CN219817199U

CN219817199U - Cleaning arm structure of semiconductor cleaning equipment and semiconductor cleaning equipment

Info

Publication number: CN219817199U
Application number: CN202223324067.XU
Authority: CN
Inventors: 陈忠明; 宋爱军; 赵宏宇; 张敬博; 李欢; 郑洪�; 王瑞轩
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2022-12-12
Filing date: 2022-12-12
Publication date: 2023-10-13
Anticipated expiration: 2032-12-12

Abstract

The utility model discloses a cleaning arm mechanism of semiconductor cleaning equipment and the semiconductor cleaning equipment, and relates to the technical field of semiconductors, wherein the cleaning arm mechanism comprises a driving component and a cleaning arm rotating component which are arranged on an installation bottom plate, the driving component and the cleaning arm rotating component are transmitted through a transmission belt, the driving component is connected with the installation bottom plate through an installation component, a tensioning block is arranged on the installation component and is in threaded connection with a tensioning screw, and a stop block is arranged on the installation bottom plate and is used for propping against the threaded end of the tensioning screw; the problem of among the prior art wash arm structure can only rely on operator's experience to confirm the adjustment volume when carrying out the tensioning adjustment of drive belt, and the adjustment volume is difficult for carrying out accurate control, can't carry out fine adjustment is solved.

Description

Cleaning arm structure of semiconductor cleaning equipment and semiconductor cleaning equipment

Technical Field

The utility model belongs to the technical field of semiconductors, and particularly relates to a cleaning arm structure of semiconductor cleaning equipment and the semiconductor cleaning equipment.

Background

In semiconductor cleaning equipment, a cleaning Arm structure (Arm structure) of a single-chip cleaning machine is an important structure of the single-chip cleaning machine, and stability of the cleaning Arm structure influences a Wafer (Wafer) cleaning effect and influences Wafer yield. Therefore, as a synchronous pulley for driving the cleaning arm to rotate, the tensioning degree is particularly critical, and if the synchronous belt is loosened in the time of not being maintained, the cleaning arm can not be driven to rotate even because of unstable rotation of the cleaning arm, and the process of a customer is affected.

The existing cleaning arm structure is characterized in that a long waist hole is formed in a mounting plate of a driving assembly of the existing cleaning arm structure, a threaded hole matched with the long waist hole is formed in a mounting bottom plate, and the mounting plate and the mounting bottom plate are connected by penetrating the long waist hole through a screw and fastening the screw in the threaded hole; the cleaning arm rotating assembly is arranged on the mounting bottom plate and used for driving the cleaning arm pipe to rotate, and the driving assembly drives the cleaning arm rotating assembly through the synchronous belt wheels and the driving belt. When tensioning adjustment is performed, the screw is loosened, the mounting plate can move relative to the mounting bottom plate, the tensioning degree of the driving belt is adjusted, and the screw is screwed down after adjustment. The tensioning adjustment can only be determined by the experience of an operator, the adjustment amount is not easy to accurately control, and fine adjustment cannot be performed.

Disclosure of Invention

The utility model aims to overcome the defects in the prior art, and provides a cleaning arm mechanism of semiconductor cleaning equipment and the semiconductor cleaning equipment, which solve the problems that the cleaning arm mechanism in the prior art can only determine the adjustment amount by virtue of the experience of an operator when the tension adjustment of a driving belt is carried out, the adjustment amount is difficult to accurately control and cannot be finely adjusted.

In order to achieve the above object, the present utility model provides a cleaning arm mechanism of a semiconductor cleaning apparatus, the cleaning arm mechanism comprising a driving assembly and a cleaning arm rotating assembly which are disposed on a mounting base plate, wherein the driving assembly and the cleaning arm rotating assembly are driven by a driving belt, the driving assembly is connected with the mounting base plate by a mounting member, a tensioning block is disposed on the mounting member, a tensioning screw is in threaded connection with the tensioning block, and a tensioning screw is disposed on the mounting base plate

A stop opposite the tensioning block;

one end of the tensioning screw, which extends out of the tensioning block, is used for abutting against the stop block so as to adjust the tension of the driving belt.

Optionally, one of the mounting component and the mounting bottom plate is provided with a guide block, the other one is provided with a guide groove extending along the tensioning direction of the driving belt, and the guide block is slidably arranged in the guide groove.

Optionally, the guide way extends along the horizontal direction, the guide way with the guide block is provided with two respectively, and two the axis of guide way is parallel to each other, and two the guide block is in vertical direction interval arrangement.

Optionally, the mounting component includes first mounting panel and second mounting panel, first mounting panel with the second mounting panel is connected and is formed the L shaped plate, first mounting panel is used for connecting drive assembly, the second mounting panel with mounting plate can dismantle the connection, the tensioning piece sets up on the first mounting panel, the guide block sets up on the second mounting panel.

Optionally, one of the second mounting plate and the mounting bottom plate is provided with at least one long waist-shaped mounting groove, the other one is provided with a first mounting hole matched with the long waist-shaped mounting groove, and the second mounting plate is connected with the mounting bottom plate through mounting screws penetrating through the long waist-shaped mounting groove and the first mounting hole.

Optionally, two pairs of long kidney-shaped mounting grooves are formed in the second mounting plate, each pair of long kidney-shaped mounting grooves are symmetrically formed in two sides of the second mounting plate, and the mutually-far ends of each pair of long kidney-shaped mounting grooves are open to form an open groove structure.

Optionally, the guide groove is a long waist hole formed in the mounting bottom plate, the guide block is a rectangular block protruding out of the surface of the mounting part, and the axis of the long waist hole is parallel to the axis of the tensioning screw.

Optionally, the driving assembly comprises a driving motor, a speed reducer and a first belt wheel which are sequentially connected, and the speed reducer is fixed on the mounting component; the cleaning arm rotating assembly comprises a rotating shaft which is rotationally connected with the mounting bottom plate, a second belt wheel is sleeved on the rotating shaft, and the transmission belt is matched with the first belt wheel and the second belt wheel.

Optionally, a nut is screwed on the tensioning screw, and the nut is located between the tensioning block and the stop block.

The utility model also provides semiconductor cleaning equipment, which comprises the cleaning arm structure of the semiconductor cleaning equipment.

The utility model provides a cleaning arm structure of semiconductor cleaning equipment and the semiconductor cleaning equipment, which have the beneficial effects that: the cleaning arm structure of the semiconductor cleaning equipment is provided with a tensioning block arranged on the mounting part and a stop block arranged on the mounting bottom plate, the tensioning screw penetrates through the tensioning block and is in threaded connection with the tensioning block, the threaded end of the tensioning screw abuts against the stop block by screwing the tensioning screw, the tensioning block and the mounting part can move relative to the mounting bottom plate by utilizing the abutting reaction force, and the driving assembly is driven to move in a direction far away from the cleaning arm rotating assembly, so that tensioning adjustment of a transmission belt is realized; the tensioning adjustment utilizes the thread spacing of the tensioning screw to facilitate accurate control of adjustment quantity, and fine adjustment can be achieved.

Additional features and advantages of the utility model will be set forth in the detailed description which follows.

Drawings

The foregoing and other objects, features and advantages of the utility model will be apparent from the following more particular descriptions of exemplary embodiments of the utility model as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the utility model.

Fig. 1 shows a schematic overall structure of a cleaning arm mechanism of a semiconductor cleaning apparatus according to an embodiment of the present utility model.

Fig. 2 is a schematic view showing a mounting structure of a mounting part and a stopper of a cleaning arm mechanism of a semiconductor cleaning apparatus on a mounting base plate according to an embodiment of the present utility model.

Fig. 3 shows an exploded view of the view of fig. 2.

Fig. 4 shows an exploded view of the other view of fig. 2.

Fig. 5 shows a schematic structural view of a mounting part of a cleaning arm mechanism of a semiconductor cleaning apparatus according to an embodiment of the present utility model.

Fig. 6 shows a schematic structural view of a driving assembly of a cleaning arm mechanism of a semiconductor cleaning apparatus according to an embodiment of the present utility model.

Fig. 7 shows a schematic structural view of a rotating mechanism of a cleaning arm mechanism of a semiconductor cleaning apparatus according to an embodiment of the present utility model.

Fig. 8 is a schematic view showing a connection exploded structure of a rotating mechanism of a cleaning arm mechanism of a semiconductor cleaning apparatus and a cleaning arm pipe according to an embodiment of the present utility model.

Reference numerals illustrate:

1. a mounting base plate; 2. a drive assembly; 3. a cleaning arm rotation assembly; 4. a transmission belt; 5. a mounting member; 6. a tensioning block; 7. tensioning the screw; 8. a stop block; 9. a guide block; 10. a guide groove; 11. a nut; 12. a first mounting plate; 13. a second mounting plate; 14. a long kidney-shaped mounting groove; 15. a first mounting hole; 16. installing a screw; 17. a second mounting hole; 18. a driving motor; 19. a speed reducer; 20. a first pulley; 21. a rotation shaft; 22. cleaning the arm tube; 23. cleaning the pipeline connecting piece; 24. a second pulley; 25. clamping the connecting block; 26. a nozzle; 27. a bearing; 28. a bearing seat; 29. and a limiting block.

Detailed Description

Preferred embodiments of the present utility model will be described in more detail below. While the preferred embodiments of the present utility model are described below, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.

As shown in fig. 1 to 4, the present utility model provides a cleaning arm mechanism of a semiconductor cleaning apparatus, the cleaning arm mechanism comprises a driving component 2 and a cleaning arm rotating component 3 which are arranged on a mounting base plate 1, the driving component 2 and the cleaning arm rotating component 3 are transmitted through a transmission belt 4, the driving component 2 is connected with the mounting base plate 1 through a mounting component 5, a tensioning block 6 is arranged on the mounting component 5, the tensioning block 6 is in threaded connection with a tensioning screw 7, and a stop block 8 opposite to the tensioning block 6 is arranged on the mounting base plate 1;

one end of the tensioning screw 7, which extends out of the tensioning block 6, is used for abutting against the stop block 8 so as to adjust the tension of the driving belt 4.

Specifically, in order to solve the problems that the cleaning arm structure in the prior art can only determine the adjustment amount by virtue of the experience of an operator when the tensioning adjustment of the driving belt 4 is performed, the adjustment amount is not easy to accurately control, and fine adjustment cannot be performed; the cleaning arm structure of the semiconductor cleaning equipment provided by the utility model is provided with the tensioning block 6 arranged on the mounting part 5 and the stop block 8 arranged on the mounting bottom plate 1, the tensioning screw 7 penetrates through the tensioning block 6 and is in threaded connection with the tensioning block 6, the threaded end of the tensioning screw 7 is abutted against the stop block 8 by screwing the tensioning screw 7, the tensioning block 6 and the mounting part 5 can be moved relative to the mounting bottom plate 1 by utilizing the abutted reaction force, and the driving assembly 2 is driven to move in a direction away from the cleaning arm rotating assembly 3, so that the tensioning adjustment of the driving belt 4 is realized; such tensioning adjustment utilizes the thread pitch of the tensioning screw 7 to facilitate accurate control of the adjustment amount, enabling fine adjustment.

Alternatively, one of the mounting member 5 and the mounting base plate 1 is provided with a guide block 9, and the other is provided with a guide groove 10 extending in the tension direction of the belt 4, and the guide block 9 is slidably provided in the guide groove 10.

Specifically, the cooperation of the guide block 9 and the guide groove 10 can form a guide effect on the movement of the mounting component 5 relative to the mounting base plate 1, limit the linear movement direction of the mounting component, and avoid the torsion of the mounting component 5 in the movement process, so that the driving component 2 is inclined.

Alternatively, the guide grooves 10 extend in the horizontal direction, two guide grooves 10 and guide blocks 9 are respectively provided, the axes of the two guide grooves 10 are parallel to each other, and the two guide blocks 9 are arranged at intervals in the vertical direction.

Specifically, the two guide blocks 9 are respectively arranged in the two guide grooves 10, so that the mounting part 5 is further prevented from twisting relative to the mounting bottom plate 1, and the horizontal guide effect of the guide grooves 10 on the mounting part 5 is improved.

Optionally, the mounting component 5 includes a first mounting plate 12 and a second mounting plate 13, the first mounting plate 12 is connected with the second mounting plate 13 to form an L-shaped plate, the first mounting plate 12 is used for connecting the driving assembly 2, the second mounting plate 13 is detachably connected with the mounting base plate 1, the tensioning block 6 is arranged on the first mounting plate 12, and the guide block 9 is arranged on the second mounting plate 13.

Specifically, as shown in fig. 5, the first mounting plate 12 and the second mounting plate 13 are integrally formed, the driving assembly 2 is mounted on the first mounting plate 12, the second mounting plate 13 is mounted on the mounting base plate 1 in a fitting manner, and the guide block 9 on the second mounting plate 13 is embedded into the guide groove 10 on the mounting base plate 1 during mounting to realize a guide effect.

Alternatively, one of the second mounting plate 13 and the mounting base plate 1 is provided with at least one elongated kidney-shaped mounting groove 14, the other is provided with a first mounting hole 15 which is matched with the elongated kidney-shaped mounting groove, and the second mounting plate 13 is connected with the mounting base plate 1 through a mounting screw 16 which is penetrated in the elongated kidney-shaped mounting groove 14 and the first mounting hole 15.

In this embodiment, the first mounting plate 12 is provided with a second mounting hole 17, the driving assembly 2 is penetrated and mounted in the second mounting hole 17 by fastening a bolt, the second mounting plate 13 is mounted on the mounting base plate 1 by a mounting screw 16 penetrating through the long waist-shaped mounting groove 14 and the first mounting hole 15, and the long waist-shaped mounting groove 14 is arranged to enable the first mounting plate 12 to have a certain transverse adjustment space.

Optionally, two pairs of long kidney-shaped mounting grooves 14 are provided on the second mounting plate 12, each pair of long kidney-shaped mounting grooves 14 is symmetrically provided on two sides of the second mounting plate 12, and the mutually distant ends of each pair of long kidney-shaped mounting grooves 14 are opened to form an open groove structure.

Specifically, the two pairs of elongated kidney-shaped mounting slots 14 are vertically spaced apart to provide space for lateral movement of the second mounting plate 12.

Alternatively, the guide groove 10 is a long waist hole formed on the mounting bottom plate 1, the guide block 9 is a rectangular block protruding from the surface of the mounting part 5, and the axis of the long waist hole is parallel to the axis of the tensioning screw 7.

Specifically, the width of the long waist hole is matched with the width of the rectangular block, the long waist hole is utilized to play a role in guiding the movement of the rectangular block, and the installation component 5 and the driving component 2 are prevented from inclining in the movement process.

Alternatively, the driving assembly 2 includes a driving motor 18, a speed reducer 19 and a first pulley 20 connected in sequence, the speed reducer 19 being fixed on the mounting member 5; the cleaning arm rotating assembly 3 comprises a rotating shaft 21 which is rotatably connected with the mounting base plate 1, a second belt wheel 24 is sleeved on the rotating shaft 21, and the driving belt 4 is matched with the first belt wheel 20.

Specifically, as shown in fig. 6, the driving motor 18 may be connected to the speed reducer 19 by fastening a bolt, the output shaft of the speed reducer 19 is provided with the first pulley 20, and the speed reducer 19 may be connected to the first mounting plate 12 by fastening a bolt.

In this embodiment, the cleaning arm rotating assembly 3 includes a rotating shaft 21, a cavity is provided in the rotating shaft 21, two ends of the rotating shaft 21 are respectively used for connecting a cleaning arm pipe 22 and a cleaning pipeline connecting piece 23, the rotating shaft 21 is connected with the mounting base plate 1 through a rotating connecting component, and a second belt wheel 24 is sleeved on the rotating shaft 21.

Specifically, as shown in fig. 7 and 8, the rotation shaft 21 is rotatably connected with the mounting base plate 1 through a rotation connection member, the transmission belt 4 is sleeved on the first belt pulley 20 and the second belt pulley 24, the driving assembly 2 rotates the rotation shaft 21 through the transmission belt 4 of the transmission belt 4, and the rotation of the rotation shaft 21 drives the cleaning arm tube 22 connected thereto to rotate.

In this embodiment, one end of the rotary shaft 21 is provided with a clamping connection block 25, one end of the cleaning arm tube 22 can be inserted into the clamping connection block 25, and the clamping connection of the cleaning arm tube 22 is realized by fastening a clamping screw on the clamping connection block 25, the other end of the cleaning arm tube 22 is provided with a nozzle 26, an infusion line is arranged inside the cleaning arm tube 22, the infusion line is connected with the nozzle 26 and penetrates through the rotary shaft 21, and the cleaning line connector 23 is used for connecting the infusion line with the cleaning line.

In this embodiment, the rotary connection member includes two bearings 27 that are sleeved on the rotary shaft 21 at intervals, the two bearings 27 are respectively connected with the mounting base plate 1 through one bearing 27 seat, and a stopper 29 is provided on the outer side of the rotary shaft 21, and the stopper 29 is used for restricting the rotation angle of the rotary shaft 21.

Specifically, the two bearings 27 are arranged at intervals to support the rotating shaft 21, and the two bearings 27 support the rotating shaft 21 at two positions along the axis of the rotating shaft 21, so that the rotating stability of the rotating shaft 21 is improved; the stopper 29 is detachably installed at the outer side of the rotation shaft 21, and restricts the rotation shaft 21 to rotate only within a set angle range, and the stopper 29 can realize its limiting function by interfering with the mounting base plate 1 or other limiting parts mounted on the mounting base plate 1.

Optionally, a nut 11 is screwed onto the tensioning screw 7, and the nut 11 is located between the tensioning block 6 and the stop 8.

Specifically, the nut 11 is arranged between the tensioning block 6 and the stop block 8 and is used for fastening the tensioning screw 7 on the tensioning block 6 after the tensioning screw 7 is adjusted, so that loosening of the tensioning screw 7 caused by equipment operation is avoided, and tensioning stability of the driving belt 4 is maintained.

In this embodiment, tensioning piece 6 sets up the one end that is close to rotary part in installation component 5 upside, and the operation end of tensioning screw 7 adopts the button head hexagon socket head cap structure, and the use of being convenient for hexagon socket head cap wrench stretches into in its operation end to twist tensioning screw 7, and dog 8 interval sets up the one side that is close to cleaning arm rotary part 3 at tensioning piece 6, makes its screw thread end produce reaction force by twisting tensioning screw 7 and supports against dog 8, and then makes installation component 5 and drive assembly 2 to the direction removal of keeping away from cleaning arm rotary part 3, and then realizes the tensioning adjustment to drive belt 4.

Specifically, the semiconductor cleaning device provided by the utility model has the cleaning arm structure of the semiconductor cleaning device, when the semiconductor cleaning device is used, the driving assembly 2 drives the cleaning arm rotating assembly 3 to drive the cleaning arm pipe 22 to rotate through the transmission of the first belt pulley 20, the transmission belt 4 and the second belt pulley 24, and when the transmission belt 4 needs to be tensioned and adjusted, the mounting screw 16 is loosened firstly, so that the mounting part 5 can transversely move; then the tensioning screw 7 is screwed, and the installation part 5 moves towards the direction away from the cleaning arm rotating assembly 3 under the cooperation of the guide groove 10 and the guide block 9 by utilizing the reaction force generated by the abutment of the threaded end of the tensioning screw 7 and the stop block 8, so that the tensioning adjustment of the driving belt 4 is realized; finally, the nut 11 is screwed down to lock the tensioning screw 7, and the mounting screw 16 is screwed down to complete the adjustment.

The foregoing description of embodiments of the utility model has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.

Claims

1. The cleaning arm structure of the semiconductor cleaning equipment comprises a driving assembly and a cleaning arm rotating assembly which are arranged on a mounting bottom plate, wherein the driving assembly and the cleaning arm rotating assembly are in transmission through a transmission belt;

2. The cleaning arm structure of a semiconductor cleaning apparatus according to claim 1, wherein one of the mounting member and the mounting base plate is provided with a guide block, the other one is provided with a guide groove extending in the belt tensioning direction, and the guide block is slidably provided in the guide groove.

3. The cleaning arm structure of the semiconductor cleaning apparatus according to claim 2, wherein the guide grooves extend in a horizontal direction, the guide grooves and the guide blocks are respectively provided with two, axes of the two guide grooves are parallel to each other, and the two guide blocks are arranged at intervals in a vertical direction.

4. The cleaning arm structure of a semiconductor cleaning apparatus according to claim 2, wherein the mounting member includes a first mounting plate and a second mounting plate, the first mounting plate being connected with the second mounting plate to form an L-shaped plate, the first mounting plate being for connection with the drive assembly, the second mounting plate being detachably connected with the mounting base plate, the tension block being provided on the first mounting plate, the guide block being provided on the second mounting plate.

5. The cleaning arm structure of the semiconductor cleaning apparatus according to claim 4, wherein one of the second mounting plate and the mounting base plate is provided with at least one elongated waist-shaped mounting groove, the other one is provided with a first mounting hole which is fitted with the elongated waist-shaped mounting groove, and the second mounting plate is connected with the mounting base plate by a mounting screw which is penetrated in the elongated waist-shaped mounting groove and the first mounting hole.

6. The cleaning arm structure of the semiconductor cleaning apparatus according to claim 5, wherein two pairs of the elongated waist-shaped mounting grooves are provided on the second mounting plate, each pair of the elongated waist-shaped mounting grooves is symmetrically provided on both sides of the second mounting plate, and the mutually distant ends of each pair of the elongated waist-shaped mounting grooves are opened to form an open groove structure.

7. The cleaning arm structure of the semiconductor cleaning apparatus according to claim 4, wherein the guide groove is a long waist hole formed in the mounting base plate, the guide block is a rectangular block protruding from the surface of the mounting member, and an axis of the long waist hole is parallel to an axis of the tension screw.

8. The cleaning arm structure of a semiconductor cleaning apparatus according to claim 1, wherein the driving assembly includes a driving motor, a speed reducer, and a first pulley connected in this order, the speed reducer being fixed to the mounting member; the cleaning arm rotating assembly comprises a rotating shaft which is rotationally connected with the mounting bottom plate, a second belt wheel is sleeved on the rotating shaft, and the transmission belt is matched with the first belt wheel and the second belt wheel.

9. The cleaning arm structure of the semiconductor cleaning apparatus according to claim 1, wherein a nut is screwed on the tension screw, and the nut is located between the tension block and the stopper.

10. A semiconductor cleaning apparatus comprising the cleaning arm structure of the semiconductor cleaning apparatus according to any one of claims 1 to 9.