CN219778099U - Exposure lamp water-cooling circulation system of exposure machine - Google Patents
Exposure lamp water-cooling circulation system of exposure machine Download PDFInfo
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- CN219778099U CN219778099U CN202223119335.4U CN202223119335U CN219778099U CN 219778099 U CN219778099 U CN 219778099U CN 202223119335 U CN202223119335 U CN 202223119335U CN 219778099 U CN219778099 U CN 219778099U
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- exposure
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- 238000001816 cooling Methods 0.000 title claims abstract description 152
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 192
- 239000000498 cooling water Substances 0.000 claims abstract description 52
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 238000004806 packaging method and process Methods 0.000 claims abstract description 4
- 239000012153 distilled water Substances 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 238000007710 freezing Methods 0.000 claims description 3
- 230000008014 freezing Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 24
- 238000004880 explosion Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000007788 liquid Substances 0.000 description 6
- 241000192308 Agrostis hyemalis Species 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000110 cooling liquid Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010019 resist printing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Abstract
The utility model discloses an exposure lamp water-cooling circulation system of an exposure machine, which comprises a water inlet pipeline for feeding refrigerating fluid, a cooling pipeline, a heat exchanger, an exposure lamp box, a circulation pipeline and a power pump, wherein the water inlet pipeline is connected with the cooling pipeline; the cooling pipeline is communicated with the water inlet pipeline; the heat exchanger is communicated with the cooling pipeline; an exposure lamp is arranged in the exposure lamp box and is provided with cooling water for cooling the exposure lamp; the circulating pipeline is communicated with a cavity for packaging cooling water in the exposure lamp box, and the temperature of the cooling water in the cavity is gradually increased under the working state of the exposure lamp; the power pump is arranged on the circulating pipeline and used for enabling cooling water in the cavity to flow back in the cavity after entering the circulating pipeline, so that the cooling water flowing in the circulating pipeline can exchange heat with refrigerating fluid entering the heat exchanger after entering the cooling pipeline from the water inlet pipeline, the cooling effect of the cooling circulating water of the exposure lamp can be effectively improved, the working environment temperature of the exposure lamp is obviously reduced, and the explosion of the exposure lamp caused by poor cooling effect is prevented.
Description
Technical Field
The utility model relates to the field of exposure machines, in particular to a water cooling circulation system of an exposure lamp of an exposure machine.
Background
An exposure machine refers to a machine device that transfers image information on a film or other transparent body to a surface coated with a photosensitive substance by turning on light to emit ultraviolet rays of UVA wavelength. The exposure machine is an important main force device for producing the photosensitive oil plate in a green oil process (solder resist printing), the exposure lamp is an indispensable component for normal production and exposure of the exposure machine, the normal working state of the exposure lamp is important for the green oil production process, and in the process of producing the photosensitive oil plate through the exposure machine, if the exposure lamp of the exposure machine is extinguished, the production output can be influenced. Because the working environment temperature of the exposure lamp is very high, the working environment temperature of the exposure lamp needs to be maintained within a preset temperature range through a water cooling circulation system, namely, the working environment temperature of the exposure lamp is reduced through the water cooling circulation system, so that the normal service life of the exposure lamp is ensured, and the production output is not influenced.
