CN219907827U - Evaporation crucible and evaporation equipment - Google Patents

Abstract

The present disclosure provides an evaporation crucible and evaporation equipment, belongs to evaporation equipment technical field. The evaporation crucible comprises: the device comprises a crucible cylinder, a storage cylinder, a feeding container for storing evaporation materials and a control device; the bottom of the crucible cylinder is communicated with the bottom of the storage cylinder, the feeding container is communicated with the top of the storage cylinder, and the control device is connected with the feeding container and used for controlling the feeding container to add evaporation materials into the storage cylinder. The utility model discloses a can avoid frequent shut down unpacking, and can let the surplus of intracavity evaporation coating material keep invariable when adding evaporation coating material, promote evaporation coating efficiency and stability.

Description

Evaporation crucible and evaporation equipment

Technical Field

The disclosure relates to the technical field of evaporation equipment, in particular to an evaporation crucible and evaporation equipment.

Background

The vapor deposition refers to a process of vaporizing and depositing a vapor deposition material onto a substrate surface by a certain heating method under a vacuum condition, and is widely applied to a manufacturing process of a display panel. The evaporation crucible is one of the most important devices in the evaporation process.

The evaporation crucible in the related art generally includes a crucible body having a receiving chamber in which an evaporation material is placed. As the vapor deposition process continues, the vapor deposition material in the accommodating chamber gradually decreases until it is completely consumed. In the vapor deposition process, technicians are required to continuously add vapor deposition materials into the accommodating cavity so as to ensure that the vapor deposition process is continuously carried out.

However, frequent shut down and open the cavity and increase the evaporation material into the accommodating cavity can cause production waiting and affect the evaporation efficiency; in addition, the amount of the vapor deposition material added each time the cavity is opened is not easily controlled, and in general, the heating source of the vapor deposition crucible is fixed to the top of the vapor deposition crucible, and if too much or too little vapor deposition material is added into the vapor deposition crucible, the distance between the surface of the vapor deposition material and the heating source is inconsistent, which affects the stability of vapor deposition.

Disclosure of Invention

The embodiment of the disclosure provides an evaporation crucible and evaporation equipment, can avoid frequently stopping unpacking, and can let the surplus of intracavity evaporation material keep invariable when adding evaporation material, promotes evaporation efficiency and stability. The technical scheme is as follows:

embodiments of the present disclosure provide an evaporation crucible, which includes: the device comprises a crucible cylinder, a storage cylinder, a feeding container for storing evaporation materials and a control device; the bottom of the crucible cylinder is communicated with the bottom of the storage cylinder, the feeding container is communicated with the top of the storage cylinder, and the control device is connected with the feeding container and used for controlling the feeding container to add evaporation materials into the storage cylinder.

In one implementation of the disclosed embodiments, the charging vessel comprises: the control device comprises a detection device and a control circuit; the container body is provided with a charging hole, the charging valve is connected with the charging hole and the top of the storage cylinder, and the detection device is positioned on the storage cylinder and used for detecting the residual quantity of evaporation materials of the storage cylinder; the control circuit is respectively and electrically connected with the detection device and the charging valve, and is used for controlling the charging valve to be opened when the residual quantity is not more than a threshold value, or controlling the charging valve to be closed when the residual quantity is not less than the threshold value.

In another implementation of the disclosed embodiments, the cartridge includes a vertical section and a connecting section that are connected, the connecting section having opposite first and second ends, the first end being in communication with a top of the vertical section, the second end being in communication with a charging valve, the second end being located above the first end in a vertical direction.

In another implementation of the disclosed embodiments, the detection means is located on the wall of the connecting section.

In another implementation of an embodiment of the present disclosure, the detection device comprises a pressure sensor or a liquid level sensor.

In another implementation of the embodiment of the disclosure, the charging port is located at the bottom of the container body, and in a vertical direction, the charging port is not lower than the top of the storage cylinder.

In another implementation of the disclosed embodiments, the volume of the crucible cartridge is greater than the volume of the storage cartridge.

In another implementation of the disclosed embodiments, the crucible cartridge includes a cartridge body and a frustum jacket, a large end of the frustum jacket being connected to the cartridge body.

In another implementation of the disclosed embodiments, the frustum jacket is detachably connected to the barrel body.

The embodiment of the disclosure provides an evaporation device, which comprises a heating device and an evaporation crucible as described above, wherein the heating device is positioned outside the crucible cylinder, and the heating device is used for heating the crucible cylinder.

The technical scheme provided by the embodiment of the disclosure has the beneficial effects that at least:

the evaporation crucible provided by the embodiment of the disclosure comprises a crucible cylinder, a storage cylinder and a feeding container. The bottom of the crucible cylinder is communicated with the bottom of the storage cylinder, so that the crucible cylinder and the storage cylinder form a communicating vessel, namely the liquid level of the crucible cylinder is kept consistent with the liquid level in the storage cylinder. And a feeding container is further arranged at the top of the storage cylinder, and the feeding container can be used for adding evaporation materials into the storage cylinder under the control of the control device. Therefore, when the evaporation material is added into the crucible barrel, the evaporation material is not required to be stopped for addition, but is directly added into the crucible barrel through the material storage barrel of the communicating vessel, frequent stopping is avoided, and the evaporation efficiency is improved.

Simultaneously, when adding the coating by vaporization material, add the coating by vaporization material to storage cylinder through controlling means control charging container, compare in manual work and add, machine control is more accurate, can satisfy the threshold just to stop to add at the surplus of storage cylinder. The liquid levels of the crucible barrel and the storage barrel in the communicating vessel are kept consistent, so that the residual quantity of the evaporation material in the crucible barrel can be kept constant, the quantity of the evaporation material in the crucible barrel is unchanged, and the evaporation condition is not required to be adjusted, thereby improving the stability of evaporation.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present disclosure, and other drawings may be obtained according to these drawings without inventive effort for a person of ordinary skill in the art.

Fig. 1 is a schematic structural view of an evaporation crucible provided in an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present disclosure.

The various labels in the figures are described below:

10. a crucible barrel; 11. a cartridge body; 12. a frustum sleeve;

20. a storage cylinder; 21. a vertical section; 22. a connection section;

30. a charging container; 31. a container body; 310. a feed inlet; 32. a charging valve;

33. a detection device; 34. a control circuit;

40. a heating device.

Detailed Description

For the purposes of clarity, technical solutions and advantages of the present disclosure, the following further details the embodiments of the present disclosure with reference to the accompanying drawings.

Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The terms "first," "second," "third," and the like in the description and in the claims, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, is intended to mean that elements or items that are present in front of "comprising" or "comprising" are included in the word "comprising" or "comprising", and equivalents thereof, without excluding other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", "top", "bottom" and the like are used only to indicate relative positional relationships, which may be changed accordingly when the absolute position of the object to be described is changed.

Fig. 1 is a schematic structural view of an evaporation crucible according to an embodiment of the present disclosure. As shown in fig. 1, the evaporation crucible includes: a crucible cylinder 10, a material storage cylinder 20, a material charging container 30 for storing vapor deposition material, and a control device.

As shown in fig. 1, the bottom of the crucible 10 communicates with the bottom of the storage cylinder 20, and the charging container 30 communicates with the top of the storage cylinder 20.

Wherein, the control device is connected with the feeding container 30 and is used for controlling the feeding container 30 to add the evaporation material into the storage cylinder 20.

The evaporation crucible provided by the embodiment of the disclosure comprises a crucible cylinder 10, a storage cylinder 20 and a charging container 30. Wherein the bottoms of the crucible cylinder 10 and the storage cylinder 20 are communicated, so that the crucible cylinder 10 and the storage cylinder 20 form a communicating vessel, namely the liquid level of the crucible cylinder 10 is consistent with the liquid level in the storage cylinder 20. A charging container 30 is further provided on the top of the storage cylinder 20, and the charging container 30 is capable of charging the evaporation material into the storage cylinder 20 under the control of the control device. Therefore, when the evaporation material is added into the crucible barrel 10, the evaporation material is not required to be stopped and added, but is directly added into the crucible barrel 10 through the material storage barrel 20 of the communicating vessel, frequent stopping is avoided, and the evaporation efficiency is improved.

Meanwhile, when the evaporation material is added, the control device controls the feeding container 30 to add the evaporation material to the storage cylinder 20, compared with manual addition. The machine control is more accurate, can stop joining when the surplus of storage section of thick bamboo satisfies the threshold value. The liquid levels of the crucible cylinder 10 and the storage cylinder 20 in the communicating vessel are kept consistent, so that the residual amount of the vapor deposition material in the crucible cylinder 10 can be kept constant, the amount of the vapor deposition material in the crucible cylinder 10 is not changed, and the vapor deposition condition is not required to be adjusted, thereby improving the stability of vapor deposition.

