CN219855375U - Monocrystalline silicon rod cutting device - Google Patents
Monocrystalline silicon rod cutting device Download PDFInfo
- Publication number
- CN219855375U CN219855375U CN202320763428.6U CN202320763428U CN219855375U CN 219855375 U CN219855375 U CN 219855375U CN 202320763428 U CN202320763428 U CN 202320763428U CN 219855375 U CN219855375 U CN 219855375U
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- Prior art keywords
- cutting
- motor
- monocrystalline silicon
- filter screen
- cutting device
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- 238000005520 cutting process Methods 0.000 title claims abstract description 71
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims description 31
- 230000002457 bidirectional effect Effects 0.000 claims description 24
- 239000007921 spray Substances 0.000 claims description 13
- 230000002146 bilateral effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 17
- 239000011863 silicon-based powder Substances 0.000 abstract description 10
- 238000000926 separation method Methods 0.000 abstract description 8
- 239000013078 crystal Substances 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 125000004122 cyclic group Chemical group 0.000 abstract description 2
- 239000000428 dust Substances 0.000 description 4
- XJKVPKYVPCWHFO-UHFFFAOYSA-N silicon;hydrate Chemical compound O.[Si] XJKVPKYVPCWHFO-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000002231 Czochralski process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a monocrystalline silicon rod cutting device, which comprises a fixed base, wherein the top of the fixed base is symmetrically and slidingly connected with translation plates, a space adjusting mechanism matched with the two translation plates is arranged in the fixed base, an electric telescopic rod is fixedly arranged at the top of the translation plates, a connector is fixedly arranged at the output end of the electric telescopic rod, and a pneumatic chuck is fixedly arranged at one side of the connector away from the electric telescopic rod, so that the monocrystalline silicon rod cutting device has the beneficial effects that: the utility model has compact structure and strong practicability, and the arranged interval adjusting mechanism can drive the two translation plates to move, so that the distance between the two pneumatic chucks is adjusted, and the device can be suitable for single crystal rods with different lengths; the cutting thickness adjusting mechanism can drive the two movable mounting plates to move, so that the distance between the three cutting lines is adjusted, and the cutting thickness is adjusted; through the first filter screen and the second filter screen, separation of silicon wafers from silicon powder and separation of silicon powder from water are realized, and cyclic utilization of water resources is realized.
Description
Technical field:
the utility model belongs to the technical field of cutting devices, and particularly relates to a monocrystalline silicon rod cutting device.
The background technology is as follows:
the monocrystalline silicon rod is a silicon monocrystal rod formed by shaping or pulling in a hearth through a zone melting or Czochralski process, the current cutting of the monocrystalline rod is basically linear cutting through high-strength materials, a large amount of silicon powder can be generated in the cutting process, and the monocrystalline silicon rod is treated in a spraying mode in order not to influence cutting operation and avoid dust emission, so that continuous water input is required in the linear cutting process, and water resource waste is caused; the cutting lines are basically fixed and installed before cutting, and no method is needed to adjust the cutting intervals in real time to obtain silicon wafers with different thicknesses, so that a cutting device capable of solving the problems is provided.
The utility model comprises the following steps:
the utility model aims to overcome the defects of the prior art, provides a monocrystalline silicon rod cutting device for solving the defects in the prior art, and at present, the monocrystalline rod is cut by a high-strength material basically, a large amount of silicon powder can be generated in the cutting process, and the monocrystalline rod cutting device is treated in a spraying mode so as not to influence cutting operation and avoid dust emission, so that continuous water input is required in the linear cutting process, and waste of water resources is caused; the cutting lines are basically fixed and installed before cutting, and no method is needed to adjust the cutting intervals in real time to obtain silicon wafers with different thicknesses, so that a cutting device capable of solving the problems is provided.
In order to solve the technical problems, the utility model provides the following technical scheme:
the utility model relates to a monocrystalline silicon rod cutting device which comprises a fixed base, wherein translation plates are symmetrically and slidingly connected to the top of the fixed base, a distance adjusting mechanism matched with the two translation plates is arranged in the fixed base, an electric telescopic rod is fixedly arranged at the top of the translation plates, a connector is fixedly arranged at the output end of the electric telescopic rod, a pneumatic chuck is fixedly arranged at one side of the connector, which is far away from the electric telescopic rod, of the fixed base, a material collecting box is fixedly connected to the top of the fixed base, a supporting plate is symmetrically and fixedly arranged at the top of the material collecting box, fixed mounting plates are symmetrically and fixedly connected to one side, which is opposite to the two supporting plates, of the fixed mounting plates, movable mounting plates are symmetrically arranged at two sides of the fixed mounting plates, the movable mounting plates are slidingly connected with the corresponding supporting plates, a cutting thickness adjusting mechanism matched with the corresponding two movable mounting plates is arranged in the supporting plates, and cutting lines are fixedly arranged between the corresponding two fixed mounting plates and the movable mounting plates.
As a preferable scheme of the utility model, the interval adjusting mechanism comprises a motor I, the motor I is fixedly arranged in the fixed base, the output end of the motor I is fixedly connected with a first bidirectional screw rod, the first bidirectional screw rod is rotationally connected with the inner wall of the fixed base, the surface of the first bidirectional screw rod is symmetrically and spirally connected with an inner thread plate, and the inner thread plate is fixedly connected with a corresponding translation plate.
As a preferable scheme of the utility model, the cutting thickness adjusting mechanism comprises a second motor, the second motor is fixedly arranged on the outer surface of the supporting plate, the output end of the second motor is fixedly connected with a second bidirectional screw rod, the second bidirectional screw rod is rotationally connected with the inner wall of the supporting plate, the surface of the second bidirectional screw rod is symmetrically connected with an internal thread sleeve in a threaded manner, and the internal thread sleeve is fixedly connected with a corresponding movable mounting plate.
As a preferable scheme of the utility model, cutting lines are fixedly arranged above the two connecting heads, spray heads are fixedly arranged at the bottoms of the cutting lines at equal intervals, a water pump is fixedly arranged at the top of the cutting lines, a water outlet is arranged on the outer surface of the material receiving box, the input end of the water pump is connected with the water outlet, and the output end of the water pump is connected with the spray heads.
As a preferable scheme of the utility model, a first filter screen is fixedly arranged on the inner wall of the material receiving box, a second filter screen is fixedly arranged on the inner wall of the material receiving box and below the first filter screen, the second filter screen is positioned above the water outlet, and a material taking door matched with the first filter screen is arranged on the outer surface of the material receiving box.
As a preferable scheme of the utility model, a control panel is arranged on the outer surface of the material receiving box, and the control panel is electrically connected with the electric telescopic rod, the pneumatic chuck, the water pump, the first motor and the second motor.
The beneficial effects achieved by the utility model are as follows: the utility model has compact structure and strong practicability, and the arranged interval adjusting mechanism can drive the two translation plates to move, so that the distance between the two pneumatic chucks is adjusted, and the device can be suitable for single crystal rods with different lengths; the cutting thickness adjusting mechanism can drive the two movable mounting plates to move, so that the distance between the three cutting lines is adjusted, and the cutting thickness is adjusted; through the first filter screen and the second filter screen, separation of silicon chips and silicon powder and separation of silicon powder and water can be realized, and cyclic utilization of water resources can be realized.
Description of the drawings:
in order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic elevational cross-sectional view of the present utility model;
FIG. 2 is a schematic side elevational view of the present utility model;
FIG. 3 is a schematic top view of a cross-sectional structure of a support plate of the present utility model;
fig. 4 is a schematic diagram of the front cross-sectional structure of the receiving box of the present utility model.
In the figure: 1. a fixed base; 2. a spacing adjustment mechanism; 21. a motor I; 22. a first bidirectional screw rod; 23. an inner thread plate; 3. a cutting thickness adjusting mechanism; 31. a motor II; 32. a second bidirectional screw rod; 33. an internal thread sleeve; 4. a translation plate; 5. an electric telescopic rod; 6. a connector; 7. a pneumatic chuck; 8. a material receiving box; 9. a support plate; 10. a fixed mounting plate; 11. moving the mounting plate; 12. cutting lines; 13. a spray head; 14. a water pump; 15. a water outlet; 16. a first filter screen; 17. a second filter screen; 18. a control panel; 19. and a material taking door.