Currently, an exposure lamp water cooling circulation system of an existing exposure machine comprises a water inlet pipeline, a coil waterway pipeline, a cooling coil, a heat exchanger and an exposure lamp box. The water inlet pipeline is communicated with the coiled pipe waterway pipeline and is used for feeding chilled water; the cooling coil is arranged on the coil waterway pipeline and is used for providing air cooling air for an exposure part (exposure chamber) of the exposure machine and cooling the exposure part (exposure chamber); the heat exchanger is arranged on the coil waterway pipeline; chilled water entering the coil waterway pipeline from the water inlet pipeline flows into the heat exchanger after passing through the cooling coil; the exposure lamp is arranged in the exposure lamp box, and cooling water for cooling the exposure lamp is arranged in the exposure lamp box; because the temperature of the exposure lamp is higher in the working process, the temperature of the cooling water in the exposure lamp box is gradually increased when the exposure lamp is in work, so that the cooling water with high temperature and the chilled water with low temperature are required to be subjected to heat exchange in a cold-hot exchange mode so as to maintain the cooling temperature of the cooling water for cooling the exposure lamp. That is, during the operation of the exposure lamp, the cooling water in the exposure lamp box is pumped into the heat exchanger by the water pump to exchange heat with the chilled water flowing into the heat exchanger, so as to maintain the normal operation temperature of the exposure lamp. Therefore, the cooling of the exposure lamp tube of the existing exposure machine is to cool the exposure chamber by external chilled water through the cooling coil of the exposure machine, and then take away the heat of the chilled water circulation of the exposure lamp through the cooling of the heat exchanger, thereby achieving the purpose of maintaining the normal working temperature of the exposure lamp. However, this structure will cause the poor cooling effect of the exposure lamp and easily cause the exposure lamp to extinguish in operation, because the chilled water passes through the small bent pipe of the cooling coil and then enters the heat exchanger for cold and heat exchange, and because the chilled water has impurities, when the chilled water passes through the small bent pipe of the cooling coil, the chilled water is easy to cause the blockage of the small bent pipe of the cooling coil and the flow rate of the chilled water entering the heat exchanger is small, thereby causing the temperature of the circulating water for exchanging and cooling the exposure lamp through the heat exchanger to be higher and higher due to long-time production, and further causing the overtemperature abnormality of the exposure lamp and the lamp to be turned off.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model aims to provide the water cooling circulation system of the exposure lamp of the exposure machine, which can solve the problem of poor cooling effect of the exposure lamp caused by blockage of a cooling coil, effectively improve the cooling effect of cooling circulation water of the exposure lamp, obviously reduce the working environment temperature of the exposure lamp, prevent the danger of explosion of the exposure lamp caused by poor cooling effect and improve the safety, thereby achieving better effect of maintaining the normal service life and normal production of the exposure lamp.
The utility model adopts the following technical scheme:
an exposure lamp water cooling circulation system of an exposure machine, comprising:
a water inlet pipeline for feeding refrigerating fluid;
the cooling pipeline is communicated with the water inlet pipeline;
a heat exchanger in communication with the cooling conduit;
an exposure lamp box which is internally provided with an exposure lamp and is provided with cooling water for cooling the exposure lamp;
the circulating pipeline is communicated with a cavity for packaging the cooling water in the exposure lamp box, and the temperature of the cooling water in the cavity is gradually increased under the working state of the exposure lamp;
the power pump is arranged on the circulating pipeline and is used for enabling cooling water in the cavity to flow back into the cavity after entering the circulating pipeline, so that the cooling water flowing in the circulating pipeline can exchange heat with refrigerating fluid entering the heat exchanger after entering the cooling pipeline from the water inlet pipeline.
Further, a first electromagnetic valve is arranged on the cooling pipeline and used for controlling the on-off of the refrigerating fluid entering the heat exchanger from the cooling pipeline.
Further, the exposure lamp water cooling circulation system of the exposure machine further comprises a coil water channel pipeline, wherein the coil water channel pipeline is communicated with the water inlet pipeline, a cooling coil for cooling an exposure part of the exposure machine is arranged on the coil water channel pipeline, the coil water channel pipeline is also communicated with the heat exchanger, and a second electromagnetic valve for controlling on-off of refrigerating fluid flowing through the cooling coil and entering the heat exchanger is arranged on the coil water channel pipeline, so that the refrigerating fluid can enter the heat exchanger to exchange heat with cooling water flowing in the circulation pipeline after flowing through the cooling coil.
Further, the exposure lamp water cooling circulation system of the exposure machine further comprises a distilled water storage tank, the circulation pipeline is communicated with the distilled water storage tank, and the cooling water in the cavity is distilled water from the distilled water storage tank after being frozen.
Further, a temperature detection element is arranged in the distilled water storage tank and used for detecting the water temperature in the distilled water storage tank.
Further, the exposure lamp water cooling circulation system of the exposure machine further comprises an electric cabinet, wherein the first electromagnetic valve, the second electromagnetic valve and the temperature detection element are controlled by the electric cabinet, and the electric cabinet adjusts the working state of the first electromagnetic valve and/or the second electromagnetic valve according to the fact that the temperature detection element detects the water temperature in the distilled water storage box.
