CN219849000U - Multi-channel gas mixing device - Google Patents

Abstract

The utility model discloses a multi-channel gas mixing device, which comprises a plurality of gas mixing proportion control modules, wherein the plurality of gas mixing proportion control modules are arranged along the left-right direction, and each gas mixing proportion control module comprises: the flow channel block is provided with a first through hole and a second through hole which penetrate through the flow channel block along the left-right direction, one end of the first through hole is provided with a first inlet, the other end of the first through hole is provided with a first outlet, one end of the second through hole is provided with a second inlet, the other end of the second through hole is provided with a second outlet, the first inlet of one of two adjacent gas mixing proportion control modules is connected with the first outlet of the other one, and a first flow channel and a second flow channel are arranged in the flow channel block; the mixing cavity is provided with a mixing outlet and is respectively communicated with the first flow passage and the second flow passage. The multi-channel gas mixing device provided by the embodiment of the utility model has the advantages of strong reliability, high accuracy and the like.

Description

Multi-channel gas mixing device

Technical Field

The utility model relates to the technical field of manufacturing of specific surface area measurement equipment, in particular to a multi-channel gas mixing device.

Background

The specific surface area meter mixes the adsorbed gas such as nitrogen and the carrier gas such as helium, so that the mixed gas flows through the surface of the sample to be measured, the amount of the nitrogen adsorbed and desorbed by the sample is detected to reflect the amount of the nitrogen adsorbed on the surface of the sample, the specific surface area of the sample is obtained by calculation, and the flow control of the nitrogen and the helium directly influences the detection precision of the specific surface area meter.

A multichannel gas mixing device such as be used for specific surface appearance among the correlation technique realizes detecting the multiunit sample simultaneously through setting up multiunit parallel gas circuit, and every group gas circuit adopts tubular product such as copper pipe to connect nitrogen gas and helium air supply to mix helium and nitrogen gas, but the internal diameter processing uniformity of tubular product is relatively poor, leads to the gas flow between the different groups to produce the error, produces great difference in temperature between the different groups gas circuit moreover easily, leads to mixing device's whole temperature homogeneity relatively poor, further leads to the gas flow difference between the different groups gas circuit, influences the accuracy of specific surface appearance's testing result.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the multi-channel gas mixing device which has the advantages of high reliability, high accuracy and the like.

To achieve the above object, according to an embodiment of the present utility model, there is provided a multi-channel gas mixing apparatus including a plurality of gas mixing ratio control modules, a plurality of the gas mixing ratio control modules being arranged in a left-right direction, adjacent two of the gas mixing ratio control modules being detachably connected, each of the gas mixing ratio control modules including: the flow channel block is provided with a first through hole and a second through hole which penetrate through the flow channel block along the left-right direction, one end of the first through hole is provided with a first inlet, the other end of the first through hole is provided with a first outlet, one end of the second through hole is provided with a second inlet, the other end of the second through hole is provided with a second outlet, the first inlet of one of two adjacent gas mixing proportion control modules is connected with the first outlet of the other one, the first inlet is communicated with a first gas source, the second inlet is communicated with a second gas source, and a first flow channel and a second flow channel are arranged in the flow channel block; the mixing cavity is provided with a mixing outlet, and the mixing cavity is respectively communicated with the first flow channel and the second flow channel.

The multi-channel gas mixing device provided by the embodiment of the utility model has the advantages of high reliability, high accuracy and the like.

In addition, the multi-channel gas mixing device according to the above embodiment of the present utility model may have the following additional technical features:

according to one embodiment of the present utility model, each of the gas mixture ratio control modules further includes: the first flow control device is arranged outside the flow passage block and is communicated with the first flow passage; and the second flow control device is arranged outside the flow passage block and is communicated with the second flow passage.

According to an embodiment of the present utility model, the first flow control device includes a first proportional valve provided outside the flow block and communicating with the first flow passage, and a first flow meter provided outside the flow block and communicating with the first flow passage, the first flow meter being electrically connected with the first proportional valve, and the second flow control device includes a second proportional valve provided outside the flow block and communicating with the second flow passage, and a second flow meter provided outside the flow block and communicating with the second flow passage, the second flow meter being electrically connected with the second proportional valve.

According to one embodiment of the utility model, sealing rings are arranged at both ends of the first through hole and both ends of the second through hole.

According to one embodiment of the utility model, two adjacent runner blocks are connected by a threaded fastener.

According to one embodiment of the utility model, a locating pin is arranged between two adjacent runner blocks.

According to one embodiment of the utility model, the first via is located above the second via.

According to one embodiment of the utility model, the runner block is an aluminum material piece.

According to one embodiment of the utility model, the first flow meter and the first proportional valve are electrically connected by a PID controller and the second flow meter and the second proportional valve are electrically connected by a PID controller.

According to one embodiment of the utility model, the multi-channel gas mixing device is a multi-channel gas mixing device for a specific surface meter.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

fig. 1 is a schematic diagram of a gas mixing ratio control module according to an embodiment of the present utility model.

Fig. 2 is a schematic diagram of a gas mixing ratio control module according to an embodiment of the present utility model.

Fig. 3 is a schematic view of the structure of a flow block of a gas mixing ratio control module according to an embodiment of the present utility model.

Fig. 4 is a partial structural schematic diagram of a gas mixing ratio control module according to an embodiment of the present utility model.

Fig. 5 is a schematic structural view of a first separator of a gas mixing ratio control module according to an embodiment of the present utility model.

Fig. 6 is a schematic structural view of a multi-channel gas mixing device according to an embodiment of the present utility model.

Reference numerals: the multi-channel gas mixing device 1, the gas mixing proportion control module 10, the mixing cavity 100, the mixing outlet 110, the flow channel block 200, the first flow channel 210, the first longitudinal front blind hole front section 211, the first vertical flow meter front blind hole 212, the first vertical flow meter rear blind hole 213, the first longitudinal front blind hole rear section 214, the first vertical proportional valve front blind hole 215, the first vertical proportional valve rear blind hole 216, the first longitudinal rear blind hole 217, the first blind slot 218, the second flow channel 220, the second longitudinal front blind hole front section 221, the second vertical flow meter front blind hole 222, the second vertical flow meter rear blind hole 223, the second longitudinal front blind hole rear section 225, the second vertical proportional valve front blind hole 225 the second vertical proportional valve rear blind hole 226, the second vertical proportional valve rear blind hole 227, the second blind groove 228, the first through hole 230, the first inlet 231, the first outlet 232, the second through hole 240, the second inlet 241, the second outlet 242, the first flowmeter 311, the first proportional valve 312, the second flowmeter 321, the second proportional valve 322, the first partition 410, the partition 411, the positioning part 412, the second partition 420, the sealing ring 430, the blocking piece 440, the positioning pin 450, the first pressure reducing valve 21, the second pressure reducing valve 22, the first pressure stabilizing valve 31, the second pressure stabilizing valve 32, the first electromagnetic valve 41, the second electromagnetic valve 42, the first air source 2, the second air source 3.

Detailed Description

The present utility model has been made based on the findings and knowledge of the inventors regarding the following facts and problems:

the specific surface area meter mixes the adsorbed gas such as nitrogen and the carrier gas such as helium, so that the mixed gas flows through the surface of the sample to be measured, the amount of the nitrogen adsorbed and desorbed by the sample is detected to reflect the amount of the nitrogen adsorbed on the surface of the sample, the specific surface area of the sample is obtained by calculation, and the flow control of the nitrogen and the helium directly influences the detection precision of the specific surface area meter.

A multichannel gas mixing device such as be used for specific surface appearance among the correlation technique realizes detecting the multiunit sample simultaneously through setting up multiunit parallel gas circuit, and every group gas circuit adopts tubular product such as copper pipe to connect nitrogen gas and helium air supply to mix helium and nitrogen gas, but the internal diameter processing uniformity of tubular product is relatively poor, leads to the gas flow between the different groups to produce the error, produces great difference in temperature between the different groups gas circuit moreover easily, leads to mixing device's whole temperature homogeneity relatively poor, further leads to the gas flow difference between the different groups gas circuit, influences the accuracy of specific surface appearance's testing result.

In addition, the specific surface meter needs to control the partial pressure of each component in the mixed gas, and needs to adjust the partial pressure ratio of each component in the mixed gas when necessary, and also needs to control or adjust the pressure of the whole mixed gas.

A gas mixing proportion control module such as used for a surface area meter in the related art controls the flow of each component in mixed gas by partially adopting a steady flow valve based on motor driving, thereby realizing the purpose of controlling partial pressure and proportion thereof; however, the steady flow valve has long-term drift, so that the problem of baseline drift of a test curve is solved, the resolution of flow adjustment of the steady flow valve is insufficient, the partial pressure control accuracy of each component in the mixed gas is influenced, and the linearity of fitting of the multi-point specific surface area test curve is influenced. So that the detection accuracy and repeatability of the instrument are limited.

Some gas mixing ratio control modules, such as those used in a specific surface area meter, use mass flow controllers to control the flow of the components in the mixed gas, but the mass flow controllers are costly.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

A multi-channel gas mixing device 1 according to an embodiment of the present utility model is described below with reference to the accompanying drawings.

As shown in fig. 1 to 6, the multi-channel gas mixing apparatus 1 according to the embodiment of the present utility model includes a plurality of gas mixing ratio control modules 10, the plurality of gas mixing ratio control modules 10 are arranged in a left-right direction (up-down, front-back, and left-right directions are shown by arrows in the drawing and are for convenience of description only and are not limited to an actual arrangement direction), and adjacent two gas mixing ratio control modules 10 are detachably connected, each gas mixing ratio control module 10 including a flow path block 200 and a mixing chamber 100.

The flow channel block 200 is provided with a first through hole 230 and a second through hole 240 penetrating the flow channel block 200 in the left-right direction, one end of the first through hole 230 forms a first inlet 231 and the other end forms a first outlet 232, one end of the second through hole 240 forms a second inlet 241 and the other end forms a second outlet 242, the first inlet 231 of one of the two adjacent gas mixing ratio control modules 10 is connected with the first outlet 232 of the other, the first inlet 231 is communicated with the first gas source 2, the second inlet 241 is communicated with the second gas source 3, and the flow channel block 200 is internally provided with a first flow channel 210 and a second flow channel 220. The mixing chamber 100 is provided with a mixing outlet 110, the mixing chamber 100 being in communication with a first flow channel 210 and a second flow channel 220, respectively.

Specifically, as shown in fig. 6, the gas in the first gas source 2 enters the leftmost flow block 200 through the first inlet 231 of the first through hole 230 located at the leftmost side and is transferred to the plurality of flow blocks 200 through the plurality of first through holes 230 connected in sequence, the gas in the second gas source 3 enters the leftmost flow block 200 through the second inlet 241 of the second through hole 240 located at the leftmost side and is transferred to the plurality of flow blocks 200 through the plurality of second through holes 240 connected in sequence, in each gas mixing ratio control module 10, the gas in the first through hole 230 is transferred to the mixing chamber 100 through the first flow channel 210, the gas in the second through hole 240 is transferred to the mixing chamber 100 through the second flow channel 220, and the two gases are discharged through the mixing outlet 110 after being mixed in the mixing chamber 100. The first gas source 2 is preferably a nitrogen gas source and the second gas source 3 is preferably a helium gas source.

According to the multi-channel gas mixing device 1 of the embodiment of the utility model, by arranging the flow channel blocks 200, the first flow channel 210, the second flow channel 220 and the first through hole 230 and the second through hole 240 for gas transmission between the adjacent flow channel blocks 200 are formed by opening holes in the block flow channel blocks 200, compared with the mode of mixing different gas sources by connecting pipes in the related art, the processing consistency of the inner diameters of the first flow channel 210, the second flow channel 220, the first through hole 230 and the second through hole 240 formed by opening holes in the flow channel blocks 200 is better, the inner diameters of the first flow channel 210, the second flow channel 220, the first through hole 230 and the second through hole 240 are more uniform, so that the flow rate of gas is not easy to fluctuate when flowing through the first flow channel 210, the second flow channel 220, the first through hole 230 and the second through hole 240, the content control of each component in the mixed gas is more accurate and reliable, and the error of a specific surface meter is facilitated to be reduced.

And, through setting up runner block 200, trompil forms first runner 210, second runner 220, first through-hole 230 and second through-hole 240 in massive runner block 200, compare the mode that mixes through the tubular product connection different air sources in the correlation technique, the heat can spread runner block 200 more evenly, make runner block 200 holistic temperature more even, avoid local temperature uneven to lead to the internal diameter to change and make the gas flow produce undulant, further improve the accuracy of the content of each component in the mixed gas, improve the accuracy that the specific surface appearance detected.

In addition, because the multiple groups of gas paths are realized by the combination of the multiple flow path blocks 200, on one hand, the simultaneous mixed transportation of multiple groups of gas can be conveniently realized, the simultaneous detection of multiple groups of samples of a specific surface meter is conveniently realized, on the other hand, after the multiple flow path blocks 200 are connected, compared with the mode of pipe connection in the related art, the heat transfer between the flow path blocks 200 is easier, the temperature between the multiple flow path blocks 200 is more uniform, the temperature difference between different groups of gas paths is smaller, and the difference between parallel gas paths can be conveniently reduced, so that the system error between each gas path is reduced, and the multi-channel gas mixing device 1 is more accurate and reliable.

Therefore, the multi-channel gas mixing device 1 according to the embodiment of the utility model has the advantages of strong reliability, high accuracy and the like.

A multi-channel gas mixing device 1 according to an embodiment of the present utility model is described below with reference to the accompanying drawings.

In some embodiments of the present utility model, as shown in fig. 1 to 6, a multi-channel gas mixing apparatus 1 according to an embodiment of the present utility model includes a plurality of gas mixing ratio control modules 10, the plurality of gas mixing ratio control modules 10 being arranged in a left-right direction, adjacent two gas mixing ratio control modules 10 being detachably connected, each gas mixing ratio control module 10 including a flow channel block 200 and a mixing chamber 100.

Specifically, as shown in fig. 1 and 2, each of the gas mixture ratio control modules 10 further includes a first flow rate control device and a second flow rate control device. The first flow control device is disposed outside the flow block 200 and communicates with the first flow channel 210. The second flow control device is disposed outside the flow block 200 and communicates with the second flow channel 220. Thus, the gas flow rates of the first flow channel 210 and the second flow channel 220 can be controlled by the first flow rate control device and the second flow rate control device, respectively, so that the component ratio of each gas in the mixed gas can be controlled. By arranging the first flow control device and the second flow control device outside the flow channel block 200, on one hand, the installation of the first flow control device and the second flow control device can be facilitated, and on the other hand, the influence of the heat generated by the first flow control device and the second flow control device on the flow channel block 200 can be reduced, so that the influence of the heat generated by the first flow control device and the second flow control device on the gas flow is reduced, the accuracy of the component content in the mixed gas is further improved, and the accuracy of the detection of the specific surface meter is improved.

It will be appreciated by those skilled in the art that a portion of the heat of the first and second flow control devices mounted outside of the flow block 200 may also be transferred to the flow block 200, but the errors may be eliminated by a temperature compensation algorithm.

More specifically, as shown in fig. 1 and 2, the first flow control device includes a first proportional valve 312 and a first flow meter 311, the first proportional valve 312 is disposed outside the flow path block 200 and communicates with the first flow path 210, the first flow meter 311 is electrically connected with the first proportional valve 312, the second flow control device includes a second proportional valve 322 and a second flow meter 321, the second proportional valve 322 is disposed outside the flow path block 200 and communicates with the second flow path 220, the second flow meter 321 is disposed outside the flow path block 200 and communicates with the second flow path 220, and the second flow meter 321 is electrically connected with the second proportional valve 322. Thus, the opening degree of the proportional valve can be controlled by the detection value of the flowmeter until the difference value between the actual detection value of the flowmeter and the target set value is close to zero, so that the accurate control of each gas flow is realized. Compared with the technical scheme of controlling the gas flow by adopting a motor-driven steady flow valve in the related art, the method adopting the flowmeter and the proportional valve has higher precision and better accuracy, and compared with the technical scheme of controlling the gas flow by adopting a mass flow controller in the related art, the method adopting the flowmeter and the proportional valve has lower cost.

Further, the first flowmeter 311 and the first proportional valve 312 are electrically connected through a PID controller, and the second flowmeter 321 and the second proportional valve 322 are electrically connected through a PID controller. Specifically, the difference between the detection result of the flowmeter and the target set value is used as an input signal of a PID controller, an output signal of the PID controller is used for controlling the opening degree of the proportional valve, and the PID controller controls the opening degree of the proportional valve to enable the difference between the actual measurement value of the flowmeter and the target set value to be 0, so that accurate control of flow is achieved. When the ratio of nitrogen to helium needs to be regulated, only the target set value of nitrogen and the target set value of helium need to be set according to the requirement, and the PID controller can automatically control the proportional valve, so that the actually measured flow of the flowmeter can quickly reach the target set value.

Advantageously, as shown in fig. 2 and 4, both ends of the first through hole 230 and both ends of the second through hole 240 are provided with sealing rings 430. This can improve the sealing of the connection between the adjacent two flow path blocks 200.

More advantageously, adjacent two of the flow blocks 200 are connected by threaded fasteners. This can facilitate the compression of two adjacent runner blocks 200 with each other, and further facilitate the improvement of the sealing of the connection between the runner blocks 200.

Further, as shown in fig. 3, a positioning pin 450 is provided between two adjacent runner blocks 200. In this way, the two adjacent runner blocks 200 can be conveniently positioned, the two adjacent runner blocks 200 can be conveniently connected, and the stability of the connected runner blocks 200 is improved.

Optionally, as shown in fig. 3, the first via 230 is located above the second via 240. This may facilitate the processing of the first and second through holes 230 and 240.

Further, the runner block 200 is an aluminum material piece. This can make the heat transfer of the flow channel block 200 more uniform, and can make the flow channel block 200 have a higher specific heat capacity, making the flow channel block 200 less susceptible to environmental temperature fluctuations.

Specifically, the flow block 200 may be machined from a pallet.

Alternatively, the multi-channel gas mixing device 1 is a multi-channel gas mixing device for a specific surface meter.

