CN219810859U - Auxiliary device for inspecting wafer - Google Patents

Abstract

The utility model provides an auxiliary device for inspecting a wafer, comprising: the device comprises a base, wherein rails are respectively arranged on two opposite sides of the base, and a limiting protrusion is arranged at one end part of each rail; the rail is provided with a sliding block, the two sliding blocks are connected with a chassis, and the chassis is arranged above the base; the chassis is provided with a test disc, and the test disc is rotationally connected with the chassis through a bearing; the inspection disc is arranged on one side of the chassis, which is far away from the limiting protrusion. The device simple structure, more convenient getting put the wafer that waits to examine, be difficult to fish tail wafer that waits to examine, make things convenient for the multiple spot to detect simultaneously.

Description

Auxiliary device for inspecting wafer

Technical Field

The utility model relates to the technical field of semiconductor inspection, in particular to an auxiliary device for inspecting a wafer.

Background

In the prior art, wafer inspection is mainly performed by a fast inspection camera, which requires a fixed placement of the wafer by an auxiliary device for inspection. However, the inspection tray used for placing the wafer in the auxiliary device is generally fixed under the camera, and the wafer to be inspected is sent into the tray during the inspection, and because the position of the camera is relatively close to the inspection tray, the wafer can contact with the inspection tray and slide during the process of sending the wafer, so that the wafer is easily scratched. In addition, since a plurality of positions are required to be inspected when inspecting the wafer, the wafer rotates in the inspection tray, and friction is generated, which is liable to scratch the wafer.

Accordingly, an auxiliary device for inspecting a wafer is invented, which solves the above-mentioned problems and is urgent.

Disclosure of Invention

The auxiliary device for inspecting the wafer is simple in structure, convenient to pick and place the wafer to be inspected, not easy to scratch the wafer to be inspected, and convenient for multi-point detection.

To achieve the purpose, the utility model adopts the following technical scheme: an auxiliary device for inspecting a wafer, comprising: the device comprises a base, wherein rails are respectively arranged on two opposite sides of the base, and a limiting protrusion is arranged at one end part of each rail; the rail is provided with a sliding block, the two sliding blocks are connected with a chassis, and the chassis is arranged above the base; the chassis is provided with a test disc, and the test disc is rotationally connected with the chassis through a bearing; the inspection disc is arranged on one side of the chassis, which is far away from the limiting protrusion.

Further, an inspection camera is arranged on one side, far away from the limiting protrusion, of the base.

The beneficial effects of the utility model are as follows:

(1) Through the rotation setting, when the different points of the wafer need to be inspected, the wafer does not need to be directly rotated on the inspection disc any more, because friction exists between the wafer and the inspection disc, the wafer is easy to scratch, and the inspection disc can be directly rotated to realize the function.

(2) The inspection disc and the chassis are arranged to be of a sliding structure through the sliding blocks, so that the wafer can be prevented from contacting with the inspection disc and sliding in the process of feeding the wafer, and the wafer is easy to scratch. When the wafer is required to be sent into the inspection disk, the inspection disk is directly moved out through the sliding block, and the wafer can be quickly and easily put into the inspection disk.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not constitute a limitation on the utility model. In the drawings:

fig. 1 is a side view of an auxiliary device for inspecting a wafer.

Fig. 2 is a top view of the chassis 105.

Fig. 3 is a sectional view taken along D-D' in fig. 2.

Fig. 4 is a side view of another auxiliary device for inspecting a wafer.

Detailed Description

In order to make the present utility model better understood by those skilled in the art, the following description will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1, an auxiliary device for inspecting a wafer includes: the base 101, two opposite sides of the base 101 are respectively provided with a track 102. Because fig. 1 is a side view, only one of the rails 102 is shown, and the other side opposite the rail 102 is also provided with an identical rail 102. One end of the rail 102 is provided with a limit protrusion 103. The track 103 is provided with a sliding block 104, two sliding blocks 104 are connected with a chassis 105, and the chassis 105 is arranged above the base 101. Thus, when the slider 104 slides on the track 102, the chassis 105 can be driven to slide.

Referring to fig. 1-3, a checking disc 106 is disposed on the chassis 105, the checking disc 106 is rotatably connected with the chassis 105 through a bearing 107, and the checking disc 106 is disposed in an area a of the chassis 105 on a side far away from the limiting protrusion 103.

A bearing is a mechanical part, and is generally composed of an inner ring, an outer ring, rolling bodies and a cage. The inner and outer rings are two circular rings supported for rotation by rolling elements (e.g., balls, cylindrical rollers) therebetween. Bearing connections are typically used when the two parts need to be rotated relative to each other. If the inner ring is slightly higher than the outer ring, the inspection plate 106 may be fixed to the inner ring, and the outer ring may be connected to the chassis 105. The utility model is not limited in this regard. By the rotation arrangement of the inspection tray 106, when different points of the wafer need to be inspected, the wafer does not need to be directly rotated on the inspection tray 106 any more, because friction exists between the wafer and the inspection tray 106, the wafer is easily scratched, and the inspection tray 106 can be directly rotated to realize the function.

An inspection camera (not shown) is disposed on the base 101 in a region B on a side away from the limiting protrusion 103. In the use process, because the inspection camera is close to the inspection tray 106, when the wafer needs to be placed in the inspection tray 106, the slide block 104 can slide, so that the chassis 105 can be pulled out of the camera, and the wafer can be placed conveniently. Referring to FIG. 4, a camera 108 is schematically illustrated in FIG. 4 at the area B, and the test disc 106 is slid by the slider 104 to be moved into the camera 108 for testing. Therefore, the inspection tray 106 and the chassis 105 are configured to be slidable by the slider 104, so that the problem that the wafer is easily scratched due to the sliding of the wafer in contact with the inspection tray during the wafer feeding process in the case of fig. 4 can be avoided. When a wafer is to be transferred into the test tray 106, the test tray is directly moved out through the slider away from the area B, i.e., the state of fig. 1, so that the wafer can be quickly and easily placed. The limiting protrusion 103 is used to block the sliding block 104 to prevent the sliding block from rushing out of the track 102.

It is to be understood that the foregoing is only illustrative of the presently preferred embodiments of the utility model and the technical principles that have been developed. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.

Claims (2)

1. An auxiliary device for inspecting a wafer, comprising:

the device comprises a base, wherein rails are respectively arranged on two opposite sides of the base, and a limiting protrusion is arranged at one end part of each rail;

the rail is provided with a sliding block, the two sliding blocks are connected with a chassis, and the chassis is arranged above the base;

the chassis is provided with a test disc, and the test disc is rotationally connected with the chassis through a bearing;

the inspection disc is arranged on one side of the chassis, which is far away from the limiting protrusion.

2. The auxiliary device according to claim 1, wherein an inspection camera is arranged on the base at a side far away from the limiting protrusion.