driven magnetic force wheel's middle part, the storage tank is used for accomodating the base plate tool.
As the preferable technical scheme of positioner, the rigid coupling has the star disk locating piece of wandering and star disk bearing on the magnetic force wheel frame, the third pivot pass the star disk locating piece of wandering and with star disk locating piece rotation connection, the inner circle of star disk bearing with driven magnetic force wheel's lateral wall slides and matches.
As the preferential technical scheme of positioner, the inside wall circumference of holding groove is protruding to be equipped with a plurality of locating pins, the marginal interval of base plate tool is concave to be equipped with the buckle groove, the buckle groove with locating pin quantity is the same, every the locating pin homoenergetic with one the buckle groove matches the buckle.
As the preferable technical proposal of the positioning device, the magnetic wheel frame is movably connected with the umbrella stand main body through a magnetic wheel hinging rod.
As the preferable technical scheme of positioner, the one end swing joint of magnetic force wheel articulated rod in umbrella stand main part, the other end with magnetic force wheel frame is along being parallel to the direction rotation of second pivot is connected.
The vacuum coating equipment comprises a coating chamber for coating a substrate jig, wherein the coating chamber is internally provided with the positioning device, the positioning device is internally provided with an evaporation source main body, the evaporation source main body and the number of the planetary disc assemblies form a corresponding relation, all the evaporation source main bodies are circumferentially distributed around the revolution rotation shaft, and the umbrella stand main body can rotate until each planetary disc assembly is located right above one evaporation source main body.
As the preferable technical scheme of vacuum coating equipment, vacuum coating equipment still include with the transport room of coating chamber selectivity intercommunication, be equipped with the gripper module in the transport room, the gripper module is used for getting between transport room and the planetary disk subassembly that is in the locate position put the base plate tool, around revolution axis of rotation pivoted umbrella stand main part can drive every planetary disk subassembly passes through the locate position.
The utility model has the beneficial effects that:
according to the positioning device, by means of the revolution of the umbrella stand main body and the rotation design of the driven magnetic wheel, the flexible positioning of the substrate jig can be realized, the substrate jig can be conveniently taken and placed, the position adjustment is convenient, the rotation requirement of the substrate jig is met, and the film forming effect is further improved; by means of the sequential transmission connection of the first rotating shaft, the second rotating shaft and the third rotating shaft, the magnetic wheel frame can rotate relative to the umbrella stand main body, and the transmission relation of the transmission wheel group is unchanged, so that the inclination angle of the substrate jig is changed, and the aim of adjusting the angle of the substrate on the substrate jig during film coating is fulfilled; through the transmission cooperation between initiative magnetic force wheel and the driven magnetic force wheel, can realize the contactless transmission on the planetary disk subassembly, reduce the easy circumstances that produces the dust of rigid transmission cooperation, and then reduced the risk that the base plate on the base plate tool was polluted, ensured the finished product yields of base plate on the base plate tool.
The upstream star plate component of the vacuum coating equipment can be limited right above the evaporation source main body, so that the moving distance of evaporated coating material particles in the air is shortened, the difficulty of film formation of a substrate on the substrate jig is reduced, the film formation quality is ensured, and the film coating efficiency is improved.
Drawings
Fig. 1 is a schematic structural view of an evaporation source main body and a part of a positioning device provided by an embodiment of the present utility model;
FIG. 2 is a schematic structural diagram of a positioning device according to an embodiment of the present utility model;
FIG. 3 is a schematic cross-sectional view of a positioning device according to an embodiment of the present utility model;
FIG. 4 is a schematic view of a structure of a game disc assembly according to an embodiment of the present utility model;
fig. 5 is a cross-sectional side view of a positioning device provided by an embodiment of the present utility model.
In the figure:
100. a chamber housing;
200. a film plating chamber;
300. an evaporation source main body;
400. a positioning device; 410. revolution umbrella stand; 411. an umbrella stand main body; 412. a revolution driving unit; 413. a revolution rotation shaft; 414. a star plate fixing block; 415. a wheel set protection frame; 420. a game disc assembly; 421. a rotation driving unit; 422. a transmission wheel set; 4221. a self-rotation driving wheel; 4222. a first bevel gear; 4223. a second bevel gear; 4224. a third bevel gear; 4225. a driving magnetic wheel; 4226. a first rotating shaft; 4227. a second rotating shaft; 4228. a third rotating shaft; 4231. driven magnetic force wheel; 4232. a magnetic wheel hinging rod; 4233. a magnetic wheel frame; 4234. a positioning pin; 4235. a planet disc bearing; 4236. a positioning block of a planetary disc; 430. a substrate jig position sensor;
500. a substrate fixture.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
As shown in fig. 1 to 5, a substrate to be coated can be placed on the substrate jig 500.
The present embodiment provides a positioning device 400 for positioning a substrate fixture 500, including a revolution umbrella stand 410 and a plurality of planetary disc assemblies 420; the revolution umbrella stand 410 includes a revolution rotation shaft 413 and an umbrella stand body 411 fitted around the revolution rotation shaft 413, the umbrella stand body 411 being rotatable around the revolution rotation shaft 413; the plurality of planetary disc assemblies 420 are circumferentially distributed on the umbrella stand main body 411 around the revolution rotation shaft 413, the planetary disc assemblies 420 comprise a rotation driving unit 421, a transmission wheel set 422 and a magnetic wheel frame 4233, the transmission wheel set 422 comprises a first rotation shaft 4226, a second rotation shaft 4227 and a third rotation shaft 4228 which are sequentially connected in a transmission mode, the first rotation shaft 4226 is rotationally connected with the umbrella stand main body 411, the third rotation shaft 4228 is rotationally connected with the magnetic wheel frame 4233, the second rotation shaft 4227 is respectively perpendicular to the first rotation shaft 4226 and the third rotation shaft 4228, and the magnetic wheel frame 4233 can rotate around the second rotation shaft 4227 relative to the umbrella stand main body 411; the third rotating shaft 4228 is fixedly connected with a driving magnetic wheel 4225, a driven magnetic wheel 4231 is rotatably connected to a magnetic wheel frame 4233, the driving magnetic wheel 4225 is in transmission fit with the driven magnetic wheel 4231, and the rotation driving unit 421 can drive the first rotating shaft 4226 so as to drive the driven magnetic wheel 4231 to rotate around the axis of the self-body; the substrate fixture 500 is coaxially and detachably connected to the driven magnetic wheel 4231.
Illustratively, the positioning device 400 may be a substrate carrying mechanism such as a substrate rack for loading the substrate jig 500 during vacuum plating.
Specifically, the output end of the revolution driving unit 412 is in transmission connection with the umbrella stand body 411.
The positioning device 400 can flexibly position the substrate jig 500 by means of the revolution of the umbrella stand main body 411 and the rotation design of the driven magnetic wheel 4231, thereby facilitating the taking and placing of the substrate jig 500 and the position adjustment, meeting the rotation requirement of the substrate jig 500 and further improving the film forming effect; by means of the sequential transmission connection of the first rotating shaft 4226, the second rotating shaft 4227 and the third rotating shaft 4228, the magnetic wheel frame 4233 can rotate relative to the umbrella stand main body 411, and the transmission relation of the transmission wheel group 422 is unchanged, so that the inclination angle of the substrate jig 500 is changed, and the aim of adjusting the angle of the substrate on the substrate jig 500 during film coating is fulfilled; through the transmission cooperation between initiative magnetic wheel 4225 and driven magnetic wheel 4231, can realize the contactless transmission on the star subassembly 420, reduce the easy dust generation's of rigid transmission cooperation condition, and then reduced the risk that the base plate on the base plate tool 500 was polluted, ensured the finished product yields of the base plate on the base plate tool 500.
At least one film forming group is arranged in the film plating chamber 200, the number of the film forming groups is the same as that of the star wheel assemblies 420, and each film forming group corresponds to one star wheel assembly 420; it can be appreciated that there may be multiple film forming groups that collectively correspond to one of the star wheel assemblies 420 to achieve simultaneous or alternating coating of multiple film materials; one film forming group has one evaporation site and at least one premelting site, the evaporation site is located under the corresponding star plate assembly 420, each film forming group also has a plurality of evaporation source bodies 300, the number of the evaporation source bodies 300 is the same as the sum of the evaporation site and the premelting site, each evaporation source body 300 is located above the evaporation site or premelting site, and any evaporation source body 300 can be moved to the evaporation site. Specifically, the film formation group is provided with four.
In the embodiment, the inclination angle of the substrate jig 500 is selected to be 0 ° -45 °; specifically, the substrate jig 500 is inclined at an angle of 30 °.
