CN212357379U - Portable temperature-changing sample stage device - Google Patents
Portable temperature-changing sample stage device Download PDFInfo
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- CN212357379U CN212357379U CN202021126000.3U CN202021126000U CN212357379U CN 212357379 U CN212357379 U CN 212357379U CN 202021126000 U CN202021126000 U CN 202021126000U CN 212357379 U CN212357379 U CN 212357379U
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Abstract
The utility model discloses a portable alternating temperature sample platform device, including sample platform cavity, setting bottom surface and the bottom surface of setting under the sample platform of sample platform cavity bottom on sample platform cavity top sample bench, the inside laminating in the bottom surface of sample platform cavity sets up temperature regulation apparatus under being located the sample platform, the inside cooling device that is equipped with in the temperature regulation apparatus top that is located of sample platform cavity, sample bench bottom surface top is equipped with sample platform fixing device to it is fixed mutually with vacuum coating machine through sample platform fixing device, sample platform bottom surface bottom is equipped with sample fastener to fix the sample substrate through sample fastener. The utility model has the advantages that: the device design benefit, rational in infrastructure, convenient to use utilizes this device to carry out temperature regulation for the sample, conveniently has satisfied the demand of different substrates temperature when to the coating film, has enlarged the sample kind scope that vacuum coating machine can process.
Description
Technical Field
The utility model relates to a vacuum coating technical field, concretely relates to portable alternating temperature sample platform device.
Background
The vacuum deposition technology is a novel material synthesis and processing technology, is an important component in the technical field of surface engineering, and provides a novel process for preparing a film for scientific research and actual production. Vacuum coating has improved the combining ability of film for wet-type coating method, can control the even degree of film and the thickness of film better to reduced the pollution to the environment, along with the continuous development of vacuum coating technique, the temperature demand of different materials when to coating film processing also is constantly changing, but does not have a portable low temperature at present always or intensifies the sample platform and solve this type of problem, for this reason the utility model provides a solution thinking, based on the refrigerated portable sample platform of semiconductor.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem existing in the prior art, the utility model provides a rational in infrastructure design's a portable alternating temperature sample platform device.
The technical scheme of the utility model as follows:
the utility model provides a portable alternating temperature sample platform device, its characterized in that includes sample platform cavity, sets up in sample platform cavity top sample bench bottom surface and sets up the sample platform bottom surface in sample platform cavity bottom, the inside laminating of bottom surface sets up temperature regulation apparatus under being located the sample platform of sample platform cavity, the inside cooling device that is located the temperature regulation apparatus top that is equipped with of sample platform cavity, sample bench bottom surface top is equipped with sample platform fixing device to it is fixed mutually with vacuum coating machine through sample platform fixing device, bottom surface bottom is equipped with sample fastener under the sample platform to fix the sample substrate through sample fastener.
The portable temperature-changing sample stage device is characterized in that the temperature adjusting device adopts a heating device, the heating device comprises a silica gel electric heating piece and heat-conducting silica gel, and the silica gel electric heating piece is fixed with the bottom surface of the sample stage through the heat-conducting silica gel.
The portable temperature-changing sample stage device is characterized in that the temperature adjusting device adopts a cooling device, the cooling device comprises a conductor refrigerating sheet and heat-conducting silica gel, and the cold surface of the semiconductor refrigerating sheet is fixed with the bottom surface of the sample stage through the heat-conducting silica gel.
The portable temperature-changing sample stage device is characterized in that the sample fastening device comprises a screw rod, a limiting plate and a nut, the screw rod is arranged on the bottom surface under the sample stage in a gluing mode, the limiting plate sleeve is arranged on the screw rod in a sleeved mode, the nut is arranged on the screw rod in a matched mode, and the limiting plate and the bottom surface under the sample stage can be adjusted through the nut.
The portable variable-temperature sample stage device is characterized in that the sample stage fixing device comprises a fixing disc, the fixing disc is arranged on the bottom surface of the sample stage in a gluing mode, and the sample stage is fixed with a vacuum coating machine through the fixing disc.
The portable temperature-changing sample stage device is characterized in that the cooling device comprises a water-cooling pipe and a water-cooling pipe fixing support, and the water-cooling pipe is fixedly arranged in a sample stage cavity through the water-cooling pipe fixing support.
The portable temperature-changing sample stage device is characterized in that a lead guide pipe hole is formed in the outer wall of a sample stage cavity, the temperature adjusting device is connected with an external power supply through the lead guide pipe hole, and the pipe orifice of the water-cooling pipe is connected with a water-cooling machine of a vacuum coating machine through the lead guide pipe hole.
The portable variable-temperature sample stage device is characterized in that a temperature sensor is fixedly arranged at the top of the lower bottom surface of the sample stage.
The utility model has the advantages that: the device design benefit, rational in infrastructure, convenient to use utilizes this device to carry out temperature regulation for the sample, conveniently has satisfied the demand of different substrates temperature when to the coating film, has enlarged the sample kind scope that vacuum coating machine can process, has important meaning to vacuum coating's research field.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic side view of the overall structure of the present invention;
fig. 3 is a schematic diagram of the overall structure of the present invention;
fig. 4 is a schematic structural view of embodiment 1 of the present invention;
fig. 5 is a schematic structural diagram of embodiment 2 of the present invention;
FIG. 6 is a schematic view of the structure of the water cooling tube of the present invention;
in the figure: 1-screw rod, 2-limiting plate, 3-nut, 4-sample stage cavity, 5-lead guide pipe hole, 6-fixed disc, 7-temperature sensor, 8-sample stage lower bottom surface, 9-heat conduction silica gel, 10-silica gel electric heating sheet, 11-semiconductor refrigeration sheet, 12-water cooling tube, 13-sample stage upper bottom surface and 14-water cooling tube fixed support.
Detailed Description
The invention is further described with reference to the accompanying drawings.
Example 1:
as shown in fig. 1, 2, 3, 4, and 6, a portable temperature-changing sample stage device includes a sample stage cavity 4, a sample stage upper bottom surface 13, a sample stage lower bottom surface 8, a heating device, a sample stage fixing device, and a sample fastening device; wherein the upper bottom surface 13 of the sample stage and the lower bottom surface 8 of the sample stage are respectively fixed at the corresponding positions of the upper part and the lower part of the sample stage cavity 4 by glue.
The heating device comprises a silica gel electric heating piece 10 tightly attached to the inner part of the cavity of the bottom surface 8 under the sample platform, the silica gel electric heating piece 10 is fixed with the inner cavity of the bottom surface 8 under the sample platform through heat conduction silica gel 9, and a lead 11 is connected with an external power supply through a lead guide pipe hole 5.
The cooling device comprises a water-cooling tube 12 arranged above the silica gel electric heating sheet 10, and the water-cooling tube 12 is fixed inside the sample table cavity 4 through a water-cooling tube fixing support 14; the pipe orifice of the water-cooling pipe 12 is connected with a water-cooling machine of the vacuum coating machine through the conducting wire guide pipe hole 5 and is used for cooling the sample platform after the vacuum coating work is finished.
The sample fastening device comprises a limiting plate 2 arranged on a nut 1 and a bolt 3 for screwing, a sample base material is clamped and fixed with a nut 1 matched with the bottom surface 8 under the sample platform through the limiting plate 2, and the bolt 3 is glued with the bottom surface 8 under the sample platform through waterproof high-temperature-resistant low-temperature-resistant glue.
The sample stage fixing device is a fixing disc 6 fixed on the upper bottom surface 13 of the sample stage, and the sample stage is fixed with the vacuum coating machine through the fixing disc 6; the fixed disc 6 is glued with the upper bottom surface 13 of the sample table through high-temperature and low-temperature resistant glue and is fixed with the vacuum coating machine through a clamp.