Optionally, as shown in fig. 1, the charging vessel 30 comprises: the container body 31 and the charging valve 32, and the control device comprises a detection device 33 and a control circuit 34; the container body 31 has a feed port 310, and the feed valve 32 connects the feed port 310 and the top of the cartridge 20, and the detection device 33 is located on the cartridge 20 and is used for detecting the remaining amount of vapor deposition material of the cartridge 20.

The control circuit 34 is electrically connected with the detection device 33 and the charging valve 32 respectively, and the control circuit 34 is used for controlling the charging valve 32 to be opened when the residual quantity is not more than a threshold value; alternatively, the charging valve 32 is controlled to be closed when the remaining amount is not less than the threshold value.

Illustratively, the threshold may be 20% to 90% of the capacity of the grain storage canister. The threshold may be selected according to actual evaporation process requirements, and embodiments of the present disclosure are not limited.

In the embodiment of the disclosure, the control circuit 34 is electrically connected to the detecting device 33, and is capable of obtaining the residual amount of the evaporation material detected by the detecting device 33, and controlling the opening and closing of the charging valve 32 based on the residual amount and the threshold value. In this way, when the vapor deposition material in the crucible 10 decreases and the remaining amount of the vapor deposition material in the storage cylinder 20 decreases below the threshold value during the vapor deposition process, the feed valve 32 is opened, and the vapor deposition material in the container body 31 flows into the storage cylinder 20. During the vapor deposition process, the crucible cylinder 10 can be supplemented with vapor deposition material; when the remaining amount of the vapor deposition material in the reservoir tube 20 is replenished to the threshold value, the charging valve 32 is closed, and the vapor deposition material in the crucible tube 10 can be maintained at a constant amount.

Alternatively, the control circuit may be a processor, microcontroller, or the like.

The control circuit may include a comparator, a relay, and a transistor, the detection device outputting a detection voltage (for reflecting the detected remaining amount) to one input terminal of the comparator, the comparator comparing the detection signal with a reference voltage determined based on a threshold value, when the detection voltage is greater than the reference voltage, indicating that the remaining amount is greater than the threshold value, the output terminal of the comparator outputting a control voltage; when the detection voltage is smaller than the reference voltage, the residual quantity is smaller than the threshold value, and the output end of the comparator does not output the control voltage.

Wherein the relay may be an electromagnetic relay. The control pole of triode is connected with the output of comparator, and the source electrode of triode is connected with the power, and the drain electrode of triode is connected with the control coil of relay. After the control voltage output by the output end of the comparator is input to the control electrode, the power supply of the source electrode is discharged to the drain electrode, the control coil is electrified, then the electromagnet has magnetism, and the electromagnet enables a switch on the control loop to be closed, so that the control loop of the relay is accessed.

In the embodiment of the disclosure, the charging valve is connected in a control loop of the relay, and when the control loop is in a passage, the charging valve is electrified to work so as to close the charging valve to stop the addition of the evaporation material; when the control loop is disconnected, the charging valve is powered off and is opened to add evaporation material into the storage vat.

Illustratively, the control circuit 34 may be a programmable logic control circuit (Programmable Logic Controller, simply PLC).

Illustratively, the detecting device 33 and the charging valve 32 may be connected with the control circuit 34 in a wired or wireless manner, so that the control circuit 34 can obtain the residual amount of the evaporation material detected by the detecting device 33, and the charging valve 32 can receive an instruction output by the control circuit 34, so as to realize opening and closing of the charging valve 32.

Alternatively, as shown in fig. 1, the cartridge 20 includes a vertical section 21 and a connecting section 22 connected, the connecting section 22 having opposite first and second ends, the first end communicating with the top of the vertical section 21 and the second end communicating with the charging valve 32, the second end being located vertically above the first end.

Wherein the bottom of the vertical section 21 communicates with the bottom of the crucible 10, and the top of the vertical section 21 communicates with the container body 31 through the connection section 22. Since the second end of the connecting section 22 is above the first end, i.e. the connecting section 22 is obliquely arranged with respect to the vertical section 21, the evaporation material in the container body 31 can more easily flow along the oblique connecting section 22 into the vertical section 21 after the feed valve 32 is opened.

Alternatively, as shown in fig. 1, the detection means 33 are located on the wall of the connecting section 22.

