CN219778847U - Quartz ring protection device - Google Patents

Abstract

The utility model provides a quartz ring protection device which comprises a first support column, a second support column, a third support column and a partition plate made of polytetrafluoroethylene, wherein the first support column, the second support column and the third support column are arranged at intervals, the partition plate is arranged in an area surrounded by the first support column, the second support column and the third support column, the partition plate is connected with the first support column, the second support column and the third support column, a quartz ring is placed on the partition plate, and the partition plate comprises a lower partition plate, a first partition plate, a second partition plate and an upper partition plate which are arranged at intervals, so that the risk of damage of the quartz ring during carrying is reduced.

Description

Quartz ring protection device

Technical Field

The utility model relates to the technical field of integrated circuit manufacturing, in particular to a quartz ring protection device.

Background

Quartz is a mineral resource with very stable physical and chemical properties, and quartz ring products are mostly arranged in etching machines or photoetching machines. The quartz ring consists of a quartz thick plate and four quartz thin plates, and after the quartz ring is used for a period of time, the quartz ring is usually required to be disassembled and assembled to be sent to a cleaning chamber for cleaning, but the quartz ring is thin and fragile, and is easy to collide with a trolley during conveying, so that the quartz ring is damaged.

Disclosure of Invention

In view of the above, the present utility model provides a protection device for a quartz ring, so as to reduce the risk of damage to the quartz ring during handling.

The utility model provides a quartz ring protection device which comprises a first support column, a second support column, a third support column and a partition plate made of polytetrafluoroethylene, wherein the first support column, the second support column and the third support column are arranged at intervals, the partition plate is arranged in an area surrounded by the first support column, the second support column and the third support column, the partition plate is connected with the first support column, the second support column and the third support column, the quartz ring is placed on the partition plate, and the partition plate comprises a lower partition plate, a first partition plate, a second partition plate and an upper partition plate which are arranged at intervals.

The partition boards further comprise a third partition board and a fourth partition board which are arranged at intervals, and the first partition board, the second partition board, the third partition board and the fourth partition board are located between the upper partition board and the lower partition board.

The thicknesses of the first partition plate, the second partition plate, the third partition plate and the fourth partition plate are smaller than those of the upper partition plate and the lower partition plate.

The upper partition plate is located on one side, far away from the objective table, of the lower partition plate, and at least two opposite gaskets are arranged on one surface, close to the objective table, of the lower partition plate so as to support the lower partition plate.

Wherein, one side of the upper baffle plate far away from the lower baffle plate is provided with at least one holding piece so as to move the quartz ring protection device.

Wherein, the both ends of the holder are connected with the surface of the upper baffle plate to form a through hole.

The holding piece comprises a connecting piece and a handle, one end of the connecting piece is fixedly connected with the upper partition plate, and the other end of the connecting piece is connected with middle areas at two ends of the handle.

The distance between every two adjacent first support columns, the distance between every two adjacent second support columns and the distance between every two adjacent third support columns are equal.

Wherein the thickness of the lower partition plate is greater than that of the upper partition plate.

Wherein the radius of the partition plate is 29-31mm.

The utility model provides a quartz ring protection device which comprises a first support column, a second support column, a third support column and a partition plate made of polytetrafluoroethylene, wherein the first support column, the second support column and the third support column are arranged at intervals, the partition plate is arranged in an area surrounded by the first support column, the second support column and the third support column, the partition plate is connected with the first support column, the second support column and the third support column, a quartz ring is placed on the partition plate, and the partition plate comprises a lower partition plate, a first partition plate, a second partition plate and an upper partition plate which are arranged at intervals so as to reduce the risk of damage to the quartz ring.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a perspective structure of a quartz ring protection device provided by the utility model;

FIG. 2 is a right side schematic view of a three-dimensional structure of a quartz ring protection device provided by the utility model;

FIG. 3 is a schematic view of a first planar structure of the quartz ring protection device provided by the present utility model;

fig. 4 is a schematic plan view of a second type of the quartz ring protection device provided by the present utility model.

Reference numerals:

10. the quartz ring is a protection device; 100. a first support column; 200. a second support column; 300. a third support column; 400. a lower partition plate; 401. a gasket; 500. a first separator; 600. a second separator; 700. a third separator; 800. a fourth separator; 900. an upper partition plate; 901. a handle.