Further, a heat exchange pipeline is arranged in the heat exchanger, one section of the circulating pipeline is a heat exchange part, the heat exchange part is positioned in the heat exchanger, the heat exchange pipeline is sleeved on the heat exchange part, and a cooling flow channel is formed between the inner wall of the heat exchange pipeline and the outer wall of the heat exchange part.
Further, the exposure lamp water cooling circulation system of the exposure machine further comprises an inner water jacket and an outer water jacket, wherein the inner water jacket is wrapped on the exposure lamp, the outer water jacket is sleeved on the inner water jacket, and the cavity is formed between the inner wall of the outer water jacket and the outer wall of the inner water jacket.
Compared with the prior art, the utility model has the beneficial effects that:
when the utility model is used, the refrigerating fluid enters the heat exchanger after entering the cooling pipeline from the water inlet pipeline, the temperature of the cooling water in the cavity is gradually increased under the working state of the exposure lamp, the cooling water in the cavity is pumped into the circulating pipeline by the power pump to exchange heat with the refrigerating fluid entering the heat exchanger to reduce the temperature and then flows back into the cavity, so that the circulation is realized, and the normal service life and the normal production effect of the exposure lamp are maintained. Therefore, the exposure lamp water cooling circulation system of the exposure machine directly conveys the refrigerating fluid into the heat exchanger through the cooling pipeline to be subjected to cooling exchange with the cooling water with the temperature rising in the circulation pipeline, so that the problem that the cooling effect of the exposure lamp is poor due to the blockage of the cooling coil in the exposure lamp water cooling circulation system of the original exposure machine is effectively solved, the cooling effect of the exposure lamp cooling circulation water is effectively improved, the working environment temperature of the exposure lamp is obviously reduced, the danger of explosion of the exposure lamp due to the poor cooling effect is prevented, the safety is improved, and the effects of better maintaining the normal service life and normal production of the exposure lamp are achieved.
Drawings
FIG. 1 is a schematic diagram of a water cooling circulation system of an exposure lamp of an exposure machine;
fig. 2 is a schematic diagram of a heat exchanger and a circulation pipeline according to an embodiment of the present utility model.
In the figure: 10. a water inlet pipe; 20. a cooling pipe; 201. a first electromagnetic valve; 30. a heat exchanger; 301. a heat exchange tube; 3011. a cooling flow passage; 40. an exposure lamp box; 50. a circulation pipe; 501. a heat exchange section; 51. distilled water storage tank; 510. a temperature detecting element; 60. a power pump; 70. a coiled water conduit; 701. a second electromagnetic valve; 80. a cooling coil; 90. a liquid inlet pipe; 901. a fourth electromagnetic valve; 91. an exposure machine workbench; 92. a main water outlet pipe; 93. a first branching water outlet pipe; 930. a third electromagnetic valve; 94. and a second branch water outlet pipeline.
Detailed Description
The present utility model will be described with priority in the following description with reference to the drawings and the specific embodiments, and it should be noted that, on the premise of no conflict, new embodiments may be formed by any combination of the embodiments or technical features described below.
In the description of the present utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "horizontal," "vertical," "top," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; either directly, indirectly, through intermediaries, or in communication with each other. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Embodiments are described below:
referring to fig. 1-2, the present utility model shows an exposure lamp water cooling circulation system of an exposure machine, which comprises a water inlet pipe 10, a cooling pipe 20, a heat exchanger 30, an exposure lamp box 40, a circulation pipe 50 and a power pump 60. Wherein the water inlet pipeline 10 is used for feeding refrigerating fluid, and the refrigerating fluid is chilled water; the cooling pipe 20 communicates with the water intake pipe 10 so that the refrigerating fluid can enter the cooling pipe 20; the heat exchanger 30 communicates with the cooling conduit 20 to enable chilled liquid to enter the heat exchanger 30 from the cooling conduit 20; the exposure lamp box 40 is internally provided with an exposure lamp and has cooling water for cooling the exposure lamp; the circulation pipeline 50 is communicated with a cavity for packaging cooling water in the exposure lamp box 40, and the temperature of the cooling water in the cavity is gradually increased under the working state of the exposure lamp; the power pump 60 is disposed on the circulation pipe 50, and is configured to return cooling water in the cavity back into the cavity after entering the circulation pipe 50, so that the cooling water flowing in the circulation pipe 50 can exchange heat with the refrigerating fluid entering the heat exchanger 30 after entering the cooling pipe 20 from the water inlet pipe 10.
As can be seen from the above, when the water cooling circulation system of the exposure lamp of the exposure machine of the present utility model is in use, the cooling liquid enters the cooling pipeline 20 from the water inlet pipeline 10 and then enters the heat exchanger 30, and the temperature of the cooling water in the cavity gradually rises when the exposure lamp is in a working state, and the cooling water in the cavity is pumped by the power pump 60 into the circulation pipeline 50 to exchange heat with the cooling liquid entering the heat exchanger 30 to reduce the temperature and then flows back into the cavity, so that the circulation is performed, and the normal life and the normal production effect of the exposure lamp are maintained. As can be seen by those skilled in the art, the exposure lamp water cooling circulation system of the exposure machine of the utility model directly conveys the refrigerating fluid into the heat exchanger 30 through the cooling pipeline 20 to perform cooling exchange with the cooling water with increased temperature in the circulation pipeline 50, thereby effectively solving the problem of poor cooling effect of the exposure lamp caused by the blockage of the cooling coil 80 in the exposure lamp water cooling circulation system of the original exposure machine, effectively improving the cooling effect of the cooling circulation water of the exposure lamp, obviously reducing the working environment temperature of the exposure lamp, preventing the risk of explosion of the exposure lamp caused by poor cooling effect, improving the safety, and further achieving the effect of better maintaining the normal service life and normal production of the exposure lamp.
In addition, the exposure lamp water cooling circulation system of the exposure machine also comprises an inner water jacket and an outer water jacket, wherein the inner water jacket is wrapped on the exposure lamp, the outer water jacket is sleeved on the inner water jacket, and the cavity is formed between the inner wall of the outer water jacket and the outer wall of the inner water jacket. That is, the interlayer space between the outer water jacket and the inner water jacket is the cavity, so that the cooling water can cool the exposure lamp better.
In this embodiment, the cooling pipe 20 is provided with a first electromagnetic valve 201, and the first electromagnetic valve 201 is used for controlling on/off of the refrigerating fluid entering the heat exchanger 30 from the cooling pipe 20.
Of course, the exposure lamp water cooling circulation system of the exposure machine of the utility model further comprises a coil water channel pipeline 70, the coil water channel pipeline 70 is communicated with the water inlet pipeline 10, a cooling coil 80 for cooling the exposure part of the exposure machine is arranged on the coil water channel pipeline 70, and the coil water channel pipeline 70 is also communicated with the heat exchanger 30. The coil waterway pipe 70 is provided with a second electromagnetic valve 701 for controlling on-off of the chilled water flowing through the cooling coil 80 into the heat exchanger 30, so that the chilled water flowing through the cooling coil 80 can enter the heat exchanger 30 to exchange heat with the chilled water flowing through the circulation pipe 50. That is, it can be understood that the chilled water in the cooling pipe 20 is used as the first cooling water path into the heat exchanger 30, and when it is desired to use the portion of the chilled water flowing through the cooling coil 80 as the second cooling water path into the heat exchanger 30, the valve of the second solenoid valve 701 is opened by controlling the second solenoid valve 701. Therefore, the pipeline which is originally passed through the cooling coil 80 and then is added with the cooling pipeline 20, and the external chilled water inlet pipeline 10 is directly subjected to cooling exchange through the heat exchanger 30, so that compared with the water cooling circulation system of the exposure lamp of the original exposure machine, the improved structure greatly improves the cooling effect of the cooling circulation water of the exposure lamp, obviously reduces the working environment of the exposure lamp, and does not influence the water circulation of the pipeline of the original cooling coil 80, thereby better maintaining the normal service life and normal production output of the exposure lamp and greatly reducing the probability and maintenance time of a damage machine; the normal working environment of the exposure lamp is ensured, and the unnecessary consumption of the abnormal exposure lamp is reduced; the danger of the explosion lamp caused by poor cooling effect is more likely prevented, and the safety is improved.
In this embodiment, the coil waterway pipeline 70 is further communicated with a liquid inlet pipe 90 communicated with the water inlet end of the exposure workbench 91, a communication position between the liquid inlet pipe 90 and the coil waterway pipeline 70 is located between the cooling coil 80 and the water inlet pipeline 10, the water outlet end of the exposure workbench 91 is communicated with a main water outlet pipeline 92, the coil waterway pipeline 70 is further communicated with a first branch water outlet pipeline 93 and a second branch water outlet pipeline 94, a communication position between the first branch water outlet pipeline 93 and the coil waterway pipeline 70 is located between the second electromagnetic valve 701 and the cooling coil 80, a third electromagnetic valve 930 is further arranged on the first branch water outlet pipeline 93, and the third electromagnetic valve 930 is used for controlling the on-off of liquid delivery from the first branch water outlet pipeline 93 to the main water outlet pipeline 92; the second branch water conduit 94 communicates with the water outlet of the heat exchanger 30, the end of the first branch water conduit 93 facing away from the coil waterway conduit 70 communicates with the main water outlet conduit 92, and the end of the second branch water conduit 94 facing away from the coil waterway conduit 70 communicates with the main water outlet conduit 92. It can be seen that the chilled water is divided into three parts after entering the water intake pipe 10, one part entering the coil water path pipe 70, one part entering the cooling pipe 20, and one part entering the inside of the exposure machine table 91. The working flow of the whole exposure lamp water cooling circulation system is as follows: when part of the chilled water flowing through the cooling coil 80 is needed to be used as a second cooling water path entering the heat exchanger 30, the valve of the second electromagnetic valve 701 is controlled to be opened, and the valve of the third electromagnetic valve 930 is controlled to be closed; the chilled water entering the interior of the exposure machine workbench 91 is discharged from the main water outlet pipeline 92 through a cooling system in the interior of the exposure machine workbench 91; chilled water entering the cooling duct 20 enters the heat exchanger 30 to exchange heat with water in the circulation duct 50, and then enters the main water outlet duct 92 from the second branch water outlet duct 94 to be discharged for circulation.
In this embodiment, the exposure lamp water cooling circulation system of the exposure machine of the present utility model further includes a distilled water storage tank 51, the circulation pipeline 50 is communicated with the distilled water storage tank 51, the cooling water in the cavity is distilled water stored in the distilled water storage tank 51 after freezing, and the distilled water after freezing is defined as frozen distilled water. That is, it can be understood that the frozen distilled water stored in the distilled water storage tank 51 is circulated by pumping the frozen distilled water into the cavity by the power pump 60 and then flowing back into the distilled water storage tank 51. If impurities exist in the cooling water, the cooling water enters the cavity from the circulating pipeline 50 to cause the cavity to be blocked, so that the cooling effect of the cooling water on the exposure lamp is affected. Therefore, by allowing the cooling water in the cavity to come from the chilled distilled water (no impurities are present) in the distilled water storage tank 51, it is possible to avoid the cooling water for cooling the exposure lamp from clogging the cavity and affecting the cooling effect of the exposure lamp.
In the present embodiment, a temperature detecting element 510 is provided in the distilled water storage tank 51 for detecting the water temperature in the distilled water storage tank 51. That is, the temperature detection element 510 detects the temperature of the frozen distilled water (frozen distilled water) in the distilled water storage tank 51, and the temperature of the water in the distilled water storage tank 51 can be known in real time.
The temperature detecting element 510 of the present embodiment is a temperature sensor, and of course, in other embodiments, other temperature detectors capable of detecting temperature may be used, and the present utility model is not limited thereto.
In this embodiment, the exposure lamp water cooling circulation system of the exposure machine of the present utility model further includes an electric cabinet, wherein the first electromagnetic valve 201, the second electromagnetic valve 701 and the temperature detecting element 510 are controlled by the electric cabinet, and the electric cabinet adjusts the working state of the first electromagnetic valve 201 and/or the second electromagnetic valve 701 according to the temperature detected by the temperature detecting element 510 detecting the water temperature in the distilled water storage tank 51. That is, it can be understood that the temperature of the water in the distilled water storage tank 51 is detected by the temperature detecting element 510, and when the temperature of the water in the distilled water storage tank 51 is higher than the preset temperature range of the cooling water, the valve of the first electromagnetic valve 201 is controlled to be opened by the electric cabinet, so that the refrigerating fluid in the cooling pipeline 20 enters the heat exchanger 30 to exchange heat with the cooling water in the circulating pipeline 50; the preset temperature range of the cooling water is set by the inventor according to the actual situation, and is not described herein. Of course, according to the actual situation, the valve of the second electromagnetic valve 701 may be controlled to be opened and the valve of the third electromagnetic valve 930 may be controlled to be closed, so that the chilled water flowing through the cooling coil 80 may also enter the heat exchanger 30. Therefore, the electric cabinet is used for adjusting the working state of the first electromagnetic valve 201 and/or the second electromagnetic valve 701 according to the temperature of the distilled water in the distilled water storage tank 51 detected by the temperature detecting element 510, so as to maintain the dynamic balance of the temperature of the cooling water for cooling the exposure lamp, so that the cooling water can achieve the best cooling effect on the exposure lamp, and the better effect of maintaining the normal life and normal production of the exposure lamp can be achieved. Of course, the third electromagnetic valve 930 is also controlled by the electric cabinet, and the valve of the third electromagnetic valve 930 is controlled to be opened or closed by the electric cabinet, so that the operation of the third electromagnetic valve 930 is automatically controlled.
It should be noted that, the liquid inlet pipe 90 is provided with a fourth electromagnetic valve 901 of a controlled and electric cabinet, and whether chilled water enters the workbench 91 of the exposure machine is determined by the working state of the fourth electromagnetic valve 901 of the electric cabinet.
In this embodiment, the heat exchanger 30 has a heat exchange tube 301 therein, one section of the circulation tube 50 is a heat exchange portion 501, the heat exchange portion 501 is located in the heat exchanger 30, the heat exchange tube 301 is sleeved on the heat exchange portion 501, and a cooling flow passage 3011 is formed between an inner wall of the heat exchange tube 301 and an outer wall of the heat exchange portion 501. Specifically, the water inlet end of the cooling channel 3011 is communicated with the end of the cooling pipeline 20 away from the water inlet pipeline 10, the water inlet end of the cooling channel 3011 is also communicated with the end of the coil waterway pipeline 70 away from the cooling coil 80, and the water outlet end of the cooling channel 3011 is communicated with the second branch water outlet pipeline 94. From this, the flow path of the chilled water from the cooling pipe 20 into the heat exchanger 30 is: chilled water from the cooling pipe 20 enters the cooling flow passage 3011 in the heat exchanger 30, exchanges heat with the cooling water in the heat exchange portion 501, and is discharged from the second branching water outlet pipe 94; the chilled water flow path through the cooling coil 80 and into the heat exchanger 30 is: the chilled water flowing through the cooling coil 80 enters the cooling flow passage 3011 in the heat exchanger 30, exchanges heat with the cooling water in the heat exchange unit 501, and is discharged from the second branch water discharge pipe 94.
It should be noted that, as will be appreciated by those skilled in the art, by means of the above-described heat exchange structure, a better heat exchange effect between the heat exchanger 30 and the circulation duct 50 can be achieved.
The above embodiments are only preferred embodiments of the present utility model, and the scope of the present utility model is not limited thereto, but any insubstantial changes and substitutions made by those skilled in the art on the basis of the present utility model are intended to be within the scope of the present utility model as claimed.
Claims (8)
1. An exposure lamp water cooling circulation system of an exposure machine, which is characterized by comprising:
a water inlet pipe (10) for feeding a refrigerating fluid;
a cooling pipe (20) communicating with the water intake pipe (10);
a heat exchanger (30) in communication with the cooling duct (20);
an exposure lamp box (40) which is internally provided with an exposure lamp and is provided with cooling water for cooling the exposure lamp;
the circulating pipeline (50) is communicated with a cavity for packaging the cooling water in the exposure lamp box (40), and the temperature of the cooling water in the cavity is gradually increased under the working state of the exposure lamp;
and the power pump (60) is arranged on the circulating pipeline (50) and is used for enabling cooling water in the cavity to flow back into the cavity after entering the circulating pipeline (50), so that the cooling water flowing in the circulating pipeline (50) can exchange heat with the refrigerating fluid entering the heat exchanger (30) after entering the cooling pipeline (20) from the water inlet pipeline (10).
2. The exposure lamp water cooling circulation system of the exposure machine according to claim 1, wherein a first electromagnetic valve (201) is arranged on the cooling pipeline (20), and the first electromagnetic valve (201) is used for controlling on-off of refrigerating fluid entering the heat exchanger (30) from the cooling pipeline (20).
3. The exposure light water cooling circulation system of the exposure machine according to claim 2, further comprising a coil water channel pipeline (70), wherein the coil water channel pipeline (70) is communicated with the water inlet pipeline (10), a cooling coil (80) for cooling an exposure part of the exposure machine is arranged on the coil water channel pipeline (70), the coil water channel pipeline (70) is further communicated with the heat exchanger (30), and a second electromagnetic valve (701) for controlling on-off of a refrigerating fluid entering the heat exchanger (30) after flowing through the cooling coil (80) is arranged on the coil water channel pipeline (70), so that the refrigerating fluid can enter the heat exchanger (30) to exchange heat with the cooling water flowing in the circulation pipeline (50) after flowing through the cooling coil (80).
4. The exposure light water cooling circulation system of the exposure machine according to claim 3, further comprising a distilled water storage tank (51), wherein the circulation pipeline (50) is communicated with the distilled water storage tank (51), and the cooling water in the cavity is distilled water stored in the distilled water storage tank (51) after freezing.
5. The exposure light water cooling circulation system of an exposure machine according to claim 4, wherein a temperature detecting element (510) is provided in the distilled water storage tank (51) for detecting the water temperature in the distilled water storage tank (51).
6. The exposure lamp water cooling circulation system of the exposure machine according to claim 5, further comprising an electric cabinet, wherein the first electromagnetic valve (201), the second electromagnetic valve (701) and the temperature detection element (510) are controlled by the electric cabinet, and the electric cabinet adjusts the working state of the first electromagnetic valve (201) and/or the second electromagnetic valve (701) according to the temperature detected by the temperature detection element (510) in the distilled water storage tank (51).
7. The exposure lamp water cooling circulation system of an exposure machine according to any one of claims 1 to 6, wherein a heat exchange pipeline (301) is arranged in the heat exchanger (30), one section of the circulation pipeline (50) is a heat exchange part (501), the heat exchange part (501) is positioned in the heat exchanger (30), the heat exchange pipeline (301) is sleeved on the heat exchange part (501), and a cooling flow passage (3011) is formed between the inner wall of the heat exchange pipeline (301) and the outer wall of the heat exchange part (501).
8. The exposure lamp water cooling circulation system of the exposure machine according to any one of claims 1 to 6, further comprising an inner water jacket and an outer water jacket, wherein the inner water jacket is wrapped around the exposure lamp, the outer water jacket is sleeved on the inner water jacket, and the cavity is formed between the inner wall of the outer water jacket and the outer wall of the inner water jacket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223119335.4U CN219778099U (en) | 2022-11-23 | 2022-11-23 | Exposure lamp water-cooling circulation system of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223119335.4U CN219778099U (en) | 2022-11-23 | 2022-11-23 | Exposure lamp water-cooling circulation system of exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219778099U true CN219778099U (en) | 2023-09-29 |
Family
ID=88107819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223119335.4U Active CN219778099U (en) | 2022-11-23 | 2022-11-23 | Exposure lamp water-cooling circulation system of exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219778099U (en) |
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2022
- 2022-11-23 CN CN202223119335.4U patent/CN219778099U/en active Active
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