CN219772247U - Coating equipment - Google Patents
Coating equipment Download PDFInfo
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- CN219772247U CN219772247U CN202320879814.1U CN202320879814U CN219772247U CN 219772247 U CN219772247 U CN 219772247U CN 202320879814 U CN202320879814 U CN 202320879814U CN 219772247 U CN219772247 U CN 219772247U
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- 238000000576 coating method Methods 0.000 title claims abstract description 137
- 239000011248 coating agent Substances 0.000 title claims abstract description 133
- 239000000463 material Substances 0.000 claims abstract description 142
- 238000001816 cooling Methods 0.000 claims abstract description 102
- 238000001514 detection method Methods 0.000 claims abstract description 75
- 230000000007 visual effect Effects 0.000 claims abstract description 65
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 35
- 238000011179 visual inspection Methods 0.000 claims description 34
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 28
- 230000008020 evaporation Effects 0.000 claims description 27
- 238000001704 evaporation Methods 0.000 claims description 27
- 238000007747 plating Methods 0.000 claims description 17
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000004804 winding Methods 0.000 claims description 11
- 239000003507 refrigerant Substances 0.000 claims description 10
- 238000005096 rolling process Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 abstract description 25
- 239000012528 membrane Substances 0.000 abstract description 9
- 238000012797 qualification Methods 0.000 abstract description 7
- 238000005520 cutting process Methods 0.000 abstract description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- 230000006872 improvement Effects 0.000 description 11
- 230000017525 heat dissipation Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 239000002699 waste material Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000004075 alteration Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000005253 cladding Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
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Abstract
The utility model discloses coating equipment which comprises a vacuum coating cavity, wherein an unreeling device, a first cooling main roller, a first coating component, a visual detection component and a reeling device are arranged in the vacuum coating cavity, a film material can bypass the first cooling main roller and contact with a wrap angle of the first cooling main roller after being released from the unreeling device, the first coating component is arranged at a position opposite to a contact part of the first cooling main roller and the film material and is used for coating a first surface of the film material, and the visual detection component is arranged at a position close to the reeling device and is used for performing visual detection on the coated film material. This kind of coating equipment is provided with vision detection subassembly and accessible vision detection subassembly detects the defect on the membrane material, and then can pinpoint the position that appears the defect on the membrane material, effectively promotes the product qualification rate of follow-up cutting the membrane material, reduces the material extravagant, saves the material cost, can promote production efficiency by a wide margin when using.
Description
Technical Field
The utility model relates to the field of coating, in particular to coating equipment.
Background
The film plating equipment is equipment for laminating metal on a film base material, and the film base material needs to be cut into the required size according to the requirement after film plating. The surface of the film can have holes, chromatic aberration, concave-convex points or other unqualified defects after film coating, the film is difficult to accurately position the defects on the film after film coating, the cut product qualification rate is low, the material waste is serious, the material cost is greatly increased, and the production efficiency is also reduced.
Therefore, the present utility model aims to provide a new technical solution to solve the existing technical defects.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model provides a coating device, which solves the technical defects of low product yield, serious material waste, high implementation cost, low production efficiency and the like caused by the defect that the existing film material is difficult to position on the film material after coating.
The technical scheme adopted for solving the technical problems is as follows:
the utility model provides a coating equipment, includes vacuum coating cavity, vacuum coating cavity inside is provided with unreeling device, first cooling main roll, first coating film subassembly, visual detection subassembly and coiling mechanism, unreeling device is used for letting out the membrane material that needs coating film, and the membrane material can walk around first cooling main roll and contact with first cooling main roll wrap angle after unreeling device is let out, first coating film subassembly sets up the opposite position of the part of first cooling main roll and membrane material contact and is used for carrying out the coating film to the first face of membrane material, the coiling mechanism is used for the membrane material after the rolling coating film, visual detection subassembly sets up in being close to coiling mechanism's position and be used for carrying out visual detection work to the membrane material after the coating film.
As a further improvement of the technical scheme, the visual detection assembly comprises a CCD rack, a CCD camera and a light source, wherein the CCD camera and the light source are arranged on the CCD rack.
As a further improvement of the technical scheme, the visual detection assembly further comprises a two-dimensional code printing device, and the two-dimensional code printing device can manufacture the film plating condition detected by the visual detection assembly in a certain range on the film material into a two-dimensional code and print the two-dimensional code on a preset position of the film material in a corresponding range.
As a further improvement of the technical scheme, the visual inspection assembly is externally coated with a cooling device, and the cooling device comprises at least one of a refrigerant pipe and a metal heat radiating piece.
As a further improvement of the technical scheme, a second cooling main roller and a second coating component are further arranged in the vacuum coating cavity, the film material can bypass the second cooling main roller and contact with the wrap angle of the second cooling main roller after coating the first surface of the film material through the first coating component, and the second coating component is arranged at the opposite position of the contact part of the second cooling main roller and the film material and is used for coating the second surface of the film material.
As an improvement of the technical scheme, the first coating component and the second coating component are vapor plating coating components.
As a further improvement of the above technical solution, the vapor plating film plating assembly includes an evaporation boat or a crucible, which is disposed at a position opposite to a portion where the first cooling main roller and the second cooling main roller are in contact with the film material.
As a second improvement of the technical scheme, the first coating component and the second coating component are both magnetron sputtering coating components.
As a further improvement of the technical scheme, the magnetron sputtering coating assembly comprises a magnetron sputtering device and a target, wherein the target comprises a first target and a second target, the first target is arranged at the opposite position of the contact part of the first cooling main roller and the film, and the second target is arranged at the opposite position of the contact part of the second cooling main roller and the film.
As a further improvement of the technical scheme, the steering roller is arranged in the vacuum coating cavity, and is arranged between the first cooling main roller and the second cooling main roller along the flowing direction of the film material, and the film material can bypass the steering roller to steer the film material and bypass the second cooling main roller after flowing out of the first cooling main roller.
As a further improvement of the technical scheme, at least one of a passing roller, a tension roller and a flattening roller is arranged in the vacuum coating cavity, and the visual detection assembly is arranged between the winding device and the nearest passing roller or tension roller or flattening roller.
As a further improvement of the technical scheme, the unreeling device comprises an unreeling roller, and the reeling device comprises a reeling roller.
The beneficial effects of the utility model are as follows: the utility model provides a film coating device which is provided with a visual detection component, wherein the visual detection component can detect a film material subjected to film coating through a CCD camera, and after holes, chromatic aberration, concave-convex points or other unqualified defects on the film material are detected through the visual detection component, defect information is printed on the film material in a two-dimensional code mode, so that the defect position on the film material can be accurately positioned, the product qualification rate of the film material after subsequent slitting is effectively improved, the material waste is reduced, the material cost is saved, and the production efficiency can be greatly improved when the film coating device is applied.
In conclusion, the coating equipment solves the technical defects of low product percent of pass, serious material waste, high implementation cost, low production efficiency and the like caused by the defect that the existing film material is difficult to position on the film material after coating.
Drawings
The utility model will be further described with reference to the drawings and examples.
FIG. 1 is an assembled schematic view of embodiment 2 of the present utility model;
fig. 2 is an assembly schematic of embodiment 4 of the present utility model.
In the figure:
the device comprises a vacuum coating cavity 1, an unreeling device 21, a reeling device 22, a first cooling main roller 31, a visual detection assembly 4, an evaporation boat or crucible 51, a target 52, a turning roller 6 and a film 9.
Detailed Description
The conception, specific structure, and technical effects produced by the present utility model will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments, and that other embodiments obtained by those skilled in the art without inventive effort are within the scope of the present utility model based on the embodiments of the present utility model. In addition, all the coupling/connection relationships referred to in the patent are not direct connection of the single-finger members, but rather, it means that a better coupling structure can be formed by adding or subtracting coupling aids depending on the specific implementation. The technical features in the utility model can be combined interactively on the premise of not contradicting and conflicting, and refer to fig. 1 and 2.
Example 1:
the present utility model provides: the utility model provides a coating equipment, includes vacuum coating cavity 1, vacuum coating cavity 1 inside is provided with unreeling device 21, first cooling main roll 31, first coating film subassembly, visual inspection subassembly 4 and coiling mechanism 22, wherein, unreeling device 21 includes the unreeling roller, coiling mechanism 22 includes the coiling roller. The unreeling device 21 is used for paying out a film material 9 needing to be coated, the film material 9 can bypass the first cooling main roller 31 and contact with the wrap angle of the first cooling main roller 31 after being paid out from the unreeling device 21, the first coating component is arranged at the opposite position of the contact part of the first cooling main roller 31 and the film material 9 and is used for coating a film on the first surface of the film material 9, the reeling device 22 is used for reeling the film material 9 after coating, and the visual detection component 4 is arranged at a position close to the reeling device 22 and is used for performing visual detection on the film material 9 after coating.
Specifically, the visual detection assembly 4 comprises a CCD rack, a CCD camera arranged on the CCD rack and a light source, the visual detection assembly 4 further comprises a two-dimensional code printing device, and the two-dimensional code printing device can manufacture two-dimensional codes from the film plating condition detected by the visual detection assembly 4 in a certain range on the film material 9 and print the two-dimensional codes at preset positions of the film material 9 in a corresponding range. When the method is used, defects such as holes, chromatic aberration, concave-convex points or other unqualified defects on the film material 9 are detected through the CCD camera, detection information of the film material is recorded on the two-dimensional code, the two-dimensional code with the film material detection information recorded is printed on the film material 9 through the two-dimensional code printing device on the visual detection assembly 4, the two-dimensional codes are arranged in the area without coating film in the length direction of the film material 9, the two-dimensional codes are arranged at certain intervals, for example, one two-dimensional code is arranged every other meter, the two-dimensional code can record defect information in the meter in the width direction, the film material 9 is conveniently and subsequently cut, the film material waste is avoided, and the cutting qualification rate is improved. Of course, the coating may be stopped whenever the data detected by the intermediate vision detecting unit 4 is not acceptable, thereby saving the process and cost.
The film running mode of the film in the vacuum coating equipment comprises a roller sticking mode or a suspension mode, in the technical scheme, at least one of a roller passing mode, a tension roller and a flattening roller is further arranged in the vacuum coating cavity 1, and the visual detection assembly 4 is arranged between the winding device 22 and the roller passing mode or the tension roller or the flattening roller closest to the winding device 22. Since neither the CCD camera nor the light source in the visual inspection assembly 4 can withstand high temperatures, but the temperature in the evaporation area of the vapor deposition coating apparatus or the sputtering area of the magnetron sputtering apparatus is high, typically 1000 degrees or more, the camera or the light source cannot withstand such temperatures, it must be disposed near the wind-up roll because the temperature near the wind-up roll has fallen to about 50 to 60 degrees celsius. The visual inspection assembly 4 may be protected by positioning the visual inspection assembly 4 therein. Also, whether magnetron sputtering or evaporation coating, the particle orientation is variable during the coating process, and if the vision detecting component 4 is placed close to the evaporation or magnetron sputtering part, the particles are easily coated on the CCD camera and the light source, so that the CCD camera cannot detect correctly, and errors occur. At this time, although the CCD camera is arranged at the position of the wind-up roll, the influence of high temperature on the camera and the rack is reduced, but the position is 40-50 ℃, a certain influence is still caused on the CCD camera and the light source, at this time, the temperature of the visual detection assembly 4 can be reduced, the characteristics of water cooling or metal heat conduction can be adopted to reduce the temperature of the visual detection assembly 4, for example, the visual detection assembly 4 can be wrapped by a water cooling pipe or wrapped by metal copper, so that the thermal conduction of the visual detection assembly is realized, and the thermal conduction performance of the metal copper is good. The effect of cooling the camera and the light source of the visual inspection assembly 4 is achieved, so that the visual inspection assembly works normally. Specifically in this technical scheme, the outside cladding of visual inspection subassembly 4 has cooling device, cooling device includes at least one of refrigerant pipe, metal heat dissipation spare, and the cooling pipe can be water-cooled tube or other refrigerant pipes, and metal heat dissipation spare can adopt metal conductor that heat conductivility such as copper metal or aluminum metal is good, has reached the purpose that protection visual inspection subassembly 4 normally worked.
In this embodiment, the first coating component is an evaporation coating component, and the evaporation coating component includes an evaporation boat or crucible 51, where the evaporation boat or crucible 51 is disposed at a position opposite to a portion of the first cooling main roller 31 contacting the film material 9. When the equipment works, the film material 9 starts from the unreeling device 21 and passes through the evaporation boat or crucible 51, metal is laminated on the film, and the film material 9 is rolled up through the rolling roller in the rolling device 22 after being coated. In this embodiment, a set of first coating modules is provided to coat a first surface of the film material 9, and the film material 9 is coated on one surface.
Example 2:
referring to fig. 1: the utility model provides a coating equipment, includes vacuum coating cavity 1, vacuum coating cavity 1 inside is provided with unreeling device 21, first cooling main roll 31, first coating film subassembly, visual inspection subassembly 4 and coiling mechanism 22, wherein, unreeling device 21 includes the unreeling roller, coiling mechanism 22 includes the coiling roller. The unreeling device 21 is used for paying out a film material 9 needing to be coated, the film material 9 can bypass the first cooling main roller 31 and contact with the wrap angle of the first cooling main roller 31 after being paid out from the unreeling device 21, the first coating component is arranged at the opposite position of the contact part of the first cooling main roller 31 and the film material 9 and is used for coating a film on the first surface of the film material 9, the reeling device 22 is used for reeling the film material 9 after coating, and the visual detection component 4 is arranged at a position close to the reeling device 22 and is used for performing visual detection on the film material 9 after coating.
Specifically, the visual detection assembly 4 comprises a CCD rack, a CCD camera arranged on the CCD rack and a light source, the visual detection assembly 4 further comprises a two-dimensional code printing device, and the two-dimensional code printing device can manufacture two-dimensional codes from the film plating condition detected by the visual detection assembly 4 in a certain range on the film material 9 and print the two-dimensional codes at preset positions of the film material 9 in a corresponding range. When the method is used, defects such as holes, chromatic aberration, concave-convex points or other unqualified defects on the film material 9 are detected through the CCD camera, detection information of the film material is recorded on the two-dimensional code, the two-dimensional code with the film material detection information recorded is printed on the film material 9 through the two-dimensional code printing device on the visual detection assembly 4, the two-dimensional codes are arranged in the area without coating film in the length direction of the film material 9, the two-dimensional codes are arranged at certain intervals, for example, one two-dimensional code is arranged every other meter, the two-dimensional code can record defect information in the meter in the width direction, the film material 9 is conveniently and subsequently cut, the film material waste is avoided, and the cutting qualification rate is improved. Of course, the coating may be stopped whenever the data detected by the intermediate vision detecting unit 4 is not acceptable, thereby saving the process and cost.
The film running mode of the film in the vacuum coating equipment comprises a roller sticking mode or a suspension mode, in the technical scheme, at least one of a roller passing mode, a tension roller and a flattening roller is further arranged in the vacuum coating cavity 1, and the visual detection assembly 4 is arranged between the winding device 22 and the roller passing mode or the tension roller or the flattening roller closest to the winding device 22. Since neither the CCD camera nor the light source in the visual inspection assembly 4 can withstand high temperatures, but the temperature in the evaporation area of the evaporation coating apparatus or the sputtering area of the magnetron sputtering apparatus is high, typically 1000 degrees or more, the camera or the light source cannot withstand such temperatures, it must be disposed near the wind-up roll because the temperature near the wind-up roll has fallen to about 50 to 60 degrees celsius. The visual inspection assembly 4 may be protected by positioning the visual inspection assembly 4 therein. Also, whether magnetron sputtering or evaporation coating, the particle orientation is variable during the coating process, and if the vision detecting component 4 is placed close to the evaporation or magnetron sputtering part, the particles are easily coated on the CCD camera and the light source, so that the CCD camera cannot detect correctly, and errors occur. At this time, although the CCD camera is arranged at the position of the wind-up roll, the influence of high temperature on the camera and the rack is reduced, but the position is 40-50 ℃, a certain influence is still caused on the CCD camera and the light source, at this time, the temperature of the visual detection assembly 4 can be reduced, the characteristics of water cooling or metal heat conduction can be adopted to reduce the temperature of the visual detection assembly 4, for example, the visual detection assembly 4 can be wrapped by a water cooling pipe or wrapped by metal copper, so that the thermal conduction of the visual detection assembly is realized, and the thermal conduction performance of the metal copper is good. The effect of cooling the camera and the light source of the visual inspection assembly 4 is achieved, so that the visual inspection assembly works normally. Specifically in this technical scheme, the outside cladding of visual inspection subassembly 4 has cooling device, cooling device includes at least one of refrigerant pipe, metal heat dissipation spare, and the cooling pipe can be water-cooled tube or other refrigerant pipes, and metal heat dissipation spare can adopt metal conductor that heat conductivility such as copper metal or aluminum metal is good, has reached the purpose that protection visual inspection subassembly 4 normally worked.
In this embodiment, the vacuum coating cavity 1 is further provided with a second cooling main roller 32 and a second coating component, where the first coating component and the second coating component are evaporation coating components. The vapor deposition coating assembly includes a vapor boat or crucible 51, and the vapor boat or crucible 51 is disposed at a position opposite to a portion of the first and second main cooling rollers 31, 32 that contacts the film material 9. When the equipment works, the film material 9 starts from the unreeling device 21 and passes through the evaporation boat or crucible 51, metal is laminated on the film, and the film material 9 is rolled up through the rolling roller in the rolling device 22 after being coated.
The film material 9 can bypass the second cooling main roller 32 and contact the second cooling main roller 32 by wrapping angles after coating the first surface of the film material 9 through the first coating component, and the second coating component is arranged at the opposite position of the contact part of the second cooling main roller 32 and the film material 9 and is used for coating the second surface of the film material 9. Wherein, the first surface of the film material 9 is coated by the first coating component, the second surface of the film material 9 is coated by the second coating component, and the film material 9 is coated on two surfaces.
In addition, the vacuum coating cavity 1 is internally provided with a steering roller 6, along the flowing direction of the film 9, the steering roller 6 is arranged between the first cooling main roller 31 and the second cooling main roller 32, the film 9 can bypass the steering roller 6 to steer the film and bypass the second cooling main roller 32 after flowing out from the first cooling main roller 31, and the steering roller 6 can steer the film 9, so that the second coating component can conveniently coat the film on the second surface of the film 9.
Example 3:
the utility model provides a coating equipment, includes vacuum coating cavity 1, vacuum coating cavity 1 inside is provided with unreeling device 21, first cooling main roll 31, first coating film subassembly, visual inspection subassembly 4 and coiling mechanism 22, wherein, unreeling device 21 includes the unreeling roller, coiling mechanism 22 includes the coiling roller. The unreeling device 21 is used for paying out a film material 9 needing to be coated, the film material 9 can bypass the first cooling main roller 31 and contact with the wrap angle of the first cooling main roller 31 after being paid out from the unreeling device 21, the first coating component is arranged at the opposite position of the contact part of the first cooling main roller 31 and the film material 9 and is used for coating a film on the first surface of the film material 9, the reeling device 22 is used for reeling the film material 9 after coating, and the visual detection component 4 is arranged at a position close to the reeling device 22 and is used for performing visual detection on the film material 9 after coating.
Specifically, the visual detection assembly 4 comprises a CCD rack, a CCD camera arranged on the CCD rack and a light source, the visual detection assembly 4 further comprises a two-dimensional code printing device, and the two-dimensional code printing device can manufacture two-dimensional codes from the film plating condition detected by the visual detection assembly 4 in a certain range on the film material 9 and print the two-dimensional codes at preset positions of the film material 9 in a corresponding range. When the method is used, defects such as holes, chromatic aberration, concave-convex points or other unqualified defects on the film material 9 are detected through the CCD camera, detection information of the film material is recorded on the two-dimensional code, the two-dimensional code with the film material detection information recorded is printed on the film material 9 through the two-dimensional code printing device on the visual detection assembly 4, the two-dimensional codes are arranged in the area without coating film in the length direction of the film material 9, the two-dimensional codes are arranged at certain intervals, for example, one two-dimensional code is arranged every other meter, the two-dimensional code can record defect information in the meter in the width direction, the film material 9 is conveniently and subsequently cut, the film material waste is avoided, and the cutting qualification rate is improved. Of course, the coating may be stopped whenever the data detected by the intermediate vision detecting unit 4 is not acceptable, thereby saving the process and cost.
The film running mode of the film in the vacuum coating equipment comprises a roller sticking mode or a suspension mode, in the technical scheme, at least one of a roller passing mode, a tension roller and a flattening roller is further arranged in the vacuum coating cavity 1, and the visual detection assembly 4 is arranged between the winding device 22 and the roller passing mode or the tension roller or the flattening roller closest to the winding device 22. Since neither the CCD camera nor the light source in the visual inspection assembly 4 can withstand high temperatures, but the temperature in the evaporation area of the evaporation coating apparatus or the sputtering area of the magnetron sputtering apparatus is high, typically 1000 degrees or more, the camera or the light source cannot withstand such temperatures, it must be disposed near the wind-up roll because the temperature near the wind-up roll has fallen to about 50 to 60 degrees celsius. The visual inspection assembly 4 may be protected by positioning the visual inspection assembly 4 therein. Also, whether magnetron sputtering or evaporation coating, the particle orientation is variable during the coating process, and if the vision detecting component 4 is placed close to the evaporation or magnetron sputtering part, the particles are easily coated on the CCD camera and the light source, so that the CCD camera cannot detect correctly, and errors occur. At this time, although the CCD camera is arranged at the position of the wind-up roll, the influence of high temperature on the camera and the rack is reduced, but the position is 40-50 ℃, a certain influence is still caused on the CCD camera and the light source, at this time, the temperature of the visual detection assembly 4 can be reduced, the characteristics of water cooling or metal heat conduction can be adopted to reduce the temperature of the visual detection assembly 4, for example, the visual detection assembly 4 can be wrapped by a water cooling pipe or wrapped by metal copper, so that the thermal conduction of the visual detection assembly is realized, and the thermal conduction performance of the metal copper is good. The effect of cooling the camera and the light source of the visual inspection assembly 4 is achieved, so that the visual inspection assembly works normally. Specifically in this technical scheme, the outside cladding of visual inspection subassembly 4 has cooling device, cooling device includes at least one of refrigerant pipe, metal heat dissipation spare, and the cooling pipe can be water-cooled tube or other refrigerant pipes, and metal heat dissipation spare can adopt metal conductor that heat conductivility such as copper metal or aluminum metal is good, has reached the purpose that protection visual inspection subassembly 4 normally worked.
In this embodiment, the first coating film is a magnetron sputtering coating film assembly, the magnetron sputtering coating film assembly includes a magnetron sputtering device and a target 52, the target 52 includes a first target, the first target is disposed at a position opposite to a portion where the first cooling main roller 31 contacts the film 9, during operation of the apparatus, the magnetron sputtering coating film assembly ionizes inert gas, then ions formed after the ionization of the inert gas are attracted to the target 52 by using magnetic force, and metal on the target 52 is impacted to be sputtered onto the film 9, thereby completing the magnetron sputtering coating film. In this embodiment, a set of first coating modules is provided to coat a first surface of the film material 9, and the film material 9 is coated on one surface.
Example 4:
referring to fig. 2: the utility model provides a coating equipment, includes vacuum coating cavity 1, vacuum coating cavity 1 inside is provided with unreeling device 21, first cooling main roll 31, first coating film subassembly, visual inspection subassembly 4 and coiling mechanism 22, wherein, unreeling device 21 includes the unreeling roller, coiling mechanism 22 includes the coiling roller. The unreeling device 21 is used for paying out a film material 9 needing to be coated, the film material 9 can bypass the first cooling main roller 31 and contact with the wrap angle of the first cooling main roller 31 after being paid out from the unreeling device 21, the first coating component is arranged at the opposite position of the contact part of the first cooling main roller 31 and the film material 9 and is used for coating a film on the first surface of the film material 9, the reeling device 22 is used for reeling the film material 9 after coating, and the visual detection component 4 is arranged at a position close to the reeling device 22 and is used for performing visual detection on the film material 9 after coating.
Specifically, the visual detection assembly 4 comprises a CCD rack, a CCD camera arranged on the CCD rack and a light source, the visual detection assembly 4 further comprises a two-dimensional code printing device, and the two-dimensional code printing device can manufacture two-dimensional codes from the film plating condition detected by the visual detection assembly 4 in a certain range on the film material 9 and print the two-dimensional codes at preset positions of the film material 9 in a corresponding range. When the method is used, defects such as holes, chromatic aberration, concave-convex points or other unqualified defects on the film material 9 are detected through the CCD camera, detection information of the film material is recorded on the two-dimensional code, the two-dimensional code with the film material detection information recorded is printed on the film material 9 through the two-dimensional code printing device on the visual detection assembly 4, the two-dimensional codes are arranged in the area without coating film in the length direction of the film material 9, the two-dimensional codes are arranged at certain intervals, for example, one two-dimensional code is arranged every other meter, the two-dimensional code can record defect information in the meter in the width direction, the film material 9 is conveniently and subsequently cut, the film material waste is avoided, and the cutting qualification rate is improved. Of course, the coating may be stopped whenever the data detected by the intermediate vision detecting unit 4 is not acceptable, thereby saving the process and cost.
The film running mode of the film in the vacuum coating equipment comprises a roller sticking mode or a suspension mode, in the technical scheme, at least one of a roller passing mode, a tension roller and a flattening roller is further arranged in the vacuum coating cavity 1, and the visual detection assembly 4 is arranged between the winding device 22 and the roller passing mode or the tension roller or the flattening roller closest to the winding device 22. Since neither the CCD camera nor the light source in the visual inspection assembly 4 can withstand high temperatures, but the temperature in the evaporation area of the evaporation coating apparatus or the sputtering area of the magnetron sputtering apparatus is high, typically 1000 degrees or more, the camera or the light source cannot withstand such temperatures, it must be disposed near the wind-up roll because the temperature near the wind-up roll has fallen to about 50 to 60 degrees celsius. The visual inspection assembly 4 may be protected by positioning the visual inspection assembly 4 therein. Also, whether magnetron sputtering or evaporation coating, the particle orientation is variable during the coating process, and if the vision detecting component 4 is placed close to the evaporation or magnetron sputtering part, the particles are easily coated on the CCD camera and the light source, so that the CCD camera cannot detect correctly, and errors occur. At this time, although the CCD camera is arranged at the position of the wind-up roll, the influence of high temperature on the camera and the rack is reduced, but the position is 40-50 ℃, a certain influence is still caused on the CCD camera and the light source, at this time, the temperature of the visual detection assembly 4 can be reduced, the characteristics of water cooling or metal heat conduction can be adopted to reduce the temperature of the visual detection assembly 4, for example, the visual detection assembly 4 can be wrapped by a water cooling pipe or wrapped by metal copper, so that the thermal conduction of the visual detection assembly is realized, and the thermal conduction performance of the metal copper is good. The effect of cooling the camera and the light source of the visual inspection assembly 4 is achieved, so that the visual inspection assembly works normally. Specifically in this technical scheme, the outside cladding of visual inspection subassembly 4 has cooling device, cooling device includes at least one of refrigerant pipe, metal heat dissipation spare, and the cooling pipe can be water-cooled tube or other refrigerant pipes, and metal heat dissipation spare can adopt metal conductor that heat conductivility such as copper metal or aluminum metal is good, has reached the purpose that protection visual inspection subassembly 4 normally worked.
In this embodiment, the vacuum coating cavity 1 is further internally provided with a second cooling main roller 32 and a second coating component, the first coating component and the second coating component are magnetron sputtering coating components, the magnetron sputtering coating component includes a magnetron sputtering device and a target 52, the target 52 includes a first target and a second target, the first target is disposed at a position opposite to a portion of the first cooling main roller 31 contacting the film 9, the second target is disposed at a position opposite to a portion of the second cooling main roller 32 contacting the film 9, during operation of the device, the magnetron sputtering coating component ionizes an inert gas, then ions formed after the ionization of the inert gas are attracted to the target 52 by magnetic force, and metal on the target 52 is impacted and sputtered onto the film 9 to complete the magnetron sputtering coating
The film material 9 can bypass the second cooling main roller 32 and contact the second cooling main roller 32 by wrapping angles after coating the first surface of the film material 9 through the first coating component, and the second coating component is arranged at the opposite position of the contact part of the second cooling main roller 32 and the film material 9 and is used for coating the second surface of the film material 9. Wherein, the first surface of the film material 9 is coated by the first coating component, the second surface of the film material 9 is coated by the second coating component, and the film material 9 is coated on two surfaces.
In addition, the vacuum coating cavity 1 is internally provided with a steering roller 6, along the flowing direction of the film 9, the steering roller 6 is arranged between the first cooling main roller 31 and the second cooling main roller 32, the film 9 can bypass the steering roller 6 to steer the film and bypass the second cooling main roller 32 after flowing out from the first cooling main roller 31, and the steering roller 6 can steer the film 9, so that the second coating component can conveniently coat the film on the second surface of the film 9.
While the preferred embodiment of the present utility model has been described in detail, the present utility model is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model, and the equivalent modifications or substitutions are included in the scope of the present utility model as defined in the appended claims.
Claims (11)
1. A coating apparatus, characterized in that: including vacuum coating cavity (1), vacuum coating cavity (1) inside is provided with unreel device (21), first cooling main roll (31), first coating film subassembly, visual detection subassembly (4) and coiling mechanism (22), unreel device (21) are used for letting out film material (9) that need coating film, can bypass first cooling main roll (31) and contact with first cooling main roll (31) wrap angle after film material (9) is let out from unreeling device (21), first coating film subassembly sets up in the opposite position of the part of first cooling main roll (31) and film material (9) contact and is used for carrying out the coating film to the first face of film material (9), coiling mechanism (22) are used for film material (9) after the rolling coating film, visual detection subassembly (4) set up be close to the position of coiling mechanism (22) and be used for carrying out visual detection work to film material (9) after the coating film.
2. A coating apparatus according to claim 1, wherein: the visual detection assembly (4) comprises a CCD rack, a CCD camera and a light source, wherein the CCD camera and the light source are arranged on the CCD rack.
3. A coating apparatus according to claim 1, wherein: the visual detection assembly (4) further comprises a two-dimensional code printing device, and the two-dimensional code printing device can manufacture the two-dimensional code according to the film plating condition detected by the visual detection assembly (4) in a certain range on the film material (9) and print the two-dimensional code on the preset position of the film material (9) in the corresponding range.
4. A coating apparatus according to claim 1, wherein: the visual inspection assembly (4) is externally coated with a cooling device, and the cooling device comprises at least one of a refrigerant pipe and a metal heat radiating piece.
5. A coating apparatus according to claim 1, wherein: the vacuum coating cavity (1) is internally provided with a second cooling main roller (32) and a second coating component, the film material (9) can bypass the second cooling main roller (32) and contact with the wrap angle of the second cooling main roller (32) after coating the first surface of the film material through the first coating component, and the second coating component is arranged at the opposite position of the contact part of the second cooling main roller (32) and the film material (9) and is used for coating the second surface of the film material (9).
6. The plating apparatus according to claim 5, wherein: the first coating component and the second coating component are all vapor plating coating components.
7. The plating apparatus according to claim 6, wherein: the evaporation coating assembly comprises an evaporation boat or a crucible (51), and the evaporation boat or the crucible (51) is arranged at the position opposite to the contact part of the first cooling main roller (31) and the second cooling main roller (32) with the film material (9).
8. The plating apparatus according to claim 5, wherein: the first coating component and the second coating component are magnetron sputtering coating components.
9. The plating apparatus according to claim 8, wherein: the magnetron sputtering coating assembly comprises a magnetron sputtering device and a target (52), the target (52) comprises a first target and a second target, the first target is arranged at the opposite position of the contact part of the first cooling main roller (31) and the film (9), and the second target is arranged at the opposite position of the contact part of the second cooling main roller (32) and the film (9).
10. The plating apparatus according to claim 5, wherein: the vacuum coating cavity (1) is internally provided with a steering roller (6), the steering roller (6) is arranged between the first cooling main roller (31) and the second cooling main roller (32) along the flowing direction of the film material (9), and the film material (9) can bypass the steering roller (6) to steer the film material and bypass the second cooling main roller (32) after flowing out of the first cooling main roller (31).
11. A coating apparatus according to claim 1, wherein: at least one of a passing roller, a tension roller and a flattening roller is further arranged in the vacuum coating cavity (1), and the visual detection assembly (4) is arranged between the winding device (22) and the passing roller, the tension roller or the flattening roller which is nearest to the winding device (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320879814.1U CN219772247U (en) | 2023-04-18 | 2023-04-18 | Coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320879814.1U CN219772247U (en) | 2023-04-18 | 2023-04-18 | Coating equipment |
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| Publication Number | Publication Date |
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| CN219772247U true CN219772247U (en) | 2023-09-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320879814.1U Active CN219772247U (en) | 2023-04-18 | 2023-04-18 | Coating equipment |
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| Country | Link |
|---|---|
| CN (1) | CN219772247U (en) |
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