Detailed Description

The following description of the embodiments of the present utility model will be made in detail and with reference to the accompanying drawings, wherein it is apparent that the embodiments described are only some, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to fall within the scope of the utility model. The various embodiments described below and their technical features can be combined with each other without conflict.

The utility model provides a quartz ring protection device which comprises a first support column, a second support column, a third support column and a partition plate made of polytetrafluoroethylene, wherein the first support column, the second support column and the third support column are arranged at intervals, the partition plate is arranged in an area surrounded by the first support column, the second support column and the third support column, the partition plate is connected with the first support column, the second support column and the third support column, a quartz ring is placed on the partition plate, and the partition plate comprises a lower partition plate, a first partition plate, a second partition plate and an upper partition plate which are arranged at intervals.

In the utility model, the first support column, the second support column, the third support column and the partition plate made of polytetrafluoroethylene are adopted to form the quartz ring protection device, the partition plate is mainly composed of a lower partition plate, a first partition plate, a second partition plate and an upper partition plate which are arranged at intervals, the quartz ring is placed on the partition plate, and the quartz protection device with the quartz ring is moved to a cart for conveying to a cleaning chamber, in the process, because parts such as a quartz sheet and a quartz thick sheet are placed on each partition plate instead of being directly placed on the cart, and because the partition plate is made of polytetrafluoroethylene (Poly tetra fluoroethylene, PTFE), the polytetrafluoroethylene is also called Teflon, a certain friction force exists between the surface of the partition plate and the quartz sheet and the quartz thick sheet, the risk of moving the parts can be reduced, and the risk of collision between the parts and the cart in the process of transporting is reduced, and the risk of damage to the quartz ring is further reduced

Referring to fig. 1 and 2, fig. 1 is a schematic front view of a three-dimensional structure of a protection device for a quartz ring according to the present utility model, and fig. 2 is a schematic right-view of a three-dimensional structure of a protection device for a quartz ring according to the present utility model.

The utility model provides a quartz ring protection device 10, which comprises a first support column 100, a second support column 200, a third support column 300 and a baffle plate made of polytetrafluoroethylene. The first support column 100, the second support column 200 and the third support column 300 are disposed at intervals. The partition board is disposed in the area surrounded by the first support column 100, the second support column 200 and the third support column 300, and is connected with the first support column 100, the second support column 200 and the third support column 300. The quartz ring is placed on the spacers, which include a lower spacer 400, a first spacer 500, a second spacer 600, and an upper spacer 900, which are disposed at intervals. Specifically, the lower spacer 400 is disposed on the stage, the first spacer 500 and the second spacer 600 are disposed between the upper spacer 900 and the lower spacer 400, and the first spacer 500 is located at a side of the second spacer 600 close to the lower spacer 400.

In the prior art, parts such as quartz slabs and quartz sheets to be cleaned are usually placed on a cart, and then the cart with the parts placed thereon is conveyed to a cleaning chamber to clean the parts, but the quartz ring is relatively thin and fragile, so that the quartz ring is easy to collide with the cart during conveying, and damage to the quartz ring occurs; in the present utility model, the first support column 100, the second support column 200, the third support column 300 and the partition made of polytetrafluoroethylene are adopted to form the quartz ring protection device 10, and the partition is mainly composed of the lower partition 400, the first partition 500, the second partition 600 and the upper partition 900 which are arranged at intervals, the quartz ring is placed on the partition, and the quartz protection device with the quartz ring placed thereon is moved to the cart for being transported to the cleaning room, in the process, the parts such as the quartz thin sheet and the quartz thick sheet are placed on each partition instead of being directly placed on the cart, and the partition is made of polytetrafluoroethylene, so that a certain friction force exists between the surface of the partition and the quartz thin sheet and the quartz thick sheet, the moving risk of the parts can be reduced, the collision risk of the parts and the cart in the transporting process can be reduced, the damage risk of the quartz ring can be reduced, and even the damage rate of the parts can be reduced from 10% to 0%, meanwhile, the parts can be transported and washed more conveniently, and the operating efficiency can be improved.