And a temperature sensor 7 is fixedly arranged at the top of the lower bottom surface 8 of the sample table, and is used for monitoring the temperature of a sample base material for film coating in real time.
The working process is as follows:
firstly, according to the requirement of coating conditions, a sample to be coated is placed at the bottom of a sample platform, a pair of limiting plates at the bottom are fastened by a nut and bolt structure, a silica gel electric heating sheet is connected with a power supply, a water-cooling pipe is connected to an original water-cooling machine of a vacuum coating machine and is closed, the water-cooling pipe and a lead are connected with the outside through a lead guide pipe hole, and then the sample platform is fixed with the coating machine through a fixing circular truncated cone at the top. The during operation begins, temperature sensor real-time supervision through the bottom is at the temperature of the sample substrate of carrying out the coating film work, adjusts the coating film demand that silica gel electric heat piece temperature adapted substrate then, after the work, in order to protect the sample platform, consequently opens the water-cooling machine to make sample platform rapid cooling.
Example 2:
as shown in fig. 1, 2, 3, 5 and 6, a portable temperature-changing sample stage device comprises a sample stage cavity 4, a sample stage upper bottom surface 13, a sample stage lower bottom surface 8, a cooling device, a sample stage fixing device and a sample fastening device; wherein the upper bottom surface 13 of the sample stage and the lower bottom surface 8 of the sample stage are respectively fixed at the corresponding positions of the upper part and the lower part of the sample stage cavity 4 by glue.
The cooling device comprises a semiconductor refrigerating sheet 10 tightly attached to the inner part of the cavity of the lower bottom surface 8 of the sample table and a water cooling pipe 12 arranged above the semiconductor refrigerating sheet 10; in the embodiment, the cold surface of the semiconductor refrigeration piece 10 is fixed with the bottom surface 8 of the sample stage through the heat-conducting silica gel 9 in the cavity, the wire is connected with an external direct-current power supply through the wire guide pipe hole 5, the water-cooling pipe 12 is fixed inside the sample stage cavity 4 through the water-cooling pipe fixing support 14 and the water-cooling pipe 12 is arranged above the hot surface of the semiconductor refrigeration piece 10, and the pipe orifice of the water-cooling pipe 12 is connected with a water-cooling machine of a vacuum coating machine through the wire guide pipe hole 5.
The sample fastening device comprises a limiting plate 2 arranged on the screw rod 1 and a nut 3 for screwing, and a sample base material is clamped and fixed by the limiting plate 2 and a lower bottom surface 8 of the sample platform through the nut 2 matched with the bolt 1; the screw rod 1 is glued with a lower bottom surface 8 of the sample table through waterproof high-temperature-resistant low-temperature-resistant glue, and the sample table fixing device is a fixing disc 6 fixed on an upper bottom surface 12 of the sample table. The sample table is fixed with the vacuum coating machine through a fixing disc 6, wherein the disc 6 is glued with the upper bottom surface 12 of the sample table through high-temperature-resistant and low-temperature-resistant glue and is fixed with the vacuum coating machine through a clamp.
And a temperature sensor 7 is fixedly arranged at the top of the lower bottom surface 8 of the sample table, and is used for monitoring the temperature of a sample base material for film coating in real time.
The working process is as follows:
firstly, according to the requirement of coating conditions, a sample to be coated is placed at the bottom of a sample platform, a pair of limiting plates at the bottom is fastened by a nut and bolt structure, a semiconductor refrigerating sheet is connected with a direct current power supply, a water-cooling pipe is connected to an original water-cooling machine of a vacuum coating machine and is opened, the water-cooling pipe and an electric wire are connected with the outside through a wire guide pipe hole, and then the sample platform is fixed with the coating machine through a fixing circular table at the top. When the film coating machine starts to work, the temperature of the base material which is subjected to film coating work is monitored in real time through the temperature sensor at the bottom, and then the temperature of the cold surface of the semiconductor refrigeration piece is adjusted to meet the film coating requirement of the base material.
Claims (8)
1. The utility model provides a portable alternating temperature sample platform device, its characterized in that, includes sample platform cavity (4), sets up bottom surface (13) and bottom surface (8) under the sample platform of setting in sample platform cavity (4) top sample bench bottom surface (4) bottom, inside laminating in bottom surface (8) inboard under being located the sample platform of sample platform cavity (4) sets up temperature regulation apparatus, sample platform cavity (4) is inside to be equipped with cooling device above being located temperature regulation apparatus, sample bench bottom surface (13) top is equipped with sample platform fixing device to it is fixed with the vacuum coating machine through sample platform fixing device, bottom surface (8) bottom is equipped with sample fastener under the sample platform to fix the sample substrate through sample fastener.
2. The portable temperature-changing sample stage device according to claim 1, wherein the temperature adjusting device is a heating device, the heating device comprises a silica gel electric heating sheet (10) and a heat-conducting silica gel (9), and the silica gel electric heating sheet (10) is fixed to the lower bottom surface (8) of the sample stage through the heat-conducting silica gel (9).
3. The portable temperature-changing sample stage device according to claim 1, wherein the temperature adjusting device is a temperature reducing device, the temperature reducing device comprises a semiconductor refrigerating sheet (11) and a heat-conducting silica gel (9), and a cold surface of the semiconductor refrigerating sheet (11) is fixed to a lower bottom surface (8) of the sample stage through the heat-conducting silica gel (9).
4. The portable temperature-changing sample stage device according to claim 1, wherein the sample fastening device comprises a screw (1), a limiting plate (2) and a nut (3), the screw (1) is glued on the bottom surface (8) under the sample stage, the limiting plate (2) is sleeved on the screw (1), the nut (3) is arranged on the screw (1) in a matching manner, and the limiting plate (2) and the bottom surface (8) under the sample stage can be adjusted through the nut (3).
5. The portable temperature-changing sample stage device according to claim 1, wherein the sample stage fixing device comprises a fixed disk (6), the fixed disk (6) is arranged on the upper bottom surface (13) of the sample stage in a gluing mode, and the sample stage is fixed with the vacuum coating machine through the fixed disk (6).
6. The portable temperature-changing sample stage device according to claim 1, wherein the cooling device comprises a water-cooling tube (12) and a water-cooling tube fixing bracket (14), and the water-cooling tube (12) is fixedly arranged in the sample stage cavity (4) through the water-cooling tube fixing bracket (14).
7. The portable temperature-changing sample stage device according to claim 6, wherein the outer wall of the sample stage cavity (4) is provided with a lead conduit hole (5), the temperature adjusting device is connected with an external power supply through the lead conduit hole (5), and the orifice of the water-cooling tube (12) is connected with a water-cooling machine of a vacuum coating machine through the lead conduit hole (5).
8. The portable temperature-changing sample stage device according to claim 1, wherein a temperature sensor (7) is fixedly arranged on the top of the lower bottom surface (8) of the sample stage.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020097170 | 2020-01-16 | ||
| CN2020200961809 | 2020-01-16 | ||
| CN2020200971707 | 2020-01-16 | ||
| CN202020096180 | 2020-01-16 |
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| Publication Number | Publication Date |
|---|---|
| CN212357379U true CN212357379U (en) | 2021-01-15 |
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| CN202021126000.3U Active CN212357379U (en) | 2020-01-16 | 2020-06-17 | Portable temperature-changing sample stage device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111501002A (en) * | 2020-01-16 | 2020-08-07 | 浙江工业大学 | Portable temperature-changing sample stage device |
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- 2020-06-17 CN CN202021126000.3U patent/CN212357379U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111501002A (en) * | 2020-01-16 | 2020-08-07 | 浙江工业大学 | Portable temperature-changing sample stage device |
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