CN219901815U

CN219901815U - Frock clamp suitable for circular cap of semiconductor device

Info

Publication number: CN219901815U
Application number: CN202320591403.2U
Authority: CN
Inventors: 苏朋锁; 侯喜明
Original assignee: Suzhou Haswell Electronics Co ltd
Current assignee: Suzhou Haswell Electronics Co ltd
Priority date: 2023-03-23
Filing date: 2023-03-23
Publication date: 2023-10-27
Anticipated expiration: 2033-03-23

Abstract

The utility model belongs to the field of semiconductor processing, in particular to a fixture suitable for a circular cap of semiconductor equipment, which comprises a workbench, a clamping plate, a guide shaft, an adjusting mechanism and a fixing mechanism, wherein the guide shaft is slidably arranged on the upper end surface of the workbench; through the cooperation of above-mentioned structure, can be when the work piece is processed for the bottom surface and the laminating of first adsorption disc up end of work piece, thereby support the work piece, fixed work piece is held by the lateral wall centre gripping of work piece through the grip block, can be when processing the work piece, reduce as far as shielding the area of work piece, in order to the processing operation.

Description

Frock clamp suitable for circular cap of semiconductor device

Technical Field

The utility model relates to the field of semiconductor processing, in particular to a fixture suitable for a circular cap of semiconductor equipment.

Background

The semiconductor material is one kind of electronic material with semiconductor performance, conductivity between conductor and insulator and resistivity in the range of 1mΩ -cm to 1gΩ -cm, and may be used in making semiconductor device and integrated circuit.

Like chinese patent, CN215201612U, a frock clamp suitable for circular cap of semiconductor device, including the base, one side of base is provided with the fixed block, and a plurality of first fixed slots have been seted up to one side of fixed block, have seted up the guiding groove on the left and right sides of fixed block, have seted up the spout on the fixed block, the spout is located the central line department of first fixed slot, is provided with the slide rail on the base, slide rail and guiding groove looks one-to-one are provided with the slider on the slide rail, be provided with the movable block on the slider, a plurality of second fixed slots have been seted up on one side of movable block, and the second fixed slot is one-to-one setting with first fixed slot, and the movable block stretches into in the spout through the slider, makes first fixed slot and second fixed slot close up the setting mutually. The utility model can effectively reduce the cost aiming at fixation with different sizes.

Above-mentioned patent is in the in-process of using, through changing the distance between first fixed slot and the second fixed slot, realizes that the centre gripping of work piece is fixed, in the in-process of using, needs place the work piece in first fixed slot, and the inner wall in first fixed slot and second fixed slot can shelter from the part of work piece machined surface simultaneously to influence normal processing.

Therefore, a tool clamp suitable for a circular cap of a semiconductor device is provided for the problems.

Disclosure of Invention

The utility model provides a fixture clamp for placing a round cap which shields a processing surface and is suitable for semiconductor equipment.

The technical scheme adopted for solving the technical problems is as follows: the utility model relates to a fixture suitable for a circular cap of semiconductor equipment, which comprises a workbench, a clamping plate, a guide shaft, an adjusting mechanism and a fixing mechanism, wherein the guide shaft is slidably arranged on the upper end surface of the workbench, the clamping plate is elastically arranged on the outer wall of the guide shaft, and the sliding of the guide shaft is controlled by the adjusting mechanism.

The fixed establishment includes first adsorption disk, second adsorption disk and the third adsorption disk that communicate with the negative pressure cavity, and the second adsorption disk sets up between first adsorption disk and third adsorption disk, and the through-hole that is used for adsorbing the work piece has all been seted up to the up end of first adsorption disk, second adsorption disk and third adsorption disk, can be when processing the work piece, reduces as far as shielding the area of work piece to processing operation.

Preferably, the bottom surface fixed mounting of first adsorption disk has the intercommunication pipe, and the inner wall optional position of intercommunication pipe is provided with the solenoid valve, and the one end fixed mounting of intercommunication pipe has the check valve, can be when adsorbing the work piece for first adsorption disk, second adsorption disk and third adsorption disk inner chamber keep the state of negative pressure.

Preferably, the adjusting mechanism comprises a connecting sleeve and a sliding plate, wherein the connecting sleeve is detachably arranged on the outer wall of the guide shaft, the sliding plate is slidably arranged in an inner cavity of the connecting sleeve, one end of the sliding plate is fixedly connected with the outer wall of the clamping plate, and the connecting sleeve provides a space for the sliding plate to install and slide.

Preferably, the inner wall of the connecting sleeve is provided with an elastic piece for propping the sliding plate, one end of the elastic piece is fixedly connected with the outer wall of the sliding plate, the other end of the elastic piece is fixedly connected with the inner wall of the connecting sleeve, and the workpiece can be protected when being clamped by the elastic piece.

Preferably, the inner wall of the workbench is rotationally connected with a control panel, the outer wall of the control panel is provided with a waist-shaped groove, the outer wall of the guide shaft is in sliding fit with the inner wall of the waist-shaped groove, and a rectangular block in sliding fit with the inner wall of the workbench is fixedly arranged on the outer wall of the guide shaft and used for preventing the guide shaft from rotating.

Preferably, the inner wall of the workbench is rotationally connected with a worm, the outer wall of the control panel is fixedly connected with a worm wheel matched with the worm, one end of the worm is fixedly connected with a control handle, one end of the control handle, far away from the worm, extends to the outer wall of the workbench, and the worm wheel and the control panel can be controlled to rotate by rotating the worm, so that sliding adjustment of the clamping plate is realized.

The utility model has the advantages that:

according to the utility model, the first adsorption disc, the second adsorption disc and the third adsorption disc which are communicated with the negative pressure cavity are arranged on the upper end surface of the workbench, the workpiece is placed on the first adsorption disc during processing, the workpiece is adsorbed by the negative pressure, the plurality of clamping plates capable of sliding are arranged on the upper end surface of the workbench, the clamping plates synchronously slide, the clamping of the semiconductor workpiece is realized, the second adsorption disc and the third adsorption disc are arranged to adsorb the workpieces with different sizes, the bottom surface of the workpiece is attached to the upper end surface of the first adsorption disc during processing of the workpiece, so that the workpiece is supported, the workpiece is clamped and fixed by the side wall of the workpiece through the clamping plates, and the area for shielding the workpiece during processing of the workpiece can be reduced as much as possible, so that the processing operation is facilitated.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a cross-sectional view of a table of the present utility model;

FIG. 3 is a cross-sectional view of a first adsorption disk of the present utility model;

FIG. 4 is a schematic view of the installation of a third adsorption disk according to the present utility model;

fig. 5 is a cross-sectional view of a coupling sleeve according to the present utility model.

In the figure: 1. a work table; 2. a clamping plate; 3. a connecting sleeve; 4. a guide shaft; 5. a communication conduit; 6. an electromagnetic valve; 7. a second adsorption plate; 8. a third adsorption plate; 9. a first adsorption plate; 10. a worm wheel; 11. a control panel; 12. a sliding plate; 13. a control handle; 14. a worm; 15. a one-way valve.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

Referring to fig. 1-5, a fixture for a circular cap of a semiconductor device includes a working table 1, a clamping plate 2, a guide shaft 4, an adjusting mechanism and a fixing mechanism, wherein the guide shaft 4 is slidably mounted on an upper end surface of the working table 1, and a chute for sliding the guide shaft 4 is provided on the upper end surface of the working table 1.

The clamping plates 2 are elastically installed on the outer wall of the guide shaft 4, the sliding of the guide shaft 4 is controlled by the adjusting mechanism, a plurality of clamping plates 2 are arranged, and the clamping is performed by the side walls of the semiconductor workpiece through synchronous movement of the clamping plates 2 when the semiconductor workpiece is processed.

The fixed establishment includes first adsorption disk 9, second adsorption disk 7 and third adsorption disk 8 with the negative pressure cavity intercommunication, and second adsorption disk 7 sets up between first adsorption disk 9 and third adsorption disk 8, and second adsorption disk 7 and third adsorption disk 8 are the annular, and the axis coincidence of first adsorption disk 9, second adsorption disk 7 and third adsorption disk 8.

The through holes for adsorbing the workpieces are formed in the upper end faces of the first adsorption disc 9, the second adsorption disc 7 and the third adsorption disc 8, and when the workpieces are machined, the workpieces are placed on the upper end face of the first adsorption disc 9, and the workpieces are adsorbed through negative pressure, so that preliminary fixing of the workpieces is achieved.

Through setting up second adsorption disk 7 and third adsorption disk 8 can adsorb the work piece of equidimension, when the work piece processing, the bottom surface of work piece and the laminating of first adsorption disk 9 up end to support the work piece, prevent the damage when processing of work piece as far as possible, in addition, through grip block 2 by the lateral wall centre gripping fixed work piece of work piece, can reduce when processing the work piece as far as shielding the area of work piece, so that processing operation.

In order to improve stability when adsorbing the work piece, all be provided with the sheet rubber at the up end of first adsorption disk 9, second adsorption disk 7 and third adsorption disk 8, can improve the leakproofness through the sheet rubber when adsorbing the work piece, and then improve stability when adsorbing the work piece.

The bottom surface fixed mounting of first adsorption disk 9 has intercommunication pipe 5, and the inner wall optional position of intercommunication pipe 5 is provided with solenoid valve 6, and the outer wall of second adsorption disk 7 and third adsorption disk 8 all is provided with intercommunication pipe 5 for negative pressure cavity intercommunication, the up end of workstation 1 is provided with the control switch that is used for controlling solenoid valve 6, when handling the work piece of equidimension not, controls different solenoid valve 6 and switches on.

One end of the communication conduit 5 is fixedly provided with a one-way valve 15, the one-way valve 15 is a common one-way valve body for controlling the gas flow direction, and when a workpiece is adsorbed, the inner cavities of the first adsorption disk 9, the second adsorption disk 7 and the third adsorption disk 8 can be kept in a negative pressure state by arranging the one-way valve 15.

