CN219777724U - Micro-motion platform for sensor chip production and detection equipment - Google Patents
Micro-motion platform for sensor chip production and detection equipment Download PDFInfo
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- CN219777724U CN219777724U CN202222545596.6U CN202222545596U CN219777724U CN 219777724 U CN219777724 U CN 219777724U CN 202222545596 U CN202222545596 U CN 202222545596U CN 219777724 U CN219777724 U CN 219777724U
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- 238000001514 detection method Methods 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000006073 displacement reaction Methods 0.000 claims abstract description 49
- 238000005303 weighing Methods 0.000 claims description 6
- 229920000715 Mucilage Polymers 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 5
- 239000003292 glue Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 7
- 238000000034 method Methods 0.000 description 6
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
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Abstract
The utility model discloses a micro-motion platform for sensor chip production detection equipment, which comprises a detection equipment base, wherein a detection equipment support is fixedly arranged on the detection equipment base, a fixed table is fixedly arranged at the top end of the detection equipment support, a longitudinal rail is fixedly arranged on the fixed table, a longitudinal displacement block is connected to the longitudinal rail in a sliding manner, and a transverse rail is fixedly arranged on the longitudinal displacement block.
Description
Technical Field
The utility model relates to the technical field of sensor chip production and detection equipment, in particular to a micro-motion platform for the sensor chip production and detection equipment.
Background
The sensor is an intelligent electronic component capable of sensing the surrounding environment, because the miniaturization trend of the sensor exploits a wider application space for the sensor, the sensor is not a technological innovation or a new field, but is a continuously developed technology, along with the improvement of an IC manufacturing process, miniaturization is a new trend of the sensor industry, wherein a sensor chip is used as a core of the sensor, the sensor chip controls any port on the sensor, the quality of one sensor chip can ensure the key of whether the sensor normally operates, so people usually place the sensor chip on detection equipment, the detection equipment is used for detecting parameters such as current, voltage and the like of an integrated circuit for the sensor chip, a plurality of detection heads are required to be arranged for improving the production beat, time difference is generated between the two detection heads, one detection head is required to be fixed, the other detection head is required to be used for fine adjustment, the traditional micro-motion platform can only unidirectionally adjust the distance and the position between the detection heads, and the flexibility of the detection heads arranged on the micro-motion platform is reduced for detecting the sensor chip.
In view of the above, the applicant has developed such a micro-motion platform, which reduces the debugging difficulty of the dispensing process in the field of packaging of the pressure sensor housing, and simplifies the debugging difficulty of the process personnel by the micro-motion adjustment platform, so that the dispensing needle head has adjustability in all directions in the X-Y coordinate domain. The micro-motion platform is low in price, does not need to write a program, is simple to install and is easy to use.
Disclosure of Invention
The utility model aims to provide a micro-motion platform for sensor chip production detection equipment, which solves the problem that the traditional micro-motion platform provided in the background art can only adjust the distance and the position between detection heads in one direction, and reduces the flexibility of the detection heads arranged on the micro-motion platform to the sensor chip detection.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a fine motion platform for sensor chip production check out test set, includes the check out test set base, fixed mounting has the check out test set support on the check out test set base, the top fixed mounting of check out test set support has the fixed station, fixed mounting has longitudinal rail on the fixed station, sliding connection has longitudinal displacement piece on the longitudinal rail, fixed mounting has transverse rail on the longitudinal displacement piece, sliding connection has transverse displacement piece on the transverse rail, one side fixed mounting of transverse displacement piece has the lifting rail, sliding connection has the crane on the lifting rail, one side fixed mounting of crane has fine motion mechanism.
Preferably, the micro-motion mechanism comprises a micro-motion frame, a first adjusting block, a second adjusting block, a supporting frame, a micro-motion bolt, a first detection head installation frame and a second detection head installation frame, wherein one side of the micro-motion frame is fixedly connected with the lifting frame.
Preferably, a first adjusting block is arranged on one side of the micro-motion frame, a connecting plate is arranged on the other side of the top end of the micro-motion frame, a second adjusting block is arranged on one side of the first adjusting block, a supporting frame is arranged on the second adjusting block, a first detecting head mounting frame is arranged on one side of the connecting plate, a second detecting head mounting frame is arranged on one side of the supporting frame, micro-motion bolts are connected to the surface of the connecting plate in a threaded mode, and the connecting plate is connected with the supporting frame through the micro-motion bolts.
Preferably, the first detection head mounting frame and the second detection head mounting frame are provided with detection heads.
Preferably, the fixed table is provided with a first servo motor for driving the longitudinal displacement block to move along the longitudinal track direction, the longitudinal displacement block is provided with a second servo motor for driving the transverse displacement block to move along the transverse track direction, and the transverse displacement block is provided with a third servo motor for driving the lifting frame to move along the lifting track direction.
Preferably, a first ball screw extending longitudinally is arranged on the fixed table, a first ball nut which is matched and connected with the first ball screw is arranged on the longitudinal displacement block, and the first servo motor is used for driving the ball screw to rotate; the longitudinal displacement block is provided with a second ball screw which transversely extends, the transverse displacement block is provided with a second ball nut which is connected with the second ball screw in a matched manner, and the second servo motor is used for driving the ball screw to rotate; the transverse displacement block is provided with a vertical third ball screw, the lifting block is provided with a third ball nut which is connected with the third ball screw in a matched mode, and the third servo motor is used for driving the third ball screw to rotate.
Preferably, the middle part fixed mounting of check out test set support has the plummer, the middle part fixed mounting on plummer top has the automatic glue weighing device that is used for preventing that the gluey weight is out of control.
Preferably, a protective cover is arranged above the automatic glue weighing device (16).
Compared with the prior art, the utility model has the beneficial effects that: through setting up micro-motion mechanism, the staff is through adjusting the relative distance between first regulating block and the second regulating block, adjusts the height of support frame, and is indirect to the height of second detection head mounting bracket and adjust, and the staff is through rotating micro-motion bolt to the XY direction of second detection head mounting bracket on the support frame, has improved the flexibility ratio of installing the detection head on micro-motion platform to sensor chip detection.
Drawings
FIG. 1 is a perspective view of a first view of the present utility model;
FIG. 2 is a perspective view of a second view of the present utility model;
FIG. 3 is a perspective view of a third view of the present utility model;
fig. 4 is a side view of the present utility model.
In the figure: 1. a detection device base; 2. a detection device holder; 3. a carrying platform; 4. a micro-motion mechanism; 41. a micro-motion frame; 42. a first adjustment block; 43. a second adjustment block; 44. a support frame; 45. a micro-bolt; 46. a second test head mount; 47. a first test head mount; 48. a connecting plate; 5. a lifting frame; 6. lifting rails; 7. a third servo motor; 8. a lateral displacement block; 9. a transverse rail; 10. a second servo motor; 11. a longitudinal displacement block; 12. a longitudinal rail; 13. a first servo motor; 14. a fixed table; 15. a protective cover; 16. automatic glue weighing device.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
Referring to fig. 1-4, the utility model provides a micro-motion platform for sensor chip production detection equipment, which comprises a detection equipment base 1, a detection equipment support 2 is fixedly installed on the detection equipment base 1, a fixed table 14 is fixedly installed at the top end of the detection equipment support 2, a longitudinal rail 12 is fixedly installed on the fixed table 14, a longitudinal displacement block 11 is slidingly connected to the longitudinal rail 12, a transverse rail 9 is fixedly installed on the longitudinal displacement block 11, a transverse displacement block 8 is slidingly connected to the transverse rail 9, a lifting rail 6 is fixedly installed on one side of the transverse displacement block 8, a lifting frame 5 is slidingly connected to the lifting rail 6, a micro-motion mechanism 4 is fixedly installed on one side of the lifting frame 5, the micro-motion mechanism 4 comprises a micro-motion frame 41, a first adjusting block 42, a second adjusting block 43, a supporting frame 44, a micro-motion bolt 45, a first detection head mounting frame 47 and a second detection head mounting frame 46, the Y-direction position of the micro-motion mechanism 4 is adjusted in the sliding process of the longitudinal displacement block 11 along the longitudinal rail 12, the X-direction position of the micro-motion mechanism 4 is adjusted in the sliding process of the transverse displacement block 8 along the transverse rail 9, the lifting rail 5 is adjusted in the sliding process of the lifting rail 5, and the sliding position of the micro-motion mechanism 4 is adjusted in the sliding process of the Z direction along the lifting frame 6.
One side of the micro-motion frame 41 is fixedly connected with one side adjacent to the lifting frame 5, the micro-motion mechanism 4 is installed on the lifting frame 5 through the micro-motion frame 41, a first adjusting block 42 is installed on one side of the micro-motion frame 41, a connecting plate 48 is installed on the other side of the top end of the micro-motion frame 41, a second adjusting block 43 is arranged at the bottom of the first adjusting block 42, a supporting frame 44 is installed on the second adjusting block 43, a first detecting head installing frame 47 is installed on one side of the connecting plate 48, a second detecting head installing frame 46 is installed on one side of the supporting frame 44, micro-motion bolts 45 are connected to the surface threads of the connecting plate 48, and the connecting plate 48 is in sliding connection with the supporting frame 44 through the micro-motion bolts 45, and detecting heads are installed on the first detecting head installing frame 47 and the second detecting head installing frame 46.
The operator rotates the micro-motion bolt 45 through the hand to adjust the height of the support frame 44, so that the support frame translates in the Y-axis direction, and the position adjustment of the detection head in the Y-axis direction is realized; the first adjusting block 42 and the second adjusting block 43 are of precise clamping structures, and can be manually adjusted in a sliding manner, so that the first adjusting block 42 and the second adjusting block 43 are staggered to adjust the left-right distance, the second detecting head mounting frame 46 is translated in the X-axis direction, and then the distance between the first detecting head and the second detecting head is adjusted, namely the adjustment in the X-axis direction is realized; after the distance between the first detection head and the second detection head in the X-axis and Y-axis directions is adjusted to a proper distance according to the production takt, normal operation can be started, and the first detection head and the second detection head detect the sensor chip according to the production takt.
The fixed table 14 is provided with a first servo motor 13 for driving the longitudinal displacement block 11 to move along the direction of the longitudinal track 12, the longitudinal displacement block 11 is provided with a second servo motor 10 for driving the transverse displacement block 8 to move along the direction of the transverse track 9, the transverse displacement block 8 is provided with a third servo motor 7 for driving the lifting frame 5 to move along the direction of the lifting track 6, the first servo motor 13 is started after being electrified, the first servo motor 13 drives the ball screw on the longitudinal track 12 to rotate, the threads on the surface of the ball screw are mutually matched with the threads on the inner wall of the longitudinal displacement block 11, the longitudinal displacement block 11 is limited by the longitudinal track 12 with the mutually matched shape and size, so that the longitudinal displacement block 11 slides along the longitudinal track 12, the second servo motor 10 is started after being electrified, the second servo motor 10 drives the ball screw on the transverse track 9 to rotate, the threads on the surface of the ball screw are mutually matched with the threads on the inner wall of the transverse displacement block 8, the transverse displacement block 8 is limited by the transverse track 9 with the mutually matched shape and size, the third servo motor 7 is started after being electrified, the third servo motor 7 drives the lifting frame 7 drives the ball screw on the inner wall of the lifting frame 5 to mutually matched with the lifting frame 5 to rotate along the mutually matched shape and the lifting track 6, and the ball screw on the lifting frame 5 is mutually matched with the inner wall with the lifting frame 5 is mutually matched with the threads.
The middle part fixed mounting of check out test set support 2 has plummer 3, and the middle part fixed mounting on plummer 3 top has automatic title mucilage binding to put 16, and the top of automatic title mucilage binding is put 16 still is equipped with the protection casing 15 that is used for protecting automatic title mucilage binding to put 16, and the staff will wait to detect the sensor chip and place on plummer 3, and automatic title mucilage binding is put 16, carries out the accurate measurement of weighing to the work piece that waits to detect to prevent that the gluey weight is out of control.
When the embodiment of the utility model is used, the following steps are adopted: the operator places the sensor chip to be detected on the workbench below the automatic glue weighing device 16, the first servo motor 13 is started after being electrified, the first servo motor 13 drives the ball screw on the longitudinal rail 12 to rotate, the threads on the surface of the ball screw are mutually matched with the threads on the inner wall of the longitudinal displacement block 11, the longitudinal displacement block 11 is limited by the longitudinal rail 12 with the shape and the size mutually matched, so that the longitudinal displacement block 11 slides along the longitudinal rail 12, the second servo motor 10 is started after being electrified, the second servo motor 10 drives the ball screw on the transverse rail 9 to rotate, the threads on the surface of the ball screw are mutually matched with the threads on the inner wall of the transverse displacement block 8, the transverse displacement block 8 is limited by the transverse rail 9 with the shape and the size mutually matched, so that the transverse displacement block 8 slides along the transverse rail 9, the third servo motor 7 drives the ball screw in the lifting rail 6 to rotate, the threads on the surface of the ball screw are mutually matched with the threads on the inner wall of the lifting frame 5, the lifting frame 5 is limited by the lifting rail 6 with the shape and the size mutually matched with the lifting frame 5, so that the lifting frame 5 slides along the lifting frame 6, the position of the lifting frame 6 is mutually matched with the transverse rail 9 along the transverse rail 4, the position of the sliding block 4 is adjusted by the sliding mechanism 4 in the transverse direction of the sliding block 4, and the position of the sliding mechanism 4 is adjusted along the transverse direction 4 is adjusted, and the position of the sliding mechanism 4 is adjusted along the transverse direction 4, and the transverse direction 4 is adjusted, and the position of the sliding direction 4 is moved along the transverse direction 4, the position of the second detection head XY direction fixed on the second detection head mounting frame 46 on the support frame 44 is manually adjusted, and the first detection head is fixed on the first detection head mounting frame 47, and the first detection head and the second detection head detect the sensor chip respectively.
Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.
Claims (8)
1. Micro-motion platform for sensor chip production check out test set, including check out test set base (1), its characterized in that: the detection device comprises a detection device base (1), wherein a detection device support (2) is fixedly arranged on the detection device base (1), a fixed table (14) is fixedly arranged at the top end of the detection device support (2), a longitudinal rail (12) is fixedly arranged on the fixed table (14), a longitudinal displacement block (11) is connected to the longitudinal rail (12) in a sliding mode, a transverse rail (9) is fixedly arranged on the longitudinal displacement block (11), a transverse displacement block (8) is connected to the transverse rail (9) in a sliding mode, a lifting rail (6) is fixedly arranged on one side of the transverse displacement block (8), a lifting frame (5) is connected to the lifting rail (6) in a sliding mode, and a micro-motion mechanism (4) is fixedly arranged on one side of the lifting frame (5).
2. The micro-motion platform for a sensor chip production inspection apparatus of claim 1, wherein: the micro-motion mechanism (4) comprises a micro-motion frame (41), a first adjusting block (42), a second adjusting block (43), a supporting frame (44), a micro-motion bolt (45), a first detection head mounting frame (47) and a second detection head mounting frame (46), and one side of the micro-motion frame (41) is fixedly connected with the lifting frame (5).
3. A micro-motion platform for a sensor chip production inspection apparatus according to claim 2, wherein: the utility model discloses a micro-motion frame, including fine motion frame (41), connecting plate (48) are installed on one side of fine motion frame (41), connecting plate (48) are installed to the opposite side on fine motion frame (41) top, one side of first regulating block (42) is equipped with second regulating block (43), install support frame (44) on second regulating block (43), first detection head mounting bracket (47) are installed to one side of connecting plate (48), second detection head mounting bracket (46) are installed to one side of support frame (44), the surface threaded connection of connecting plate (48) has micro-motion bolt (45), connecting plate (48) are connected with support frame (44) through micro-motion bolt (45).
4. A micro-motion platform for a sensor chip production inspection apparatus according to claim 2, wherein: the first detection head mounting frame (47) and the second detection head mounting frame (46) are provided with detection heads.
5. The micro-motion platform for a sensor chip production inspection apparatus of claim 1, wherein: the fixed table (14) is provided with a first servo motor (13) for driving the longitudinal displacement block (11) to move along the longitudinal track (12), the longitudinal displacement block (11) is provided with a second servo motor (10) for driving the transverse displacement block (8) to move along the transverse track (9), and the transverse displacement block (8) is provided with a third servo motor (7) for driving the lifting frame (5) to move along the lifting track (6).
6. The micro-motion platform for a sensor chip production inspection apparatus of claim 5, wherein: the fixed table (14) is provided with a first ball screw extending longitudinally, the longitudinal displacement block (11) is provided with a first ball nut which is matched and connected with the first ball screw, and the first servo motor (13) is used for driving the ball screw to rotate; the longitudinal displacement block (11) is provided with a second ball screw extending transversely, the transverse displacement block (8) is provided with a second ball nut which is connected with the second ball screw in a matched manner, and the second servo motor (10) is used for driving the ball screw to rotate; the transverse displacement block (8) is provided with a vertical third ball screw, the lifting frame (5) is provided with a third ball nut which is connected with the third ball screw in a matched mode, and the third servo motor (7) is used for driving the third ball screw to rotate.
7. The micro-motion platform for a sensor chip production inspection apparatus of claim 1, wherein: the middle part fixed mounting of check out test set support (2) has plummer (3), the middle part fixed mounting on plummer (3) top has automatic title mucilage binding that is used for preventing that the gluey weight is out of control to put (16).
8. The micro-motion platform for a sensor chip production inspection apparatus of claim 7, wherein: a protective cover (15) is arranged above the automatic glue weighing device (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222545596.6U CN219777724U (en) | 2022-09-26 | 2022-09-26 | Micro-motion platform for sensor chip production and detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222545596.6U CN219777724U (en) | 2022-09-26 | 2022-09-26 | Micro-motion platform for sensor chip production and detection equipment |
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| Publication Number | Publication Date |
|---|---|
| CN219777724U true CN219777724U (en) | 2023-09-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222545596.6U Active CN219777724U (en) | 2022-09-26 | 2022-09-26 | Micro-motion platform for sensor chip production and detection equipment |
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| CN (1) | CN219777724U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117742083A (en) * | 2023-12-26 | 2024-03-22 | 苏州矽行半导体技术有限公司 | Multi-freedom-degree adjustable wafer focusing system |
-
2022
- 2022-09-26 CN CN202222545596.6U patent/CN219777724U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117742083A (en) * | 2023-12-26 | 2024-03-22 | 苏州矽行半导体技术有限公司 | Multi-freedom-degree adjustable wafer focusing system |
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