CN219807787U - Novel prevent graphite head of reduction furnace - Google Patents
Novel prevent graphite head of reduction furnace Download PDFInfo
- Publication number
- CN219807787U CN219807787U CN202320668343.XU CN202320668343U CN219807787U CN 219807787 U CN219807787 U CN 219807787U CN 202320668343 U CN202320668343 U CN 202320668343U CN 219807787 U CN219807787 U CN 219807787U
- Authority
- CN
- China
- Prior art keywords
- graphite head
- graphite
- head
- wall
- silicon core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 136
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 136
- 239000010439 graphite Substances 0.000 title claims abstract description 136
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910052710 silicon Inorganic materials 0.000 abstract description 17
- 239000010703 silicon Substances 0.000 abstract description 17
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 229920005591 polysilicon Polymers 0.000 abstract description 7
- 230000002411 adverse Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 10
- 238000003754 machining Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a novel graphite head for preventing a reduction furnace from being reversed, which belongs to the technical field of polysilicon production, wherein a silicon core hole for fixing a silicon core is formed in the top of the graphite head, an annular groove is formed in the outer wall of the graphite head, and the center of the annular groove is consistent with the axial direction of the graphite head; or the annular groove is formed in the outer wall of the graphite head, the spiral groove extends on the outer wall of the graphite head along the axial direction of the graphite head, and the optimized structure can solve the problems that when a silicon rod is disassembled by stopping a furnace in the prior art, the silicon rod and the graphite head are easy to split, so that the silicon rod is inverted, the subsequent treatment cost is increased, the reduction furnace is damaged, and the quality of a polysilicon product is adversely affected.
Description
Technical Field
The utility model belongs to the technical field of polysilicon production, and particularly relates to a novel graphite head capable of preventing reduction from reversing a furnace.
Background
The polysilicon is the main raw material for producing semiconductors and solar photovoltaic products, the main methods for producing polysilicon at present are an improved Siemens method, a silane method, a fluidized bed method and the like, wherein the improved Siemens method and the silane method both need to deposit carriers in the reduction process, the carriers widely used by the improved Siemens method are silicon cores, including square silicon cores, round silicon cores, diamond silicon cores and the like, and the silicon cores are connected and clamped with electrodes through graphite pieces. All receive factors such as machining precision, quality, structure to graphite spare and silicon core and often all appear all kinds of trouble, for example: the graphite piece and the silicon core are not well attached, so that bright spots, bar pouring and the like are caused, silicon growing on the graphite is not combined together, and the root is cracked.
The graphite components for the traditional polysilicon reduction furnace mainly have two main structures: the utility model discloses a three-piece structure, which comprises a graphite base, a fixed ring and a graphite clamping valve, wherein the three parts are disclosed in an utility model patent with the publication number of CN213326754U and the name of a diamond silicon core clamping piece; the other structure is a two-piece structure and comprises a graphite base and a graphite head. The graphite base and the graphite head in the two-piece structure are of a socket structure, such as the structure disclosed by the utility model patent with the publication number of CN212895085U and the name of a novel graphite component, a cavity taper hole for placing the graphite head is formed in the upper end of the graphite base, both ends of the graphite head are tapered, the tapered part of the graphite head is matched with the taper hole on the graphite base, and the clamping of the graphite base and the graphite head is realized while the silicon core is clamped by the graphite head through the clamping, so that the structure is convenient to install, but the risk of falling a rod caused by the separation of graphite and silicon blocks after furnace shutdown exists. The surface of the existing graphite head is relatively smooth after the existing graphite head is machined, silicon can be attached to the surface of the graphite head in the actual production process, but the surface of the graphite head is smooth, the adhesive force is not strong, when a silicon rod is disassembled by stopping a furnace, the silicon rod and the graphite head are easy to split, so that the silicon rod is inverted, the subsequent treatment cost is increased, the reduction furnace is damaged, the quality of a polycrystalline silicon product is adversely affected, and the manufacturing cost is high.
Accordingly, those skilled in the art have been working to develop a new graphite article which is less prone to furnace reversion and has lower difficulty in structural processing to meet the production requirements.
Disclosure of Invention
The utility model aims to solve the problems that a graphite component for a two-piece reduction furnace with a graphite head and a graphite seat for fixing a silicon core in the prior art is easy to appear when a silicon rod is disassembled by blowing out, and the silicon rod and the graphite head are easy to split, so that the silicon rod is inverted, the subsequent treatment cost is increased, the reduction furnace is damaged, and the quality of a polysilicon product is adversely affected.
In order to achieve the above object, the present utility model has the following technical scheme:
the utility model provides a novel prevent graphite head of reduction furnace of falling, graphite head top has been seted up the silicon core hole that is used for fixed silicon core, annular groove has been seted up on the graphite head outer wall, and annular groove's center is unanimous with graphite head's axial direction.
Further, a plurality of annular grooves are formed in the outer wall of the graphite head, and the annular grooves are uniformly distributed on the outer wall of the graphite head along the axial direction of the graphite head.
Further, a silicon core hole for fixing a silicon core is formed in the top of the graphite head, a spiral groove is formed in the outer wall of the graphite head, and the spiral groove extends on the outer wall of the graphite head along the axial direction of the graphite head.
Further, a gas channel is formed in the bottom of the graphite head and is communicated with the silicon core hole, and the graphite head is inserted on the graphite seat.
Further, an exhaust hole is formed in the side face of the graphite head, and the exhaust hole is communicated with the gas channel.
The utility model has the beneficial effects that:
1. according to the utility model, two optimized graphite head structures are provided, so that the risks of cracking the silicon rod and the graphite head and pouring the silicon rod into the furnace caused by the fact that the silicon rod and the graphite head are not tightly combined together due to low-temperature growth and the like can be eliminated, the damage to a reduction furnace is avoided, the quality of a polycrystalline silicon product is ensured, and the cost generated in subsequent treatment is reduced.
2. According to the novel graphite head for preventing the reduction and pouring furnace, a plurality of annular grooves are newly added on the original graphite head structure, and compared with the structure of longitudinally opening the grooves during processing, the annular grooves are easier to ensure that the processed groove structure is more uniform, the depth/width tolerance is smaller, and the silicon rod is more tightly connected with the graphite head.
3. In the utility model, a structure that the spiral groove is formed on the outer wall of the graphite head is also provided, compared with the graphite head structure of the annular groove, the graphite head with the structure does not need to repeatedly correct the cutting position of the cutter when the spiral groove is used for machining the groove on a machine tool, the continuous machining can be realized, the shape uniformity of the groove can be ensured, the machining difficulty is reduced, the machining efficiency is improved, and the production cost is reduced.
Drawings
Fig. 1 is a schematic structural view of a graphite head in example 1.
Fig. 2 is a cross-sectional view of fig. 1.
Fig. 3 is a schematic structural diagram of the graphite head inserted on the graphite base in embodiment 1.
Fig. 4 is a schematic structural view of another embodiment of a graphite head.
Fig. 5 is a cross-sectional view of fig. 4.
Fig. 6 is a schematic structural diagram of the graphite head of example 2 inserted on the graphite base.
Wherein, 1, graphite head; 2. a silicon core; 3. a graphite base; 4. an electrode; 1.1, a silicon core hole; 1.2, an annular groove; 1.3, spiral grooves; 1.4, gas channels; 1.5, exhaust holes; and 3.1, a graphite head mounting cavity.
Detailed Description
The present utility model will be described in further detail with reference to examples, but embodiments of the present utility model are not limited thereto.
The structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure for understanding and reading by those skilled in the art, and are not intended to limit the scope of the utility model, which is defined by the claims, so that any structural modifications, proportional changes, or dimensional adjustments should not be made in the essential significance of the utility model, and should still fall within the scope of the utility model covered by the technical disclosure without affecting the efficacy or achievement of the utility model. Also, the terms such as "upper", "lower", "front", "rear", "middle", and the like are used herein for descriptive purposes only and are not intended to limit the scope of the utility model for which the utility model may be practiced or for which the relative relationships may be altered or modified without materially altering the technical context.
Example 1
This embodiment is one of the most basic implementation, a novel prevent graphite head of reduction furnace of falling belongs to polycrystalline silicon production technical field, and silicon core hole 1.1 that is used for fixed silicon core 2 has been seted up at graphite head 1 top, annular groove 1.2 has been seted up on the graphite head 1 outer wall, and the center of annular groove 1.2 is unanimous with the axial direction of graphite head 1.
The technical scheme is further described below by taking a structure that a bullet-shaped graphite head 1 is taken as an example, and 5 annular grooves are formed in the upper portion of the outer wall of the graphite head 1.
Referring to fig. 1-2, a silicon core hole 1.1 for fixing a silicon core 2 is formed in the top of a graphite head 1, 5 annular grooves 1.2 are formed in the upper portion of the radially upper outer wall of the graphite head 1, the centers of all the annular grooves 1.2 are located on the central shaft of the graphite head 1, and the annular grooves 1.2 are uniformly distributed on the outer wall of the graphite head 1 along the axial direction of the graphite head 1.
In this embodiment, the distance between the adjacent annular grooves is preferably 2-5 mm.
In this embodiment, the annular groove is preferably uniform in shape and specification, and the cross section of the groove is preferably in an arc structure. The radius of the arc-shaped section of the groove near the middle part of the graphite head 1 is preferably larger than that of the groove at the end part.
The middle part of graphite head 1 is the cylindricality structure, and the lower part of graphite head 1 is the inverted round platform shape, see fig. 3, and fig. 3 is that graphite head 1 is placed on graphite seat 3, graphite seat 3 installs on electrode 4, and the grafting of graphite head 1 upper portion has the local schematic drawing of longitudinal section of silicon core 2, and it can be seen that the lower part of graphite head 1 is pegged graft on graphite seat 3, and graphite seat 3 is fixed on electrode 4.
Preferably, a gas channel 1.4 is arranged below the middle part of the graphite head 1, the gas channel 1.4 is communicated with the silicon core hole 1.1, and the graphite head 1 is inserted into the graphite seat 3.
Preferably, an exhaust hole 1.5 is formed in the side face of the graphite head 1, and the exhaust hole 1.5 is communicated with the gas channel 1.4.
Example 2
This embodiment is another implementation mode, a novel prevent graphite head of reduction furnace that falls belongs to polycrystalline silicon production technical field, and silicon core hole 1.1 that is used for fixed silicon core 2 has been seted up at graphite head 1 top, set up spiral recess 1.3 on the graphite head 1 outer wall, spiral recess 1.3 extends along the axial of graphite head 1 on graphite head 1 outer wall.
The technical scheme is further described below by taking a structure that a bullet-shaped graphite head 1 is taken as an example, and 1 spiral grooves 1.3 are formed in the upper portion of the outer wall of the graphite head 1.
Referring to fig. 4-5, a silicon core hole 1.1 for fixing a silicon core 2 is formed in the top of the graphite head 1, 1 spiral grooves 1.3 are formed in the upper portion of the outer wall of the graphite head 1, and the spiral grooves 1.3 are uniformly distributed on the outer wall of the graphite head 1 along the axial direction of the graphite head 1.
The spiral groove is preferably uniform in shape and specification, and the cross section of the groove is preferably arc-shaped.
Preferably, referring to fig. 6, a silicon core hole 1.1 for fixing a silicon core 2 is formed at the top of the graphite head 1, a spiral groove 1.3 is formed on the outer wall of the graphite head 1, and the spiral groove 1.3 extends along the axial direction of the graphite head 1 on the outer wall of the graphite head 1.
Preferably, a gas channel 1.4 is formed in the bottom of the graphite head 1, the gas channel 1.4 is communicated with the silicon core hole 1.1, and the graphite head 1 is inserted into the graphite seat 3.
Preferably, an exhaust hole 1.5 is formed in the side face of the graphite head 1, and the exhaust hole 1.5 is communicated with the gas channel 1.4.
Compared with the embodiment 1, the method can solve the problem that the furnace is reversed due to the falling of the root of the silicon rod and the bullet head after the furnace is stopped, and the continuous thread structure is more convenient to process, does not need to repeatedly correct the cutting position of the cutter, can continuously process, can further ensure the uniformity of the shape of the groove, and reduces the processing difficulty, thereby reducing the production cost.
Claims (4)
1. Novel prevent graphite head of reduction furnace of falling, its characterized in that: a silicon core hole (1.1) for fixing a silicon core (2) is formed in the top of the graphite head (1), a plurality of annular grooves (1.2) are formed in the outer wall of the graphite head (1), the centers of the annular grooves (1.2) are consistent with the axial direction of the graphite head (1), and the annular grooves (1.2) are uniformly distributed on the outer wall of the graphite head (1) along the axial direction of the graphite head (1).
2. Novel prevent graphite head of reduction furnace of falling, its characterized in that: a silicon core hole (1.1) for fixing a silicon core (2) is formed in the top of the graphite head (1), a spiral groove (1.3) is formed in the outer wall of the graphite head (1), and the spiral groove (1.3) extends on the outer wall of the graphite head (1) along the axial direction of the graphite head (1).
3. The graphite head for preventing reduction from being reversed according to claim 1 or 2, wherein: the bottom of graphite head (1) has seted up gas passage (1.4), and gas passage (1.4) and silicon core hole (1.1) intercommunication, graphite head (1) peg graft on graphite seat (3).
4. A novel graphite head for preventing reduction of furnace reversing according to claim 3, wherein: the side of graphite head (1) has seted up exhaust hole (1.5), exhaust hole (1.5) and gas channel (1.4) intercommunication.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320668343.XU CN219807787U (en) | 2023-03-30 | 2023-03-30 | Novel prevent graphite head of reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320668343.XU CN219807787U (en) | 2023-03-30 | 2023-03-30 | Novel prevent graphite head of reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219807787U true CN219807787U (en) | 2023-10-10 |
Family
ID=88211560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320668343.XU Active CN219807787U (en) | 2023-03-30 | 2023-03-30 | Novel prevent graphite head of reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219807787U (en) |
-
2023
- 2023-03-30 CN CN202320668343.XU patent/CN219807787U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2868516Y (en) | Countersink-working and shaping cutter | |
| CN219807787U (en) | Novel prevent graphite head of reduction furnace | |
| CN112846677A (en) | Vertical forging and rough and finish turning process for driving spiral bevel gear with boss | |
| CN104057269B (en) | A kind of processing technique of the drift of hard alloy top hammer shaping mould | |
| CN103480919A (en) | Method for finish machining of tooth profile of large-modulus hard-tooth-face rack | |
| CN111283394A (en) | Machining process of inner gear ring of wind power gear box and inner gear ring pitch circle clamp thereof | |
| CN108500274B (en) | Integrally formed serially connected miniature annular part and 3D printing method | |
| CN214193420U (en) | Boss formula is carburization material pole for heat treatment | |
| CN214768660U (en) | Coal cutting pick mold structure capable of preventing mold from cracking | |
| CN101700612B (en) | Machining method of rotating blade spacer of axial compressor/turbine | |
| CN105773091B (en) | The manufacture method for the big specification honeycomb ceramic carrier mould of thin-walled that can be coated repeatedly | |
| CN113770398A (en) | Method for arranging flexible top tire for lathe | |
| CN206967701U (en) | Large-scale silicon nitride ceramics protection pipe blank forming mould | |
| CN113070740A (en) | Efficient machining method and negative pressure clamp for thin-wall aluminum oxide ceramic structural part | |
| CN209206308U (en) | Intelligent vertical multistation rises jug forming machine | |
| CN219443753U (en) | Clamp for machining hard alloy multi-inclined-hole nozzle by wire cutting | |
| CN218395779U (en) | Combined forming female die for rolling bearing forging mechanization | |
| CN201714838U (en) | Ball head pin of stabilizing bar | |
| CN111890131B (en) | Method and equipment for grinding biconical cubic boron nitride superhard cutter | |
| CN221716764U (en) | Multi-station milling and drilling integrated tool | |
| CN110651587A (en) | Tool apron and machining method thereof | |
| CN221848766U (en) | Drilling and milling cutter for machining conical surface annular oil groove | |
| CN212744938U (en) | Gear for lawn machine | |
| CN216828464U (en) | Die core structure for cold heading forming of nut | |
| CN219359144U (en) | Fixing jig for special-shaped ceramic shaft sleeve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |