CN219800952U - Battery cell coating device - Google Patents

Abstract

The utility model provides a battery cell coating device, which comprises a mounting table and a rotating assembly, wherein a via hole for a battery cell to pass through is formed in the mounting table along the Z-axis direction, the two side surfaces of the mounting table along the Z-axis direction are a first side surface and a second side surface respectively, and the first side surface is used for placing an insulating sheet; the rotating assembly is arranged on the second side face, the rotating assembly is arranged on two opposite sides of the through hole along the X direction and comprises a rubber roller and a first fixing piece, the rubber roller is arranged on the first fixing piece in a rotating mode, a gap through which a power supply core passes is formed between the two rubber rollers and is arranged oppositely, an elastic piece is arranged between the rubber roller and the first fixing piece, and the width of the gap along the X direction is smaller than the size of the power supply core along the X direction. Through setting up via hole and rotating assembly, make the electric core pass via hole and clearance in proper order, and two rubber rolls have the trend of supporting tightly in electric core side all the time to with insulating piece cladding on the side of electric core, realize the diolame processing to electric core, improve artifical diolame work efficiency.

Description

Battery cell coating device

Technical Field

The utility model relates to the technical field of battery production, in particular to a battery cell coating device.

Background

In the production process of the battery, the battery core is required to be coated, the outer shell is insulated and protected, the scratch on the metal surface of the battery core is prevented, and the safety of the battery core is improved. Generally, a film coating machine is used for coating films, the speed is high, but in the process of changing and reforming tools for different battery cells, the required cost is high, and the required operation period is long, so that manual film coating can be performed for small-batch battery cells, and the requirement on the level of staff is high.

The prior art has the following problems: due to the difference of staff, the coated battery cell products are inconsistent in the manual treatment process, and the efficiency of the purely manual operation is slower.

Disclosure of Invention

The utility model aims at: the utility model provides a battery cell diolame device, it can improve artifical diolame work efficiency, and simple structure.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

provided is a battery cell coating device, comprising:

the mounting table is provided with a through hole for passing through the power supply core in a penetrating manner along the Z-axis direction, two side surfaces of the mounting table along the Z-axis direction are a first side surface and a second side surface respectively, and the first side surface is used for placing an insulating sheet;

the rotating assembly is arranged on the second side face, the rotating assembly is arranged on two opposite sides of the through hole along the X direction, the rotating assembly comprises rubber rollers and first fixing pieces, the rubber rollers are arranged on the first fixing pieces in a rotating mode, two rubber rollers are arranged oppositely, gaps for the battery cells to pass through are formed between the rubber rollers, elastic pieces are arranged between the rubber rollers and the first fixing pieces, and the width of the gaps along the X direction is smaller than the size of the battery cells along the X direction.

As a preferred scheme of electric core diolame device, the rotating-structure still includes second mounting and guide pillar, the second mounting with first mounting interval, the second mounting sets up on the second side, one side that the first mounting kept away from the rubber roll is provided with the second mounting, the guide pillar along its length direction's both ends respectively with first mounting with the second mounting is connected.

As a preferable scheme of the cell coating device, the elastic piece is a spring, and the spring is sleeved on the guide post.

As a preferred scheme of electric core coating device, run through on the first mounting and be provided with a plurality of first mounting holes, all first mounting holes are along Y axle direction interval setting, be provided with on the second mounting with the relative through-hole that sets up of first mounting hole, the guide pillar is inserted respectively along its length direction's both ends and is established first mounting hole with in the through-hole, the guide pillar is installed in the first mounting hole, the guide pillar is kept away from first mounting hole's one end is passed the through-hole, just the guide pillar is for the second mounting removes.

As a preferred scheme of electric core diolame device, first mounting includes backup pad and two end plates, the backup pad along its length direction's both ends all with the end plate is connected perpendicularly, two second mounting hole has all been seted up on the end plate, the both ends of rubber roll's length direction insert respectively establish in two the second mounting hole.

As a preferred scheme of electric core diolame device, be provided with first locating part on the first side, the via hole is followed the both sides of Y axle direction all are provided with first locating part, be provided with the recess on the first locating part, the recess is followed the Z axle direction runs through first locating part, the recess with the via hole intercommunication, and two the notch of recess sets up relatively, so that the electric core is followed the both ends card of Y axle direction is established in the recess and can follow the length direction of recess slides.

As a preferred scheme of the cell coating device, the first limiting part comprises a first part and a second part, the bottom surface of the first part is abutted against the first side surface, the end surface of the second part, which is close to one end of the first side surface, is spaced from the first side surface, the second part is positioned on one side surface of the first part, which is close to the other first limiting part, and the end surface of the second part, which is close to one end of the first side surface, the first part and the first side surface are used for limiting the limiting groove of the insulating sheet.

As a preferred scheme of the battery cell coating device, the first side face is provided with a second limiting piece, the second limiting piece comprises a first block and a second block, the first block is arranged on two sides of the second side face along the X-axis direction, the second block is arranged on two sides of the second side face along the Y-axis direction, and the second limiting piece is abutted to the end face of the insulating sheet so as to limit the movement of the insulating sheet.

As a preferable scheme of the battery cell coating device, the first blocks are movably arranged on the mounting table along the X-axis direction, so that the distance between the two first blocks is adjustable; and/or;

the second blocks are movably arranged on the mounting table along the Y-axis direction, so that the distance between the two second blocks can be adjusted.

As a preferable scheme of the battery core coating device, a plurality of through holes are formed in the mounting table, and all the through holes are communicated with the negative pressure generator gas circuit so that the insulating sheet is adsorbed on the mounting table.

The beneficial effects of the utility model are as follows: through setting up via hole and rotating assembly to place the insulating piece on first side, rotating assembly sets up in the via hole along the opposite both sides of X axle direction, when the clearance between via hole and two rubber rolls is passed in proper order to the electric core, electric core bottom and insulating piece butt and drive the insulating piece and follow Z axle direction and remove, set up the elastic component because of rubber roll and first mounting between, make two rubber rolls have the trend with electric core side butt all the time, and support the insulating piece tightly on the side of electric core, thereby realize the diolame processing to the electric core, improve artifical diolame work efficiency.

Drawings

The utility model is described in further detail below with reference to the drawings and examples.

Fig. 1 is a structural diagram of the battery cell coating device according to the embodiment of the utility model.

Fig. 2 is a structural diagram (provided with an insulating sheet) of the battery cell coating device according to the embodiment of the utility model.

Fig. 3 is a side view of the battery cell coating device according to the embodiment of the utility model.

Fig. 4 is a structural view of the first fixing member according to the embodiment of the present utility model.

Fig. 5 is a block diagram of the guide post according to the embodiment of the present utility model.

Fig. 6 is a structural view of the second fixing member according to the embodiment of the present utility model.

Fig. 7 is a side view of the first stop member according to an embodiment of the present utility model.

In fig. 1 to 7:

1. a mounting table; 101. a via hole; 102. a first side; 103. a second side; 104. a through hole; 105. a bracket; 2. a rotating assembly; 201. a rubber roller; 202. a first fixing member; 2021. a support plate; 20211. a first mounting hole; 2022. an end plate; 20221. a second mounting hole; 203. a second fixing member; 2031. a through hole; 204. a guide post; 2041. an external thread structure; 3. an elastic member; 4. a first limiting member; 401. a first section; 402. a second section; 4021. a groove; 5. a second limiting piece; 501. a first block; 5011. a second long hole; 502. a second block; 5021. a third long hole; 6. a nut;

200. an insulating sheet.

Detailed Description

Advantages and features of the present utility model and methods of accomplishing the same may become apparent with reference to the following detailed description of embodiments taken in conjunction with the accompanying drawings. However, the present utility model is not limited to the embodiments disclosed below, but may be embodied in various different forms, which are provided only for the purpose of completing the disclosure of the present utility model and fully understanding the scope of the present utility model by those skilled in the art, and the present utility model is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present utility model will be described in detail with reference to the accompanying drawings.

As shown in fig. 1 to 3, the utility model provides a battery cell coating device, which comprises a mounting table 1 and a rotating assembly 2, wherein a through hole 101 for a battery cell to pass through is formed in the mounting table 1 along the Z-axis direction, the battery cell passes through the through hole 101 by manual operation, two side surfaces of the mounting table 1 along the Z-axis direction are a first side surface 102 and a second side surface 103 respectively, the first side surface 102 is used for placing an insulating sheet 200, the insulating sheet 200 is driven to move downwards along the Z-axis direction at the same time when the battery cell passes through the through hole 101, and the bottom of the battery cell is coated with the insulating sheet 200. The rotating assembly 2 is arranged on the second side 103, the rotating assembly 2 is arranged on two opposite sides of the through hole 101 along the X direction, the rotating assembly 2 comprises a rubber roller 201 and a first fixing piece 202, the rubber roller 201 is arranged on the first fixing piece 202 in a rotating mode, the two rubber rollers 201 are arranged oppositely, a gap through which a power supply core passes is formed between the two rubber rollers 201, so that the power supply core can sequentially pass through the through hole 101 and the gap, the power supply core can drive the two rubber rollers 201 to rotate on the first fixing piece 202 in the moving process of the Z axis direction, and the two rubber rollers 201 can respectively abut against two sides of the power supply core, so that the insulating sheet 200 is coated on the side face of the power supply core. The elastic piece 3 is arranged between the rubber roller 201 and the first fixing piece 202, and in the process that the battery cell passes through the gap, the elastic piece 3 is arranged, so that the two rubber rollers 201 always have a trend of approaching each other, the rubber roller 201 always abuts against the insulating sheet 200 on the side face of the battery cell, the insulating sheet 200 is coated on the battery cell, and the coating of the battery cell can be completed after the battery cell completely passes through the gap. The width of the gap along the X direction is smaller than the dimension of the battery cell along the X direction, so as to ensure that the two rubber rollers 201 can both abut against the side surface of the battery cell, so that the two rubber rollers 201 can abut the insulating sheet 200 on the side surface of the battery cell. Through setting up via hole 101 and rotating assembly 2 to 102 place insulating piece 200 on the first side, rotating assembly 2 sets up in the opposite both sides of via hole 101 along the X axis direction, when the electric core passes the clearance between via hole 101 and two rubber rolls 201 in proper order, electric core bottom and insulating piece 200 butt and drive insulating piece 200 and remove along the Z axis direction, because of setting up elastic component 3 between rubber roll 201 and the first mounting 202, make two rubber rolls 201 have the trend with electric core side butt all the time, and with insulating piece 200 butt on the side of electric core, thereby realize the diolame processing to the electric core, improve artifical diolame work efficiency.

As shown in fig. 3, the rotating structure further includes a second fixing member 203 and a guide pillar 204, where the second fixing member 203 and the first fixing member 202 are spaced apart, the second fixing member 203 is disposed on the second side 103, one side of the first fixing member 202 away from the rubber roller 201 is provided with the second fixing member 203, two ends of the guide pillar 204 along the length direction thereof are respectively connected with the first fixing member 202 and the second fixing member 203, so that the first fixing member 202 is disposed on the second fixing member 203 along the X-axis direction, and the guide pillar 204 is disposed between the first fixing member 202 and the second fixing member 203, so that the first fixing member 202 can be effectively prevented from moving along the Z-axis direction when the battery core sequentially passes through the through hole 101 and the gap, and the rubber roller 201 is extruded, so as to limit the rubber roller 201 and the first fixing member 202 and the second fixing member 203 to keep the same horizontal plane.

Preferably, the elastic member 3 is a spring, the spring is sleeved on the guide pillar 204, the spring is arranged between the first fixing member 202 and the second fixing member 203, in the process of coating the battery cell, the battery cell sequentially passes through the through hole 101 and the gap along the Z-axis direction, in the process of passing through the gap, the battery cell can extrude the rubber roller 201 along the direction that the two rubber rollers 201 are far away from each other, the two ends of the spring along the length direction can be respectively abutted against the first fixing member 202 and the second fixing member 203, the two rubber rollers 201 can always have a trend of being abutted against the side surface of the battery cell, the two rubber rollers 201 can always be abutted against the side surface of the battery cell, and the insulating sheet 200 is coated on the side surface of the battery cell, so that the coating treatment of the battery cell is realized.

Preferably, referring to fig. 4 and 6, in this embodiment, a plurality of first mounting holes 20211 are formed in the first fixing member 202 in a penetrating manner, all the first mounting holes 20211 are formed in the second fixing member 203 at intervals along the Y axis direction, through holes 2031 are formed in the second fixing member 203 and are opposite to the first mounting holes 20211, two ends of the guide pillar 204 along the length direction of the guide pillar are respectively inserted into the first mounting holes 20211 and the through holes 2031, the guide pillar 204 is mounted in the first mounting holes 20211, the first fixing member 202 is mounted on the second fixing member 203 through the guide pillar 204, so as to limit the first fixing member 202 to move along the Z axis direction, one end of the guide pillar 204 away from the first mounting hole 20211 passes through the through holes 2031, and the guide pillar 204 moves relative to the second fixing member 203, in the process that the battery core passes through the gap, the two rubber rollers 201 can be extruded in the direction away from each other, and the two first fixing members 202 are driven to move along the direction of the second fixing member 203 close to each other, so that the guide pillar 204 moves along the X axis direction 2031, and the two rubber rollers 204 can be fixed on the two elastic side surfaces of the two rubber rollers 200 through the two elastic sleeves 204 in the direction of the through holes 2033, and the two rubber rollers 200 can be fixed against the trend to each other.

Specifically, referring to fig. 5, both ends of the guide pillar 204 along the length direction thereof are provided with external screw thread structures 2041, and the first mounting hole 20211 is provided with internal screw thread structures therein, so that the guide pillar 204 is screwed into the first mounting hole 20211, so that the guide pillar 204 can be more stably mounted on the first fixing member 202; the guide pillar 204 passes through the through hole 2031 and protrudes on one side of the second fixing member 203 away from the first fixing member 202, a nut 6 is disposed at one end of the guide pillar 204 away from the first mounting hole 20211, an internal thread structure is disposed on an inner sidewall of the nut 6, and the nut 6 is screwed on the guide pillar 204 to limit the guide pillar 204 to move in a direction approaching the first fixing member 202 in the through hole 2031.

Referring to fig. 4, the first fixing member 202 includes a support plate 2021 and two end plates 2022, two ends of the support plate 2021 along the length direction are vertically connected with the end plates 2022, two end plates 2022 are provided with second mounting holes 20221, and two ends of the rubber roller 201 along the length direction are respectively inserted into the two second mounting holes 20221, so that the rubber roller 201 can be stably mounted on the first fixing member 202, and the rubber roller 201 can be rotatably arranged on the first fixing member 202.

As shown in fig. 1 to 3, a first limiting member 4 is disposed on a first side 102, two sides of a via hole 101 along the Y axis direction are both provided with the first limiting member 4, a groove 4021 is disposed on the first limiting member 4, the groove 4021 penetrates through the first limiting member 4 along the Z axis direction, the groove 4021 is communicated with the via hole 101, and notches of the two grooves 4021 are oppositely disposed, so that two ends of a battery core along the Y axis direction are clamped in the groove 4021 and can slide along the length direction of the groove 4021, and the battery core can be prevented from shifting when passing through the via hole 101 in the moving process of the battery core along the Z axis direction from top to bottom, thereby improving the coating efficiency.

Specifically, referring to fig. 7, the first stopper 4 includes a first portion 401 and a second portion 402, the bottom surface of the first portion 401 abuts against the first side surface 102, the end surface of the second portion 402 near one end of the first side surface 102 is spaced from the first side surface 102, the second portion 402 is located on one side surface of the first portion 401 near the other first stopper 4, the end surface of the second portion 402 near one end of the first side surface 102, the first portion 401 and the first side surface 102 form a limiting groove for limiting the insulating sheet 200, and when the insulating sheet 200 is placed on the first side surface 102, both ends of the insulating sheet 200 along the Y axis direction can be respectively clamped in the limiting grooves of the two first stoppers 4 to limit the insulating sheet 200 to move along the Z axis direction.

Preferably, the first limiting parts 4 are movably arranged on the mounting table 1, so that the distance between the two first limiting parts 4 can be adjusted, the position of the first limiting parts 4 can be adjusted, and two ends of the battery cell along the Y-axis direction can be clamped in the groove 4021. A plurality of third mounting holes are formed in the side surface, close to the first side surface 102, of the first portion 401, all the third mounting holes are arranged at intervals along the Y-axis direction, first long holes which are opposite to the third mounting holes are formed in the mounting table 1, the first long holes extend along the Y-axis direction, fasteners penetrate through the first long holes to be mounted in the third mounting holes, the first limiting pieces 4 are mounted on the first side surface 102, the fasteners are mounted in the third mounting holes which are different along the Y-axis direction, the distance between the two first limiting pieces 4 can be adjusted, and two ends of a battery cell along the Y-axis direction are clamped in the grooves 4021.

Preferably, the first limiting members 4 with different sizes can be selected according to different types of battery cells, so that two ends of the battery cells along the Y-axis direction can be clamped in the groove 4021.

As shown in fig. 1 to 3, the first side 102 is provided with the second limiting member 5, the second limiting member 5 includes the first block 501 and the second block 502, both sides of the second side 103 along the X-axis direction are provided with the first block 501, both sides of the second side 103 along the Y-axis direction are provided with the second block 502, the second limiting member 5 abuts against the end face of the insulating sheet 200 to limit the movement of the insulating sheet 200, and the setting of the second limiting member 5 can effectively limit the insulating sheet 200 from shifting, so that the insulating sheet 200 can be accurately coated on the battery core, prevent the insulating sheet 200 from shifting in position after being coated on the battery core, improve the accuracy of the battery core coating, and improve the working efficiency.

Preferably, the first blocks 501 are movably disposed on the mounting table 1 in the X-axis direction so that the interval between the two first blocks 501 is adjustable; and/or; the second blocks 502 are movably arranged on the mounting table 1 along the Y-axis direction, so that the distance between the two second blocks 502 can be adjusted, the second blocks can be matched with insulating sheets 200 with different sizes, and the insulating sheets 200 with different sizes are limited to prevent the insulating sheets 200 from shifting.

Specifically, the first block 501 is provided with a second long hole 5011, the length of the second long hole 5011 extends along the X-axis direction, the mounting table 1 is provided with a plurality of fourth mounting holes which are opposite to the second long hole 5011, all the fourth mounting holes are arranged at intervals along the X-axis direction, and the fastener passes through the second long hole 5011 to be mounted in the fourth mounting hole, so that the first block 501 is mounted on the first side 102, and the fastener is mounted in the fourth mounting holes which are different along the X-axis direction, so that the distance between the two first blocks 501 can be adjusted, and the first block 501 can play a limiting role on the insulating sheets 200 with different sizes. The second block 502 is provided with a third long hole 5021, the length of the third long hole 5021 extends along the Y-axis direction, the mounting table 1 is provided with a plurality of fifth mounting holes which are opposite to the third long hole 5021, all the fifth mounting holes are arranged at intervals along the Y-axis direction, a fastener passes through the third long hole 5021 and is arranged in the fifth mounting holes, so that the second block 502 is arranged on the first side 102, and the distance between the two second blocks 502 can be adjusted by arranging the fastener in the fifth mounting holes which are different along the Y-axis direction, so that the second block 502 can play a limiting role on the insulating sheets 200 with different sizes. And the two sides of the first limiting member 4 along the X-axis direction are provided with the second blocks 502, so that two ends of the insulating sheet 200 along the Y-axis direction can be abutted against the two second blocks 502, so as to limit the insulating sheet 200 to move along the Y-axis direction.

As shown in fig. 1, in an embodiment, a plurality of through holes 104 are formed on the mounting table 1, and all the through holes 104 are in air-path communication with the negative pressure generator, so that the insulating sheet 200 is adsorbed on the mounting table 1, the insulating sheet 200 is stably adsorbed on the first side 102, and the insulating sheet 200 can be prevented from curling on the first side 102, thereby improving the coating efficiency of the battery cell.

As shown in fig. 1 and fig. 2, the second side 103 is provided with two brackets 105, the top end of the bracket 105 along the Z-axis direction is abutted against the second side 103, and the two brackets 105 are arranged on the second side 103 at intervals along the X-axis direction, so that the vertical height of the mounting table 1 is increased by arranging the brackets 105, and the battery cell can more conveniently sequentially penetrate through the through holes 101 and the gaps along the Z-axis direction.

Specifically, a plurality of sixth mounting holes are provided on a side of the bracket 105 near the second side 103, the sixth mounting holes are provided at intervals along a length direction of the bracket 105, and through holes 104 provided opposite to the sixth mounting holes are provided on the mounting table 1, and fasteners are installed in the sixth mounting holes through the through holes 104, so that the bracket 105 can be stably installed on the second side 103.

In other embodiments, the two brackets 105 are not limited to being disposed on the second side 103 at intervals along the X-axis direction, but the two brackets 105 may be disposed on the second side 103 at intervals along the Y-axis direction; and not limited to the two brackets 105, four brackets 105 may be provided so that the four brackets 105 can be provided on the second side 103 at intervals in the X-axis direction and in the Y-axis direction, respectively.

Although the embodiments of the present utility model have been described above with reference to the accompanying drawings, the present utility model is not limited to the above embodiments, but may be manufactured in various forms, and it will be understood by those skilled in the art that the present utility model may be embodied in other specific forms without changing the technical spirit or essential features of the present utility model. Accordingly, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive.

Claims (10)

1. The utility model provides a electric core diolame device which characterized in that includes:

the mounting table is provided with a through hole for passing through the power supply core in a penetrating manner along the Z-axis direction, two side surfaces of the mounting table along the Z-axis direction are a first side surface and a second side surface respectively, and the first side surface is used for placing an insulating sheet;

the rotating assembly is arranged on the second side face, elastic pieces are arranged between the rubber rollers and the first fixing pieces, and the width of the gap along the X direction is smaller than the size of the battery cell along the X direction.

2. The cell coating device according to claim 1, wherein the rotating assembly further comprises a second fixing member and a guide post, the second fixing member is spaced from the first fixing member, the second fixing member is disposed on the second side surface, the second fixing member is disposed on a side, away from the glue roller, of the first fixing member, and two ends of the guide post in the length direction of the guide post are respectively connected with the first fixing member and the second fixing member.

3. The cell encapsulation apparatus of claim 2, wherein the resilient member is a spring, the spring being sleeved on the guide post.

4. The battery cell coating device according to claim 2, wherein a plurality of first mounting holes are formed in the first fixing member in a penetrating manner, all the first mounting holes are formed in the first fixing member at intervals along the Y-axis direction, through holes which are opposite to the first mounting holes are formed in the second fixing member, two ends of the guide post in the length direction of the guide post are respectively inserted into the first mounting holes and the through holes, the guide post is installed in the first mounting holes, one end, away from the first mounting holes, of the guide post penetrates through the through holes, and the guide post moves relative to the second fixing member.

5. The battery cell coating device according to claim 1, wherein the first fixing member comprises a supporting plate and two end plates, both ends of the supporting plate along the length direction of the supporting plate are vertically connected with the end plates, the two end plates are provided with second mounting holes, and both ends of the rubber roller along the length direction of the rubber roller are respectively inserted into the two second mounting holes.

6. The battery cell coating device according to claim 4, wherein a first limiting piece is arranged on the first side face, the first limiting pieces are arranged on two sides of the through hole along the Y-axis direction, grooves are formed in the first limiting pieces, the grooves penetrate through the first limiting pieces along the Z-axis direction, the grooves are communicated with the through hole, and the notches of the two grooves are oppositely arranged, so that two ends of the battery cell along the Y-axis direction are clamped in the grooves and can slide along the length direction of the grooves.

7. The cell coating apparatus according to claim 6, wherein the first limiting member comprises a first portion and a second portion, a bottom surface of the first portion abuts against the first side surface, an end surface of the second portion adjacent to one end of the first side surface is spaced from the first side surface, the second portion is located on one side surface of the first portion adjacent to the other first limiting member, and an end surface of the second portion adjacent to one end of the first side surface, the first portion and the first side surface form a limiting groove for limiting the insulating sheet.

8. The battery cell coating device according to claim 4, wherein a second limiting piece is arranged on the first side face, the second limiting piece comprises a first block and a second block, the first block is arranged on two sides of the second side face along the X-axis direction, the second block is arranged on two sides of the second side face along the Y-axis direction, and the second limiting piece abuts against the end face of the insulating sheet to limit movement of the insulating sheet.

9. The cell encapsulation device of claim 8, wherein the first blocks are movably disposed on the mounting table along the X-axis direction such that a spacing between the two first blocks is adjustable; and/or;

the second blocks are movably arranged on the mounting table along the Y-axis direction, so that the distance between the two second blocks can be adjusted.

10. The device of any one of claims 1 to 5, wherein a plurality of through holes are formed in the mounting table, and all the through holes are in air-path communication with the negative pressure generator so that the insulating sheet is adsorbed on the mounting table.