The detection means 33 may comprise, among other things, a pressure sensor or a liquid level sensor.

Illustratively, when the detecting device 33 is a pressure sensor, the pressure sensor is located at the inclined connecting section 22, so that when the vapor deposition material accumulates at the position where the pressure sensor is located, pressure is applied to the pressure sensor, the pressure sensor detects a pressure signal, and as the vapor deposition material accumulates, the pressure signal detected by the pressure sensor becomes larger and larger, so that the remaining amount of the vapor deposition material can be determined according to the detected pressure signal.

Illustratively, when the detecting device 33 is a liquid level sensor, the liquid level sensor may be located at any position of the cartridge 20, and the remaining amount of the vapor deposition material in the cartridge 20 can be detected by the liquid level sensor.

Alternatively, as shown in fig. 1, the charging port 310 is located at the bottom of the container body 31, and the charging port 310 is not lower than the top of the cartridge 20 in the vertical direction.

Through setting up the container body 31 wholly on the top of storage section of thick bamboo 20, after charging valve 32 opens like this, the coating by vaporization material can converge to storage section of thick bamboo 20 by oneself under the effect of gravity in, need not to set up suction device in container body 31, reduce cost and convenient to use.

Alternatively, as shown in fig. 1, the cross-sectional area of the crucible cartridge 10 is larger than the cross-sectional area of the reservoir cartridge 20, and the volume of the crucible cartridge 10 is larger than the volume of the reservoir cartridge 20. In this way, in the communicating vessel formed by the crucible barrel 10 and the storage barrel 20, the evaporation material is more concentrated in the crucible barrel 10, so that the evaporation material in the crucible barrel 10 is not evaporated too quickly, and the charging valve 32 on the container body 31 is frequently opened, so that the evaporation material is added into the storage barrel 20.

Alternatively, as shown in fig. 1, the crucible cartridge 10 includes a cartridge body 11 and a frustum sleeve 12, with the large end of the frustum sleeve 12 being connected to the cartridge body 11. Thus, the frustum sleeve 12 with the diameter gradually reduced is arranged at the top end of the crucible barrel 10, so that the frustum sleeve 12 can better block the evaporation material in the thermal melting state sprayed out of the crucible barrel 10, and the evaporation material is prevented from splashing to the base material and affecting the evaporation quality.

Alternatively, the frustum sleeve 12 is detachably connected with the barrel body 11. Thus, the frustum sleeve 12 with different sizes is replaced on the cylinder body 11 according to the use requirement, and the applicability of the crucible cylinder 10 can be improved.

Illustratively, the end surface of the cylinder body 11, which is close to the frustum sleeve 12, is provided with a plurality of grooves which are circumferentially arranged at intervals; the end face of the large end of the frustum sleeve 12 is provided with bulges which are in one-to-one correspondence with the grooves. Thus, the bump on the frustum sleeve 12 is inserted into the groove of the cylinder body 11, and the detachable connection of the frustum sleeve 12 and the cylinder body 11 can be realized.

The application process of the evaporation crucible provided by the embodiment of the disclosure is as follows:

firstly, the evaporation material is replenished in the container body 31, and the charging valve 32 is controlled to be opened, so that the evaporation material in the container body 31 flows into the crucible barrel 10 and the storage barrel 20 until the residual amount of the evaporation material in the storage barrel 20 is not less than a threshold value.

Then, in the evaporation process, the control circuit 34 acquires the residual amount of the evaporation material of the storage barrel 20 detected by the detection device 33 in real time, and controls the opening and closing of the charging valve 32 based on the relation between the residual amount and the threshold value; wherein, when the residual quantity is not more than the threshold value, the charging valve 32 is controlled to be opened so as to supplement the evaporation material into the crucible cylinder 10; when the remaining amount is not less than the threshold value, the charging valve 32 is controlled to be closed, and the replenishment of the vapor deposition material into the crucible 10 is stopped.

Fig. 2 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present disclosure. As shown in fig. 2, the evaporation apparatus includes a heating device 40 and the evaporation crucible as described above, the heating device 40 is located outside the crucible 10, and the heating device 40 is used to heat the crucible 10.

As shown in fig. 2, the heating device 40 may be an electric heating wire disposed around the crucible 10, so that the crucible 10 can be uniformly heated, and the vapor deposition material can be uniformly heated.