The specific embodiment is as follows:
the following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, the utility model provides a monocrystalline silicon rod cutting device, which comprises a fixed base 1, translation plates 4 are symmetrically and slidingly connected to the top of the fixed base 1, an electric telescopic rod 5 is fixedly installed at the top of the translation plates 4, a connector 6 is fixedly installed at the output end of the electric telescopic rod 5, a pneumatic chuck 7 is fixedly installed at one side of the connector 6 far away from the electric telescopic rod 5, a material receiving box 8 is fixedly connected to the top of the fixed base 1, a supporting plate 9 is symmetrically and fixedly installed at the top of the material receiving box 8, fixed mounting plates 10 are symmetrically and fixedly connected to one side of the two opposite supporting plates 9, movable mounting plates 11 are symmetrically arranged at two sides of the fixed mounting plates 10, the movable mounting plates 11 are in sliding connection with corresponding supporting plates 9, cutting thickness adjusting mechanisms 3 matched with the corresponding two movable mounting plates 11 are arranged in the supporting plates 9, cutting lines 12 are fixedly installed between the corresponding two fixed mounting plates 10 and the movable mounting plates 11, when the monocrystalline silicon rod cutting device is used, the distance between the two pneumatic chucks 7 is adjusted through the distance adjusting mechanisms 2 firstly, after the adjustment of the length of the monocrystalline silicon rod is completed, the cutting line is adjusted through the distance adjusting mechanism 7, and then the cutting line is adjusted through the three cutting lines 3 after the adjustment of the cutting line is completed, and the cutting line is required to be adjusted through the cutting line 3.
Further, the interval adjusting mechanism 2 comprises a motor 21, the motor 21 is fixedly arranged inside the fixed base 1, the output end of the motor 21 is fixedly connected with a first bidirectional screw rod 22, the first bidirectional screw rod 22 is rotationally connected with the inner wall of the fixed base 1, the surface of the first bidirectional screw rod 22 is symmetrically and spirally connected with an inner threaded plate 23, the inner threaded plate 23 is fixedly connected with the corresponding translation plate 4, and when the interval adjusting mechanism is operated, the motor 21 is started to drive the first bidirectional screw rod 22 to rotate, the first bidirectional screw rod 22 drives the inner threaded plate 23 to move, and the inner threaded plate 23 drives the corresponding translation plate 4 to move.
Further, the cutting thickness adjusting mechanism 3 comprises a second motor 31, the second motor 31 is fixedly arranged on the outer surface of the supporting plate 9, the output end of the second motor 31 is fixedly connected with a second bidirectional screw rod 32, the second bidirectional screw rod 32 is rotationally connected with the inner wall of the supporting plate 9, the surface of the second bidirectional screw rod 32 is symmetrically and spirally connected with an inner thread sleeve 33, the inner thread sleeve 33 is fixedly connected with the corresponding movable mounting plate 11, and when the cutting thickness adjusting mechanism works, the second motor 31 is started to drive the second bidirectional screw rod 32 to rotate, the second bidirectional screw rod 32 drives the inner thread plate 33 to move, and the inner thread plate 33 drives the corresponding movable mounting plate 11 to move.
Further, cutting lines 12 are fixedly installed above the two connectors 6, spray heads 13 are fixedly installed at the bottoms of the cutting lines 12 at equal intervals, a water pump 14 is fixedly installed at the tops of the cutting lines 12, a water outlet 15 is formed in the outer surface of the material collecting box 8, the input end of the water pump 14 is connected with the water outlet 15, the output end of the water pump 14 is connected with the spray heads 13, when the material collecting box 8 is used, water is added into the material collecting box 8 firstly, and in the cutting process, the water pump 14 is started to spray the water from the spray heads 13 to spray dust fall operation.
Further, a first filter screen 16 is fixedly arranged on the inner wall of the material receiving box 8, a second filter screen 17 is fixedly arranged on the inner wall of the material receiving box 8 and below the first filter screen 16, the second filter screen 17 is positioned above the water outlet 15, a material taking door 19 matched with the first filter screen 16 is arranged on the outer surface of the material receiving box 8, and when the material taking device is in operation, separation of silicon chips and silicon powder is realized through the first filter screen 16, separation of silicon powder and water is realized through the second filter screen 17, and recycling of water resources is realized while material taking is facilitated.
Further, the outer surface of the material receiving box 8 is provided with a control panel 18, and the control panel 18 is electrically connected with the electric telescopic rod 5, the pneumatic chuck 7, the water pump 14, the first motor 21 and the second motor 31, and integrated control is realized through the control panel 18, so that the operation of workers is facilitated.