Fig. 3 illustrates a gas mixing ratio control module 10 according to some examples of the utility model. As shown in fig. 3, a first longitudinal front blind hole, a first longitudinal rear blind hole 217, a first vertical flowmeter front blind hole 212, a first vertical flowmeter rear blind hole 213, a first vertical proportional valve front blind hole 215, a first vertical proportional valve rear blind hole 216 (the up-down, front-rear and left-right directions are shown by arrows in the figure and are only for convenience of description, and are not limited to the actual setting direction), a first spacer 410 is provided on the runner block 200, the first longitudinal front blind hole is divided into a first longitudinal front blind hole front section 211 and a first longitudinal front blind hole rear section 214 by the first longitudinal front blind hole front section 211, the first vertical flowmeter front blind hole 212, the first vertical flowmeter rear blind hole 213, the first longitudinal front blind hole rear section 214, the first vertical proportional valve front blind hole 215, the first vertical proportional valve rear blind hole 216 and the first longitudinal rear blind hole 217, the front end of the first longitudinal front blind hole 211 is communicated with the mixing cavity 100 and the rear end is connected with the first vertical flowmeter front blind hole 212, the first longitudinal front blind hole 214 is connected with the first vertical proportional valve front blind hole 213 and the first vertical proportional valve rear blind hole 213, the first longitudinal front blind hole 213 is connected with the first vertical proportional valve front blind hole 213 and the first vertical proportional valve rear blind hole 215, and the first longitudinal proportional valve front blind hole 215 is connected with the first longitudinal proportional valve front end 213. The flow channel block 200 is provided with a second longitudinal front blind hole, a second longitudinal rear blind hole 227, a second vertical flow meter front blind hole 222, a second vertical flow meter rear blind hole 223, a second vertical proportional valve front blind hole 225 and a second vertical proportional valve rear blind hole 226, the flow channel block 200 is provided with a second spacer 420, the second longitudinal front blind hole is divided into a second longitudinal front blind hole front section 221 and a second longitudinal front blind hole rear section 224 by the second longitudinal front blind hole front section 221, the second vertical flow meter front blind hole 222, the second vertical flow meter rear blind hole 223, the second longitudinal front blind hole rear section 224, the second vertical proportional valve front blind hole 225, the second vertical proportional valve rear blind hole 226 and the second longitudinal rear blind hole 227, the front end of the second longitudinal front blind hole front section 221 is communicated with the mixing cavity 100 and the rear end is connected with the second vertical flow meter front blind hole 222, the front end of the second longitudinal front blind hole rear section 224 is connected with the second vertical flow meter rear blind hole 223 and the rear end is connected with the second vertical proportional valve front blind hole 225, the second longitudinal front blind hole 321 is connected with the second vertical proportional valve front blind hole 226 and the second vertical proportional valve front blind hole 226, the second longitudinal proportional valve front blind hole 226 is connected with the second vertical proportional valve front blind hole 223 and the second vertical proportional valve front blind hole 223 respectively. Specifically, the longitudinal direction is the front-rear direction. Thus, the main body portions of the first flow channel 210 and the second flow channel 220 can be formed through the longitudinal blind holes, and the flow channels connected to the outside of the flow channel block 200 can be formed through the vertical blind holes, so that the connection between the flowmeter and the proportional valve is facilitated, and the air flow can be prevented from directly passing through the first longitudinal front blind holes and the second longitudinal front blind holes through the first spacer 410 and the second spacer 420, so that the air flow can be conveniently bypassed through the flowmeter. Therefore, the first flow channel 210 and the second flow channel 220 can be formed conveniently, blind holes are formed, and machining consistency is better.

Further, as shown in fig. 3 and 4, the flow channel block 200 is provided with a first blind groove 218 and a second blind groove 228, the first blind groove 218 is communicated with the first longitudinal front blind hole, the second blind groove 228 is communicated with the second longitudinal front blind hole, the first spacer 410 is matched in the first blind groove 218, and the second spacer 420 is matched in the second blind groove 228. This may facilitate the installation of the first and second spacers 410 and 420.

Specifically, as shown in fig. 5, each of the first and second spacers 410 and 420 may include a spacer 411 and a positioning portion 412, the spacer 411 may be used to isolate the first or second longitudinal front blind holes, the positioning portion 412 may be used to position the spacer, a sink groove may be further provided around the first and second blind grooves 218 and 228, and the positioning portion 412 may be fitted in the sink groove.

Specifically, as shown in fig. 3, the mixing chamber 100 is connected to the front end of the flow channel block 200, the first inlet 231 is communicated with the first longitudinal rear blind hole 217, the second inlet 241 is communicated with the second longitudinal rear blind hole 227, and the rear ends of the first longitudinal rear blind hole 217 and the second longitudinal rear blind hole 227 are provided with a blocking member 440. This allows communication between the first inlet 231 and the first flow channel 210 and between the second inlet 241 and the second flow channel 220, and the blocking member 440 prevents leakage of gas from the rear ends of the first and second longitudinal rear blind holes 217 and 227.

Advantageously, as shown in fig. 4, the first spacer 410 and the second spacer 420 are flexible members, and the first inlet 231, the blocking member 440, the front end of the first longitudinal front blind hole, the front end of the second longitudinal front blind hole, the outer end of the first vertical flow meter front blind hole 212, the outer end of the first vertical flow meter rear blind hole 213, the outer end of the first vertical proportional valve front blind hole 215, the outer end of the first vertical proportional valve rear blind hole 216, the outer end of the second vertical flow meter front blind hole 222, the outer end of the second vertical flow meter rear blind hole 223, the outer end of the second vertical proportional valve front blind hole 225, and the outer end of the second vertical proportional valve rear blind hole 226 are each provided with a sealing ring 430. Specifically, the vertical blind holes may be in communication with the upper or lower surface of the flow block 200, and fig. 4 shows an embodiment in which the vertical blind holes are each in communication with the upper surface of the flow block 200, with the "outer end" being the upper end. This can facilitate improving the sealability of the flow block 200.