Example two

Referring to fig. 1-5, further on the basis of the first embodiment is:

the adjusting mechanism comprises a connecting sleeve 3 and a sliding plate 12, wherein the connecting sleeve 3 is detachably arranged on the outer wall of the guide shaft 4, nuts are connected to the outer wall of the guide shaft 4 through threads, and the connecting sleeve 3 is clamped through the two nuts, so that detachable connection between the connecting sleeve 3 and the guide shaft 4 is realized.

The sliding plate 12 is slidably mounted in the inner cavity of the connecting sleeve 3, one end of the sliding plate 12 is fixedly connected with the outer wall of the clamping plate 2, and the connecting sleeve 3 provides a space for the sliding plate 12 to mount and slide.

The inner wall of connecting sleeve 3 is provided with the elastic component that is used for pushing up the sliding plate 12, and the one end of elastic component and the outer wall fixed connection of sliding plate 12, the other end of elastic component and the inner wall fixed connection of connecting sleeve 3, the elastic component is common spring, promotes sliding plate 12 in real time through the elasticity of elastic component and makes grip block 2 have the trend of laminating with the work piece lateral wall in real time, simultaneously through setting up the elastic component, can protect the work piece when the centre gripping work piece.

The inner wall of the workbench 1 is rotationally connected with a control panel 11, a waist-shaped groove is formed in the outer wall of the control panel 11, the outer wall of the guide shaft 4 is in sliding fit with the inner wall of the waist-shaped groove, and a rectangular block in sliding fit with the inner wall of the workbench 1 is fixedly arranged on the outer wall of the guide shaft 4 and used for preventing the guide shaft 4 from rotating.

The rotary control disc 11 can control the guide shaft 4 to slide through the sliding fit of the waist-shaped groove and the sliding groove, so that the clamping plate 2 is driven to slide, and the clamping of workpieces with different sizes is realized.

The inner wall of the workbench 1 is rotationally connected with a worm 14, the outer wall of the control panel 11 is fixedly connected with a worm wheel 10 matched with the worm 14, and the worm wheel 10 and the control panel 11 can be controlled to rotate by rotating the worm 14, so that the sliding adjustment of the clamping plate 2 is realized.

One end of the worm 14 is fixedly connected with a control handle 13, one end of the control handle 13 away from the worm 14 extends to the outer wall of the workbench 1, and the worm 14 can be driven to rotate by rotating the control handle 13.

In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims.

Claims

1. Frock clamp suitable for circular cap of semiconductor device, its characterized in that: the automatic clamping device comprises a workbench (1), a clamping plate (2), a guide shaft (4), an adjusting mechanism and a fixing mechanism, wherein the guide shaft (4) is slidably arranged on the upper end face of the workbench (1), the clamping plate (2) is elastically arranged on the outer wall of the guide shaft (4), and the sliding of the guide shaft (4) is controlled by the adjusting mechanism;

the fixing mechanism comprises a first adsorption disc (9), a second adsorption disc (7) and a third adsorption disc (8) which are communicated with the negative pressure cavity, wherein the second adsorption disc (7) is arranged between the first adsorption disc (9) and the third adsorption disc (8), and through holes for adsorbing workpieces are formed in the upper end faces of the first adsorption disc (9), the second adsorption disc (7) and the third adsorption disc (8).

2. A tooling fixture for circular caps of semiconductor devices as defined in claim 1, wherein: the bottom surface fixed mounting of first adsorption disc (9) has intercommunication pipe (5), the inner wall optional position of intercommunication pipe (5) is provided with solenoid valve (6), the one end fixed mounting of intercommunication pipe (5) has check valve (15).

3. A tooling fixture for circular caps of semiconductor devices as defined in claim 2, wherein: the adjusting mechanism comprises a connecting sleeve (3) and a sliding plate (12), wherein the connecting sleeve (3) is detachably arranged on the outer wall of the guide shaft (4), the sliding plate (12) is slidably arranged in an inner cavity of the connecting sleeve (3), and one end of the sliding plate (12) is fixedly connected with the outer wall of the clamping plate (2).

4. A tooling fixture for circular caps of semiconductor devices as recited in claim 3, wherein: the inner wall of the connecting sleeve (3) is provided with an elastic piece for jacking the sliding plate (12), one end of the elastic piece is fixedly connected with the outer wall of the sliding plate (12), and the other end of the elastic piece is fixedly connected with the inner wall of the connecting sleeve (3).

5. The tooling fixture for circular caps of semiconductor devices of claim 4, wherein: the inner wall of workstation (1) rotates and is connected with control panel (11), waist type groove has been seted up to the outer wall of control panel (11), the outer wall of guiding axle (4) with the inner wall slip laminating in waist type groove.

6. The tooling fixture for a circular cap of a semiconductor device of claim 5, wherein: the inner wall of workstation (1) rotates and is connected with worm (14), the outer wall fixedly connected with of control panel (11) with worm (14) complex worm wheel (10), the one end fixedly connected with control handle (13) of worm (14), control handle (13) keep away from the one end of worm (14) extends to the outer wall of workstation (1).