When the device is used, the distance between the two pneumatic chucks 7 is adjusted through the interval adjusting mechanism 2 according to the length of the single crystal rod, after the adjustment is completed, the two ends of the single crystal rod are clamped and fixed through the pneumatic chucks 7, the distance between the three cutting lines 12 is adjusted through the cutting thickness adjusting mechanism 3 according to requirements, then the electric telescopic rod 5 is started to drive the single crystal rod to move downwards, linear cutting operation of the single crystal rod is completed, in the cutting process, the water pump 14 is started to spray water from the spray head 13 to spray dust fall operation, then separation of silicon chips and silicon powder is realized through the first filter screen 16, separation of silicon powder and water is realized through the second filter screen 17, and recycling of water resources is realized while material taking is facilitated.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (6)
1. The utility model provides a monocrystalline silicon stick cutting device, includes unable adjustment base (1), its characterized in that, unable adjustment base (1) top symmetry sliding connection has translation board (4), unable adjustment base (1) inside be equipped with interval adjustment mechanism (2) that two translation boards (4) cooperation used, translation board (4) top fixed mounting has electric telescopic handle (5), electric telescopic handle (5) output fixed mounting has connector (6), one side fixed mounting that electric telescopic handle (5) was kept away from to connector (6) has pneumatic chuck (7), unable adjustment base (1) top fixedly connected with receipts workbin (8), receipts workbin (8) top symmetry fixed mounting has backup pad (9), two one side symmetry fixedly connected with fixed mounting board (10) that backup pad (9) are relative, fixed mounting board (10) bilateral symmetry is equipped with and removes mounting board (11), remove mounting board (11) and corresponding backup pad (9) sliding connection, inside be equipped with two cutting thickness adjustment mechanism (3) that move (11) cooperation use, two corresponding and two fixed mounting board (10) have between cutting line (12) and the fixed mounting board.
2. The monocrystalline silicon rod cutting device according to claim 1, wherein the spacing adjusting mechanism (2) comprises a motor (21), the motor (21) is fixedly installed inside the fixed base (1), the output end of the motor (21) is fixedly connected with a first bidirectional screw rod (22), the first bidirectional screw rod (22) is rotationally connected with the inner wall of the fixed base (1), inner thread plates (23) are symmetrically and threadedly connected with the surfaces of the first bidirectional screw rod (22), and the inner thread plates (23) are fixedly connected with the corresponding translation plates (4).
3. The monocrystalline silicon rod cutting device according to claim 1, characterized in that the cutting thickness adjusting mechanism (3) comprises a second motor (31), the second motor (31) is fixedly installed on the outer surface of the supporting plate (9), the output end of the second motor (31) is fixedly connected with a second bidirectional screw rod (32), the second bidirectional screw rod (32) is rotationally connected with the inner wall of the supporting plate (9), the surface of the second bidirectional screw rod (32) is symmetrically connected with an inner thread sleeve (33) in a threaded manner, and the inner thread sleeve (33) is fixedly connected with the corresponding movable mounting plate (11).
4. The monocrystalline silicon rod cutting device according to claim 1, characterized in that cutting lines (12) are fixedly installed above the two connectors (6), spray heads (13) are fixedly installed at the bottoms of the cutting lines (12) at equal intervals, a water pump (14) is fixedly installed at the tops of the cutting lines (12), a water outlet (15) is formed in the outer surface of the material receiving box (8), the input end of the water pump (14) is connected with the water outlet (15), and the output end of the water pump (14) is connected with the spray heads (13).
5. The monocrystalline silicon rod cutting device according to claim 4, wherein a first filter screen (16) is fixedly mounted on the inner wall of the material receiving box (8), a second filter screen (17) is fixedly mounted on the inner wall of the material receiving box (8) and below the first filter screen (16), the second filter screen (17) is located above the water outlet (15), and a material taking door (19) matched with the first filter screen (16) is arranged on the outer surface of the material receiving box (8).
6. The monocrystalline silicon rod cutting device according to claim 1, characterized in that a control panel (18) is arranged on the outer surface of the material receiving box (8), and the control panel (18) is electrically connected with the electric telescopic rod (5), the pneumatic chuck (7), the water pump (14), the first motor (21) and the second motor (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320763428.6U CN219855375U (en) | 2023-04-10 | 2023-04-10 | Monocrystalline silicon rod cutting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320763428.6U CN219855375U (en) | 2023-04-10 | 2023-04-10 | Monocrystalline silicon rod cutting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219855375U true CN219855375U (en) | 2023-10-20 |
Family
ID=88321975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320763428.6U Active CN219855375U (en) | 2023-04-10 | 2023-04-10 | Monocrystalline silicon rod cutting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219855375U (en) |
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2023
- 2023-04-10 CN CN202320763428.6U patent/CN219855375U/en active Active
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