CN219861675U - Furnace cover for increasing camera observation field of view - Google Patents

Abstract

The utility model relates to the technical field of auxiliary equipment of a single crystal furnace, in particular to a furnace cover for increasing the view field of camera observation, which comprises a furnace cover body, wherein an observation window is arranged on the furnace cover body, an installation cavity concavely arranged on the furnace cover body is arranged on the observation window, and an installation cavity observation port and an observation window component positioned on the upper side of the installation cavity observation port are arranged at the bottom of the installation cavity. The installation cavity is arranged on the furnace cover body through the recess, so that the observation window is prevented from protruding upwards to block the observation sight, the swing angle of the camera at the same height can be increased by the installation cavity arranged in the recess, the wide angle of the observation visual angle is further increased, an operator can observe the crystal bar generation process in the single crystal furnace more accurately, and the abnormal situation can be treated in time conveniently.

Description

Furnace cover for increasing camera observation field of view

Technical Field

The utility model relates to the technical field of auxiliary equipment of a single crystal furnace, in particular to a furnace cover for increasing the view field of a camera.

Background

The Czochralski method is the most widely applied technology for producing monocrystalline silicon at present, and when the Czochralski method is used for producing monocrystalline silicon, the monocrystalline furnace is one of core production equipment. The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an environment with inert gases of nitrogen and helium as main materials and using a graphite heater to melt polycrystalline materials such as polycrystalline silicon and the like.

For the single crystal furnace with a high-pressure inner cavity, the observation window is of an independent structure relative to the furnace body, and needs to bear great pressure, so that the quality of the crystal bar is ensured, and the high requirements on the tightness, safety and reliability of the observation window are met.

The automatic control system for crystal growth of the single crystal furnace mostly adopts a CCD (ChargeCoupledDevices) camera, and realizes the automatic control of the crystal growth process by utilizing a visual image acquisition and processing technology; the position of the observation window arranged on the furnace cover is fixed, the CCD camera is arranged on the furnace cover of the single crystal furnace through the bracket, the camera observes the crystal pulling state through the observation window at a certain inclination angle, the camera azimuth is adjusted through adjusting the bracket, the crystal bar diameter, the liquid mouth distance, the liquid level brightness and the like are obtained in the furnace in real time, and in order to achieve the optimal control effect, the position of the CCD camera relative to the furnace body observation window needs to be continuously adjusted.

As disclosed in chinese patent document CN217104137U, an observation window of the patent protrudes upward, the protruding portion of the observation window affects the observation field of the camera, when the protruding portion is higher, the swinging angle of the camera at the same height is narrower, and due to the narrowing of the observation field, the operator cannot observe the crystal bar generation process inside the single crystal furnace accurately through the CCD camera due to limited observation of the observation field, and the process cannot be made in time when abnormal conditions occur.

Therefore, improvements in the furnace cover are needed to better enhance its field of view.

Disclosure of Invention

Aiming at the technical problem that the view field of the existing furnace cover is poor, the technical scheme adopted by the utility model for solving the technical problem is as follows:

the utility model provides an increase bell of camera observation field of vision, includes the bell body, be equipped with the observation window on the bell body, the observation window is equipped with sunken setting and is in installation cavity on the bell body, the bottom of installation cavity is equipped with installation cavity viewing aperture and is located the observation window subassembly of installation cavity viewing aperture upside.

Further, the furnace cover body is provided with an upper cover body and a lower cover body positioned at the lower side of the upper cover body, the upper cover body is provided with an upper cover body opening, the lower cover body is provided with a lower cover body opening, and the observation window extends from the upper cover body opening to the lower cover body opening.

Further, the furnace cover body is of an arc-shaped structure.

Further, the observation window is obliquely arranged on the furnace cover body.

In order to improve the stability of observation window subassembly, the observation window subassembly include the clamp plate, with the glass that the clamp plate is connected, the clamp plate is equipped with the clamp plate opening, the border of installation cavity viewing aperture forms supporting part and is used for supporting glass.

In order to improve stability between the pressing plate and the glass, the pressing plate is provided with a pressing plate accommodating cavity, and the pressing plate accommodating cavity is used for accommodating the glass.

In order to improve the stability of the glass, the observation window assembly further comprises a sealing element connected with the glass, and the installation cavity is provided with an installation cavity groove for accommodating the sealing element.

In order to improve the cooling effect of the observation window, a heat exchange channel is formed between the upper cover body and the lower cover body, a first water channel and a second water channel are arranged on the heat exchange channel, and the observation window is positioned between the first water channel and the second water channel.

In order to improve the cooling effect of observation window, the outside of observation window is equipped with the cooling platform, the observation window with be equipped with the cooling chamber between the cooling platform, the cooling chamber with first water course with the second water course intercommunication, the cooling platform be equipped with the cooling platform viewing aperture of installation cavity viewing aperture intercommunication.

In order to improve the cooling effect of observation window, the inner wall of installation chamber viewing aperture is equipped with installation chamber extension, installation chamber extension with the inner wall connection of cooling platform viewing aperture, the cooling chamber is including being located the first cooling chamber of observation window side, and be located the observation window bottom with the second cooling chamber between the cooling platform bottom.

The beneficial effects of the utility model are as follows:

1. the installation cavity is arranged on the furnace cover body through the recess, so that the observation window is prevented from protruding upwards to block the observation sight, the swing angle of the camera at the same height can be increased by the installation cavity arranged in the recess, the wide angle of the observation visual angle is further increased, an operator can observe the crystal bar generation process in the single crystal furnace more accurately, and the abnormal situation can be treated in time conveniently.

2. The heat exchange channel can cool the installation cavity extending into the furnace cover body, further cool the observation window assembly, and avoid the high-pressure high-temperature condition in the single crystal furnace, thereby influencing the service life of the observation window assembly.

Drawings

FIG. 1 is a schematic view of a furnace cover for increasing the field of view of a camera according to the present utility model.

Fig. 2 is a cross-sectional view A-A of fig. 1.

Fig. 3 is a top view of the viewing window of the present utility model.

Fig. 4 is a B-B cross-sectional view of fig. 3.

Fig. 5 is an exploded view of fig. 4.

Fig. 6 is an exploded view of a furnace cover for increasing the field of view of a camera according to the present utility model.

Fig. 7 shows a prior art furnace lid.

Fig. 8 is a C-C cross-sectional view of fig. 7.

Fig. 9 is a cross-sectional view A-A of fig. 1.

Fig. 10 is a C-C cross-sectional view of fig. 7.

Fig. 11 is a cross-sectional view A-A of fig. 1.

Detailed Description

Embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

The furnace cover for increasing the view field of camera observation as shown in fig. 1 to 6 comprises a furnace cover body 1, wherein an observation window 2 is arranged on the furnace cover body 1, the observation window 2 is provided with a mounting cavity 3 concavely arranged on the furnace cover body 1, and the bottom of the mounting cavity 3 is provided with a mounting cavity observation port 31 and an observation window assembly 4 positioned on the upper side of the mounting cavity observation port 31.

As shown in fig. 2 and 9, since the camera is disposed on the upper side of the observation window and the camera is disposed obliquely, the line of sight of the camera through the observation window forms an angle with the central axis of the single crystal silicon growth liquid surface.

In the utility model, when the camera is observed from top to bottom, the camera is positioned on the upper end surface of one side far away from the central axis of the monocrystalline silicon growth liquid surface from the observation window, the monocrystalline silicon growth condition is observed obliquely downwards, the observation sight line forms an included angle alpha with the central axis of the monocrystalline silicon growth liquid surface, after the camera swings at the same height for a certain angle, the camera is positioned on the inner side of one side close to the central axis of the monocrystalline silicon growth liquid surface from the observation port of the installation cavity, the monocrystalline silicon growth liquid surface is observed obliquely downwards, the observation sight line forms an included angle gamma with the central axis of the monocrystalline silicon growth liquid surface at the moment, and the difference value between the included angle alpha and the included angle gamma is M, namely the swinging angle of the utility model at the same height.

