CN219778835U - Liquid medicine recovery device with guide disc - Google Patents
Liquid medicine recovery device with guide disc Download PDFInfo
- Publication number
- CN219778835U CN219778835U CN202321108588.3U CN202321108588U CN219778835U CN 219778835 U CN219778835 U CN 219778835U CN 202321108588 U CN202321108588 U CN 202321108588U CN 219778835 U CN219778835 U CN 219778835U
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- CN
- China
- Prior art keywords
- lifting rod
- liquid medicine
- guide plate
- disc
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000011084 recovery Methods 0.000 title claims abstract description 14
- 239000007788 liquid Substances 0.000 title abstract description 47
- 239000003814 drug Substances 0.000 title abstract description 29
- 238000001179 sorption measurement Methods 0.000 claims abstract description 17
- 239000012530 fluid Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims 7
- 238000010168 coupling process Methods 0.000 claims 7
- 238000005859 coupling reaction Methods 0.000 claims 7
- 239000010410 layer Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 9
- 238000004064 recycling Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Abstract
The utility model relates to a liquid medicine recovery device with a guide plate, which comprises a device body, wherein the device body comprises a base, a plurality of layered plates, a lifting rod and an adsorption plate, the layered plates are arranged on the base at intervals, the lifting rod is positioned in the layered plates, and the adsorption plate is arranged on the lifting rod; the guide disc is arranged on the lifting rod and is positioned below the adsorption disc; when the liquid medicine is sprayed to the wafer by the nozzle, the lifting rod synchronously rotates, part of the liquid medicine thrown out of the wafer falls on the guide plate, and the liquid medicine is thrown out between the adjacent two layers of plates again by the centrifugal force of the rotation of the guide plate, so that the liquid medicine can be completely concentrated in a specific liquid containing ring groove, and the situation that the liquid medicine is thrown into other different liquid containing ring grooves below to pollute the recovery groove is avoided.
Description
Technical Field
The present utility model relates to semiconductor processing devices, and more particularly to a liquid medicine recycling device with a guiding plate.
Background
In the prior art, in the process of semiconductor processing, a wafer is usually etched by a liquid medicine, the etched liquid medicine is collected and recycled through a pipeline, for example, a gas-liquid separation layered independent recycling device of taiwan patent No. TW I727902B, which comprises a fixed inner layer, a plurality of interlayers, a movable outer layer, and a lifting mechanism, wherein the fixed inner layer, the interlayer, and the movable outer layer are sequentially sleeved and move up and down relative to each other by the lifting mechanism, independent gas spaces and liquid containing ring grooves are formed between the layers, when each layer moves up relative to the previous layer, the corresponding gas spaces and liquid containing ring grooves are opened, and the independent liquid pipelines and gas pipelines are respectively connected with the liquid containing ring grooves and the gas spaces, thereby lifting each layer by the lifting mechanism to respectively perform etching reactions of different liquid medicines and respectively recycle the reacted chemical gases and chemical liquids into the recycling grooves.
However, because the wafer has various sizes, the whole structure is designed by the wafer with the largest size, but when the wafer with the small size is installed, because the distance between the outer periphery of the wafer and each layer is larger, part of liquid medicament sprayed by etching is easy to fall into the liquid-containing ring groove of the lower layer before entering the corresponding liquid-containing ring groove of the layer due to the gravity, so that different liquid medicaments enter the same recovery groove to form mixed pollution of the liquid medicaments; accordingly, there is a need for improvement in view of the foregoing problems.
Disclosure of Invention
In view of the drawbacks and shortcomings of the prior art, the present utility model provides a liquid medicine recycling device with a guiding plate, which can receive liquid medicine thrown out by a wafer above and falling in advance by arranging the guiding plate by a lifting rod.
In order to achieve the above object, the present utility model provides a liquid medicine recycling device with a guiding disc, comprising:
the device comprises a device body, a plurality of layered plates, a lifting rod and an adsorption disc, wherein the layered plates are arranged on the base at intervals, the layered plates are annular and are arranged from inside to outside at intervals to form an inner space and an upper opening communicated with the inner space in a surrounding manner, the lifting rod is arranged on the base and is positioned in the layered plates, the lifting rod can vertically movably penetrate through the upper opening, and the adsorption disc is arranged on the lifting rod;
and the guide disc is arranged on the lifting rod and positioned below the adsorption disc, and the distance between the guide disc and the adsorption disc is smaller than the distance between any two adjacent layering plates.
Furthermore, in the liquid medicine recovery device with the guide disc, the guide disc is penetrated with a plurality of hollowed holes, and the hollowed holes are arranged at intervals in a surrounding manner.
Furthermore, in the liquid medicine recovery device with the guide plate, each hollowed-out hole is a quadrilateral hole.
In addition, in the liquid medicine recovery device with the guide plate, a combining part is annularly protruded at a position of the lifting rod adjacent to the top end, a plurality of combining holes are formed in the combining part in a penetrating mode, internal threads are formed in each combining hole, a plurality of connecting holes are formed in the guide plate in a penetrating mode at intervals in a surrounding mode, and the guide plate is fixedly locked in each combining hole by means of a plurality of locking pieces penetrating through each connecting hole.
The utility model has the advantages that the liquid medicine thrown from the wafer above is thrown between the adjacent two layers by the centrifugal force of the rotation of the guide disc, thereby achieving the purpose of completely concentrating the liquid medicine in a specific liquid containing ring groove and avoiding the situation that the liquid medicine is thrown into other different liquid containing ring grooves below to pollute the recovery groove; in addition, the guide disc is provided with a hollowed-out hole, so that the weight of the guide disc is reduced.
Drawings
Fig. 1 is a perspective view of the present utility model.
Fig. 2 is a partially exploded view of the present utility model.
Fig. 3 is an external view of the guide plate of the present utility model.
FIG. 4 is a schematic representation of the use of the present utility model.
Fig. 5 is a schematic diagram of another use of the present utility model.
Fig. 6 is an enlarged view of a portion of the use of the present utility model.
Detailed Description
The technical means adopted by the present utility model to achieve the intended purpose will be further described below with reference to the drawings and the preferred embodiments of the present utility model.
Referring to fig. 1, the medical fluid recycling apparatus with a guiding tray 20 of the present utility model includes an apparatus body 10 and a guiding tray 20.
Referring to fig. 1 and 2, the device body 10 includes a base 101, a plurality of layered plates 11, a lifting rod 12 and an adsorption disc 13, wherein each layered plate 11 is disposed on the base 101, each layered plate 11 is an annular housing, which is disposed at intervals from inside to outside and surrounds an inner space and an upper opening communicating with the inner space, each layered plate 11 can be controlled to move up and down according to the requirement of a user, so that each layered plate 11 can be attached to each other or form a spacing distance, independent gas space and liquid containing ring groove are formed between each layered plate 11, when each layer moves up relative to the previous layer, the corresponding gas space and liquid containing ring groove are opened, and the independent liquid pipeline (not shown in the drawing) and the gas pipeline (not shown in the drawing) are respectively connected with the liquid containing ring groove and the gas space, which is not described in detail in the prior art.
The lifting rod 12 is disposed in the base 101 and is located in each layered plate 11, the lifting rod 12 is capable of moving up and down and penetrating through the upper opening, and the mechanism capable of moving up and down is not described in detail in the prior art, in this embodiment, a combining portion 121 is annularly protruded at a position of the lifting rod 12 adjacent to the top end, a plurality of combining holes 122 are penetrated in the combining portion 121, each combining hole 122 is formed with an internal thread, and a distance between the top surface of the combining portion 121 and the top surface of the adsorption disc 13 is smaller than a distance between any adjacent layered plates 11, but not limited thereto, and a form of the lifting rod 12 can be changed according to a user requirement.
Referring to fig. 2 to 4, the adsorption disc 13 is disposed on the lifting rod 12, specifically, disposed at the top end of the lifting rod 12, and is communicated with an external air suction device (not shown in the drawings) for providing an adsorption force, which is an application of the prior art, so details are not repeated.
The guide plate 20 is a circular plate body, and includes a connecting portion 21, a guiding portion 22 and a plurality of hollow holes 23, the connecting portion 21 is located at a central position of the guide plate 20 and penetrates through the connecting holes 211 at intervals, the position of each connecting hole 211 corresponds to the position of each combining hole 122, the guiding portion 22 is located at a position of the guide plate 20 adjacent to the outer periphery, the hollow holes 23 are arranged at the outer side of the connecting portion 21 at intervals, in this embodiment, each hollow hole 23 is a quadrangular hole, but not limited thereto, the guide plate 20 is penetrated through each connecting hole 211 by a plurality of locking members (not shown in the drawings) and locked to each combining hole 122, the guide plate 20 is fixed on the lifting rod 12 and is located at a lower position of the adsorption plate 13, and the fixing mode of the guide plate 20 is not limited as described above and can be changed according to the requirements of users.
In the use of the present utility model, referring to fig. 2 and 4 to 6, a wafer 30 is adsorbed and fixed by the adsorption disc 13, the outer diameter of the wafer 30 is smaller than the outer diameter of the guide disc 20, when a nozzle 40 sprays the liquid medicine on the wafer 30, the lifting rod 12 rotates synchronously, and part of the liquid medicine thrown from the outer periphery of the wafer 30 falls on the guide portion 22 of the guide disc 20, and then the part of the liquid medicine is thrown between the adjacent two-layer plates 11 by the centrifugal force of the rotation of the guide disc 20, thereby achieving the purpose that the liquid medicine can be completely concentrated in the liquid-containing ring groove with specific height even if the wafer 30 moves to different heights by the lifting rod 12, and avoiding the situation that the liquid medicine is thrown into other liquid-containing ring grooves with different lower sides to pollute the recovery groove.
In the above process, the guide plate 20 is formed with the hollow hole 23, so that the weight is reduced.
The present utility model is not limited to the above embodiments, but is capable of modification in all aspects, including the following description, but not limited to, embodiments, of the present utility model.
Claims (4)
1. A medical fluid recovery apparatus having a guide plate, comprising:
the device comprises a device body, a plurality of layered plates, a lifting rod and an adsorption disc, wherein the layered plates are arranged on the base at intervals, the layered plates are annular and are arranged from inside to outside at intervals to form an inner space and an upper opening communicated with the inner space in a surrounding manner, the lifting rod is arranged on the base and is positioned in the layered plates, the lifting rod can vertically movably penetrate through the upper opening, and the adsorption disc is arranged on the lifting rod;
and the guide disc is arranged on the lifting rod and positioned below the adsorption disc, and the distance between the guide disc and the adsorption disc is smaller than the distance between any two adjacent layering plates.
2. The medical fluid recovery device with a guiding plate as defined in claim 1, wherein the guiding plate is penetrated with a plurality of hollow holes, and each hollow hole is arranged at intervals around.
3. The medical fluid recovery apparatus with a guide plate as claimed in claim 2, wherein each of the hollowed holes is a quadrangular hole.
4. A medical fluid recovery apparatus having a guide plate according to any one of claims 1 to 3, wherein a coupling portion is annularly protruded at a position of the lifting rod adjacent to the top end, a plurality of coupling holes are formed in the coupling portion, each of the coupling holes is formed with an internal thread, a plurality of coupling holes are formed in the guide plate circumferentially and alternately, and the guide plate is fixedly secured to each of the coupling holes by a plurality of locking members penetrating the coupling holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321108588.3U CN219778835U (en) | 2023-05-10 | 2023-05-10 | Liquid medicine recovery device with guide disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321108588.3U CN219778835U (en) | 2023-05-10 | 2023-05-10 | Liquid medicine recovery device with guide disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219778835U true CN219778835U (en) | 2023-09-29 |
Family
ID=88131695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321108588.3U Active CN219778835U (en) | 2023-05-10 | 2023-05-10 | Liquid medicine recovery device with guide disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219778835U (en) |
-
2023
- 2023-05-10 CN CN202321108588.3U patent/CN219778835U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: Hsinchu County, Taiwan, China Patentee after: Jikai Technology Co.,Ltd. Address before: Hsinchu County Patentee before: Kherdi Technology Co.,Ltd. |