Referring to fig. 3 and 4, fig. 3 is a schematic view of a first planar structure of a quartz ring protection device 10 according to the present utility model, and fig. 4 is a schematic view of a second planar structure of the quartz ring protection device 10 according to the present utility model. In an embodiment, the separator further includes a third separator 700 and a fourth separator 800 disposed at intervals, and the first separator 500, the second separator 600, the third separator 700, and the fourth separator 800 are located between the upper separator 900 and the lower separator 400. Specifically, the third and fourth separators 700 and 800 are disposed between the second separator 600 and the upper separator 900, and the third separator 700 is located at a side of the fourth separator 800 remote from the lower floor.

In the prior art, the whole cart is fully occupied by carrying one set of quartz ring, so that the efficiency of carrying the quartz ring is poor. In the present utility model, the partition plates are formed by using the first partition plate 500, the second partition plate 600, the third partition plate 700, the fourth partition plate 800, the upper partition plate 900, the lower partition plate 400, etc. in the present utility model, so that the quartz ring occupies a whole space of the cart, and the space occupied by the quartz ring is reduced to one sixth, thereby increasing the use space of the cart.

In an embodiment, the thicknesses of the first separator 500, the second separator 600, the third separator 700, and the fourth separator 800 are smaller than the thicknesses of the upper separator 900 and the lower separator 400, so as to reduce the risk of damage to the upper separator 900 and the lower separator 400 during use, and ensure normal operation.

In an embodiment, the thickness H of the upper partition 900 is 1.5mm, and the thickness H of the lower partition 400 is 3mm, so as to further reduce the risk of damage to the upper partition 900 and the lower partition 400 during use, thereby ensuring normal operation.

In one embodiment, the thickness d of the first separator 500, the second separator 600, the third separator 700 and the fourth separator 800 is 0.75mm, so as to reduce the risk of damage to the first separator 500, the second separator 600, the third separator 700 and the fourth separator 800 during use, thereby ensuring normal operation

In one embodiment, the upper spacer 900 is located on a side of the lower spacer 400 away from the stage, and at least two opposite spacers 401 are disposed on a side of the lower spacer 400 near the stage to support the lower spacer 400. Specifically, the stage may be a cart, a machine table, or a surface of a floor, and the number of the spacers 401 disposed on a surface of the lower partition 400 close to the stage may be 2, 3, 4, 8, or 9, and when the number of the spacers 401 disposed on a surface of the lower partition 400 close to the stage is greater than or equal to 2, the distances between the adjacent spacers 401 are equal, and in this embodiment, the surface of the lower partition 400 close to the stage is provided with 4 spacers 401 for illustration.

In the utility model, the gasket 401 is arranged on the lower surface of the lower baffle 400 to support the lower baffle 400, so that the contact area between the lower baffle 400 and the object stage is avoided, the force for carrying the quartz ring protection device 10 is reduced, and at least two opposite gaskets 401 are arranged on the lower surface of the lower baffle 400, so that the quartz ring protection device 10 is prevented from shaking, the collision between parts and the trolley in the carrying process is further reduced, and the damage risk of the quartz ring is further reduced.

In one embodiment, the planar shape of the spacer 401 is square, and the length and width of the spacer 401 is 4.3mm, so that the spacer can play a supporting role and reduce the cost.

In one embodiment, at least one grip 901 is provided on a side of the upper partition 900 remote from the lower partition 400 to move the quartz ring protection device 10. Specifically, in the present embodiment, the number of the grippers 901 is two as an example.

In one embodiment, the two ends of the holding member 901 are connected to the surface of the upper partition 900 to form a through hole, so that the handling of the quartz ring protection device 10 onto or under the cart is more labor-saving and convenient. Further, the grip 901 has a rectangular planar shape, the long side a of the grip 901 is 15mm, the short side k thereof is 6mm, and the height x thereof is 4.5mm.

In one embodiment, at least one grip 901 is provided on a side of the upper partition 900 remote from the lower partition 400 to move the quartz ring protection device 10.

In another embodiment, the grip 901 includes a connector and a handle, one end of the connector is fixedly connected to the upper partition 900, and the other end of the connector is connected to a middle region of both ends of the handle.

In one embodiment, the distance L between every two adjacent first support columns 100, second support columns 200, and third support columns 300 is equal. Specifically, the distance L between every two adjacent first support columns 100, second support columns 200 and third support columns 300 is 56mm, so as to play a better supporting role.

In one embodiment, the column heights w of the first, second and third support columns 100, 200 and 300 are 44mm, and the distances y between adjacent lower, first, second, third, fourth and upper spacers 400, 500, 600, 700, 800 and 900 are 7.5mm to better accommodate the components of the quartz ring, thereby avoiding damage caused by collision.

In an embodiment, the radius of the planes of the first support column 100, the second support column 200 and the third support column 300 is 3mm, which further ensures the normal operation.

In an embodiment, the thickness of the lower partition 400 is greater than that of the upper partition 900, so as to further reduce the risk of damage to the upper partition 900 and the lower partition 400 during use, and further ensure normal operation.

In one embodiment, the radius r of the spacer is 29-31mm. In particular, the radius r of the baffle may be 29mm, 30mm, 31mm, etc. to better accommodate the quartz ring.

In one embodiment, the distance from the center point of the upper diaphragm 900 to the grip 901 is 12mm to further make it more labor-saving and convenient when handling the quartz ring protection device 10 onto or off the cart.

In one embodiment, the spacer 401, the grip 901, the first support post 100, the second support post 200, and the third support post 300 are made of teflon to further reduce the risk of damage to the quartz ring.

The utility model provides a quartz ring protection device 10, which is formed by a first support column 100, a second support column 200, a third support column 300 and a baffle plate made of polytetrafluoroethylene, wherein the baffle plate mainly comprises a lower baffle plate 400, a first baffle plate 500, a second baffle plate 600 and an upper baffle plate 900 which are arranged at intervals, the quartz ring is placed on the baffle plate, the quartz protection device with the quartz ring is moved to a cart for being transported to a cleaning chamber, in the process, parts such as a quartz thin plate, a quartz thick plate and the like are placed on each baffle plate instead of being directly placed on the cart, and the baffle plate is made of polytetrafluoroethylene, so that a certain friction force exists between the surface of the baffle plate and the quartz thin plate and the quartz thick plate, the risk of moving the parts is reduced, the collision between the parts and the cart is reduced, the risk of damaging the parts in the process of transporting is reduced, the damage rate of the parts is even reduced from 10% to 0%, and meanwhile, the transporting and the parts are washed more conveniently and fast, and the operation efficiency is improved.

The foregoing embodiments of the present utility model are not limited to the above embodiments, but are intended to be included within the scope of the present utility model as defined by the appended claims and their equivalents.

Claims (10)

1. The utility model provides a quartzy ring protection device, its characterized in that includes first support column, second support column, third support column and the baffle of making with polytetrafluoroethylene, first support column the second support column with the third support column interval sets up, the baffle set up in first support column the second support column with in the region that the third support column encloses, just the baffle with first support column the second support column and third support column are connected, quartzy ring place in on the baffle, the baffle includes lower baffle, first baffle, second baffle and the last baffle that the interval set up.

2. The quartz ring protection device of claim 1, wherein the baffle further comprises a third baffle and a fourth baffle disposed in spaced relation, the first baffle, the second baffle, the third baffle, and the fourth baffle being positioned between the upper baffle and the lower baffle.

3. The quartz ring protection device of claim 2, wherein the first, second, third, and fourth baffles are each less thick than the upper and lower baffles.

4. The quartz ring protection device of claim 2, wherein the upper baffle is located on a side of the lower baffle away from the stage, and at least two oppositely disposed shims are disposed on a side of the lower baffle adjacent the stage to support the lower baffle.

5. The quartz ring protector of claim 4, wherein the side of the upper baffle remote from the lower baffle is provided with at least one grip to move the quartz ring protector.

6. The quartz ring protection device of claim 5, wherein the two ends of the grip member are connected to the surface of the upper partition plate to form a through hole.

7. The quartz ring protection device of claim 5, wherein the grip comprises a connector and a handle, one end of the connector is fixedly connected with the upper partition, and the other end of the connector is connected with a middle area of two ends of the handle.

8. The quartz ring protection device of any of claims 1-7, wherein a distance between each two adjacent first support posts, second support posts, and third support posts is equal.

9. A quartz ring protector according to claim 3 wherein the thickness of the lower baffle is greater than the thickness of the upper baffle.

10. The quartz ring protection device of any of claims 1-7, wherein the baffle has a radius of 29-31mm.