As shown in fig. 7 and 8, the view window of the furnace cover in the prior art protrudes upward, the protruding portion of the furnace cover affects the view field of the camera, when the protruding portion is higher or the protruding portion approaches to the view line direction, the swing angle of the camera at the same height is narrower, and due to the narrowed view angle, the operator cannot observe the crystal bar generating process in the single crystal furnace accurately due to limited view, and the abnormal situation cannot be handled in time.

Specifically, in the prior art, when the camera is observed from top to bottom, the camera is located the up end of one side of the axis of keeping away from monocrystalline silicon growth liquid level from the part that the observation window is protruding, observe monocrystalline silicon growth condition downwards in the slope, the observation sight and the contained angle beta that the axis of monocrystalline silicon growth liquid level formed this moment, the camera is located the inboard of one side of being close to the axis of monocrystalline silicon growth liquid level from the installation cavity viewing aperture after same high swing certain angle, observe monocrystalline silicon growth liquid level downwards in the slope, the contained angle gamma that the observation sight and the axis of monocrystalline silicon growth liquid level formed this moment, contained angle beta and contained angle gamma's difference be N, but this prior art is at the swing angle of same high promptly.

As can be seen from fig. 8 and 9, the difference M between the included angle α and the included angle γ is larger than the difference N between the included angle β and the included angle γ.

The installation cavity is arranged on the furnace cover body through the recess, the observation window is prevented from protruding upwards to block the observation sight, and the swinging angle of the camera at the same height can be increased by the installation cavity arranged in the recess, so that the swinging angle M of the camera at the same height is larger than the swinging angle N of the camera at the same height in the prior art, the wide angle of the observation visual angle is further increased, an operator can observe the crystal bar generation process in the single crystal furnace more accurately, and the abnormity can be handled in time conveniently.

As shown in fig. 10, in the prior art, when the portion of the camera protruding from the observation window is located at the upper end face of the side far away from the central axis of the single crystal silicon growth liquid surface, the single crystal silicon growth is observed obliquely downward through the lower end face of the installation cavity observation port located at the inner side of the side near the central axis of the single crystal silicon growth liquid surface, and the observation line at this time forms an angle P with the central axis of the single crystal silicon growth liquid surface.

As shown in fig. 11, when the camera is positioned from the upper end face of the side of the observation window away from the central axis of the single crystal silicon growth liquid surface, the single crystal silicon growth is observed obliquely downward through the lower end face of the installation cavity observation port positioned on the inner side of the central axis of the single crystal silicon growth liquid surface, and the observation line at this time forms an included angle Q with the central axis of the single crystal silicon growth liquid surface.

As can be seen from fig. 10 and 11, the included angle Q is larger than the included angle P at the same height, so that the camera can observe more comprehensive growth conditions of monocrystalline silicon through the swing angle of the larger included angle, and the operator can conveniently deal with anomalies in time.

As shown in fig. 2 and 6, the furnace cover body 1 is provided with an upper cover 11 and a lower cover 12 positioned at the lower side of the upper cover 11, optionally, the upper cover is provided with an upper cover opening 111 for the observation window to pass through and extend onto the lower cover, and the lower cover 12 is provided with a lower cover opening 121 for the observation window to pass through and extend into the lower cover.

The furnace cover body 1 is of an arc structure, and the furnace cover is used for increasing the view field of a camera, as shown in fig. 1 to 6. Alternatively, in some embodiments, czochralski crystal manufacture is a currently more widespread method of producing silicon single crystal, using equipment that requires evacuation, and therefore furnace pressures are significantly higher than ambient. The furnace body is generally designed in a circular shape to improve its pressure-bearing capacity. Therefore, the furnace cover body is of an arc structure and is covered on the furnace body. Further, the upper cover body and the lower cover body are of arc structures, and the heat exchange channels between the upper cover body and the lower cover body are uniformly distributed, so that the camera is generally arranged on the furnace cover in an inclined mode, as shown in fig. 2, the observation window is obliquely arranged so that a first included angle is formed between the plane of the camera facing the outer side and the horizontal plane, a second included angle is formed between the plane formed by the upper cover body opening and the horizontal plane, a third included angle is formed between the plane formed by the lower cover body opening and the horizontal plane, and the first included angle is equal to the second included angle and the third included angle respectively. The inclined arrangement of the observation window can be matched with a camera arranged in an inclined manner, so that the observation angle can be improved, and the situation in the single crystal furnace can be observed at the side surface of the single crystal furnace.

