CN219891132U - X-RAY detection equipment for silicon carbide semiconductor device - Google Patents
X-RAY detection equipment for silicon carbide semiconductor device Download PDFInfo
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- CN219891132U CN219891132U CN202321306814.9U CN202321306814U CN219891132U CN 219891132 U CN219891132 U CN 219891132U CN 202321306814 U CN202321306814 U CN 202321306814U CN 219891132 U CN219891132 U CN 219891132U
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- silicon carbide
- carbide semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 32
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 32
- 238000001514 detection method Methods 0.000 title claims abstract description 29
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 230000000670 limiting effect Effects 0.000 claims abstract description 9
- 244000309464 bull Species 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 230000001360 synchronised effect Effects 0.000 abstract description 2
- 238000003466 welding Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010027146 Melanoderma Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model discloses X-RAY detection equipment for a silicon carbide semiconductor device, which comprises a box body, wherein through the cooperation of a driving block, a placing plate, a threaded rod, a positioning frame and a second driving motor, the silicon carbide semiconductor device placed on the placing plate is subjected to horizontal reciprocating motion, through the arrangement of a sliding rod, the function of limiting the driving block is realized, the stability of a device is improved, through the arrangement of a universal wheel, the effect of convenient movement of the device is realized, through the synchronous rotation of a certain angle of an X-RAY transmitter and an X-RAY receiver through the rotation rod, the positioning frame and the first driving motor, the multi-directional detection of the silicon carbide semiconductor device can be realized, the detection blind area is reduced, and through the cooperation of a sliding block, a return frame, a mounting block and a semicircular sliding rail, the limiting function of a rotating assembly is realized, so that the rotating assembly is more stable in the operation process, and the stability of the device is improved.
Description
Technical Field
The utility model relates to the technical field of X-RAY detection equipment, in particular to X-RAY detection equipment of a silicon carbide semiconductor device.
Background
With the rapid development of electronic technology, the miniaturization of packaging, the high density of assembly and the continuous emergence of various novel devices have higher and higher requirements on the quality of assembly and connection. Thus placing higher demands on the method and technique of inspection. To meet this requirement, new detection technologies are continuously emerging, and automatic x-ray detection (AXI) is a typical representative of this. It can detect invisible welding spots (such as BGA), and can perform qualitative and quantitative analysis on detection results so as to find faults early.
The existing X-RAY emitting mechanism and X-RAY receiving mechanism of the X-RAY detecting equipment can only realize Z-axis motion, and the problems of missing detection and false detection are easy to occur when an irregular silicon carbide semiconductor device is detected, so that the X-RAY detecting equipment of the silicon carbide semiconductor device is required to be provided.
Disclosure of Invention
The utility model aims to provide X-RAY detection equipment for a silicon carbide semiconductor device, and the X-RAY emitter and the X-RAY receiver can synchronously swing through the matched use of a bearing assembly, a driving assembly, a limiting assembly and a detection assembly, so that angle adjustment is realized, multi-azimuth detection is realized for the silicon carbide semiconductor device, detection dead zones can be reduced, and the problems in the background technology are solved.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides an X-RAY check out test set of carborundum semiconductor device, includes the box, the bottom of box is symmetrical fixed mounting has four sets of universal wheels, the fixed symmetrical fixed mounting that is in interior bottom of box has four sets of support columns, four sets of the top fixed mounting of support column has the locating frame, the spout has been seted up respectively on the both sides inner wall of locating frame, the inside of spout is provided with the carrier assembly who is used for placing carborundum semiconductor device, be provided with the drive assembly who is used for carrying out rotatory with the check out test set on the locating frame, the drive assembly includes the bull stick, the bull stick rotates to be installed on one side lateral wall of locating frame, the one end of bull stick runs through the box and is connected with first driving motor, fixed cover is equipped with the shape frame that returns on the outer wall of bull stick, be provided with the spacing subassembly that is used for fixing a position to the drive assembly on the shape frame that returns, one side of shape frame is provided with the check out assembly.
Preferably, the bearing assembly comprises two groups of driving blocks, the two groups of driving blocks are respectively and slidably connected in the two groups of sliding grooves, a placing plate is fixedly installed on the side wall of one opposite side of each driving block, one group of driving blocks is internally and spirally connected with a threaded rod, one end of the threaded rod penetrates through the positioning frame to be connected with a second driving motor, the other group of driving blocks are internally and slidably connected with sliding rods, and two ends of each sliding rod are respectively and fixedly installed on the inner walls of two sides of each sliding groove.
Preferably, the second driving motor is fixedly arranged on one side wall of the positioning frame, and one end of the output shaft of the second driving motor is fixedly connected with one end of the threaded rod.
Preferably, the limiting component comprises a sliding block, the sliding block is fixedly arranged at the inner top of the square frame, two groups of mounting blocks are symmetrically and fixedly arranged on the side wall of one side of the positioning frame, semicircular sliding rails are fixedly arranged on the upper surfaces of the two groups of mounting blocks, and the sliding block is in sliding connection with the inner parts of the semicircular sliding rails.
Preferably, the detection assembly comprises a first mounting plate fixedly mounted on one side wall of the square frame, an X-RAY emitter is fixedly mounted at one end of the first mounting plate, a second mounting plate is fixedly mounted above the square frame on the first mounting plate, and an X-RAY receiver is fixedly mounted at one end of the second mounting plate.
Preferably, the first driving motor is fixedly installed on one side wall of the box body, one end of the output shaft of the first driving motor is fixedly connected with one end of the rotating rod, and the rotating rod is rotationally connected with the side wall of the box body.
Preferably, the front face of the box body is hinged with a box door through a hinge, and an observation window is formed in the box door.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the utility model, through the cooperation of the driving block, the placing plate, the threaded rod, the positioning frame and the second driving motor, the silicon carbide semiconductor device placed on the placing plate is reciprocated in the horizontal direction, and through the arrangement of the sliding rod, the effect of limiting the driving block is achieved, so that the stability of the device is improved.
2. Through bull stick, locating frame and first driving motor for X-RAY transmitter and X-RAY receiver carry out the synchronous rotation of certain angle, can carry out diversified detection to carborundum semiconductor device, reduce the detection blind area, through setting up slider, returning shape frame, installation piece and semicircular slide rail's cooperation and use, play and carry out spacing effect to rotating assembly, make it more steady in the operation in-process, be favorable to hoisting device's stability.
3. Through setting up the universal wheel, play the effect that the device was convenient for remove, through setting up the support column, play the effect to the fixed stay of locating frame, through setting up the installation piece, played the effect to support the location to the shape frame that returns, place the board through setting up, can place its upper surface with the material, conveniently detect it, through setting up the observation window, make things convenient for the inside condition of staff real-time observation box.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the structure of the shaft side of the present utility model;
FIG. 3 is a schematic view of the structure of the inside of the case of the present utility model;
FIG. 4 is a schematic diagram of a detecting assembly according to the present utility model;
fig. 5 is a schematic structural view of the bearing assembly of the present utility model.
In the figure: 1. a case; 2. a universal wheel; 3. a support column; 4. a positioning frame; 5. a mounting block; 6. a rotating rod; 7. a first driving motor; 8. a square frame; 9. a chute; 10. a driving block; 11. placing a plate; 12. a threaded rod; 13. a second driving motor; 14. a slide bar; 15. a slide block; 16. a semicircular slide rail; 17. a first mounting plate; 18. an X-RAY emitter; 19. a second mounting plate; 20. an X-RAY receiver; 21. and an observation window.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, the present utility model provides a technical solution:
the X-RAY detection equipment for the silicon carbide semiconductor device comprises a box body 1, wherein four groups of universal wheels 2 are symmetrically and fixedly arranged at the bottom of the box body 1, four groups of support columns 3 are fixedly and symmetrically and fixedly arranged at the inner bottom of the box body 1, a positioning frame 4 is fixedly arranged at the top of each of the four groups of support columns 3, sliding grooves 9 are respectively formed in the inner walls of two sides of the positioning frame 4, a silicon carbide semiconductor device bearing assembly is arranged in the sliding grooves 9, and a driving assembly for rotating the detection equipment is arranged on the positioning frame 4;
the driving assembly comprises a rotating rod 6, the rotating rod 6 is rotatably arranged on one side wall of the positioning frame 4, one end of the rotating rod 6 penetrates through the box body 1 and is connected with a first driving motor 7, the first driving motor is set to be a stepping motor, the single rotation angle is not more than 45 degrees, a square frame 8 is fixedly sleeved on the outer wall of the rotating rod 6, a limiting assembly used for positioning the driving assembly is arranged on the square frame 8, one side of the square frame 8 is provided with a detection assembly, and the X-RAY emitter 18 and the X-RAY receiver 20 synchronously rotate at a certain angle through the rotating rod 6, the positioning frame 4 and the first driving motor 7, so that multidirectional detection can be carried out on a silicon carbide semiconductor device, and the detection blind area is reduced;
the bearing assembly comprises two groups of driving blocks 10, the two groups of driving blocks 10 are respectively and slidably connected to the interiors of the two groups of sliding grooves 9, a placing plate 11 is fixedly arranged on the side wall of one side opposite to the two groups of driving blocks 10, a threaded rod 12 is connected to the interior of one group of driving blocks 10 in a threaded manner, one end of the threaded rod 12 penetrates through the positioning frame 4 to be connected with a second driving motor 13, the interiors of the other groups of driving blocks 10 are respectively and slidably connected with a sliding rod 14, and two ends of the sliding rod 14 are respectively and fixedly arranged on the inner walls of two sides of the sliding groove 9;
the second driving motor 13 is fixedly arranged on one side wall of the positioning frame 4, one end of an output shaft of the second driving motor 13 is fixedly connected with one end of the threaded rod 12, the second driving motor 13 is a forward and reverse rotation stepping motor, and the silicon carbide semiconductor device arranged on the placing plate 11 is subjected to horizontal reciprocating motion through the matching of the driving block 10, the placing plate 11, the threaded rod 12, the positioning frame 4 and the second driving motor 13, so that the limiting effect on the driving block 10 is achieved through the arrangement of the sliding rod 14, and the stability of the device is improved;
the limiting assembly comprises a sliding block 15, the sliding block 15 is fixedly arranged at the inner top of the square frame 8, two groups of mounting blocks 5 are symmetrically and fixedly arranged on the side wall of one side of the positioning frame 4, semicircular sliding rails 16 are fixedly arranged on the upper surfaces of the two groups of mounting blocks 5, and the sliding block 15 is in sliding connection with the inner parts of the semicircular sliding rails 16;
the detection assembly comprises a first mounting plate 17, wherein the first mounting plate 17 is fixedly arranged on one side wall of a square frame 8, an X-RAY emitter 18 is fixedly arranged at one end of the first mounting plate 17, X-RAYs emitted by the X-RAY emitter pass through a silicon carbide semiconductor device and are received by an X-RAY receiver 20 arranged above the X-RAY emitter, and as a welding spot contains a large amount of lead for absorbing the X-RAYs, compared with X-RAYs passing through glass fibers, copper, silicon and other materials, the X-RAYs irradiated on the welding spot are absorbed in a large amount, and a good image is generated in a black spot, so that analysis of the welding spot becomes quite visual, a second mounting plate 19 is fixedly arranged above the square frame 8 positioned above the first mounting plate 17, and the X-RAY receiver 20 is fixedly arranged at one end of the second mounting plate 19;
the first driving motor 7 is fixedly arranged on one side wall of the box body 1, one end of an output shaft of the first driving motor 7 is fixedly connected with one end of the rotating rod 6, and the rotating rod 6 is rotationally connected with the side wall of the box body 1;
the front of the box body 1 is hinged with a box door through a hinge, and an observation window 21 is formed in the box door, so that a worker can observe the internal condition of the device in real time conveniently.
Working principle: when the utility model is used, the box door is opened, the silicon carbide semiconductor device is arranged on the upper surface of the placing plate 11, the threaded rod 12 is driven to rotate by the output shaft of the second driving motor 13, so that the driving block 10 drives the placing plate 11 to move horizontally, the silicon carbide semiconductor device is positioned between the X-RAY receiver 20 and the X-RAY emitter 18, the X-RAY receiver 20 and the X-RAY emitter are matched for use, the X-RAY perspective is utilized to convert the visible light image, the internal structure and the internal state of the silicon carbide semiconductor device are displayed in an image mode, the quality of the silicon carbide semiconductor device is judged, the output shaft of the first driving motor 7 drives the rotating rod 6 to rotate, the square frame 8 drives the X-RAY receiver 20 and the X-RAY emitter to swing synchronously, the angle adjustment in a certain range is realized, the silicon carbide semiconductor device can be detected in multiple directions, the detection dead angle is avoided, and the detection dead angle is reduced.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The X-RAY detection equipment of the silicon carbide semiconductor device comprises a box body (1), and is characterized in that: the bottom of box (1) is symmetrical fixed mounting and has four universal wheels (2), the interior bottom of box (1) is fixed to be symmetrical fixed mounting and has four groups support column (3), four groups the top fixed mounting of support column (3) has locating frame (4), spout (9) have been seted up respectively on the both sides inner wall of locating frame (4), the inside of spout (9) is provided with the carrier assembly that is used for placing carborundum semiconductor device, be provided with on locating frame (4) and be used for carrying out rotatory drive assembly with check out equipment, drive assembly includes bull stick (6), bull stick (6) rotate install on one side lateral wall of locating frame (4), the one end of bull stick (6) runs through box (1) and is connected with first driving motor (7), fixed cover is equipped with on the outer wall of bull stick (6) and returns shape frame (8), be provided with the spacing subassembly that is used for fixing a position drive assembly on the shape frame (8), one side of returning shape frame (8) is provided with the check out the check assembly.
2. An X-RAY inspection apparatus for silicon carbide semiconductor devices as claimed in claim 1, wherein: the bearing assembly comprises two groups of driving blocks (10), the two groups of driving blocks (10) are respectively connected with the interiors of the two groups of sliding grooves (9) in a sliding mode, the two groups of driving blocks (10) are fixedly arranged on the side walls of one side opposite to the sliding grooves, a placing plate (11) is fixedly arranged on one side of each driving block, one group of driving blocks (10) is internally connected with a threaded rod (12) in a threaded mode, one end of each threaded rod (12) penetrates through the positioning frame (4) to be connected with a second driving motor (13), the other group of driving blocks (10) are respectively connected with a sliding rod (14) in a sliding mode, and two ends of each sliding rod (14) are respectively fixedly arranged on the inner walls of two sides of each sliding groove (9).
3. An X-RAY inspection apparatus for silicon carbide semiconductor devices as claimed in claim 2, wherein: the second driving motor (13) is fixedly arranged on one side wall of the positioning frame (4), and one end of an output shaft of the second driving motor (13) is fixedly connected with one end of the threaded rod (12).
4. An X-RAY inspection apparatus for silicon carbide semiconductor devices as claimed in claim 1, wherein: the limiting assembly comprises a sliding block (15), the sliding block (15) is fixedly arranged at the inner top of the square frame (8), two groups of mounting blocks (5) are symmetrically and fixedly arranged on one side wall of the positioning frame (4), semicircular sliding rails (16) are fixedly arranged on the upper surfaces of the two groups of mounting blocks (5), and the sliding block (15) is slidably connected in the semicircular sliding rails (16).
5. An X-RAY inspection apparatus for silicon carbide semiconductor devices as claimed in claim 1, wherein: the detection assembly comprises a first mounting plate (17), the first mounting plate (17) is fixedly mounted on one side wall of a square frame (8), an X-RAY emitter (18) is fixedly mounted at one end of the first mounting plate (17), a second mounting plate (19) is fixedly mounted above the square frame (8) and located above the first mounting plate (17), and an X-RAY receiver (20) is fixedly mounted at one end of the second mounting plate (19).
6. An X-RAY inspection apparatus for silicon carbide semiconductor devices as claimed in claim 1, wherein: the first driving motor (7) is fixedly arranged on one side wall of the box body (1), one end of an output shaft of the first driving motor (7) is fixedly connected with one end of the rotating rod (6), and the rotating rod (6) is rotationally connected with the side wall of the box body (1).
7. An X-RAY inspection apparatus for silicon carbide semiconductor devices as claimed in claim 1, wherein: the front of the box body (1) is hinged with a box door through a hinge, and an observation window (21) is formed in the box door.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321306814.9U CN219891132U (en) | 2023-05-26 | 2023-05-26 | X-RAY detection equipment for silicon carbide semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321306814.9U CN219891132U (en) | 2023-05-26 | 2023-05-26 | X-RAY detection equipment for silicon carbide semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219891132U true CN219891132U (en) | 2023-10-24 |
Family
ID=88408747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321306814.9U Active CN219891132U (en) | 2023-05-26 | 2023-05-26 | X-RAY detection equipment for silicon carbide semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219891132U (en) |
-
2023
- 2023-05-26 CN CN202321306814.9U patent/CN219891132U/en active Active
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