CN219778028U - Angle adjusting mechanism for automatic focusing module, adjusting tool, automatic focusing device and microscopic system - Google Patents

Abstract

The utility model provides an angle adjusting mechanism for an automatic focusing module, comprising: the first fixing plate is used for forming a fixing foundation of the angle adjusting mechanism; the second fixing plate is used for fixedly connecting with the automatic focusing module; the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate, the other end of the angle adjusting connecting plate is connected with the second fixing plate, and the fixed angle of the automatic focusing module is adjusted by changing the fixed position of the arc connecting structure, so that the included angle between the laser line of the automatic focusing module and the sample is changed. The utility model also relates to an adjusting tool, an automatic focusing device and a microscopic system. The utility model solves the problem that different samples have different angles to the laser, so that the automatic focusing microscopic system can generate laser lines with different angles only by adjusting the angle of the automatic focusing module, and is convenient for adapting to different samples and applications.

Description

Angle adjusting mechanism for automatic focusing module, adjusting tool, automatic focusing device and microscopic system

Technical Field

The utility model relates to the field of automatic focusing microscopy, in particular to an angle adjusting mechanism, an adjusting tool, an automatic focusing device and a microscopy system for an automatic focusing module.

Background

The semiconductor chip is a basic element in the electronic information industry, and as the integration level of the semiconductor chip is higher and higher, the size of the semiconductor chip is smaller and smaller, and the micro semiconductor chip is mainly and effectively detected through a microscopic system. The microscope system has the characteristics of small visual field, high precision and the like, only one part of a wafer can be detected at a time, and accurate focusing is required when different positions are replaced, so that the industrial detection microscope system needs to integrate an automatic focusing module in order to increase the detection speed and improve the detection efficiency.

The automatic focusing module sends out laser to hit the sample through the microscope objective lens, and then returns to the automatic focusing module, and the automatic focusing module judges whether the laser beam is at the optimal position or not according to the returned laser beam shape and focuses in real time. The laser beam of the automatic focusing module forms linear laser after passing through a microscopic system, and in the automatic focusing microscopic system, a spectroscope and the automatic focusing module are arranged at an angle of 45 degrees, so that the projection angle of the laser line can directly influence the angle of the laser line projected on a sample wafer; for example, horizontal or vertical laser lines may be projected onto the sample after passing through the beam splitter.

In some inspection applications, such as dicing wafer processing, it is desirable to apply horizontal or vertical laser lines to focus into dicing streets; while other applications, such as the inspection of core particles, impact the inspection and efficiency when focusing on the gaps between core particles, especially for small and widely spaced wafer samples; in this case, it is therefore necessary that the laser line is able to strike the wafer at an angle such that the laser line is able to strike most of the core particles on the wafer, and some solutions are provided by current auto focus module manufacturers: for example, the laser line of the autofocus microscopy system of WDI is at an angle of 35 ° to the sample; for another example, the auto-focus module of the MSG directly provides a 45 ° angle laser line; however, for different applications and samples, the angle between the actually required laser line and the sample may not be the same, and the existing products are all fixed angle lasers, so that different requirements on angles cannot be met.

Therefore, there is a need to provide a new way to solve the above technical problems.

Disclosure of Invention

In view of the shortcomings of the prior art, one of the objects of the present utility model is to provide an angle adjustment mechanism for an auto-focus module, comprising:

the first fixing plate is used for forming a fixing foundation of the angle adjusting mechanism;

the second fixing plate is used for fixedly connecting with the automatic focusing module;

the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate, the other end of the angle adjusting connecting plate is connected with the second fixing plate, and the fixed angle of the automatic focusing module is adjusted by changing the fixed position of the arc connecting structure, so that the included angle between the laser line of the automatic focusing module and the sample is changed.

Preferably, the angle adjustment connection structure includes a first adjustment plate;

the arc connecting structure comprises first arc holes, and at least two first fixing holes are formed in the first fixing plate;

the first fixing hole is opposite to the first circular arc hole, so that the angle adjustment of the automatic focusing module which is directly connected or indirectly connected with the first adjusting plate and rotates around the first shaft is realized by changing the relative position of the first fixing hole and the first circular arc hole.

Preferably, the first circular arc hole is concentric with the first hollowed-out portion of the first fixing plate.

Preferably, an annular step is arranged at the edge of the first hollowed-out part of the first fixing plate; the annular step is matched with the first adjusting plate in an abutting mode, so that guiding and limiting when the first adjusting plate rotates relative to the first fixing plate are formed.

Preferably, the angle adjusting connection structure further comprises a second adjusting plate and a third adjusting plate; wherein, the liquid crystal display device comprises a liquid crystal display device,

the second adjusting plate is fixedly connected to the first adjusting plate; the third adjusting plate is used for being connected with the second fixing plate;

the arc connecting structure further comprises a second arc hole positioned on the second adjusting plate and at least two second fixing holes positioned on the third adjusting plate;

the second fixing hole is opposite to the second circular arc hole in position, so that the angle adjustment of the rotation of the automatic focusing module connected with the third adjusting plate around the second shaft is realized by changing the relative position of the second fixing hole and the second circular arc hole; wherein the second axis is perpendicular to the first axis.

Preferably, the arc connecting structure further comprises a third arc hole on the third adjusting plate and at least two third fixing holes on the second fixing plate;

the third fixing hole is opposite to the third circular arc hole in position, so that the angle adjustment of the automatic focusing module connected with the second fixing plate along the third axis is realized by changing the relative position of the third fixing hole and the third circular arc hole; the third shaft is perpendicular to the second shaft and the first shaft respectively.

Another object of the present utility model is to provide an auto-focusing device, comprising: the automatic focusing module is used for adjusting the angle of the automatic focusing module; the automatic focusing module is arranged on the angle adjusting mechanism for the automatic focusing module, so that the posture of the automatic focusing module is changed through adjusting the angle adjusting mechanism, and the included angle between the laser line of the automatic focusing module and the sample is changed.

It is a further object of the present utility model to provide an autofocus microscopy system comprising the angle adjustment mechanism for an autofocus module.

The fourth object of the present utility model is to provide an adjusting tool, comprising: the device comprises a tooling platform, a first fixed plate, a second fixed plate and an angle adjusting and connecting structure; wherein, the liquid crystal display device comprises a liquid crystal display device,

the tooling platform is fixedly connected with the second fixing plate and used for forming a support when the angle of the automatic focusing module is adjusted;

the first fixing plate is used for being fixed with the microscope barrel;

the second fixing plate is used for fixedly connecting with the automatic focusing module;

the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate, the other end of the angle adjusting connecting plate is connected with the second fixing plate, the arrangement of different included angles between a laser line of the automatic focusing module and a sample is realized by adjusting the tool platform, and the position of the automatic focusing module is fixed by utilizing an arc connecting structure after adjustment.

Preferably, the tooling platform is a four-dimensional or five-dimensional or six-dimensional combined translation platform.

Compared with the prior art, the utility model has the beneficial effects that:

the utility model provides an angle adjusting mechanism for an automatic focusing module, comprising: the first fixing plate is used for forming a fixing foundation of the angle adjusting mechanism; the second fixing plate is used for fixedly connecting with the automatic focusing module; the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate, the other end of the angle adjusting connecting plate is connected with the second fixing plate, and the fixed angle of the automatic focusing module is adjusted by changing the fixed position of the arc connecting structure, so that the included angle between the laser line of the automatic focusing module and the sample is changed. The utility model also relates to an adjusting tool, an automatic focusing device and a microscopic system. The utility model solves the problem that different samples have different angles to the laser, so that the microscope system can generate laser lines with different angles by adjusting the angle of the automatic focusing module, and the automatic focusing microscope system is convenient to adapt to different samples and applications.

The foregoing description is only an overview of the present utility model, and is intended to provide a better understanding of the present utility model, as it is embodied in the following description, with reference to the preferred embodiments of the present utility model and the accompanying drawings. Specific embodiments of the present utility model are given in detail by the following examples and the accompanying drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not constitute a limitation on the utility model. In the drawings:

FIG. 1 is a schematic diagram of an assembly structure of an angle adjusting mechanism for an auto-focus module according to the present utility model;

FIG. 2 is a schematic diagram showing an exploded structure of an angle adjusting mechanism for an auto-focus module according to the present utility model;

FIG. 3 is a schematic view of a part of the angle adjusting mechanism for an auto-focusing module according to the present utility model;

FIG. 4 is a schematic structural view of a second adjusting plate according to the present utility model;

FIG. 5 is a schematic diagram of an auto-focusing apparatus according to the present utility model;

FIG. 6a is a schematic diagram of an autofocus microscopy system according to the present utility model;

FIG. 6b is a schematic view of the optical path structure of FIG. 6 a;

FIG. 7a is a schematic diagram of an autofocus microscopy system according to the second embodiment of the present utility model;

FIG. 7b is a schematic view of the optical path structure of FIG. 7 a;

FIG. 8 is a schematic diagram of an auto-focus microscope system employing an adjustment tool according to the present utility model;

FIG. 9 is a schematic diagram of a second embodiment of an autofocus microscopy system employing an adjustment tool according to the present utility model;

FIG. 10 is a schematic structural diagram of an adjusting tool according to the present utility model;

fig. 11 is a schematic diagram of a partial structure of an adjusting tool in the present utility model.

In the figure: 100. an angle adjustment mechanism for an auto-focus module;

110. a first fixing plate; 111. a first hollowed-out part; 112. an annular step; 113. a first screw hole; 114. a first fixing hole;

120. a first adjustment plate; 121. a second hollow part; 122. a first circular arc hole; 123. a fourth screw hole;

130. a second fixing plate; 131. a second screw hole; 132. a third screw hole; 133. a third fixing hole;

140. a second adjusting plate; 141. a second circular arc hole; 143. a long hole;

150. a third adjusting plate; 151. a second fixing hole; 152. a third circular arc hole;

200. a tooling platform; 210. a tool fixing plate; 220. a first platform; 230. a second platform; 240. a swinging connecting seat;

300. an automatic focusing module; 310. a laser exit window;

400. an incident lens barrel; 500. a camera; 600. a dichroic mirror; 700. a beam splitter; 900. and (3) a sample.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other examples, which a person of ordinary skill in the art would obtain without undue burden based on the embodiments of the utility model, are within the scope of the utility model.

In the drawings, the shape and size may be exaggerated for clarity, and the same reference numerals will be used throughout the drawings to designate the same or similar components.

In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc. are defined with respect to the configuration shown in the drawings, and in particular, "height" corresponds to the top-to-bottom dimension, "width" corresponds to the left-to-right dimension, and "depth" corresponds to the front-to-back dimension, are relative concepts, and thus may vary accordingly depending on the location and use of the terms, and therefore these or other orientations should not be interpreted as limiting terms.

Terms (e.g., "connected" and "attached") referring to an attachment, coupling, etc., refer to a relationship wherein these structures are directly or indirectly secured or attached to one another through intervening structures, as well as both movable or rigid attachments or relationships, unless expressly described otherwise.

Example 1

An embodiment of the present utility model provides an angle adjustment mechanism 100 for an auto-focus module, as shown in connection with fig. 1-4, comprising:

a first fixing plate 110 for forming a fixing base of the angle adjusting mechanism; in some embodiments, as shown in fig. 2 and 7, the first fixing plate 110 is fixed outside the microscope tube through the first screw hole 113, so as to form a base for integrally fixing the angle adjusting mechanism of the automatic focusing module. In this embodiment, the first fixing plate 110 is provided with a first hollow portion 111 for passing through a laser exit window of the auto-focusing module.

The second fixing plate 130 is used for fixedly connecting with the automatic focusing module; as shown in fig. 2 and 5, the automatic focusing module is fixedly connected with the second fixing plate 130 through the second screw hole 131; in this embodiment, the second fixing plate 130 and the auto-focusing module form a rigid whole after being fixed, and the adjustment of the auto-focusing module is achieved by adjusting the angular position of the second fixing plate 130.

The angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate 110, the other end of the angle adjusting connecting plate is connected with the second fixing plate 130, and the fixed angle of the automatic focusing module is adjusted by changing the fixed position of the arc connecting structure, so that the included angle between the laser line of the automatic focusing module and the sample is changed. In some embodiments, the laser line may be disposed at an angle of 45 ° or horizontal or vertical with the sample, and in other embodiments, the laser line may be disposed at an angle of 35 ° with the sample.

In some embodiments, as shown in fig. 1, 2; the angle adjustment connection structure includes a first adjustment plate 120; the arc connecting structure comprises a first arc hole 122, and at least two first fixing holes 114 are formed on the first fixing plate 110; as shown in fig. 3, the first fixing hole 114 is opposite to the first circular hole 122, so as to implement an angular adjustment of the auto-focusing module rotated about the first axis by directly or indirectly connecting the first adjusting plate 120 by changing the relative positions of the first fixing hole 114 and the first circular hole 122. In this embodiment, the first circular arc hole 122 is concentric with the second hollow portion 121, and the second hollow portion 121 and the first hollow portion 111 are also coaxially (Q-axis) arranged after the assembly is completed, so that the first circular arc hole 122 is concentric with the first hollow portion 111 of the first fixing plate 110. As shown in fig. 3, the arc angle α of the first arc hole 122 may be configured to be 50 ° to 95 °, so that an adjustment range exceeding 45 ° is achieved by the limitation of the two fixing screws. In this embodiment, the angle adjustment of the autofocus module around the first axis (the axis direction of the laser exit window 310 of the autofocus module or the axis direction of the first hollow portion 111) is achieved through the arc connection structure, so as to adjust the angle between the laser line and the sample, and the adjustment of the P-axis and the R-axis of the other two axes can be achieved by adjusting the adjusting screw on the autofocus module, so as to ensure that the autofocus module is coaxial with the microscope system.

In some preferred embodiments, as shown in fig. 2, an annular step 112 is disposed at the edge of the first hollowed-out portion 111 of the first fixing plate 110; the annular step 112 is in abutting fit with the first adjusting plate 120 to form guiding and limiting when the first adjusting plate 120 rotates relative to the first fixing plate 110. In this embodiment, the auto-focusing module rotates under the guiding action of the annular step 112 and the first adjusting plate 120, and plays a role of auxiliary support in the angle adjusting process, so as to ensure the adjusting accuracy and operability.

In other embodiments, as shown in fig. 1-4, the angle adjustment connection structure further includes a second adjustment plate 140 and a third adjustment plate 150 on the basis of the first adjustment plate 120; wherein, the second adjusting plate 140 is fixedly connected to the first adjusting plate 120; the third adjusting plate 150 is used for connecting with the second fixing plate 130; the arc connection structure further includes a second arc hole 141 located on the second adjusting plate 140 and at least two second fixing holes 151 located on the third adjusting plate 150; the second fixing hole 151 is opposite to the second circular arc hole 141 in position to realize the angular adjustment of the rotation of the auto focus module connected to the third adjustment plate 150 about the second axis (P axis) by changing the relative position of the second fixing hole 151 and the second circular arc hole 141; wherein the second axis (P-axis) is perpendicular to the first axis (Q-axis). In this embodiment, as shown in fig. 2, the first adjusting plate 120 and the second adjusting plate 140 are fixedly connected with the long hole 143 by penetrating the fourth screw hole 123 with a screw. As shown in fig. 4, the arc angle β of the second arc hole 141 may be configured to be in a range of 30 ° to 65 °, so that an adjustment range of ±10° with respect to the center position (0 ° position) is achieved by the limitation of the two fixing screws. In this embodiment, the angle adjustment of the autofocus module around the first axis Q (the axis direction of the laser exit window 310 of the autofocus module or the axis direction of the first hollow portion 111) and the second axis P can be simultaneously achieved through the arc connection structure, so as to adjust the angle between the laser line and the sample.

In still another preferred embodiment, as shown in fig. 1 to 11, the angle-adjusting connection structure is based on a first adjusting plate 120, a second adjusting plate 140, a third adjusting plate 150; the arc connection structure further comprises a third arc hole 152 on the third adjusting plate 150 and at least two third fixing holes 133 on the second fixing plate 130; the third fixing hole 133 is located opposite to the third circular arc hole 152 to achieve an angular adjustment of the rotation of the auto focus module coupled to the second fixing plate 130 along a third axis (e.g., R axis in fig. 9) by changing the relative positions of the third fixing hole 133 and the third circular arc hole 152; the third axis R is perpendicular to the second axis P and the first axis Q respectively. As shown in fig. 11, the third circular arc hole 152 is configured in a two-stage design to enhance the strength of the third regulation plate 150; the arc angle γ of the two third arc holes 152 may be configured in a range of 25 ° to 65 °, so that pitch adjustment of the adjustment range of ±10° with respect to the center position (0 ° position) is achieved by the limitation of the two fixing screws. In this embodiment, the angle adjustment of the autofocus module around the first axis Q (the axis direction of the laser exit window 310 of the autofocus module or the axis direction of the first hollowed portion 111), the second axis P, and the third axis R can be simultaneously realized through the arc connection structure, so that the operation of the adjusting screw on the autofocus module is avoided (the adjusting screw has a limited adjusting range, and the adjusting range is not easy to grasp and is easy to break), and the angle between the laser line and the sample is adjusted outside the autofocus module, so as to ensure that the autofocus module and the microscope system are coaxial.

Example 2

As shown in fig. 5, an automatic focusing apparatus includes: an auto-focus module 300, an angle adjustment mechanism 100 for the auto-focus module; the automatic focusing module is arranged on the angle adjusting mechanism for the automatic focusing module, so that the posture of the automatic focusing module is changed through adjusting the angle adjusting mechanism, and the included angle between the laser line of the automatic focusing module and the sample is changed. It should be understood that the angle adjustment mechanism 100 for the auto-focusing module is described in detail in embodiment 1, and is not described here again.

The automatic focusing microscope system can generate laser lines with different angles by adjusting the automatic focusing module aiming at different samples, so that the automatic focusing microscope system is convenient to adapt to different samples and applications.

Example 3

As shown in fig. 6-11, an autofocus microscopy system includes an angle adjustment mechanism 100 for an autofocus module. It should be understood that the angle adjustment mechanism 100 for the auto-focusing module is described in detail in embodiment 1, and is not described here again.

As shown in fig. 6a and 6b, the linear laser beam 300a emitted by the auto-focusing module is incident into the microscopic system through the dichroic mirror 600, and one path is reflected onto the sample 900 in a linear direction; the other path is captured by the camera 500 after passing through the dichroic mirror 600, the spectroscope 700, and the incident lens barrel 400.

As shown in fig. 7a and 7b, the oblique line laser beam 300a emitted by the auto-focusing module is incident into the microscopic system through the dichroic mirror 600, and is reflected onto the sample 900 in a straight line direction; the other path is captured by the camera 500 after passing through the dichroic mirror 600, the spectroscope 700, and the incident lens barrel 400.

Aiming at different samples, the automatic focusing microscopic system can generate laser lines with different angles only by adjusting the angle of the automatic focusing module, so that the automatic focusing microscopic system is convenient to adapt to different samples and applications.

Example 4

As shown in fig. 8-11, an adjusting tool includes: the tool platform 200, the first fixing plate 110, the second fixing plate 130 and the angle adjusting and connecting structure; wherein, the liquid crystal display device comprises a liquid crystal display device,

the tooling platform 200 is fixedly connected with the second fixing plate 130 and is used for forming a support when the angle of the automatic focusing module is adjusted;

a first fixing plate 110 for fixing to the microscope;

the second fixing plate 130 is used for fixedly connecting with the automatic focusing module;

the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate 110, the other end of the angle adjusting connecting plate is connected with the second fixing plate 130, the tool platform 200 is adjusted to achieve arrangement of different included angles between a laser line of the automatic focusing module and a sample, and the automatic focusing module is fixed in position by means of an arc connecting structure after adjustment.

In some preferred embodiments, tooling platform 200 is a four-dimensional or five-dimensional or six-dimensional combined translation stage. As shown in fig. 10, the tooling platform 200 includes a tooling fixing plate 210, a first platform 220, a second platform 230, and a swing connection base 240; wherein, the liquid crystal display device comprises a liquid crystal display device,

the tool fixing plate 210 is used for being fixedly connected with the second fixing plate 130, and as shown in fig. 2 and 10, the tool platform 200 and the automatic focusing module 300 are connected into a whole through the third screw hole 132; as shown in fig. 10, the first stage 220 and the second stage 230 are respectively configured with angle and displacement adjustment in one direction, so as to implement four-dimensional adjustment. In this embodiment, the rotation axis of the rotation adjustment of the tooling platform 200 is consistent with the first axis Q, the second axis P and the third axis R in embodiment 1, that is, the angle adjustment of the first axis Q corresponds to the angle adjustment of the swing connection seat 240; the second axis P axis angular adjustment corresponds to the angular adjustment of the first platform 220; the third axis R-axis angular adjustment corresponds to the angular adjustment of the second platform 230; through the adjusting tool, an effective support is formed for the angle adjusting process of the automatic focusing module 300, so that the relative position of the automatic focusing module 300 in an automatic focusing microscopic system can be fixed in the automatic focusing process; after the angle adjustment is completed, the position of the automatic focusing module 300 is quickly fixed, and the tooling platform 200 is removed, so that the laser line with a specific angle can be incident into the microscopic system, and the application of the automatic focusing system is expanded.

Although embodiments of the present utility model have been disclosed above, it is not limited to the details and embodiments shown and described, it is well suited to various fields of use for which the utility model would be readily apparent to those skilled in the art, and accordingly, the utility model is not limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.

Claims (10)

1. An angle adjustment mechanism for an auto-focus module, comprising:

a first fixing plate (110) for forming a fixing base of the angle adjusting mechanism;

a second fixing plate (130) for fixedly connecting with the automatic focusing module;

the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate (110), the other end of the angle adjusting connecting plate is connected with the second fixing plate (130), and the fixed angle of the automatic focusing module is adjusted by changing the fixed position of the arc connecting structure, so that the included angle between the laser line of the automatic focusing module and the sample is changed.

2. The angle adjustment mechanism for an autofocus module of claim 1, wherein:

the angle adjustment connection comprises a first adjustment plate (120);

the arc connecting structure comprises first arc holes (122), and at least two first fixing holes (114) are formed in the first fixing plate (110);

the first fixing hole (114) is opposite to the first circular arc hole (122) in position, so that the angle adjustment of the automatic focusing module, which is directly connected or indirectly connected with the first adjusting plate (120), rotating around the first shaft is realized by changing the relative position of the first fixing hole (114) and the first circular arc hole (122).

3. The angle adjustment mechanism for an autofocus module of claim 2, wherein: the first circular arc hole (122) is concentric with the first hollowed-out part (111) of the first fixing plate (110).

4. The angle adjustment mechanism for an autofocus module of claim 2, wherein: an annular step (112) is arranged at the edge of the first hollowed-out part (111) of the first fixed plate (110); the annular step (112) is in abutting fit with the first adjusting plate (120) to form guiding and limiting when the first adjusting plate (120) rotates relative to the first fixing plate (110).

5. The angle adjustment mechanism for an autofocus module of claim 2, wherein: the angle adjusting connecting structure further comprises a second adjusting plate (140) and a third adjusting plate (150); wherein, the liquid crystal display device comprises a liquid crystal display device,

the second adjusting plate (140) is fixedly connected to the first adjusting plate (120); the third adjusting plate (150) is used for being connected with the second fixing plate (130);

the arc connecting structure further comprises a second arc hole (141) positioned on the second adjusting plate (140) and at least two second fixing holes (151) positioned on the third adjusting plate (150);

the second fixing hole (151) is opposite to the second circular arc hole (141) in position, so that the angle adjustment of the rotation of the automatic focusing module connected with the third adjusting plate (150) around the second shaft is realized by changing the relative position of the second fixing hole (151) and the second circular arc hole (141); wherein the second axis is perpendicular to the first axis.

6. The angle adjustment mechanism for an autofocus module of claim 5, wherein: the arc connecting structure further comprises a third arc hole (152) on a third adjusting plate (150) and at least two third fixing holes (133) positioned on a second fixing plate (130);

the third fixing hole (133) is opposite to the third circular arc hole (152) in position, so that the angle adjustment of the automatic focusing module connected with the second fixing plate (130) along the third axis is realized by changing the relative position of the third fixing hole (133) and the third circular arc hole (152); the third shaft is perpendicular to the second shaft and the first shaft respectively.

7. An autofocus device, comprising: an autofocus module, an angle adjustment mechanism for an autofocus module as recited in claim 1; the automatic focusing module is arranged on the angle adjusting mechanism for the automatic focusing module, so that the posture of the automatic focusing module is changed through adjusting the angle adjusting mechanism, and the included angle between the laser line of the automatic focusing module and the sample is changed.

8. An autofocus microscopy system comprising an angle adjustment mechanism for an autofocus module according to claim 1.

9. Adjust frock, its characterized in that includes: the tool comprises a tool platform (200), a first fixing plate (110), a second fixing plate (130) and an angle adjusting and connecting structure; wherein, the liquid crystal display device comprises a liquid crystal display device,

the tooling platform (200) is fixedly connected with the second fixing plate (130) and is used for forming a support for adjusting the angle of the automatic focusing module;

the first fixing plate (110) is used for being fixed with the microscope;

the second fixing plate (130) is used for fixedly connecting with the automatic focusing module;

the angle adjusting connecting structure is provided with an arc connecting structure which can be fixed along an arc; one end of the angle adjusting connecting plate is connected with the first fixing plate (110), the other end of the angle adjusting connecting plate is connected with the second fixing plate (130), and the position of the automatic focusing module is fixed by using an arc connecting structure after adjustment through arrangement of different included angles between a laser line of the automatic focusing module and a sample by adjusting the tool platform (200).

10. The adjustment tool of claim 9, wherein: the tool platform (200) is a four-dimensional or five-dimensional or six-dimensional combined translation platform.