The furnace cover for increasing the view field of the camera as shown in fig. 4 and 5, the observation window assembly 4 comprises a pressing plate 41 and glass 42 connected with the pressing plate 41, the pressing plate 41 is provided with a pressing plate opening 411, and a supporting part 311 is formed at the edge of the observation opening 31 of the installation cavity and used for supporting the glass 42. Further, as a preferred embodiment of the present utility model, but not limited to, the installation cavity observation port is an opening penetrating into the single crystal furnace, and the glass can be supported by the support portion formed by the inner wall of the installation cavity and the edge of the installation cavity observation port, so that the glass can be more stably connected to the pressing plate.

The cover for increasing the view of the camera as shown in fig. 5, the platen 41 is provided with a platen receiving chamber 412, and the platen receiving chamber 412 is used for receiving the glass 42. Further, as a preferred embodiment of the present utility model, but not limited to, the press plate is made of metal such as stainless steel, and glass is accommodated in the press plate accommodating cavity, so that glass breakage caused by direct pressing of both sides of the glass by the press plate is avoided.

A cover for increasing the field of view of the camera as shown in fig. 1 to 6, the viewing window assembly 4 further comprises a sealing member 43 connected to the glass 42, and the mounting cavity 3 is provided with a mounting cavity recess 32 for receiving the sealing member 43. Further, as a preferred embodiment of the present utility model, but not limited to, the sealing member is located on the supporting portion, the sealing member can improve the air tightness of the single crystal furnace, and meanwhile, the sealing member is arranged between the glass and the supporting portion, so that the risk of glass breakage caused by direct abutting of two sides of the glass with the supporting portion is avoided.

Optionally, the sealing member is a sealing ring made of polytetrafluoroethylene or fluorine-containing rubber.

As shown in fig. 6, a furnace cover for increasing the view field of the camera is provided, a heat exchange channel 5 is formed between the upper cover 11 and the lower cover 12, a first water channel 51 and a second water channel 52 are arranged on the heat exchange channel 5, and the observation window 2 is located between the first water channel 51 and the second water channel 52. The heat exchange channel can cool the installation cavity extending into the furnace cover body, further cool the observation window assembly, and avoid the high-pressure high-temperature condition in the single crystal furnace, thereby influencing the service life of the observation window assembly.

Optionally, in some embodiments, water flows from the first water channel to the second water channel and cools the furnace cover body, one side of the periphery of the observation window is in contact with the first water channel, the other side of the periphery of the observation window is in contact with the second water channel, and when water flows from the first water channel to the second water channel, the water cools the furnace cover body and simultaneously cools the periphery of the observation window, so that the glass temperature in the installation cavity is reduced, the camera is prevented from being influenced to capture the crystal contour line, and the service life of the sealing element is prolonged.

Optionally, in some embodiments, the first water channel 51 and the second water channel 52 are separated by a head inner wall 50, and water from the first water channel enters the second water channel through a peripheral wall of the viewing window.

As shown in fig. 4 to 6, a furnace cover for increasing the view field of the camera is provided with a cooling table 6 on the outer side of the observation window 2, a cooling cavity 7 is arranged between the observation window 2 and the cooling table 6, the cooling cavity 7 is communicated with the first water channel 51 and the second water channel 52, and the cooling table 6 is provided with a cooling table observation port 61 communicated with the installation cavity observation port 31. Optionally, in some embodiments, the cooling table observation port is an opening penetrating through the cooling table, the installation cavity stretches into the lower side of the lower cover body, when water flows into the cooling cavity from the first water channel, the water fills the whole cooling cavity, the cooling cavity can cool down the outer wall of the observation window in contact, and the water moves from the cooling cavity to the second water channel again.

A cover for increasing the field of view of the camera, as shown in fig. 2 to 6, has an upper end surface of the cooling table 6 flush with an upper end surface of the lower cover 12. Optionally, in some embodiments, since the observation window is obliquely disposed, the cooling table may be disposed obliquely, where a plane on a side of the cooling table away from the monocrystalline silicon growth liquid surface forms a fourth included angle with the horizontal plane, the observation window is obliquely disposed so that a plane on a side of the cooling table away from the monocrystalline silicon growth liquid surface forms a first included angle with the horizontal plane, a plane formed by the upper cover opening forms a second included angle with the horizontal plane, a plane formed by the lower cover opening forms a third included angle with the horizontal plane, and the fourth included angle is equal to the first included angle, the second included angle, and the third included angle, respectively. The cooling table and the observation window are obliquely arranged, so that the observation angle can be improved, the situation in the single crystal furnace can be observed on the side face of the single crystal furnace, meanwhile, the cooling cavity is matched with the heat exchange channel, and the cooling of the periphery of the observation window is more uniform through uniform distribution.

A cover for increasing the view field of the camera as shown in fig. 4 to 6, the inner wall of the mounting cavity observation port 31 is provided with a mounting cavity extension 312, the mounting cavity extension 312 is connected with the inner wall of the cooling platform observation port 61, and the cooling cavity 7 comprises a first cooling cavity 71 located at the side of the observation window 2, and a second cooling cavity 72 located between the bottom of the observation window 2 and the bottom of the cooling platform 6. Optionally, in some embodiments, when water flows into the cooling cavity from the first water channel, the water fills the first cooling cavity and the second cooling cavity, the water can cool the outer side wall of the contacted observation window in the first cooling cavity, the water can cool the bottom wall of the contacted observation window in the second cooling cavity, and the water moves from the cooling cavity to the second water channel again.

As shown in fig. 1 to 6, the embodiment of example 1 is as follows:

the furnace cover body 1 is provided with an upper cover body 11 and a lower cover body 12 positioned at the lower side of the upper cover body 11, the upper cover body 11 and the lower cover body 12 are of arc structures, and a heat exchange channel 5 is formed between the upper cover body 11 and the lower cover body 12.

The upper cover 11 is provided with an upper cover opening 111 for the observation window 2 to pass through and extend onto the lower cover 12, and the lower cover 12 is provided with a lower cover opening 121 for the observation window 2 to pass through and extend into the lower cover 12.

The observation window 2 is obliquely arranged so that a plane far away from one side of the monocrystalline silicon growth liquid level forms a first included angle with the horizontal plane, a second included angle is formed between the upper cover opening 111 and the horizontal plane, a third included angle is formed between the lower cover opening 121 and the horizontal plane, and the first included angle is equal to the second included angle and the third included angle respectively. The inclined arrangement of the observation window 2 can improve the observation angle and observe the situation in the single crystal furnace at the side surface of the single crystal furnace.

The plane of the observation window 2 towards the outside is flush with the plane of the upper cover opening 111, so that the swing angle of the camera at the same height can be increased, the wide angle of the observation view angle is further increased, an operator can observe the crystal bar generation process inside the single crystal furnace more accurately, and the abnormality can be handled in time.

The embodiment of example 2 is as follows:

example 2 differs from example 1 in that in example 2 the observation window 2 is cooled by the heat exchange channel 5.

Glass 42 holding is in clamp plate holding chamber 412, avoid the both sides of glass 42 directly to be pushed down by clamp plate 41 and cause glass cracked, installation cavity viewing aperture 31 is for lining up the opening in the single crystal growing furnace, the inner wall of installation cavity 3 and the supporting part 311 that the border formed of installation cavity viewing aperture 31 can support glass 42, glass 42 connects more steadily on clamp plate 41, installation cavity recess 32 is located supporting part 311, sealing member 43 can improve the gas tightness of single crystal growing furnace, sealing member 43 sets up between glass 42 and supporting part 311 simultaneously, avoid the both sides of glass 42 directly to lead to the fact the cracked risk of glass with supporting part 311 butt, cooling table 6 and viewing window 2 slope setting can improve viewing angle and observe the condition in the single crystal growing furnace side, cooling cavity 7 can evenly set up simultaneously and make the week side cooling of viewing window 2 more even.

First water channel 51 and second water channel 52 are separated by head inner wall 50, and water in first water channel 51 enters second water channel 52 through the peripheral wall of observation window 2.

When water flows into the cooling cavity 7 from the first water channel 51, the first cooling cavity 71 and the second cooling cavity 72 are filled with water, the water can cool the outer side wall of the contacted observation window 2 in the first cooling cavity 71, the water can cool the bottom wall of the contacted observation window 2 in the second cooling cavity 72, and the water moves from the cooling cavity 7 to the second water channel 52.

The water flows from the first water channel 51 to the second water channel 52 and cools the furnace cover body 1, and simultaneously, the periphery side of the observation window 2 is cooled, so that the temperature of the glass 42 in the installation cavity 3 is reduced, the camera capturing of the crystal contour line is prevented from being influenced, and the service life of the sealing piece 43 is prolonged.

The foregoing examples are provided to further illustrate the technical contents of the present utility model for the convenience of the reader, but are not intended to limit the embodiments of the present utility model thereto, and any technical extension or re-creation according to the present utility model is protected by the present utility model. The protection scope of the utility model is subject to the claims.

Claims (7)

1. The utility model provides an increase camera and observe bell in field of vision, includes bell body (1), its characterized in that: the furnace cover is characterized in that an observation window (2) is arranged on the furnace cover body (1), the observation window (2) is provided with a mounting cavity (3) concavely arranged on the furnace cover body (1), and the bottom of the mounting cavity (3) is provided with a mounting cavity observation port (31) and an observation window assembly (4) positioned on the upper side of the mounting cavity observation port (31); the furnace cover body (1) is of an arc-shaped structure; the observation window (2) is obliquely arranged on the furnace cover body (1);

the furnace cover body (1) is provided with an upper cover body (11) and a lower cover body (12) positioned at the lower side of the upper cover body (11), the upper cover body (11) is provided with an upper cover body opening (111), the lower cover body (12) is provided with a lower cover body opening (121), and the observation window (2) extends from the upper cover body opening (111) to the lower cover body opening (121); the upper cover body (11) and the lower cover body (12) are arc-shaped structures.

2. A cover for increasing the field of view of a camera according to claim 1, wherein: the observation window assembly (4) comprises a pressing plate (41) and glass (42) connected with the pressing plate (41), wherein the pressing plate (41) is provided with a pressing plate opening (411), and a supporting part (311) is formed at the edge of the installation cavity observation opening (31) and used for supporting the glass (42).

3. A cover for increasing the field of view of a camera according to claim 2, wherein: the pressing plate (41) is provided with a pressing plate accommodating cavity (412), and the pressing plate accommodating cavity (412) is used for accommodating the glass (42).

4. A cover for increasing the field of view of a camera according to claim 2, wherein: the observation window assembly (4) further comprises a sealing piece (43) connected with the glass (42), and the installation cavity (3) is provided with an installation cavity groove (32) for accommodating the sealing piece (43).

5. A cover for increasing the field of view of a camera according to claim 1, wherein: a heat exchange channel (5) is formed between the upper cover body (11) and the lower cover body (12), a first water channel (51) and a second water channel (52) are arranged on the heat exchange channel (5), and the observation window (2) is located between the first water channel (51) and the second water channel (52).

6. A cover for increasing field of view for a camera as set forth in claim 5, wherein: the outside of observation window (2) is equipped with cooling platform (6), observation window (2) with be equipped with cooling chamber (7) between cooling platform (6), cooling chamber (7) with first water course (51) with second water course (52) intercommunication, cooling platform (6) be equipped with cooling platform viewing aperture (61) of installation chamber viewing aperture (31) intercommunication.

7. A cover for increasing field of view for a camera as defined in claim 6, wherein: the inner wall of installation cavity viewing port (31) is equipped with installation cavity extension (312), installation cavity extension (312) with the inner wall connection of cooling table viewing port (61), cooling chamber (7) are including being located first cooling chamber (71) of viewing window (2) side, and be located viewing window (2) bottom with second cooling chamber (72) between cooling table (6) bottom.