Alternatively, as shown in fig. 2 to 4, the first longitudinal front blind hole and the first longitudinal rear blind hole 217 are coaxially disposed, the second longitudinal front blind hole and the second longitudinal rear blind hole 227 are coaxially disposed, and the position height of the first longitudinal front blind hole and the first longitudinal rear blind hole 217 in the up-down direction is higher than the position height of the second longitudinal front blind hole and the second longitudinal rear blind hole 227. This may facilitate the processing of the blind holes and the formation of the first and second flow channels 210, 220 within the flow block 200.

Specifically, the first through hole 230 may pass through the first longitudinal rear blind hole 217, and the second through hole 240 may pass through the second longitudinal rear blind hole 227. Communication of the first through-hole 230 with the first flow channel 210 and communication of the second through-hole 240 with the second flow channel 220 may thereby be facilitated.

Other constructions and operations of the multi-channel gas mixing device 1 according to the embodiments of the present utility model are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. The utility model provides a multichannel gas mixing device which characterized in that, includes a plurality of gas mixing proportion control module, a plurality of gas mixing proportion control module is arranged along controlling the direction, and two adjacent gas mixing proportion control module detachably connects, every gas mixing proportion control module includes:

the flow channel block is provided with a first through hole and a second through hole which penetrate through the flow channel block along the left-right direction, one end of the first through hole is provided with a first inlet, the other end of the first through hole is provided with a first outlet, one end of the second through hole is provided with a second inlet, the other end of the second through hole is provided with a second outlet, the first inlet of one of two adjacent gas mixing proportion control modules is connected with the first outlet of the other one, the first inlet is communicated with a first gas source, the second inlet is communicated with a second gas source, and a first flow channel and a second flow channel are arranged in the flow channel block;

the mixing cavity is provided with a mixing outlet, and the mixing cavity is respectively communicated with the first flow channel and the second flow channel.

2. The multi-channel gas mixing device of claim 1, wherein each of the gas mixing ratio control modules further comprises:

the first flow control device is arranged outside the flow passage block and is communicated with the first flow passage;

and the second flow control device is arranged outside the flow passage block and is communicated with the second flow passage.

3. The multi-channel gas mixing device of claim 2, wherein the first flow control device comprises a first proportional valve and a first flow meter, the first proportional valve is disposed outside the flow block and is in communication with the first flow channel, the first flow meter is electrically connected with the first proportional valve, the second flow control device comprises a second proportional valve and a second flow meter, the second proportional valve is disposed outside the flow block and is in communication with the second flow channel, the second flow meter is disposed outside the flow block and is in communication with the second flow channel, and the second flow meter is electrically connected with the second proportional valve.

4. The multi-channel gas mixing device of claim 1, wherein both ends of the first through hole and both ends of the second through hole are provided with sealing rings.

5. The multi-channel gas mixing device of claim 1, wherein adjacent two of the flow channel blocks are connected by threaded fasteners.

6. The multi-channel gas mixing device of claim 1, wherein a locating pin is provided between two adjacent flow channel blocks.

7. The multi-channel gas mixing device of claim 1, wherein the first through-hole is located above the second through-hole.

8. The multi-channel gas mixing device of claim 1, wherein the flow block is an aluminum material piece.

9. A multi-channel gas mixing device as recited in claim 3 wherein the first flow meter and the first proportional valve are electrically connected by a PID controller and the second flow meter and the second proportional valve are electrically connected by a PID controller.

10. The multi-channel gas mixing device of claim 1, wherein the multi-channel gas mixing device is a multi-channel gas mixing device for a specific surface instrument.