In this embodiment, one end of the first shaft 4226 is coaxially fixed with a rotation driving wheel 4221, and the other end is coaxially fixed with a first bevel gear 4222, and the rotation driving unit 421 is in transmission connection with the rotation driving wheel 4221; one end of the second rotating shaft 4227 is fixedly provided with a second bevel gear 4223, one end of the third rotating shaft 4228 is coaxially and fixedly provided with a third bevel gear 4224, and the other end of the third rotating shaft 4228 is coaxially and fixedly provided with a driving magnetic wheel 4225; the first bevel gear 4222, the second bevel gear 4223 and the third bevel gear 4224 are sequentially in meshed engagement. By means of the arrangement of the rotation driving wheel 4221, the first bevel gear 4222, the second bevel gear 4223, the third bevel gear 4224 and the driving magnetic wheel 4225, the transmission relation among the first rotating shaft 4226, the second rotating shaft 4227 and the third rotating shaft 4228 is defined, the magnetic wheel frame 4233 can rotate relative to the umbrella stand main body 411, the transmission relation of the transmission wheel group 422 is unchanged, and the relative rotation design of the magnetic wheel frame 4233 and the umbrella stand main body 411 is realized. The arrangement of the spinning drive wheel 4221 and the drive magnetic wheel 4225 define the drive input and drive output of the drive wheel set 422.
Further, a star plate fixed block 414 is fixedly connected to the umbrella stand main body 411, the first rotating shaft 4226 penetrates through the star plate fixed block 414 and is rotationally connected with the star plate fixed block 414, a wheel set protection frame 415 is fixedly connected to the star plate fixed block 414, the other end of the second rotating shaft 4227 is rotationally connected to the wheel set protection frame 415, the wheel set protection frame 415 encloses a wheel set protection cavity, and the first bevel gear 4222, the second bevel gear 4223 and the third bevel gear 4224 are all arranged in the wheel set protection cavity. The arrangement of the wheel set protection frame 415 achieves the purpose of shielding the rigid transmission part on the transmission wheel set 422, further reduces the risk of pollution of the substrate on the substrate jig 500, and simultaneously has the protection effect on the transmission wheel set 422; the second shaft 4227 is rotatably connected to the wheel set protection frame 415, so as to achieve the positioning purpose of the second shaft 4227, and ensure that the transmission relation of the transmission wheel set 422 is not affected.
Still further, the outer side wall of the driving magnetic wheel 4225 is in transmission fit with the upper end surface of the driven magnetic wheel 4231, and the middle part of the driven magnetic wheel 4231 is further provided with a containing groove for containing the substrate fixture 500. Through the design that the outer side wall of the driving magnetic wheel 4225 is matched with the upper end face of the driven magnetic wheel 4231, the setting positions and the rotation modes of the driving magnetic wheel 4225 and the driven magnetic wheel 4231 are limited, and smooth completion of non-contact transmission is ensured. The arrangement of the accommodating groove defines the arrangement position of the substrate jig 500, and ensures that the substrate on the substrate jig 500 cannot slide down.
Further, a planet positioning block 4236 and a planet bearing 4235 are fixedly connected to the magnetic wheel frame 4233, and the third rotating shaft 4228 passes through the planet positioning block 4236 and is rotatably connected to the planet positioning block 4236, and an inner ring of the planet bearing 4235 is slidably matched with an outer side wall of the driven magnetic wheel 4231. The sliding fit of the planet bearing 4235 and the driven magnetic wheel 4231 define the relative position of the receiving substrate fixture 500 and the magnetic wheel frame 4233; the rotation fit of the third rotating shaft 4228 and the planetary disc positioning block 4236 limits the relative position of the third rotating shaft 4228 and the magnetic wheel frame 4233, ensures that the transmission wheel set 422 can smoothly drive the substrate jig 500 to rotate around the axis of the substrate jig 500, has simple and reliable structure and high working stability, and is beneficial to realizing the smooth positioning of the positioning device 400 to the substrate jig 500. Specifically, the planet bearing 4235 is made of ceramic.
In this embodiment, a plurality of positioning pins 4234 are protruding in the circumferential direction of the inner sidewall of the accommodating groove, and a fastening groove is recessed in the edge of the substrate fixture 500 at intervals, the number of the fastening grooves is the same as that of the positioning pins 4234, and each positioning pin 4234 can be fastened with one fastening groove in a matching manner. The cooperation of the locating pin 4234 and the buckling groove limits the position relation between the driven magnetic wheel 4231 and the substrate jig 500, and avoids the occurrence of the condition that the substrate jig 500 rotates relative to the driven magnetic wheel 4231, thereby ensuring that the substrate jig 500 can smoothly complete the rotation around the axis of the substrate jig 500, and improving the film forming quality of the substrate.
Further, the length direction of the third rotation shaft 4228 is perpendicular to the axis direction of the driven magnetic wheel 4231. The limitation is simple and direct, the design difficulty is low, the occupied space is small, smooth transmission of the driving magnetic wheel 4225 and the driven magnetic wheel 4231 is facilitated, the design difficulty of the driving magnetic wheel 4225 and the driven magnetic wheel 4231 is reduced, and the production cost is reduced. The above improvements also help optimize the construction of the star wheel assembly 420.
Illustratively, the magnetic wheel frame 4233 is movably coupled to the umbrella frame body 411 by a magnetic wheel hinge lever 4232. The magnetic wheel hinging rod 4232 has a simple and reliable structure, realizes movable connection between the magnetic wheel frame 4233 and the umbrella stand main body 411, and ensures that the rotating action of the magnetic wheel frame 4233 relative to the umbrella stand main body 411 can be smoothly completed.
In this embodiment, one end of the magnetic wheel hinge rod 4232 is movably connected to the umbrella stand body 411, and the other end is rotatably connected to the magnetic wheel frame 4233 along a direction parallel to the second rotation shaft 4227. The above design limits the arrangement mode of the magnetic wheel hinge rod 4232 and limits the swing range of the magnetic wheel frame 4233, so that the magnetic wheel frame 4233 can rotate within a preset range, the risk of position deviation of the magnetic wheel frame 4233 caused by accidents is avoided, and the operation stability of the positioning device 400 is improved. The above limitation also simplifies the structure of the magnetic wheel hinge rod 4232, reduces the adjustment difficulty of the magnetic wheel hinge rod 4232, and improves the efficiency of position adjustment of the positioning device 400.
The embodiment also provides vacuum coating equipment, which comprises a coating chamber 200 for coating a substrate jig 500, wherein the coating chamber 200 is internally provided with the positioning device 400, the positioning device 400 is internally provided with an evaporation source main body 300, the evaporation source main body 300 and the number of the star plate assemblies 420 form a corresponding relation, all the evaporation source main bodies 300 are circumferentially distributed around a revolution rotation shaft 413, and an umbrella stand main body 411 can rotate until each star plate assembly 420 is positioned right above one evaporation source main body 300.
The star plate assembly 420 can be limited right above the evaporation source main body 300, so that the moving distance of evaporated coating material particles in the air is shortened, the film forming difficulty of a substrate on the substrate jig 500 is reduced, the film forming quality is ensured, and the film coating efficiency is improved.
Further, the gripper module is used for picking and placing the substrate fixture 500 between the carrying chamber and the planetary disc assemblies 420 at the positioning position, and the umbrella stand body 411 rotating around the revolution rotation shaft 413 can drive each of the planetary disc assemblies 420 to pass through the positioning position. The arrangement of the positioning position enables all the star plate assemblies 420 on the positioning device 400 to carry the substrate jig 500 by using the same transfer device, so that the arrangement requirement of the transfer device is reduced, the production cost of the vacuum coating equipment is reduced, and the space occupied by the vacuum coating equipment is reduced.
In this embodiment, the coating chamber 200 is enclosed by the chamber housing 100.
Specifically, the chamber housing 100 is provided with a substrate jig position sensor 430 for monitoring the position of the substrate jig 500 on the positioning device 400.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.
Claims (10)
1. Positioning device for positioning substrate tool (500), its characterized in that includes:
the revolution umbrella stand (410) comprises a revolution rotation shaft (413) and an umbrella stand main body (411) sleeved on the revolution rotation shaft (413), wherein the umbrella stand main body (411) can rotate around the revolution rotation shaft (413);
the device comprises a plurality of planetary disc assemblies (420), wherein the plurality of planetary disc assemblies (420) are circumferentially distributed on an umbrella stand main body (411) around a revolution rotating shaft (413), each planetary disc assembly (420) comprises a rotation driving unit (421), a transmission wheel set (422) and a magnetic wheel frame (4233), each transmission wheel set (422) comprises a first rotating shaft (4226), a second rotating shaft (4227) and a third rotating shaft (4228) which are sequentially connected in a transmission mode, each first rotating shaft (4226) is rotationally connected with the umbrella stand main body (411), each third rotating shaft (4228) is rotationally connected with the corresponding magnetic wheel frame (4233), each second rotating shaft (4227) is perpendicular to each first rotating shaft (4226) and each third rotating shaft (4228), and each magnetic wheel frame (4233) can rotate around each second rotating shaft (4227) relative to the umbrella stand main body (411);
the third rotating shaft (4228) is fixedly connected with a driving magnetic wheel (4225), a driven magnetic wheel (4231) is rotationally connected to the magnetic wheel frame (4233), the driving magnetic wheel (4225) is in transmission fit with the driven magnetic wheel (4231), and the rotation driving unit (421) can drive the first rotating shaft (4226) so as to drive the driven magnetic wheel (4231) to rotate around the axis of the driven magnetic wheel; the substrate jig (500) is coaxially and detachably connected to the driven magnetic force wheel (4231).
2. The positioning device according to claim 1, wherein one end of the first rotating shaft (4226) is coaxially and fixedly provided with a rotation driving wheel (4221), the other end is coaxially and fixedly provided with a first bevel gear (4222), and the rotation driving unit (421) is in transmission connection with the rotation driving wheel (4221); one end of the second rotating shaft (4227) is fixedly provided with a second bevel gear (4223), one end of the third rotating shaft (4228) is coaxially and fixedly provided with a third bevel gear (4224), and the other end of the third rotating shaft is coaxially and fixedly provided with the driving magnetic wheel (4225); the first bevel gear (4222), the second bevel gear (4223) and the third bevel gear (4224) are sequentially meshed.
3. The positioning device according to claim 2, wherein a planet disk fixing block (414) is fixedly connected to the umbrella stand main body (411), the first rotating shaft (4226) penetrates through the planet disk fixing block (414) and is rotationally connected with the planet disk fixing block (414), a wheel set protection frame (415) is fixedly connected to the planet disk fixing block (414), the other end of the second rotating shaft (4227) is rotationally connected to the wheel set protection frame (415), the wheel set protection frame (415) encloses a wheel set protection cavity, and the first bevel gear (4222), the second bevel gear (4223) and the third bevel gear (4224) are all arranged in the wheel set protection cavity.
4. A positioning device according to claim 3, wherein an outer side wall of the driving magnetic wheel (4225) is in transmission fit with an upper end surface of the driven magnetic wheel (4231), and a containing groove is further formed in the middle of the driven magnetic wheel (4231) and is used for containing the substrate jig (500).
5. The positioning device according to claim 4, wherein a planet positioning block (4236) and a planet bearing (4235) are fixedly connected to the magnetic wheel frame (4233), the third rotating shaft (4228) passes through the planet positioning block (4236) and is rotationally connected with the planet positioning block (4236), and an inner ring of the planet bearing (4235) is slidably matched with an outer side wall of the driven magnetic wheel (4231).
6. The positioning device according to claim 4, wherein a plurality of positioning pins (4234) are protruding in the circumferential direction of the inner side wall of the accommodating groove, the edge interval of the substrate jig (500) is concavely provided with fastening grooves, the number of the fastening grooves is the same as that of the positioning pins (4234), and each positioning pin (4234) can be fastened with one fastening groove in a matching manner.
7. The positioning device according to any one of claims 1-6, wherein the magnetic wheel frame (4233) is movably connected to the umbrella stand body (411) by a magnetic wheel hinge rod (4232).
8. The positioning device according to claim 7, wherein one end of the magnetic wheel hinge rod (4232) is movably connected to the umbrella stand body (411), and the other end is rotatably connected to the magnetic wheel frame (4233) along a direction parallel to the second rotation axis (4227).
9. Vacuum coating equipment, its characterized in that includes coating film room (200) that are used for carrying out the coating film to base plate tool (500), be provided with the positioner of any one of claims 1-8 in coating film room (200), still be equipped with evaporation source main part (300) in the positioner, evaporation source main part (300) with the quantity of planetary disc subassembly (420) constitutes the correspondence, all evaporation source main part (300) are around revolution axis of rotation (413) circumference distribution, umbrella stand main part (411) can rotate to every planetary disc subassembly (420) all are located just above evaporation source main part (300).
10. The vacuum coating apparatus according to claim 9, further comprising a handling chamber in selective communication with the coating chamber (200), the handling chamber having a gripper module disposed therein for picking and placing the substrate jig (500) between the handling chamber and the puck assembly (420) in the positioning position, the umbrella stand body (411) rotating about the revolution axis of rotation (413) being capable of driving each of the puck assemblies (420) through the positioning position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321616952.7U CN219930230U (en) | 2023-06-25 | 2023-06-25 | Positioning device and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321616952.7U CN219930230U (en) | 2023-06-25 | 2023-06-25 | Positioning device and vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219930230U true CN219930230U (en) | 2023-10-31 |
Family
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117947398A (en) * | 2024-03-26 | 2024-04-30 | 江苏鸿瑞光电科技有限公司 | Optical lens coating mechanism and coating process |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117947398A (en) * | 2024-03-26 | 2024-04-30 | 江苏鸿瑞光电科技有限公司 | Optical lens coating mechanism and coating process |
| CN117947398B (en) * | 2024-03-26 | 2024-05-31 | 江苏鸿瑞光电科技有限公司 | Optical lens coating mechanism and coating process |
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