The evaporation crucible comprises a crucible barrel 10, a storage barrel 20 and a charging container 30. Wherein the bottoms of the crucible cylinder 10 and the storage cylinder 20 are communicated, so that the crucible cylinder 10 and the storage cylinder 20 form a communicating vessel, namely the liquid level of the crucible cylinder 10 is consistent with the liquid level in the storage cylinder 20. And, still be equipped with the charging container 30 at the top of storage barrel 20, the charging container 30 can be when the surplus of the evaporation material of storage barrel 20 is not greater than the threshold value, adds the evaporation material in the storage barrel 20 through the top of storage barrel 20 to the surplus is not less than the threshold value. Therefore, when the evaporation material is added into the crucible barrel 10, the evaporation material is not required to be stopped and added, but is directly added into the crucible barrel 10 through the material storage barrel 20 of the communicating vessel, frequent stopping is avoided, and the evaporation efficiency is improved.

Meanwhile, when the residual amount of the storage cylinder 20 meets the threshold value during the addition of the evaporation material, the addition is stopped, and the liquid levels of the crucible cylinder 10 and the storage cylinder 20 in the communicating vessel are kept consistent, so that the residual amount of the evaporation material in the crucible cylinder 10 can be kept constant, the amount of the evaporation material in the crucible cylinder 10 is unchanged, the evaporation condition is not required to be adjusted, and the stability of evaporation can be improved.

The foregoing disclosure is not intended to be limited to any form of embodiment, but is not intended to limit the disclosure, and any simple modification, equivalent changes and adaptations of the embodiments according to the technical principles of the disclosure are intended to be within the scope of the disclosure, as long as the modifications or equivalent embodiments are possible using the technical principles of the disclosure without departing from the scope of the disclosure.

Claims (10)

1. An evaporation crucible, characterized in that it comprises: a crucible cylinder (10), a material storage cylinder (20), a material charging container (30) for storing evaporation materials and a control device;

the bottom of the crucible cylinder (10) is communicated with the bottom of the storage cylinder (20), the feeding container (30) is communicated with the top of the storage cylinder (20), and the control device is connected with the feeding container (30) and used for controlling the feeding container (30) to add evaporation materials into the storage cylinder (20).

2. The evaporation crucible according to claim 1, wherein the feed container (30) comprises: a container body (31) and a charging valve (32), the control device comprising a detection device (33) and a control circuit (34);

the container body (31) is provided with a charging opening (310), the charging valve (32) is connected with the charging opening (310) and the top of the storage cylinder (20), and the detection device (33) is positioned on the storage cylinder (20) and is used for detecting the residual quantity of the evaporation material of the storage cylinder (20);

the control circuit (34) is electrically connected with the detection device (33) and the charging valve (32) respectively, and the control circuit (34) is used for controlling the charging valve (32) to be opened when the residual quantity is not more than a threshold value, or controlling the charging valve (32) to be closed when the residual quantity is not less than the threshold value.

3. The evaporation crucible according to claim 2, characterized in that the storage cylinder (20) comprises a vertical section (21) and a connecting section (22) connected, the connecting section (22) having opposite first and second ends, the first end being in communication with the top of the vertical section (21), the second end being in communication with a feed valve (32), the second end being located above the first end in the vertical direction.

4. A vapor deposition crucible according to claim 3, characterized in that the detection means (33) are located on the tube wall of the connecting section (22).

5. The evaporation crucible according to any one of claims 2 to 4, wherein the detection means (33) comprises a pressure sensor or a liquid level sensor.

6. The evaporation crucible according to any one of claims 2 to 4, wherein the feed opening (310) is located at the bottom of the container body (31), and in the vertical direction, the feed opening (310) is not lower than the top of the cartridge (20).

7. The evaporation crucible according to any of claims 1 to 4, characterized in that the volume of the crucible drum (10) is larger than the volume of the storage drum (20).

8. The evaporation crucible according to any one of claims 1 to 4, wherein the crucible drum (10) comprises a drum body (11) and a frustum jacket (12), the large end of the frustum jacket (12) being connected to the drum body (11).

9. The evaporation crucible according to claim 8, characterized in that the frustum jacket (12) is detachably connected to the cylinder body (11).

10. A deposition apparatus, characterized in that it comprises a heating device (40) and a deposition crucible according to any one of claims 1 to 9, the heating device (40) being located outside the crucible (10), the heating device (40) being adapted to heat the crucible (10).