CN219866891U - Quick-discharge valve based on semiconductor cleaning - Google Patents
Quick-discharge valve based on semiconductor cleaning Download PDFInfo
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- CN219866891U CN219866891U CN202321026434.XU CN202321026434U CN219866891U CN 219866891 U CN219866891 U CN 219866891U CN 202321026434 U CN202321026434 U CN 202321026434U CN 219866891 U CN219866891 U CN 219866891U
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- water
- cleaning
- groove
- connecting piece
- fixedly connected
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- 238000004140 cleaning Methods 0.000 title claims abstract description 48
- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 71
- 238000007789 sealing Methods 0.000 claims abstract description 44
- 238000001914 filtration Methods 0.000 claims abstract description 38
- 230000007246 mechanism Effects 0.000 claims abstract description 8
- 230000003139 buffering effect Effects 0.000 abstract description 7
- 239000012535 impurity Substances 0.000 abstract description 7
- 230000000694 effects Effects 0.000 description 9
- 238000007599 discharging Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003657 drainage water Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Details Of Valves (AREA)
Abstract
The utility model relates to the technical field of valve equipment and discloses a quick-drain valve based on semiconductor cleaning, which comprises a cleaning processing table, wherein a cleaning pool is arranged at the top of the cleaning processing table, a drain pipe is fixedly connected to the bottom of the cleaning pool, a drain assembly is arranged at the lower end of the drain pipe, a water collecting barrel is arranged in the cleaning processing table, the drain assembly comprises a sealing barrel and a drain valve, the sealing barrel and the drain valve are detachably arranged, a filtering mechanism is arranged at the lower end of the drain valve, the filtering mechanism comprises a water filtering seat, a filtering piece, a connecting piece and a buffer plate, and a filter element is arranged in the filtering piece. The water diversion holes formed in the buffer plate are used for reducing and buffering high-pressure drainage, so that the drained water is sprayed downwards to the filter piece in an umbrella shape, buffer protection is provided for the filter element in the filter piece, and in the later period, if impurities remain on the surface of the buffer plate or the filter element of the filter piece is replaced, the fixed bottom plate is only required to be detached from the water filtering seat.
Description
Technical Field
The utility model relates to the field of valve equipment, in particular to a quick-discharge valve based on semiconductor cleaning.
Background
In the production and processing process of the semiconductor, the wafer needs to be cleaned firstly so as to remove various impurity components on the surface of the wafer, and the cleaning operation needs to be respectively carried out through various cleaning liquids and processes due to the fact that the impurity components are more.
In order to recycle the cleaning water, the used water is filtered in the process of discharging the cleaning water, impurities are filtered and reused, so that the water resource waste is reduced, but when the valve of the cleaning pool is used for discharging water, the filter element of the filter assembly in the valve cannot bear the impact of the water pressure due to overlarge water pressure, so that the filter element is damaged, the filter assembly is caused to incompletely filter the impurities, and the cleaning liquid after being filtered is influenced to be recycled.
Therefore, in order to solve the above problems, a quick-drain valve based on semiconductor cleaning is provided.
Disclosure of Invention
The utility model aims to provide a quick-release valve based on semiconductor cleaning so as to solve the problems in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a quick drain valve based on semiconductor cleaning, comprising:
the cleaning and processing device comprises a cleaning and processing table, wherein a cleaning pool is arranged at the top of the cleaning and processing table, a drain pipe is fixedly connected to the bottom of the cleaning pool, and a drain assembly is arranged at the lower end of the drain pipe;
a water collecting barrel is arranged in the cleaning processing table;
the drainage assembly comprises a sealing cylinder and a drainage valve, the sealing cylinder and the drainage valve are detachably arranged, and a filtering mechanism is arranged at the lower end of the drainage valve;
the filter mechanism comprises a water filtering seat, a filter element, a connecting piece and a buffer plate, wherein a filter element is arranged inside the filter element, a movable groove and a limiting groove are formed in the filter element, the movable groove and the limiting groove are communicated with each other, the lower end of the connecting piece is slidably connected with the movable groove, a groove is formed in the upper end of the connecting piece, the buffer plate is provided with a rectangular groove, the groove is connected with the buffer plate in a clamping mode, and a water diversion hole is formed in the buffer plate.
Preferably, the movable groove is internally provided with a limiting rod, the limiting rod is movably inserted with the lower end of the connecting piece, a spring is sleeved outside the limiting rod, one end of the spring is fixedly connected with the inner wall of the filtering piece, and the other end of the spring is fixedly connected with the connecting piece.
Preferably, a sealing plate is fixedly connected to one side, close to the limiting groove, of the connecting piece, the sealing plate is movably inserted into the limiting groove, and a chamfer is formed in the top of the connecting piece.
Preferably, the fixed bottom plate is detachably connected to the bottom of the water filtering seat, the lateral side of the sealing cylinder is fixedly connected with the lateral pipe, the lateral pipe is fixedly connected with the water delivery seat, two lateral pipes and the water delivery seat are both arranged, and the lateral pipes and the water delivery seat are symmetrically distributed at the center of the drain valve.
Preferably, the sealing cylinder is sleeved with the drain pipe, the drain valve is arranged at the lower end of the sealing cylinder, the sealing ring is fixedly connected to the bottom of the sealing cylinder, the annular groove is formed in the top of the drain valve, and the sealing ring is spliced with the annular groove.
Preferably, the two limiting rods and the two springs are symmetrically distributed at the center of the fixing bottom plate, and the bottom of the water delivery seat is fixedly connected with the top of the water filtration seat.
The utility model has the technical effects and advantages that:
according to the utility model, the sealing cylinder, the water delivery seat, the water filtering seat, the water discharging valve and the fixing bottom plate are arranged at the bottom of the cleaning pool, compared with the traditional one-way water discharging valve, the water delivery seat is fixedly and respectively fixed at two sides of the sealing cylinder, the water discharging seat is separated from the water discharging seat to be discharged, the water diversion holes formed in the buffering plate are used for reducing and buffering high-pressure water discharging, so that discharged water is scattered downwards to the filtering part in an umbrella shape, buffer protection is provided for the filter element in the filtering part, the buffering plate is clamped and fixed by the connecting part at the filtering part, and in the later stage, if impurities remain on the surface of the buffering plate or the filter element of the filtering part is replaced, the fixing bottom plate is only required to be detached from the water filtering seat.
Drawings
Fig. 1 is a schematic perspective view of the whole structure of the present utility model.
Fig. 2 is a schematic diagram of a water filtering seat according to the present utility model.
Fig. 3 is a schematic diagram of a front cross-sectional structure of the water filter base of the present utility model.
FIG. 4 is a schematic view of a buffer plate according to the present utility model.
Fig. 5 is a schematic view of the structure of the connector of the present utility model.
Fig. 6 is an enlarged schematic view of the structure of fig. 3 a according to the present utility model.
In the figure: 1. cleaning a processing table; 2. a cleaning pool; 3. a drain pipe; 4. a sealing cylinder; 5. a water delivery seat; 6. a water filtering seat; 7. a water collecting barrel; 8. a drain valve; 9. a fixed bottom plate; 10. a seal ring; 11. a buffer plate; 12. a filter; 13. a connecting piece; 14. a groove; 15. a sealing plate; 16. a limit groove; 17. a limit rod; 18. and (3) a spring.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The present utility model provides a quick drain valve based on semiconductor cleaning as shown in fig. 1-6, comprising:
the cleaning and processing device comprises a cleaning and processing table 1, wherein a cleaning pool 2 is arranged at the top of the cleaning and processing table 1, a drain pipe 3 is fixedly connected to the bottom of the cleaning pool 2, and a drain assembly is arranged at the lower end of the drain pipe 3;
a water collecting barrel 7 is arranged in the cleaning processing table 1;
the drainage assembly comprises a sealing cylinder 4 and a drainage valve 8, the sealing cylinder 4 and the drainage valve 8 are detachably arranged, and a filtering mechanism is arranged at the lower end of the drainage valve 8;
the filtering mechanism comprises a water filtering seat 6, a filtering piece 12, a connecting piece 13 and a buffer plate 11, wherein a filter element is arranged in the filtering piece 12, the filtering piece 12 is provided with a movable groove and a limiting groove 16, the movable groove and the limiting groove 16 are communicated with each other, the lower end of the connecting piece 13 is in sliding connection with the movable groove, the upper end of the connecting piece 13 is provided with a groove 14, the buffer plate 11 is provided with a rectangular groove, the groove 14 is clamped with the buffer plate 11, the buffer plate 11 is provided with a water diversion hole, the movable groove is internally provided with a limiting rod 17, the limiting rod 17 is movably inserted with the lower end of the connecting piece 13, the outer part of the limiting rod 17 is sleeved with a spring 18, one end of the spring 18 is fixedly connected with the inner wall of the filtering piece 12, the other end of the spring 18 is fixedly connected with the connecting piece 13, one side, close to the limiting groove 16, of the connecting piece 13 is fixedly connected with a sealing plate 15, the sealing plate 15 is movably inserted with the limiting groove 16, the top of the connecting piece 13 is provided with a chamfer, the limiting rod 17 and the spring 18 are respectively provided with two limiting rods 17 and 18, the centers of the two limiting rods 17 and the spring 18 are symmetrically distributed at the center of the fixed bottom of the water filtering seat 5, and the top of the water filtering seat 6 is fixedly connected with the top of the water filtering seat 6;
the movable groove that filter spare 12 offered plays spacing removal effect to connecting piece 13, the length of movable groove equals the movable distance of connecting piece 13, one side of connecting piece 13 is through fixed with spring 18, make connecting piece 13 by spring 18 application thrust all the time, form the joint fixedly between recess 14 that connecting piece 13 offered and filter piece 12, simultaneously the fixed closing plate 15 of connecting piece 13 another side plays sealed effect to the movable groove, prevent that the drainage from entering into the movable inslot, simultaneously closing plate 15 and spacing groove 16 activity alternate and play spacing removal effect to connecting piece 13 equally, rectangular groove that the buffer plate 11 offered and the top looks adaptation of connecting piece 13, the chamfer that connecting piece 13 offered is convenient to alternate with the rectangular groove that the buffer plate 11 offered, the water diversion hole that the buffer plate 11 offered plays the cushioning effect to high-pressure drainage, make high-pressure drainage drain to filter piece 12 top through the water diversion hole, the gag lever 17 is through with connecting piece 13 activity, the gag lever 17 plays the effect that prevents to take place deformation to spring 18, simultaneously play spacing protection to connecting piece 13.
The bottom of the water filtering seat 6 is detachably connected with a fixed bottom plate 9, the side edge of the sealing cylinder 4 is fixedly connected with a branch pipe, the branch pipe is fixedly connected with a water delivery seat 5, two branch pipes and the water delivery seat 5 are symmetrically distributed at the center of the water discharge valve 8, the sealing cylinder 4 is sleeved with the water discharge pipe 3, the lower end of the sealing cylinder 4 is provided with the water discharge valve 8, the bottom of the sealing cylinder 4 is fixedly connected with a sealing ring 10, the top of the water discharge valve 8 is provided with an annular groove, and the sealing ring 10 is spliced with the annular groove;
the sealing ring 10 fixed at the bottom of the sealing cylinder 4 is provided with a rubber sealing ring, the annular groove formed in the drain valve 8 is installed with the sealing ring 10 and the rubber sealing ring, the sealing effect on the drain valve 8 is achieved, and the two groups of water delivery seats 5 play a role in first-layer branch drainage buffering on high-pressure water discharged from the drain pipe 3.
The working principle of the utility model is as follows:
the bottom of the cleaning tank 2 is provided with a sealing cylinder 4, a water delivery seat 5, a water filtering seat 6, a water drainage valve 8 and a fixed bottom plate 9, two sides of the sealing cylinder 4 are respectively fixed with the water delivery seat 5, drainage water is discharged from the water filtering seat 6, a water diversion hole formed in the buffer plate 11 is used for reducing and buffering high-pressure drainage water, so that discharged water is scattered downwards to the position of the filter element 12 in an umbrella shape, buffer protection is provided for a filter element in the filter element 12, the buffer plate 11 is clamped and fixed by a connecting piece 13 at the position of the filter element 12, and at the later stage, if impurities remain on the surface of the buffer plate 11 or the filter element of the filter element 12 is replaced, the fixed bottom plate 9 is separated from the water filtering seat 6, at the moment, the filter element 12 and the buffer plate 11 can be taken out simultaneously, the buffer plate 11 is separated from the filter element 12 alone, and the two groups of connecting pieces 13 are manually pushed to apply force to the position of the center of the filter element 12, so that a groove 14 formed by the connecting piece 13 is separated from the clamping position of the buffer plate 11, and the buffer plate 11 is lifted upwards.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.
Claims (6)
1. A quick drain valve based on semiconductor cleaning, comprising:
the cleaning and processing device comprises a cleaning and processing table (1), wherein a cleaning pool (2) is arranged at the top of the cleaning and processing table (1), a drain pipe (3) is fixedly connected to the bottom of the cleaning pool (2), and a drain assembly is arranged at the lower end of the drain pipe (3);
the cleaning and processing device is characterized in that a water collecting barrel (7) is arranged in the cleaning and processing table (1);
the drainage assembly comprises a sealing cylinder (4) and a drainage valve (8), wherein the sealing cylinder (4) and the drainage valve (8) are detachably arranged, and a filtering mechanism is arranged at the lower end of the drainage valve (8);
the filter mechanism comprises a water filtering seat (6), a filter element (12), a connecting piece (13) and a buffer plate (11), wherein a filter element is arranged inside the filter element (12), a movable groove and a limiting groove (16) are formed in the filter element (12), the movable groove and the limiting groove (16) are mutually communicated, the lower end of the connecting piece (13) is slidably connected with the movable groove, a groove (14) is formed in the upper end of the connecting piece (13), a rectangular groove is formed in the buffer plate (11), the groove (14) is connected with the buffer plate (11) in a clamping mode, and a water distributing hole is formed in the buffer plate (11).
2. The quick-release valve based on semiconductor cleaning according to claim 1, wherein a limiting rod (17) is arranged in the movable groove, the limiting rod (17) is movably inserted into the lower end of the connecting piece (13), a spring (18) is sleeved outside the limiting rod (17), one end of the spring (18) is fixedly connected with the inner wall of the filtering piece (12), and the other end of the spring (18) is fixedly connected with the connecting piece (13).
3. The quick-release valve based on semiconductor cleaning according to claim 2, wherein a sealing plate (15) is fixedly connected to one side of the connecting piece (13) close to the limiting groove (16), the sealing plate (15) is movably inserted into the limiting groove (16), and a chamfer is formed in the top of the connecting piece (13).
4. The quick-drain valve based on semiconductor cleaning according to claim 3, wherein a fixed bottom plate (9) is detachably connected to the bottom of the water filtering seat (6), branch pipes are fixedly connected to the side edges of the sealing cylinder (4), the branch pipes are fixedly connected with the water conveying seat (5), two branch pipes and the water conveying seat (5) are respectively provided, and the two branch pipes and the water conveying seat (5) are symmetrically distributed at the center of the drain valve (8).
5. The quick-release valve based on semiconductor cleaning according to claim 4, wherein the sealing cylinder (4) is sleeved with the drain pipe (3), a drain valve (8) is arranged at the lower end of the sealing cylinder (4), a sealing ring (10) is fixedly connected to the bottom of the sealing cylinder (4), an annular groove is formed in the top of the drain valve (8), and the sealing ring (10) is spliced with the annular groove.
6. The quick-release valve based on semiconductor cleaning according to claim 5, wherein two limit rods (17) and springs (18) are respectively arranged, the two limit rods (17) and springs (18) are symmetrically distributed at the center of a fixed bottom plate (9), and the bottom of the water delivery seat (5) is fixedly connected with the top of the water filtering seat (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321026434.XU CN219866891U (en) | 2023-05-04 | 2023-05-04 | Quick-discharge valve based on semiconductor cleaning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321026434.XU CN219866891U (en) | 2023-05-04 | 2023-05-04 | Quick-discharge valve based on semiconductor cleaning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219866891U true CN219866891U (en) | 2023-10-20 |
Family
ID=88316684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321026434.XU Active CN219866891U (en) | 2023-05-04 | 2023-05-04 | Quick-discharge valve based on semiconductor cleaning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219866891U (en) |
-
2023
- 2023-05-04 CN CN202321026434.XU patent/CN219866891U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |