CN219803001U - Display panel and display device - Google Patents

Display panel and display device Download PDF

Info

Publication number
CN219803001U
CN219803001U CN202320682383.XU CN202320682383U CN219803001U CN 219803001 U CN219803001 U CN 219803001U CN 202320682383 U CN202320682383 U CN 202320682383U CN 219803001 U CN219803001 U CN 219803001U
Authority
CN
China
Prior art keywords
fan
display panel
main body
edge
edge portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202320682383.XU
Other languages
Chinese (zh)
Inventor
董波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Tianma Microelectronics Co Ltd
Original Assignee
Wuhan Tianma Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Tianma Microelectronics Co Ltd filed Critical Wuhan Tianma Microelectronics Co Ltd
Priority to CN202320682383.XU priority Critical patent/CN219803001U/en
Application granted granted Critical
Publication of CN219803001U publication Critical patent/CN219803001U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The utility model discloses a display panel and a display device, wherein the display panel comprises a display area and a fan-out wiring area; the display area comprises a plurality of data lines, the fan-out wiring area comprises a plurality of fan-out wirings, and the fan-out wirings are electrically connected with the data lines; the fan-out wires comprise a plurality of first fan-out wires and a plurality of second fan-out wires, and the second fan-out wires are positioned on one side of the first fan-out wires away from the substrate; the first fan-out wire comprises a first main body part and a first edge part; the second fanout trace includes a second body portion and a second edge portion, the at least one first body portion and the at least one second body portion not overlapping. Parasitic capacitance between the first main body part and the second main body part can be avoided by arranging the first main body part and the second main body part not to overlap, so that the display signals transmitted in the first fan-out wiring and the second fan-out wiring are ensured to be less interfered; and fan-out is walked the line top rete and can not be because of main part overlap protruding and cause the coverage not good, guarantees display panel's structural stability.

Description

Display panel and display device
Technical Field
The present utility model relates to the field of display technologies, and in particular, to a display panel and a display device.
Background
The display resolution in the existing display products is higher and higher, and correspondingly, the display signal lines connected with the light-emitting elements are more and more, and the display signal lines occupy more and more space at the lower frame position of the display products, which is not in accordance with the development trend of the narrow frames of the display products.
Disclosure of Invention
The utility model provides a display panel and a display device, which can solve the problem of narrow frame of the display panel, reduce interference among different signal lines and ensure display effect.
According to an aspect of the present utility model, there is provided a display panel including a display area and a fan-out wiring area;
the display area comprises a plurality of data lines, the fan-out wiring area comprises a plurality of fan-out wirings, and the fan-out wirings are electrically connected with the data lines;
the fan-out wiring comprises a plurality of first fan-out wirings and a plurality of second fan-out wirings, the display panel further comprises a substrate, and the second fan-out wirings are positioned on one side of the first fan-out wirings away from the substrate;
the first fan-out wire comprises a first main body part and a first edge part, wherein the first edge part is positioned at the edge of the first main body part, and the thickness of the first edge part is smaller than that of the first main body part; the second fanout wire comprises a second main body part and a second edge part, wherein the second edge part is positioned at the edge of the second main body part, and the thickness of the second edge part is smaller than that of the second main body part;
At least one of the first body portions and at least one of the second body portions do not overlap in a thickness direction of the display panel.
According to another aspect of the present utility model, there is provided a display device comprising the display panel of the first aspect.
The fan-out wiring comprises a plurality of first fan-out wirings and a plurality of second fan-out wirings, wherein the second fan-out wirings are positioned on one side of the first fan-out wirings, which is far away from the substrate, namely the first fan-out wirings and the second fan-out wirings which are arranged in different layers, so that the space occupied by the fan-out wirings in a frame area can be reduced, the lower frame of the display panel is reduced, and the display panel with a narrow frame design is realized. Further, the first main body part of the first fan-out wiring and the second main body part of the second fan-out wiring are not overlapped, so that parasitic capacitance between the first main body part and the second main body part can be avoided, the display signals transmitted in the first fan-out wiring and the second fan-out wiring are ensured to be less interfered, and the display effect is ensured; and fan-out is walked the line top rete and can not be because of main part overlap protruding and cause the coverage not good, guarantees display panel's structural stability.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the utility model or to delineate the scope of the utility model. Other features of the present utility model will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a display panel according to an embodiment of the present utility model;
FIG. 2 is a schematic cross-sectional view of the display panel of FIG. 1 along section line A-A';
FIG. 3 is a schematic view of another cross-sectional structure of the display panel provided in FIG. 1 along the section line A-A';
FIG. 4 is a schematic diagram of a second fan-out trace according to an embodiment of the present utility model;
FIG. 5 is an enlarged schematic view of the display panel provided in FIG. 1 in region B;
FIG. 6 is a schematic cross-sectional view taken along section line C-C' of the enlarged schematic view of region B provided in FIG. 5;
FIG. 7 is a schematic cross-sectional view taken along section line D-D' of the enlarged schematic view of region B provided in FIG. 5;
FIG. 8 is a schematic view of another cross-sectional structure along section line D-D' in the enlarged schematic view of area B provided in FIG. 5;
FIG. 9 is a schematic view of another cross-sectional structure along section line D-D' in the enlarged schematic view of area B provided in FIG. 5;
FIG. 10 is another enlarged schematic view of the display panel provided in FIG. 1 in region B;
FIG. 11 is a schematic flow chart of a method for manufacturing a display panel according to an embodiment of the present utility model;
fig. 12 is a schematic flow chart of another method for manufacturing a display panel according to an embodiment of the present utility model;
fig. 13 is a schematic structural diagram of a second fanout wiring layer prepared on one side of a first fanout wiring layer according to an embodiment of the present utility model;
FIG. 14 is a schematic diagram of a photoresist layer prepared on a side of a second fan-out trace layer away from a first fan-out trace according to an embodiment of the present utility model;
FIG. 15 is a schematic structural diagram of a mask provided in an embodiment of the present utility model;
FIG. 16 is a schematic diagram of a structure for forming an exposed photoresist through a reticle according to an embodiment of the present utility model;
FIG. 17 is a schematic diagram of a developed exposure photoresist according to an embodiment of the present utility model;
FIG. 18 is a schematic flow chart of another method for manufacturing a display panel according to an embodiment of the present utility model;
fig. 19 is a schematic structural diagram of a second fan-out wiring matrix prepared by etching a second fan-out wiring layer according to an embodiment of the present utility model;
FIG. 20 is a schematic diagram of a structure for removing photoresist of a first thickness according to an embodiment of the present utility model;
fig. 21 is a schematic structural diagram of a second fan-out trace prepared by etching a second fan-out trace matrix according to an embodiment of the present utility model;
fig. 22 is a schematic structural diagram of a display device according to an embodiment of the present utility model.
Detailed Description
In order that those skilled in the art will better understand the present utility model, a technical solution in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the utility model described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic structural view of a display panel according to an embodiment of the present utility model, fig. 2 is a schematic structural view of a cross section line A-A' of the display panel according to fig. 1, and, as shown in fig. 1 and 2, a display panel 10 according to an embodiment of the present utility model includes a display area 11 and a fan-out routing area 12, the display area 11 includes a plurality of data lines 111, the fan-out routing area 12 includes a plurality of fan-out routing lines 121, and the fan-out routing lines 121 are electrically connected to the data lines 111; the fan-out trace 121 includes a plurality of first fan-out traces 1211 and a plurality of second fan-out traces 1212, the display panel 10 further includes a substrate 101, and the second fan-out trace 1212 is located at a side of the first fan-out trace 1211 away from the substrate 101; the first fanout wire 1211 includes a first body portion 1211a and a first edge portion 1211b, the first edge portion 1211b being located at an edge of the first body portion 1211a and the thickness of the first edge portion 1211b being smaller than the thickness of the first body portion 1211 a; the second fanout trace 1212 includes a second main body portion 1212a and a second edge portion 1212b, the second edge portion 1212b being located at an edge of the second main body portion 1212a and the thickness of the second edge portion 1212b being smaller than the thickness of the second main body portion 1212 a; in the thickness direction of the display panel (the Z direction as shown in fig. 2), at least one first main body portion 1211a and at least one second main body portion 1212a do not overlap.
Specifically, the display panel 100 includes a display area 11 and a fan-out wiring area 12, the display area 11 is provided with sub-pixels 13 and data lines 111 connected to each column of sub-pixels 13, and the data lines 111 are used for providing data signals to the sub-pixels 13, so that the sub-pixels 13 perform light emitting display according to the data signals. Further, the sub-pixels 13 may include Light Emitting elements and pixel circuits (not shown in the figure), and the Light Emitting elements may be Organic Light-Emitting diodes (OLEDs), mini LEDs, micro LEDs, or quantum dot LEDs (Quantum Dot Light Emitting Diodes, QLEDs), and the specific types of the Light Emitting elements are not limited in the embodiments of the present utility model. Further, the light emitting elements may include red light emitting elements, green light emitting elements and blue light emitting elements, and the light emitting elements of different colors may be arranged in various different arrangements, for example, diamond Pixel (Dimond Pixel)) arrangement, standard RGB arrangement, delta Pixel (Delta Pixel) arrangement, pearl Pixel (Pearl Pixel) arrangement or two-in-one Pixel (2 in1 Pixel)) arrangement, and the embodiment of the utility model is not limited to the specific arrangement of the light emitting elements of different colors. Further, the pixel circuit may include a thin film transistor and a capacitor, and the number of the thin film transistor and the capacitor may be set by those skilled in the art according to actual requirements, for example, may be a 2T1C circuit, a 7T1C circuit, or a 7T2C circuit. "2T1C circuit" means a pixel circuit including 2 thin film transistors (T) and 1 capacitor (C), other "7T1C circuits", "7T2C circuits", and the like. In addition, the display panel 10 further includes a non-display area, which is at least located at one side of the display area 11, and is located at the lower side of the display area 11 as illustrated in fig. 1. The non-display area may include a fanout wiring area 12 and a bonding area 13, the fanout wiring area 12 is provided with fanout wirings 121, the bonding area 13 is provided with a driving chip 131, and the fanout wirings 121 are electrically connected with the data lines 111 and the driving chip 131, respectively, for transmitting data signals output from the driving chip to the data lines 111.
With the gradual increase of the display resolution in the display panel, the number of sub-pixel columns included in the display area 11 gradually increases, and more data lines 111 and fan-out lines 121 are required to cooperate to achieve high resolution. The increase of the fanout lines 121 inevitably occupies more area of the lower frame, which is not in line with the trend of the narrow frame of the display panel. Therefore, in the embodiment of the present utility model, the fanout wires 121 may be configured to include the first fanout wires 1211 and the second fanout wires 1212 that are configured in different layers, and by configuring the fanout wires 121 in two different film layers, the area of the lower frame occupied by the fanout wires may be reduced, the area of the lower frame may be reduced, and the display screen occupation ratio of the display panel may be improved. Specifically, the fan-out trace 121 includes a first fan-out trace 1211 and a second fan-out trace 1212, the first fan-out trace 1211 is located at a side close to the substrate 101, and the second fan-out trace 1212 is located at a side of the first fan-out trace 1211 far away from the substrate 101, and since the first fan-out trace 1211 and the second fan-out trace 1212 are disposed in different layers, compared with two fan-out traces disposed in the same layer, a gap between the first fan-out trace 1211 and the second fan-out trace 1212 can be adjusted to reduce an occupied space of the fan-out trace, thereby realizing the purpose of reducing a lower frame area. Further, the first fan-out trace 1211 and the second fan-out trace 1212 which are arranged in different layers may be sequentially arranged at intervals, that is, any two adjacent data lines 111 are respectively electrically connected with the first fan-out trace 1211 and the second fan-out trace 1212, that is, two adjacent data lines 111 are respectively electrically connected with the fan-out traces 121 which are arranged in different layers, so that signal interference between two adjacent data lines 111 may be reduced, and display effect is ensured.
Further, with continued reference to fig. 2, the first fanout wire 1211 includes a first body portion 1211a and a first edge portion 1211b, the first body portion 1211a may be understood as a body structure of the first fanout wire 1211, and the first edge portion 1211b may be understood as a non-body structure of the first fanout wire 1211, such as an edge portion due to a process reason, for more signal transmission in the first body portion 1211. Specifically, the first body portion 1211a and the first edge portion 1211b may be divided based on distribution positions, for example, the first edge portion 1211b is located at an edge of the first body portion 1211 a; alternatively, the first body portion 1211a and the first edge portion 1211b may be divided based on the thickness of the film layer, and the thickness of the first edge portion 1211b is smaller than the thickness of the first body portion 1211 a. Further, the second fanout wire 1212 includes a second main body portion 1212a and a second edge portion 1212b, the second main body portion 1212a may be understood as a main body structure of the second fanout wire 1212, the signal is more transmitted in the second main body portion 1212, and the second edge portion 1212b may be understood as a non-main body structure of the second fanout wire 1212, such as an edge portion due to a process reason. Specifically, the second main body portion 1212a and the second edge portion 1212b may be divided based on the distribution position, for example, the second edge portion 1212b is located at the edge of the second main body portion 1212 a; alternatively, the second main body portion 1212a and the second edge portion 1212b may be divided based on the thickness of the film layer, and the thickness of the second edge portion 1212b is smaller than that of the second main body portion 1212 a.
In addition, along the thickness direction of the display panel (the Z direction as shown in fig. 2), at least one first main body 1211a and at least one second main body 1212a do not overlap, so that parasitic capacitance generated between the first main body 1211a and the second main body 1212a can be avoided, less interference of display signals transmitted in the first fan-out wire and the second fan-out wire is ensured, and display effect is ensured; and fan-out is walked line top rete and can not be because of main part overlap protruding the causing the coverage not good, and the planarization of fan-out is walked line top rete, and then guarantees display panel's structural stability.
In summary, according to the technical scheme provided by the embodiment of the utility model, the fan-out wires comprise the first fan-out wires and the second fan-out wires which are arranged in different layers, and a smaller wire spacing can be arranged between the first fan-out wires and the second fan-out wires which are arranged in different layers, so that the space occupied by the fan-out wires in the frame area can be reduced, the lower frame of the display panel is reduced, and the display panel with a narrow frame design is facilitated. Further, the first main body part of the first fan-out wiring and the second main body part of the second fan-out wiring are not overlapped, so that parasitic capacitance between the first main body part and the second main body part can be avoided, the display signals transmitted in the first fan-out wiring and the second fan-out wiring are ensured to be less interfered, and the display effect is ensured; and the first main body part of the first fan-out wiring and the second main body part of the second fan-out wiring are not overlapped, so that the film layer above the fan-out wiring can be ensured not to be poor in coverage due to the overlapping bulge of the main body parts, and the structural stability of the display panel is ensured.
On the basis of the above-described embodiment, fig. 3 is a schematic view of another cross-sectional structure of the display panel provided in fig. 1 along the section line A-A', and as shown in conjunction with fig. 1, 2 and 3, the first edge portion 1211b and the second edge portion 1212b partially overlap in the thickness direction of the display panel; alternatively, the first edge portion 1211b and the second edge portion 1212b do not overlap in the thickness direction of the display panel, and a minimum distance L between the first edge portion 1211b and the second edge portion 1212b in the first direction satisfies l.ltoreq.0.3 μm; the first direction is the arrangement direction of the fan-out wires.
Specifically, as shown in fig. 2, in the thickness direction of the display panel, as shown in the Z direction, the first edge portion 1211b partially overlaps the second edge portion 1212b, and the portion where the first edge portion 1211b overlaps the second edge portion 1212b is an end of the edge, that is, a portion having a smaller thickness. Because the overlapping area between the first edge 1211b and the second edge 1212b is smaller, and because the thickness of the first edge 1211b and the second edge 1212b is smaller, the film layer above the fan-out wire 121 will not bulge in the overlapping area of the first edge 1211b and the second edge 1212b, so as to ensure better flatness of the film layer above the fan-out wire.
As shown in fig. 3, in the thickness direction of the display panel, the first edge portion 1211b and the second edge portion 1212b do not overlap, and in this case, there is a case where the orthographic projection of the first edge portion 1211b on the plane of the substrate 101 and the orthographic projection of the second edge portion 1212b on the plane of the substrate 101 are in contact or not in contact. When the orthographic projection of the first edge 1211b on the plane of the substrate 101 is connected with the orthographic projection of the second edge 1212b on the plane of the substrate 101, the film layer above the fan-out trace 121 will not form a pit at the interval between the first edge 1211b and the second edge 1212b, so as to ensure better flatness of the film layer above the fan-out trace. When the front projection of the first edge 1211b on the plane of the substrate 101 is not connected with the front projection of the second edge 1212b on the plane of the substrate 101, the distance between the first edge 1211b and the second edge 1212b is smaller, for example, along the arrangement direction of the fan-out traces 121, as shown in the X direction, the minimum distance L between the first edge 1211b and the second edge 1212b satisfies L less than or equal to 0.3 μm, so that a pit is not formed at the distance between the first edge 1211b and the second edge 1212b above the fan-out traces 121, and the flatness of the film above the fan-out traces is ensured.
On the basis of the above-described embodiment, as shown with continued reference to fig. 2 and 3, the thickness of the second edge portion 1212b gradually increases in a direction in which the second edge portion 1212b points toward the second main body portion 1212 a.
Illustratively, the thickness of the second edge portion 1212b gradually increases along the direction in which the second edge portion 1212b points toward the second body portion 1212a, as shown in the X direction, i.e., the thickness of the second edge portion 1212b increases as it approaches the position of the second body portion 1212a and decreases as it moves away from the position of the second body portion 1212 a. The structure of the second edge 1212b is matched with the preparation process of the second edge 1212b, so that the preparation process of the second edge 1212b is simple, and when the first edge 1211b of the second edge 1212b overlaps, on the one hand, due to the smaller edge thickness of the second edge 1212b, a larger bulge at the overlapping position of the second edge 1212b and the first edge 1211b can be avoided, and the bulge is not formed in the overlapping region of the first edge 1211b and the second edge 1212b on the upper film layer of the fan-out wire 121, so that the flatness of the upper film layer of the fan-out wire is better.
On the basis of the above embodiment, as shown in fig. 2 and 3, the second main body portion 1212a includes a first surface m1 near the side of the substrate 101, the second edge portion 1212b includes a second surface m2 near the side of the substrate 101, the plane of the first surface m1 is parallel to the plane of the substrate 101, and the plane of the second surface m2 intersects the plane of the substrate 101.
The second main body 1212a includes a first surface m1 near one side of the substrate 101, where the plane of the first surface m1 is parallel to the plane of the substrate 101, for example, all the planes are horizontal, so that the flatness of the whole second main body 1212a is good, and normal transmission of display signals is ensured.
The second edge portion 1212b includes a second surface m2 near the side of the substrate 101, where the plane of the second surface m2 intersects the plane of the substrate 101, for example, when the plane of the substrate 101 is a horizontal plane, the plane of the second surface m2 is an inclined plane. Since there is an insulating layer between the first fanout wire 1211 and the second fanout wire 1212, and the insulating layer has the first fanout wire 1211 disposed below the insulating layer, there is a slope surface, such as m3 in the figure, between the disposed area and the non-disposed area of the first fanout wire 1211, where the second surface m2 may be parallel to the slope surface m3, for example, the second surface m2 contacts with the slope surface m3, that is, the second edge portion 1212b of the second fanout wire 1212 includes a portion extending along the slope surface m3, so that a smaller interval between the second edge portion 1212b and the first edge portion 1211b can be ensured, on one hand, more fanout wires can be disposed in a limited space, so as to facilitate realization of high display resolution of the display panel; on the other hand, the film layer above the fan-out wire 121 does not form a recess at the gap position between the first edge portion 1211b and the second edge portion 1212b, so that the flatness of the film layer above the fan-out wire 121 is ensured to be better.
On the basis of the above embodiment, as shown with continued reference to fig. 2 and 3, the second main body portion 1212a includes a third surface m4 on the side away from the substrate 101, the third surface m4 being parallel to the plane in which the substrate 101 lies; the second edge portion 1212b includes a second surface m2 near the side of the substrate 101 and a first side surface m5 connecting the second surface m2 and the third surface m4, the first side surface m5 including a curved surface.
The second main body 1212a includes a third surface m4 far away from the substrate 101, where the plane of the third surface m4 is parallel to the plane of the substrate 101, for example, all the planes are horizontal, so that the flatness of the whole second main body 1212a is good, and normal transmission of display signals is ensured. The second edge portion 1212b includes a second surface m2 adjacent to the side of the substrate 101 and a first side surface m5 connecting the second surface m2 and the third surface m4, the first side surface m5 including a curved surface, the shape of the first side surface m5 being related to the forming process of the second edge portion 1212b. Specifically, the second fanout line 1212 may be formed by a secondary etching process, for example, the second main body portion 1212a and the second edge portion 1212b are formed in different etching processes, and the second edge portion 1212b may be prepared by an optical proximity correction (Optical Proximity Correction, OPC) process. Specifically, the OPC process may be understood as forming a thick photoresist region, a thin photoresist region and a photoresist-free region in the photoresist above the prepared film layer of the second fanout line by using a mask having a specific shape, wherein the thick photoresist region may correspond to the second main body portion 1212a, and the thin photoresist region may correspond to the second edge portion 1212b. The OPC process, which will be described in detail in the following embodiments, ensures that the distance between the second fan-out trace 1212 and the first fan-out trace 1211 is not too large and thus a recess is not formed in the upper film layer of the fan-out trace; meanwhile, the distance between the second fan-out wire 1212 and the first fan-out wire 1211 is not too small, protrusions are not formed in the film layer above the fan-out wire, the film layer above the fan-out wire is ensured to be flat, and the structural stability of the display panel is ensured.
Further, fig. 4 is a schematic structural diagram of a second fan-out trace according to an embodiment of the present utility model, as shown in fig. 4, the first side surface m5 has two positions, and an included angle between a tangential plane disposed at a side near the second main body portion 1212a and a plane of the substrate 101 is larger than an included angle between a tangential plane disposed at a side far from the second main body portion 1212a and a plane of the substrate 101. Specifically, the first side surface m5 has two positions, such as an a position and a B position in the figure, wherein the a position is located on a side of the B position near the second main body portion 1212a, and an angle between a tangential plane at the a position and a plane of the substrate 101 is α, and an angle between a tangential plane at the B position and a plane of the substrate 101 is β, wherein α > β. That is, in the first side surface m5, the angle between the tangential plane at a position near the side of the second main body portion 1212a and the plane in which the substrate 101 is located is larger than the angle between the tangential plane at a position far from the side of the second main body portion 1212a and the plane in which the substrate 101 is located. In other words, the larger the rate of change in the height of the second edge portion 1212 on the side closer to the second main body portion 1212a, the smaller the rate of change in the height of the second edge portion 1212 on the side farther from the second main body portion 1212a, among the second edge portions 1212 b; in other words, the second edge portion 1212b has a steeper height of the second edge portion 1212 closer to the second body portion 1212a and a flatter height of the second edge portion 1212 farther from the second body portion 1212 a. Thus, the thickness of the second edge portion 1212 far from the second main body portion 1212a in the second edge portion 1212b is small, and the height variation is more gradual, that is, the overall thickness of the second edge portion 1212b far from the second main body portion 1212a in the second edge portion 1212b is small, so that even if the first fan-out wire 1211 and the second fan-out wire 1212 overlap at the position of the second edge portion 1212b, the overlapping position of the first fan-out wire 1211 and the second fan-out wire 1212 does not form a larger protrusion due to the small overall thickness of the second edge portion 1212b, the flatness of the film layer above the fan-out wire is ensured, and the structural stability of the display panel is ensured.
Alternatively, as a possible embodiment, with continued reference to fig. 2 and 3, the first edge portion 1211b includes a second side surface m6, and the second edge portion 1212b includes a second surface m2 adjacent to the side of the substrate 101, the second side surface m6 being parallel to the second surface m 2.
Specifically, the first edge portion 1211b includes a second side surface m6, the second edge portion 1212b includes a second surface m2 near one side of the substrate 101, where a plane of the second side surface m6 is parallel to a plane of the second surface m2, that is, the second side surface m6 and the second surface m2 have the same inclination degree, so that a smaller space between the second side surface m6 and the second surface m2 can be ensured, and further, a smaller space between the second edge portion 1212b and the first edge portion 1211b can be ensured, on one hand, more fan-out traces can be ensured to be disposed in a limited space, so that high display resolution of the display panel can be conveniently realized; on the other hand, the film layer above the fan-out wire 121 does not form a recess at the gap position between the first edge portion 1211b and the second edge portion 1212b, so that the flatness of the film layer above the fan-out wire 121 is ensured to be better.
Alternatively, as one possible embodiment, with continued reference to fig. 2 and 3, the width of the second fan out trace 1212 is greater than the width of the first fan out trace 1211 along the first direction, such as the X direction shown in the figures; the first direction is the arrangement direction of the fan-out wires.
Specifically, the second fanout trace 1212 may be formed by a secondary etching process, for example, the second main body portion 1212a and the second edge portion 1212b are formed in different etching processes, and the second fanout trace 1212 may be prepared by an optical proximity correction (Optical Proximity Correction, OPC) process. Specifically, the OPC process may be understood as forming a thick photoresist region, a thin photoresist region and a photoresist-free region in the photoresist above the prepared film layer of the second fanout line by using a mask having a specific shape, wherein the thick photoresist region may correspond to the second main body portion 1212a, and the thin photoresist region may correspond to the second edge portion 1212b. Since the second fanout wire 1212 is obtained by performing the second etching by using the OPC process and the first fanout wire 1211 is obtained by performing the first etching process, the etching precision of the second fanout wire 1212 is greater than that of the first fanout wire 1211, so that the etching loss of the second fanout wire 1212 in the etching process is ensured to be smaller, and the remaining portion of the second fanout wire 1212 after the end of the second etching process is ensured to be larger, that is, the width of the second fanout wire 1212 is greater than that of the first fanout wire 1211 along the arrangement direction of the plurality of fanout wires. Since the width of the second outgoing line 1212 is greater than the width of the first outgoing line 1211, the resistance of the second outgoing line 1212 is smaller than the resistance of the first outgoing line 1211, so that the loss of the display signal transmitted on the second outgoing line 1212 is smaller, and the good display effect of the display panel is ensured.
Optionally, fig. 5 is an enlarged schematic view of the display panel provided in fig. 1 in the area B, and as shown in conjunction with fig. 1 and 5, the display panel 10 further includes a binding area 131, where the binding area 131 is located on a side of the fanout wire area 12 away from the display area 11, and the binding area 131 includes a binding pad 132; the second fanout trace 1212 includes a first trace section 12121 and a second trace section 12122 connected to each other, the first trace section 12121 being electrically connected to the data line 111, the second trace section 12122 being electrically connected to the bonding pad 132; the included angle between the first wire segment 12121 and the preset direction is smaller than the included angle between the second wire segment 12122 and the preset direction, and the preset direction is parallel to the direction of the display area 11 pointing to the binding area 12; the line width of the first trace section 12121 is greater than the line width of the second trace section 12122.
Specifically, as shown in connection with fig. 1 and 5, the second fanout wire 1212 includes a first wire section 12121 and a second wire section 12122 connected to each other, wherein the first wire section 12121 may be understood as a portion of the second fanout wire 1212 connected to the data line 111, the second wire section 12122 may be understood as a portion of the second fanout wire 1212 connected to the bonding pad 121, and the first wire section 12121 and the second wire section 12122 are connected to each other to transmit the display signal output from the bonding pad 121 to the data line 111. And the extending directions of the first wire segment 12121 and the second wire segment 12122 are different, specifically, the included angle between the first wire segment 12121 and the preset direction (Y direction as shown in the figure) is smaller, the included angle between the second wire segment 12122 and the preset direction (Y direction as shown in the figure) is larger, for example, the included angle between the first wire segment 12121 and the preset direction is 0 °, and the included angle between the second wire segment 12122 and the preset direction is 30 °, 45 °, 60 ° or 79 °. Since the included angle between the first wire segment 12121 and the preset direction is smaller than the included angle between the second wire segment 12122 and the preset direction, the arrangement space of the first wire segment 12121 is smaller than the arrangement space of the second wire segment 12122. In order to ensure that the layout area of the second wire distribution portion 12122 may be provided with a sufficient number of second wire distribution portions to ensure the display resolution of the display panel, the wire width of the second wire distribution portion 12122 may be set to be larger than the wire width of the first wire distribution portion 12121, that is, the wire width of the first wire distribution portion 12121 is larger than the wire width of the second wire distribution portion 12122, so that on one hand, the layout area of the second wire distribution portion 12122 may be ensured to normally set the second wire distribution portion 12122, and further, the resistance of the first wire distribution portion 12121 with a larger wire width may be ensured to be the resistance of the first wire distribution portion 12121, so that the loss of the display signal in the transmission process is reduced, and the display effect of the display panel is ensured.
It should be noted that, the display panel provided in the embodiment of the present utility model further includes a driving chip 131 located in the bonding area 13, the driving chip 131 is electrically connected to the bonding pad 132, and the driving chip 131 covers the bonding pad 132, so that the bonding pad 132 is shown by a dotted line in the figure.
Based on the above embodiment, fig. 6 is a schematic cross-sectional structure along the section line C-C 'in the enlarged schematic B area provided in fig. 5, fig. 7 is a schematic cross-sectional structure along the section line D-D' in the enlarged schematic B area provided in fig. 5, fig. 8 is a schematic cross-sectional structure along the section line D-D 'in the enlarged schematic B area provided in fig. 5, fig. 9 is a schematic cross-sectional structure along the section line D-D' in the enlarged schematic B area provided in fig. 5, and fig. 5-9 show that the line width of the second main portion 1212a of the first trace portion 12121 is larger than the line width of the second main portion 1212a of the second trace portion 12122, and/or the line width of the second edge portion 1212B of the first trace portion 12121 is larger than the line width of the second edge portion 1212B of the second trace portion 12122.
As shown in fig. 6 and 7, the line width of the first wire distribution portion 12121 is larger than the line width of the second wire distribution portion 12122, specifically, the line width of the second main body portion 1212a of the first wire distribution portion 12121 is larger than the line width of the second main body portion 1212a of the second wire distribution portion 12122; alternatively, as shown in fig. 6 and 8, the line width of the second edge portion 1212b of the first wire segment 12121 is larger than the line width of the second edge portion 1212b of the second wire segment 12122; alternatively, as shown in fig. 6 and 9, the second main body portion 1212a of the first routing portion 12121 has a larger wire width than the second main body portion 1212a of the second routing portion 12122, and at the same time, the second edge portion 1212b of the first routing portion 12121 has a larger wire width than the second edge portion 1212b of the second routing portion 12122. By reasonably setting the dimensions of the second main body portion 1212a and the second edge portion 1212b of the first wire distribution portion 12121 and the second wire distribution portion 12122, the wire width of the first wire distribution portion 12121 is larger than the wire width of the second wire distribution portion 12122, so that the layout area of the second wire distribution portion 12122 can be fully ensured to normally set the second wire distribution portion 12122, meanwhile, the resistance of the first wire distribution portion 12121 with larger wire width can be ensured to be capable of being used for the first wire distribution portion 12121, the loss of display signals in the transmission process is reduced, and the display effect of the display panel is ensured.
Optionally, fig. 10 is another enlarged schematic view of the display panel provided in fig. 1 in the area B, where, as shown in fig. 10, there are two second fan-out wires 1212, and the line width of the second fan-out wire 1212 along the first direction near the edge of the display panel is greater than the line width of the second fan-out wire along the first direction near the center of the display panel; the first direction is the arrangement direction of the second fan-out wires.
Specifically, as shown in fig. 10, since the bonding pads 132 are closely arranged, when the second fan-out wire 1212 is electrically connected to the bonding pads 132, the extension length of the second wire segment 12122 of the second fan-out wire 1212 near the edge of the display panel is longer than the extension length of the second wire segment 12122 of the second fan-out wire 1212 near the center of the display panel. In order to ensure that the loss of the second outgoing lines 1212 of the display signals at different positions is the same or similar, the line width of the second outgoing lines 1212 at the side close to the edge of the display panel in the first direction may be greater than the line width of the second outgoing lines at the side close to the center of the display panel in the first direction, and the resistance of the second outgoing lines 1212 is reduced by the greater line width, so that the resistance difference caused by the longer line length of the second outgoing lines 1212 at the side close to the edge of the display panel is compensated, and the display balance of the display panel is ensured.
Further, the line width of the second fan-out wire near the edge of the display panel in the first direction is greater than the line width of the second fan-out wire near the center of the display panel in the first direction, specifically, the line width of the second main body part of the second fan-out wire near the edge of the display panel is greater than the line width of the second main body part of the second fan-out wire near the center of the display panel, and/or the line width of the second edge part of the second fan-out wire near the edge of the display panel is greater than the line width of the second edge part of the second fan-out wire near the center of the display panel, so that the resistance difference caused by longer line length is ensured, the impedance balance of the second fan-out wires at different positions is ensured, the loss balance of signals on the second fan-out wires at different positions is ensured, and the display effect balance of the display panel is good.
Based on the same inventive concept, the embodiment of the utility model also provides a method for preparing a display panel, which is used for preparing the display panel described in the above embodiment. Fig. 11 is a schematic diagram of a method for manufacturing a display panel according to an embodiment of the present utility model, where, as shown in fig. 11, the method for manufacturing a display panel according to an embodiment of the present utility model includes:
S110, providing a substrate.
The substrate provided by the embodiment of the utility model can be a flexible substrate or a rigid substrate, and the specific type of the substrate is not limited.
S120, preparing a first fan-out wire on one side of the substrate, wherein the first fan-out wire comprises a first main body part and a first edge part, the first edge part is positioned at the edge of the first main body part, and the thickness of the first edge part is smaller than that of the first main body part.
As an example, as shown in fig. 2 and 3, the first main body portion 1211a may be understood as a main body structure of the first fanout wire 1211, and the signal is more transmitted in the first main body portion 1211, and the first edge portion 1211b may be understood as a non-main body structure of the first fanout wire 1211, for example, an edge portion due to a process reason. Specifically, the first body portion 1211a and the first edge portion 1211b may be divided based on distribution positions, for example, the first edge portion 1211b is located at an edge of the first body portion 1211 a; alternatively, the first body portion 1211a and the first edge portion 1211b may be divided based on the thickness of the film layer, and the thickness of the first edge portion 1211b is smaller than the thickness of the first body portion 1211 a.
S130, preparing a second fan-out wire on one side of the first fan-out wire, which is far away from the substrate, wherein the second fan-out wire comprises a second main body part and a second edge part, the second edge part is positioned at the edge of the second main body part, and the thickness of the first edge part is smaller than that of the first main body part; and the first main body part and the second main body part are not overlapped along the thickness direction of the display panel.
As an example, as shown in connection with fig. 2 and 3, the second fanout wire 1212 includes a second main body portion 1212a and a second edge portion 1212b, the second main body portion 1212a may be understood as a main body structure of the second fanout wire 1212, and the signal is more transmitted in the second main body portion 1212, and the second edge portion 1212b may be understood as a non-main body structure of the second fanout wire 1212, such as an edge portion due to a process reason. Specifically, the second main body portion 1212a and the second edge portion 1212b may be divided based on the distribution position, for example, the second edge portion 1212b is located at the edge of the second main body portion 1212 a; alternatively, the second main body portion 1212a and the second edge portion 1212b may be divided based on the thickness of the film layer, and the thickness of the second edge portion 1212b is smaller than that of the second main body portion 1212 a.
Further, along the thickness direction of the display panel (the Z direction as shown in fig. 2), at least one first main body 1211a and at least one second main body 1212a do not overlap, so that parasitic capacitance generated between the first main body 1211a and the second main body 1212a can be avoided, less interference of display signals transmitted in the first fan-out wire and the second fan-out wire is ensured, and display effect is ensured; and fan-out is walked line top rete and can not be because of main part overlap protruding the causing the coverage not good, and the planarization of fan-out is walked line top rete, and then guarantees display panel's structural stability.
In summary, according to the manufacturing method of the display panel provided by the embodiment of the utility model, the first fan-out wires and the second fan-out wires which are arranged in different layers are manufactured, and smaller wire spacing can be provided between the first fan-out wires and the second fan-out wires which are arranged in different layers, so that the space occupied by the fan-out wires in the frame area can be reduced, the lower frame of the display panel is reduced, and the display panel with narrow frame design is facilitated. Further, the first main body part of the first fan-out wiring and the second main body part of the second fan-out wiring are not overlapped, so that parasitic capacitance between the first main body part and the second main body part can be avoided, the display signals transmitted in the first fan-out wiring and the second fan-out wiring are ensured to be less interfered, and the display effect is ensured; and the first main body part of the first fan-out wiring and the second main body part of the second fan-out wiring are not overlapped, so that the film layer above the fan-out wiring can be ensured not to be poor in coverage due to the overlapping bulge of the main body parts, and the structural stability of the display panel is ensured.
Fig. 12 is a schematic flow chart of another method for manufacturing a display panel according to an embodiment of the present utility model, and the manufacturing method shown in fig. 12 is a detailed description of how to manufacture the second fan-out line according to the embodiment. As shown in fig. 12, the preparation method provided by the embodiment of the utility model includes:
S210, providing a substrate.
S220, preparing a first fan-out wire on one side of the substrate, wherein the first fan-out wire comprises a first main body part and a first edge part, the first edge part is positioned at the edge of the first main body part, and the thickness of the first edge part is smaller than that of the first main body part.
S230, preparing a second fan-out wiring layer on one side of the first fan-out wiring layer.
Specifically, fig. 13 is a schematic structural diagram of preparing a second fanout wiring layer on one side of a first fanout wiring according to an embodiment of the present utility model, and as shown in fig. 13, first preparing a second fanout wiring layer 20 disposed in a whole layer.
S240, preparing a photoresist layer on one side of the second fan-out wiring layer away from the first fan-out wiring.
Specifically, fig. 14 is a schematic structural diagram of a photoresist layer prepared on a side of the second outgoing line layer away from the first outgoing line, and as shown in fig. 14, a photoresist 21 is prepared on a whole layer on a side of the second outgoing line layer 20 away from the first outgoing line 1211.
And S250, exposing the photoresist layer by using the mask plate to form exposure photoresist on one side of the second fan-out line.
Specifically, fig. 15 is a schematic structural diagram of a mask provided in an embodiment of the present utility model, and fig. 16 is a schematic structural diagram of a mask for forming an exposure photoresist by using the mask provided in an embodiment of the present utility model, as shown in fig. 15 and 16, a mask 22 includes a mask main body 221 and a mask edge 222 that are connected to each other, the mask edge 222 includes a plurality of mask protrusions 2221, and a hollow area 223 is provided between two adjacent mask protrusions 2221 along an arrangement direction of the plurality of mask protrusions. The exposure photoresist 23 includes a first region 231, a second region 232, and a third region 233; in the thickness direction of the display panel (the Z direction as shown in the drawing), the second region 232 overlaps the mask edge portion 222, the third region 233 overlaps the mask body portion 221, the first region 231 overlaps the region between two adjacent mask edge portions 222, and the first region 231 does not overlap the reticle.
As illustrated in fig. 15 and 16, the mask 22 includes a mask body 221 and a mask edge 222, which are connected to each other, and the mask body 221 may completely block or nearly completely block exposure light, that is, the exposure light may not be irradiated into the photoresist 21 through the mask body 221, so that the photoresist in the third region 233 under the mask body 221 is not exposed or has little exposure. The mask edge portion 222 includes a plurality of mask protrusions 2221, and a hollowed-out area 223 is disposed between two adjacent mask protrusions 2221, that is, a portion of exposure light may be irradiated into the photoresist 21 through the hollowed-out area, so that the photoresist in the second area 232 under the mask edge portion 222 is partially exposed, and the exposure amount of the photoresist is greater than that in the third area 233. There is no mask pattern between the adjacent two mask edge portions 222, i.e., the region between the adjacent two mask edge portions 222 does not block the exposure light at all, i.e., the exposure light is completely irradiated into the photoresist 21 through the region between the adjacent two mask edge portions 222, so that the photoresist in the first region 231 between the adjacent two mask edge portions 222 is completely and sufficiently exposed with a larger exposure amount than the photoresist in the second region 232. Three exposure areas with different exposure amounts are formed in the photoresist by exposing in this way, namely a first area 231, a second area 232 and a third area 233, wherein the photoresist in the first area 231 is fully exposed due to no mask, and the exposure amount is the largest; the photoresist in the second region 232 is partially hollowed out due to the partial mask so as to be partially exposed, and the exposure amount is centered; the photoresist in the third region 233 is not exposed or is exposed to a very small amount due to the complete mask, and its exposure amount is minimized.
And S260, developing the first region of the exposure photoresist to form a photoresist-free region, wherein the photoresist-free region exposes the second fan-out wiring layer.
Fig. 17 is a schematic diagram of a structure of a developing exposure photoresist according to an embodiment of the present utility model, as shown in fig. 17, a first region 231 of an exposure photoresist 23 is developed by a developing solution, and since the region is completely exposed, a photoresist-free region is formed after the first region 231 of the exposure photoresist 23 is developed, and a second fan-out wiring layer 20 of the region is exposed after the photoresist-free region is covered.
S270, developing the second region of the exposure photoresist to form the photoresist with the first thickness.
With continued reference to fig. 17, the second region 232 of the exposed photoresist 23 is developed by a developing solution, and since the region is partially exposed, a portion of the photoresist of a thickness remains after the second region 232 of the exposed photoresist 23 is developed because it is not exposed, and therefore a certain thickness of photoresist, such as a first thickness of photoresist 234, remains after the second region 232 of the exposed photoresist is developed, and the thickness of the first thickness of photoresist 234 is less than the thickness of the photoresist before the unexposed development.
And, along the direction in which the mask body portion points to the mask edge portion, the width of the mask edge portion is positively correlated with the width of the first thickness photoresist.
As illustrated in fig. 15 and 17, for example, when the width of the mask edge portion 222 is larger in the X direction as the mask edge portion 222 is directed in the direction of the mask edge portion 221 (X direction as illustrated in the drawings), the light shielding region of the mask 22 is larger in the X direction, and thus the region of the photoresist to be blocked is larger, and the width of the subsequently formed first thickness photoresist is also larger. The first thickness photoresist corresponds to the size of the second edge part in the second fan-out line, so that the width of the first thickness photoresist can be adjusted by adjusting the width of the mask edge part, and the size of the second edge part in the second fan-out line can be further adjusted.
S280, developing the third region of the exposure photoresist to form a second thickness photoresist, wherein the thickness of the second thickness photoresist is larger than that of the first thickness photoresist.
With continued reference to fig. 17, the third region 233 of the exposed photoresist 23 is developed with a developer solution, and since this region is not exposed or is exposed to a very small amount, there is a substantial thickness of photoresist remaining after development of the third region 233 of the exposed photoresist 23 as it is not exposed, and therefore a greater thickness of photoresist remains after development of the third region 233 of the exposed photoresist, such as a second thickness of photoresist 235, the thickness of this second thickness of photoresist 235 being equal to or approximately equal to the thickness of the photoresist prior to the unexposed development.
S290, etching the second fan-out wiring layer to prepare a second fan-out wiring; along the thickness direction of the display panel, the second main body part overlaps the third region, the second edge region overlaps the second region, and a gap between two adjacent second fan-out wires overlaps the first region.
Specifically, as shown in fig. 17 and fig. 2, the second fanout wiring layer is etched by the exposure mask to prepare a second fanout wiring, where the second main body portion 1212a overlaps the third region 233, and the second fanout wiring layer in the third region 233 is reserved to form the second main body portion 1212a; the second edge region 1212b overlaps the second region 232, and the second fanout wiring layer in the second region 232 is etched to form a second edge portion 1212b; the second fanout trace layer 20 exposed by the first region 231 is completely etched to form a gap between two adjacent second fanout traces 1212, that is, the gap between two adjacent second fanout traces 1212 overlaps the first region 231, to finally obtain a plurality of second fanout traces 1212 which are independently arranged, each second fanout trace 1212 including a second main body portion 1212a and a second edge portion 1212b.
In summary, the photoresist arranged on the whole layer is exposed through a mask plate comprising a mask main body part and a mask edge part to form exposure photoresist, so that a first region, a second region and a third region with different exposure degrees are obtained, namely, the photoresist with different exposure degrees is obtained through an OPC (optical process), and then different structures of the second fan-out wiring are respectively obtained through the photoresist with different exposure degrees. Therefore, the problem that the following process is bad due to the fact that the distance between the first fan-out wiring and the second fan-out wiring is too large due to over etching in the existing second fan-out wiring preparation process is avoided, and the upper film layer is sunken; or the problem that the overlapping area between the first fan-out wiring and the second fan-out wiring is overlarge due to underetching in the existing second fan-out wiring preparation process, and the film layer above the first fan-out wiring is raised to cause poor subsequent processes is avoided. The adoption of the OPC technology can ensure that the interval between the second fan-out wiring and the first fan-out wiring is neither too large nor too small, ensure that the first fan-out wiring and the second fan-out wiring are neither too overlapped nor too far away, ensure that the normal wiring density of the first fan-out wiring and the second fan-out wiring and the interference of display signals transmitted in the first fan-out wiring and the second fan-out wiring are smaller, and ensure the display effect; and the first fan-out wiring and the second fan-out wiring are not uneven in the upper film layer due to excessive distance or excessive overlapping, so that the structural stability of the display panel is ensured.
Fig. 18 is a schematic flow chart of another method for manufacturing a display panel according to an embodiment of the present utility model, and the method for manufacturing shown in fig. 18 is a detailed description of how to manufacture the second fan-out line by a secondary etching process according to the embodiment. As shown in fig. 18, the preparation method provided by the embodiment of the utility model includes:
s310, providing a substrate.
S320, preparing a first fan-out wire on one side of the substrate, wherein the first fan-out wire comprises a first main body part and a first edge part, the first edge part is positioned at the edge of the first main body part, and the thickness of the first edge part is smaller than that of the first main body part.
S330, preparing a second fan-out wiring layer on one side of the first fan-out wiring layer.
S340, preparing a photoresist layer on one side of the second outgoing line layer away from the first outgoing line.
And S350, exposing the photoresist layer by using the mask plate to form exposure photoresist on one side of the second fan-out line.
S360, developing the first area of the exposure photoresist to form a photoresist-free area, wherein the photoresist-free area exposes the second fan-out wiring layer.
And S370, developing the second region of the exposure photoresist to form the photoresist with the first thickness.
And S380, developing the third region of the exposure photoresist to form a second thickness photoresist, wherein the thickness of the second thickness photoresist is larger than that of the first thickness photoresist.
S390, etching the second fan-out wiring layer to prepare a second fan-out wiring matrix.
Specifically, fig. 19 is a schematic structural diagram of a second fan-out wiring matrix prepared by etching a second fan-out wiring layer according to the embodiment of the present utility model, and in combination with fig. 17 and 19, since photoresist in the first region 231 is completely developed and removed to form a photoresist-free region, the second fan-out wiring layer 20 corresponding to the first region is completely exposed, and at this time, the exposed second fan-out wiring layer in the photoresist-free region may be etched by using the first etching medium. The first etching medium is understood to be an etching medium, such as an etching gas, which reacts with the second fan-out trace layer. That is, the exposed second fanout trace layer in the photoresist-free region may be removed by etching with the first etching medium, and the first region of the second fanout trace may be removed by etching with the first etching medium to obtain the second fanout trace matrix 24.
S3100, etching the photoresist with the first thickness by adopting a developing etching medium, and removing the photoresist with the first thickness.
Specifically, fig. 20 is a schematic diagram of a structure for removing the photoresist with the first thickness according to the embodiment of the present utility model, and after the second fan-out trace matrix 24 is obtained by combining fig. 19 and fig. 20, the etching medium, for example, a developing solution, is used to continue to etch the photoresist 234 with the first thickness until the photoresist with the first thickness is completely etched and removed, and at this time, at least part of the second fan-out trace matrix covered by the photoresist with the first thickness is exposed.
It should be noted that, as shown in fig. 20, since the first thickness photoresist 234 and the second thickness photoresist 235 are the same material type photoresist, the developing etching medium etches the second thickness photoresist at the same time as the first thickness photoresist is etched by the developing etching medium to remove the first thickness photoresist. Since the thickness of the second thickness photoresist is greater than the thickness of the first thickness photoresist, after the first thickness photoresist is completely etched, some photoresist remains in the coverage area of the original second thickness photoresist, as shown by thinned photoresist 25, and this portion of photoresist continues to cover the second fan-out trace matrix 24. That is, while the first thickness photoresist is etched by the developing etching medium to remove the first thickness photoresist, the second thickness photoresist is thinned, but some photoresist remains in the coverage area of the original second thickness photoresist, as shown by thinned photoresist 25, and this portion of photoresist continues to cover the second fan-out line matrix 24.
S3110 etching the second outgoing line matrix to prepare a second outgoing line.
Specifically, fig. 21 is a schematic structural diagram of a second fan-out trace prepared by etching a second fan-out trace matrix according to an embodiment of the present utility model, and referring to fig. 20 and 21, a second etching medium is used to etch the second fan-out trace matrix 24 exposed by the photoresist with the first thickness, where the second etching medium reacts with the second fan-out trace matrix 24, and a second area of the second fan-out trace matrix 24 can be etched and removed by the second etching medium to obtain a second fan-out trace 1212.
The second etching medium is understood to be an etching medium, such as an etching gas, which reacts with the second fan-out precursor material. The second etching medium reacts with the second fan-out trace matrix 24 to remove the edge portion of the second fan-out trace matrix 24, so as to obtain a second edge portion 1212b of the second fan-out trace 1212, and the rest of the second fan-out trace matrix 24 is covered by the thinned photoresist 25, and the second fan-out trace matrix 24 is not reacted with the second etching medium, so that a second main body portion 1212a of the second fan-out trace 1212 is formed.
In summary, according to the preparation method provided by the embodiment of the utility model, the photoresist-free region is obtained through the first photoresist etching, the second fanout wiring matrix is obtained through the first photoresist etching of the photoresist-free region, the first thickness photoresist is removed through the second photoresist etching, and the second fanout wiring matrix is obtained through the second etching of the second fanout wiring matrix exposed by the first thickness photoresist. Namely, the second fan-out wiring comprising the second main body part and the second edge part is prepared by etching the optical adhesive twice and etching the second fan-out wiring layer twice. The size of the photoresist-free region in the photoresist and the size of the photoresist with the first thickness can be accurately controlled by reasonably controlling the sizes of the mask main body part and the mask edge part in the mask, so that the accurate regulation and control of the size of the second outgoing line can be realized, the interval between the second outgoing line and the first outgoing line is ensured not to be too large or too small, the first outgoing line and the second outgoing line are ensured not to be excessively overlapped or excessively far away, the normal wiring density of the first outgoing line and the second outgoing line and the interference of display signals transmitted in the first outgoing line and the second outgoing line are ensured to be smaller, and the display effect is ensured; and the first fan-out wiring and the second fan-out wiring are not uneven in the upper film layer due to excessive distance or excessive overlapping, so that the structural stability of the display panel is ensured.
Based on the same inventive concept, the embodiment of the present utility model further provides a display device, specifically, fig. 22 is a schematic structural diagram of the display device provided by the embodiment of the present utility model, and as shown in fig. 22, the display device 100 includes the display panel 10 according to any one of the embodiments, so that the display device 100 provided by the embodiment of the present utility model has the corresponding beneficial effects in the foregoing embodiments, which are not repeated herein. For example, the display apparatus 100 may be an electronic device such as a mobile phone, a computer, a smart wearable device (e.g., a smart watch), and a vehicle-mounted display device, which is not limited in the embodiment of the present utility model.
The above embodiments do not limit the scope of the present utility model. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included in the scope of the present utility model.

Claims (12)

1. The display panel is characterized by comprising a display area and a fan-out wiring area;
The display area comprises a plurality of data lines, the fan-out wiring area comprises a plurality of fan-out wirings, and the fan-out wirings are electrically connected with the data lines;
the fan-out wiring comprises a plurality of first fan-out wirings and a plurality of second fan-out wirings, the display panel further comprises a substrate, and the second fan-out wirings are positioned on one side of the first fan-out wirings away from the substrate;
the first fan-out wire comprises a first main body part and a first edge part, wherein the first edge part is positioned at the edge of the first main body part, and the thickness of the first edge part is smaller than that of the first main body part; the second fanout wire comprises a second main body part and a second edge part, wherein the second edge part is positioned at the edge of the second main body part, and the thickness of the second edge part is smaller than that of the second main body part;
at least one of the first body portions and at least one of the second body portions do not overlap in a thickness direction of the display panel.
2. The display panel according to claim 1, wherein the first edge portion overlaps the second edge portion in a thickness direction of the display panel;
alternatively, the first edge portion and the second edge portion do not overlap in a thickness direction of the display panel, and a minimum distance L between the first edge portion and the second edge portion in the first direction satisfies l.ltoreq.0.3 μm; the first direction is the arrangement direction of the fan-out wires.
3. The display panel according to claim 1, wherein a thickness of the second edge portion gradually increases in a direction in which the second edge portion is directed toward the second main body portion.
4. The display panel of claim 1, wherein the second body portion includes a first surface adjacent to the substrate side, the second edge portion includes a second surface adjacent to the substrate side, the first surface lies in a plane parallel to the substrate plane, and the second surface lies in a plane intersecting the substrate plane.
5. The display panel according to claim 1, wherein the second main body portion includes a third surface away from the substrate side, the third surface being parallel to a plane in which the substrate is located;
the second edge portion includes a second surface adjacent to the substrate side and a first side connecting the second surface and the third surface, the first side including a curved surface.
6. The display panel of claim 5, wherein the first side has two positions, and an angle between a tangential plane disposed near the second main body portion and a plane of the substrate is larger than an angle between a tangential plane disposed far from the second main body portion and a plane of the substrate.
7. The display panel of claim 1, wherein the first edge portion includes a second side surface, the second edge portion including a second surface proximate to a side of the substrate, the second side surface being parallel to the second surface.
8. The display panel of claim 1, wherein a width of the second fan-out trace is greater than a width of the first fan-out trace in a first direction; the first direction is the arrangement direction of the fan-out wires.
9. The display panel of claim 1, further comprising a binding region located on a side of the fan-out routing region away from the display region, the binding region comprising a binding pad;
the second fan-out wiring comprises a first wiring subsection and a second wiring subsection which are connected with each other, the first wiring subsection is electrically connected with the data line, and the second wiring subsection is electrically connected with the binding pad; the included angle between the first wiring subsection and the preset direction is smaller than the included angle between the second wiring subsection and the preset direction, and the preset direction is parallel to the direction of the display area pointing to the binding area;
The line width of the first wire distribution part is larger than that of the second wire distribution part.
10. The display panel of claim 9, wherein a line width of the second body portion of the first trace section is greater than a line width of the second body portion of the second trace section, and/or a line width of the second edge portion of the first trace section is greater than a line width of the second edge portion of the second trace section.
11. The display panel according to claim 1, wherein there are two second fan-out wirings, and a line width of the second fan-out wiring near an edge side of the display panel in a first direction is larger than a line width of the second fan-out wiring near a center side of the display panel in the first direction; the first direction is the arrangement direction of the second fan-out wires.
12. A display device comprising the display panel of any one of claims 1-11.
CN202320682383.XU 2023-03-30 2023-03-30 Display panel and display device Active CN219803001U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320682383.XU CN219803001U (en) 2023-03-30 2023-03-30 Display panel and display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320682383.XU CN219803001U (en) 2023-03-30 2023-03-30 Display panel and display device

Publications (1)

Publication Number Publication Date
CN219803001U true CN219803001U (en) 2023-10-03

Family

ID=88182062

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320682383.XU Active CN219803001U (en) 2023-03-30 2023-03-30 Display panel and display device

Country Status (1)

Country Link
CN (1) CN219803001U (en)

Similar Documents

Publication Publication Date Title
CN112740647B (en) Photosensitive assembly, camera module and manufacturing method thereof
CN109976056B (en) Array substrate, manufacturing method thereof, display panel and display device
WO2019174297A1 (en) Array substrate, manufacturing method therefor, and display apparatus
US11360627B2 (en) Touch substrate, method of forming the same, and touch display device
WO2022205852A1 (en) Display panel and display device
US20220320206A1 (en) Mask plate, display substrate and manufacturing method thereof, and display device
CN219803001U (en) Display panel and display device
US11327401B2 (en) Display substrate, method for preparing the same, and display device
CN116322186A (en) Display panel, preparation method thereof and display device
US20220330430A1 (en) Bonding pad structure
CN216958034U (en) Array substrate and display device
US11817463B2 (en) Driving backplane and method for manufacturing the same, and display device
EP4068377A1 (en) Display substrate and manufacturing method therefor, and display apparatus
CN216288456U (en) Display panel
WO2022001425A1 (en) Light emitting substrate and preparation method therefor, and display apparatus
US11957033B2 (en) Display panel, manufacturing method thereof, and display device
WO2023184244A1 (en) Display substrate and display device
WO2022217608A1 (en) Driving backplane and manufacturing method therefor, and light-emitting substrate
CN113629074B (en) Display panel
CN113178463B (en) Display panel and manufacturing method thereof
WO2023097445A1 (en) Light-emitting substrate and preparation method therefor, and display apparatus
CN112951096B (en) Display panel and preparation method thereof
US20240153962A1 (en) Display substrate, manufacturing method thereof, and display apparatus
US20220140048A1 (en) Display panel, method for preparing the same, and display device
WO2024036636A1 (en) Substrate and electronic apparatus

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant