CN219868463U - FFU system with illumination function - Google Patents
FFU system with illumination function Download PDFInfo
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- CN219868463U CN219868463U CN202223138388.0U CN202223138388U CN219868463U CN 219868463 U CN219868463 U CN 219868463U CN 202223138388 U CN202223138388 U CN 202223138388U CN 219868463 U CN219868463 U CN 219868463U
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- fan
- ffu
- illumination
- illuminated
- filter
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- 238000005286 illumination Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 238000005260 corrosion Methods 0.000 claims description 7
- 230000007797 corrosion Effects 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 abstract description 9
- 238000000746 purification Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 description 8
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
The utility model discloses an FFU system with illumination, which comprises a lower shell, a filter assembly, an illumination system, an upper shell, a fan assembly and a control device, wherein the filter assembly and the illumination system are arranged in the lower shell, the fan assembly and the control device are arranged in the upper shell, the upper shell is buckled and fixed on the filter assembly so that the fan assembly is positioned above the filter assembly, the illumination system is positioned on the outer side of the upper shell, a lamp source power interface is arranged on the control device, and a power line of the illumination system is connected to the lamp source power interface. The utility model can be arranged in the process cavity of the small-specification single-chip cleaning equipment with compact space, can realize gas purification in the process cavity and illumination function, utilizes the internal space of the single-chip cleaning equipment to the maximum efficiency, and avoids discarding the illumination system due to space problem.
Description
Technical Field
The utility model relates to an FFU system, in particular to an FFU system with illumination.
Background
The interior of a semiconductor wet process apparatus is generally required to perform wet chemical reactions, and the gas generated by the wet chemical reactions causes the gas environment of the process area inside the apparatus to become impure, so that in order to maintain a pure and stable gas environment inside the apparatus, an FFU system is generally required to be installed above the process area, and a good circulating gas field flow is established inside the apparatus by using the FFU system.
The process area below the FFU system generally needs a lighting system to provide lighting for the interior of the equipment, the existing lighting system and the FFU system are respectively and independently designed, and the lighting system is generally installed at the side edge of the FFU system, however, although the structure can effectively realize the functions of the FFU and lighting, for the equipment with compact space, particularly the process cavity of the small-sized single-chip cleaning equipment, after the FFU system is designed, no extra space is usually required for installing the lighting system.
Disclosure of Invention
In view of the above, the present utility model provides an FFU system with illumination, which can be installed in a process chamber of a small-sized single-chip cleaning apparatus with compact space, and can realize gas purification in the process chamber and illumination function, and the interior space of the single-chip cleaning apparatus is utilized with maximum efficiency, so as to avoid discarding the illumination system due to space problems.
The utility model provides a FFU system of area illumination, includes casing, filter subassembly and lighting system, the last casing of setting in the casing down and set up fan subassembly and controlling means in last casing, go up the casing lock and fix on filter subassembly so that fan subassembly is located the top of filter subassembly, lighting system is located the outside of last casing, the last lamp source power interface that is equipped with of controlling means, lighting system's power cord is connected to lamp source power interface.
Preferably, the lower housing is a rectangular square frame with upper and lower openings, the upper edge of the rectangular square frame is outwards bent to form a flange edge for installing the whole FFU system above a process area, the lower edge of the rectangular square frame is inwards extended to form a supporting edge for supporting the filter assembly and the lighting system, the filter assembly is positioned on one side of the lighting system, and the upper parts of the filter assembly and the lighting system extend out of the upper edge of the lower housing.
Preferably, the filter assembly includes a filter, a gasket disposed between the filter and the lower housing.
Preferably, the lower shell is formed by bending and processing through a sheet metal process, and the outer surface of the lower shell is sprayed with a corrosion-resistant coating.
Preferably, the lighting system includes a lighting lamp, a light-transmitting plate disposed below the lighting lamp, and a heat-dissipating plate disposed above the lighting lamp.
Preferably, the heat dissipation plate is formed by bending and processing through a sheet metal process, and the surface of the heat dissipation plate is sprayed with a corrosion-resistant coating.
Preferably, the top of the upper shell is provided with a tuyere, the lower edge of the upper shell is outwards bent to form a fixing folded edge for fixing the filter assembly, and the upper part of the fan assembly extends out of the tuyere.
Preferably, a handle is further installed at the top of the upper housing.
Preferably, the fan assembly comprises a fan mounting seat fixed in the upper shell, a fan fixed on the fan mounting seat, a fan upper cover fixed at a wind gap of the upper shell, and a fan protection net fixed on the fan upper cover.
Preferably, the fan mounting seat and the fan upper cover are formed by bending and processing through a sheet metal process, and the surfaces of the fan mounting seat and the fan upper cover are sprayed with corrosion-resistant coatings.
The beneficial effects of the utility model are as follows:
1. according to the utility model, the illumination system and the FFU system are integrated, and the two systems are arranged in one shell, so that the space required by the installation of the two systems is reduced, the FFU system is suitable for small-specification single-chip cleaning equipment with narrow process cavity space, the utilization rate of the internal space of the small-specification single-chip cleaning equipment is improved, the illumination system is prevented from being abandoned due to space problems, the installation structure of the FFU system and the illumination system is simplified, the size of the framework can be set when the upper shell and the lower shell are designed, the design time of a designer is shortened, and the design of the illumination system is not required to be considered.
2. The utility model uses the control device to control the switch of the lighting system, directly connects the power line of the lighting system to the power interface of the lamp source on the control device, integrates the control of the FFU system and the lighting system, and simplifies the wiring and routing of the lighting lamp line of the lighting system.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic perspective view of an illuminated FFU system.
Fig. 2 is a bottom view of an illuminated FFU system.
Fig. 3 is a schematic view of the installation of the lighting system in the lower housing.
Fig. 4 is a schematic view of the filter assembly and lighting system installed in the lower housing.
FIG. 5 is a schematic view of the blower mount and control device installed in the upper housing.
The meaning of the reference numerals in the figures is:
1 is a lower shell, 11 is a flange edge, 12 is a supporting edge,
2 is an upper shell, 21 is an air port, 22 is a fixed folded edge, 23 is a handle,
3 is a filter assembly, 31 is a filter,
4 is an illumination system, 41 is an illumination lamp, 42 is a light-transmitting plate, 43 is a heat-dissipating plate,
5 is a fan assembly, 51 is a fan mounting seat, 52 is a fan, 53 is a fan upper cover, 54 is a fan protection net,
and 6 is a control device, and 61 is a power interface of a lamp source.
Detailed Description
For a better understanding of the technical solution of the present utility model, the following detailed description of the embodiments of the present utility model refers to the accompanying drawings.
It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model will now be described in further detail with reference to specific examples thereof in connection with the accompanying drawings.
In the description of the present utility model, the term "plurality" means two or more, unless specified or indicated otherwise; the terms "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present specification, it should be understood that the terms "upper", "lower", "left", "right" and the like in the embodiments of the present utility model are described in terms of angles shown in the drawings, and should not be construed as limiting the embodiments of the present utility model. In the context of this document, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on the other element or be indirectly on the other element through intervening elements.
The utility model provides an FFU system with illumination, which comprises a lower shell 1, an upper shell 2, a filter assembly 3 and an illumination system 4 which are arranged in the lower shell 1, and a fan assembly 5 and a control device 6 which are arranged in the upper shell 2.
The lower housing 1 is a rectangular square frame with upper and lower openings, the upper edge of the rectangular square frame is outwards bent to form a flange edge 11 for installing the whole FFU system above a process area, the lower edge of the rectangular square frame is inwards extended to form a supporting edge 12 for supporting the filter assembly 3 and the lighting system 4, the filter assembly 3 is positioned on one side of the lighting system 4, and the upper parts of the filter assembly 3 and the lighting system 4 extend out of the upper edge of the lower housing 1. In this embodiment, the filter assembly 3 is arranged on the left side of the illumination system 4, the filter assembly 3 being higher than the illumination system 4.
The top of the upper shell 2 is provided with an air port 21, and the lower edge of the upper shell 2 is outwards bent to form a fixing folded edge 22 for fixing the filter assembly 3. The blower assembly 5 and the control device 6 are installed in the blower assembly 5, and an upper portion of the blower assembly 5 protrudes from a tuyere 21 at the top of the upper housing 2. In this embodiment, the fan assembly 5 is disposed on the left side of the control device 6.
After the fan assembly 5 and the control device 6 are installed in the upper housing 2, the upper housing 2 is fastened to the filter assembly 3, and the fixing flange 22 of the upper housing 2 is fixed to the filter housing of the filter assembly 3 by fasteners such as screws or bolts.
When the upper shell 2 is fastened and fixed on the filter assembly 3, the fan assembly 5 is positioned above the filter assembly 3, and the lighting system 4 is positioned on the outer side of the upper shell 2.
The filter assembly 3 includes a filter 31, and a gasket (not shown) provided between the filter 31 and the lower case 1.
The illumination system 4 includes an illumination lamp 41, a light-transmitting plate 42 provided below the illumination lamp 41, and a heat radiation plate 43 provided above the illumination lamp 41.
The fan assembly 5 includes a fan mount 51 fixed in the upper case 2, a fan 52 fixed on the fan mount, a fan upper cover 53 fixed at the tuyere 21 of the upper case 2, and a fan protection net 54 fixed on the fan upper cover 53.
The control device 6 is provided with a lamp power interface 61, and a power line of the lighting system 4 is connected to the lamp power interface 61.
In this embodiment, the lower housing 1, the heat dissipation plate 43, the fan mounting seat 51 and the fan upper cover 53 are all formed by bending and processing metal plates with a thickness of 2mm through a sheet metal process, and corrosion-resistant coatings are sprayed on the outer surfaces of the lower housing 1, the heat dissipation plate 53, the fan mounting seat 51 and the fan upper cover 53.
Preferably, in order to facilitate the installation and removal of the upper housing 2, a handle 23 is also installed at the top of the upper housing 2.
In installing the illuminated FFU system of the present utility model, first, the filter assembly 3 and the illumination system 4 are assembled; then, the filter assembly 3 and the lighting system 4 are installed in the lower shell 1, the control device 6 and the fan installation seat 51 are fixed in the upper shell 2, the fan 52 is installed on the fan installation seat 51, after the fan 52 is installed, the fan upper cover 53 is installed at the air inlet 21 of the upper shell 2, and the fan protection net 54 is installed on the fan upper cover 53; the upper case 2 is then fastened to the filter assembly 3, and the fixing flange 22 of the upper case 2 is fixed to the filter 31 housing of the filter assembly 3 by means of a fastener such as a screw or a bolt.
According to the utility model, the illumination system and the FFU system are integrated, and the two systems are arranged in one shell, so that the space required by the installation of the two systems is reduced, the FFU system is suitable for small-specification single-chip cleaning equipment with narrow process cavity space, the utilization rate of the internal space of the small-specification single-chip cleaning equipment is improved, the illumination system is prevented from being abandoned due to space problems, the installation structure of the FFU system and the illumination system is simplified, the size of the framework can be set when the upper shell and the lower shell are designed, the design time of a designer is shortened, and the design of the illumination system is not required to be considered.
Meanwhile, the utility model utilizes the control device to control the switch of the lighting system, and the power line of the lighting system is directly connected to the power interface of the lamp source on the control device, so that the FFU system and the lighting system are controlled into a whole, and the wiring and routing of the lighting lamp line of the lighting system are simplified.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather to enable any modification, equivalent replacement, improvement or the like to be made within the spirit and principles of the utility model.
Claims (10)
1. The utility model provides a FFU system of area illumination, its characterized in that includes lower casing, filter subassembly and lighting system, the last casing of setting in lower casing and set up fan subassembly and controlling means in last casing, go up the casing lock and fix on filter subassembly so that fan subassembly is located the top of filter subassembly, lighting system is located the outside of last casing, the last lamp source power interface that is equipped with of controlling means, lighting system's power cord is connected to lamp source power interface.
2. The illuminated FFU system of claim 1 wherein the lower housing is a rectangular box with upper and lower openings, the upper edges of which are outwardly bent to form flange edges for mounting the entire FFU system above the process field, the lower edges of which extend inwardly to form support edges for supporting the filter assembly and the illumination system, the filter assembly being located on one side of the illumination system, and the upper portions of the filter assembly and the illumination system both extending beyond the upper edges of the lower housing.
3. The illuminated FFU system of claim 2 wherein the filter assembly comprises a filter, a gasket disposed between the filter and the lower housing.
4. The illuminated FFU system according to claim 1 or 2, wherein the lower housing is formed by bending a sheet metal process, and the outer surface of the lower housing is coated with a corrosion-resistant coating.
5. The illuminated FFU system according to claim 1 or 2, wherein the illumination system comprises an illumination lamp, a light-transmitting plate disposed below the illumination lamp, and a heat-dissipating plate disposed above the illumination lamp.
6. The illuminated FFU system of claim 5, wherein the heat spreader is formed by bending a sheet metal process, and wherein a corrosion resistant coating is applied to a surface of the heat spreader.
7. The illuminated FFU system of claim 1 wherein the top of the upper housing is provided with a tuyere, the lower edge of the upper housing is outwardly bent to form a fixing flange for fixing with the filter assembly, and the upper portion of the fan assembly is protruded from the tuyere.
8. The illuminated FFU system of claim 7 wherein the top of the upper housing is further fitted with a pull handle.
9. The illuminated FFU system of claim 7 wherein the fan assembly comprises a fan mount secured within the upper housing, a fan secured to the fan mount, a fan upper cover secured at a tuyere of the upper housing, and a fan guard secured to the fan upper cover.
10. The illuminated FFU system of claim 9 wherein the fan mount and the fan upper cover are both formed by sheet metal bending, and the surfaces of the fan mount and the fan upper cover are both coated with a corrosion resistant coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223138388.0U CN219868463U (en) | 2022-11-25 | 2022-11-25 | FFU system with illumination function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223138388.0U CN219868463U (en) | 2022-11-25 | 2022-11-25 | FFU system with illumination function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219868463U true CN219868463U (en) | 2023-10-20 |
Family
ID=88337017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223138388.0U Active CN219868463U (en) | 2022-11-25 | 2022-11-25 | FFU system with illumination function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219868463U (en) |
-
2022
- 2022-11-25 CN CN202223138388.0U patent/CN219868463U/en active Active
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