CN219761169U - Annular light source suitable for wafer cutting machine - Google Patents
Annular light source suitable for wafer cutting machine Download PDFInfo
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- CN219761169U CN219761169U CN202320358689.XU CN202320358689U CN219761169U CN 219761169 U CN219761169 U CN 219761169U CN 202320358689 U CN202320358689 U CN 202320358689U CN 219761169 U CN219761169 U CN 219761169U
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- annular light
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- 239000011324 bead Substances 0.000 claims abstract description 14
- 239000011049 pearl Substances 0.000 claims description 8
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 abstract description 4
- 230000001502 supplementing effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 238000011179 visual inspection Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000013589 supplement Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003909 pattern recognition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The utility model discloses an annular light source suitable for a wafer cutting machine, which belongs to the field of visual inspection lighting systems and comprises an industrial camera, wherein the head of the industrial camera is connected with a lens, a direct light source is arranged on the side of the lens, an annular light source is also arranged at the front end of the lens, an annular lamp holder is arranged in the annular light source, and twelve groups of LED lamp beads are uniformly arranged on the surface of the annular lamp holder in a fan shape. The LED lamp beads are divided into twelve groups, and the vertical six groups and the horizontal six groups are independently controlled, so that the light angle is conveniently controlled, the polarized light supplementing method is formed, the image (especially the cutting marks and the cutting channels) identification capability is enhanced, the polarized light angle is conveniently adjusted according to actual requirements through flexible control of the LED lamp beads, the cutting mark identification is enhanced, and the accuracy of the cutting mark inspection is improved.
Description
Technical Field
The utility model relates to the field of visual detection illumination systems, in particular to an annular light source suitable for a wafer cutting machine.
Background
A wafer saw (also called dicing saw) vision system generally uses image pixel binarization to identify images, and generally has two purposes, namely, image recognition (pattern recognition) and kerf inspection (Kerfchecking).
In the image recognition state, since the planar pattern is mostly recognized only simply and the wafer surface is generally dry, it is generally illuminated only with a direct light source, and it is occasionally necessary to perform appropriate amount of light supplement with a ring light source. In the state of inspecting the cut marks, the cut marks of the object to be inspected are not simple plane patterns, and the surface of the wafer and the inside of the cut marks may have cutting water residues, and the reflection of the surface of the wafer has a certain interference effect on the judgment of the cut marks, so that only a direct light source is not necessarily sufficient, and the annular light source is often required to supplement light for matching at the time. However, if a complete light field is formed around the target object by the annular light source, the light rays reflected back to the lens can generate halation effect on the image in the lens, so that the system images the cut marks, the boundary of the image is still not obvious, or the residual water in the cut marks also reflects the light rays back, so that the inside and outside of the cut marks are easily confused, and the judgment is affected.
Disclosure of Invention
The utility model mainly aims to provide an annular light source suitable for a wafer cutting machine, which can effectively solve the problems in the background art.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
the utility model provides an annular light source suitable for wafer cutting machine, includes industrial camera, a camera lens has been installed in industrial camera's head connection, a direct light source is installed to the camera lens side, and an annular light source has still been installed to the front end of camera lens, the inside annular lamp stand that is equipped with of annular light source, twelve groups of LED lamp pearls have been evenly arranged to the surface of annular lamp stand in the fan-shape.
Preferably, a circular light source housing is arranged outside the annular light source, the head of the lens is vertically inserted into the center of the light source housing and is fixedly installed with the light source housing, one side of the light source housing is also provided with a connector, and the connector is used for electrically connecting the annular lamp holder with an external control system.
Preferably, the center of the annular lamp holder is the center of the target object, each group of LED lamp beads are located in the radial direction, and the included angle between two adjacent groups is 30 degrees.
Preferably, each group of LED lamp beads comprises two lamp beads, the upper three groups and the lower three groups of the twelve groups of LED lamp beads are controlled by one switch, the left three groups and the right three groups are controlled by one switch, and the two switches are mutually independent.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, the LED lamp beads are divided into twelve groups, each group is provided with two lamp beads, and the two groups are divided into six vertical groups and six horizontal groups for independent control, so that the light angle is conveniently controlled, and a polarized light supplementing method is formed, the image (especially the cutting marks and the cutting channels) identification capability is enhanced, the polarized light angle is conveniently adjusted according to actual requirements through flexible control of the LED lamp beads, and therefore the cutting mark identification is enhanced, and the accuracy of the cutting mark inspection is improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a visual inspection system of a dicing saw according to the present utility model;
FIG. 2 is a schematic view of the ring light source of the present utility model;
FIG. 3 is a schematic diagram of a full-lit illumination of an LED lamp bead according to the present utility model;
FIG. 4 is a schematic view of a partial lighting illumination of an LED lamp according to the present utility model;
fig. 5 is a schematic diagram of partial lighting of an LED lamp according to the present utility model.
In the figure: 1. an industrial camera; 2. a lens; 3. a direct light source; 4. an annular light source; 5. a joint; 6. a light source housing; 7. an annular lamp holder; 8. LED lamp beads.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
As shown in fig. 1-2, an annular light source suitable for a wafer cutting machine comprises an industrial camera 1, wherein a lens 2 is installed at the head of the industrial camera 1 in a connecting way, a direct light source 3 is installed at the side of the lens 2, an annular light source 4 is also installed at the front end of the lens 2, a circular light source housing 6 is arranged outside the annular light source 4, the head of the lens 2 is vertically inserted into the center of the light source housing 6 and fixedly installed with the light source housing 6, a connector 5 is further arranged at one side of the light source housing 6, and the connector 5 electrically connects an annular lamp holder 7 with an external control system.
The inside annular lamp stand 7 that is equipped with of annular light source 4, the surface of annular lamp stand 7 is fan-shaped twelve groups of LED lamp pearls 8 of evenly having arranged, and the centre of a circle of annular lamp stand 7 is the center of target object, and every group of LED lamp pearls 8 all are located the footpath, and the contained angle between two adjacent groups is 30, and three groups on the vertical in twelve groups of LED lamp pearls adopt a switch control with three groups down, and three groups on the left side of horizontal adopt a switch control with three groups on the right side, two way switches mutually independent.
Example 1
As shown in fig. 3, based on the above-described hardware structure, twelve groups of LED beads 8 on the whole annular lamp holder 7 are all lighted, a circle of bright field is formed around the target object, and light supplementing can be assisted in plane recognition, which is a common basic mode.
Example 2
As shown in fig. 4, based on the above-described hardware structure, light is supplemented only in the horizontal direction, the horizontal line is used as a base line, the target object is used as a center, the horizontal line is offset by 30 ° and the upper and lower directions respectively, and light is supplemented in six directions, so that a horizontal polarized light mode is formed, because the diffuse reflection of light in the vertical direction is inconsistent, the identification of non-planar images in the vertical direction can be enhanced, and if the cutting direction of the dicing saw is in the vertical direction, the identification of the cut marks can be enhanced by using the light control mode, and the accuracy of the cut mark inspection is improved.
Example 3
As shown in fig. 5, based on the above-described hardware structure, light is supplemented only in the vertical direction, the vertical line is used as a base line, the target object is used as the center of a circle, the vertical line and the left and right directions are respectively biased by 30 °, and light is supplemented in six directions, so that a vertical polarized light mode is formed, and the same principle is adopted.
It should be noted that, in some more special occasions, because of the flexible lamp control mode, we can use the different brightness of the horizontal direction and the vertical direction, and the cooperation of the direct light source 3, so as to achieve various lighting effects required by us.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (3)
1. An annular light source suitable for wafer cutting machine, its characterized in that: including industry camera (1), a camera lens (2) has been installed in the head connection of industry camera (1), a direct light source (3) is installed to camera lens (2) side, and still installs an annular light source (4) in the front end of camera lens (2), annular light source (4) inside is equipped with annular lamp stand (7), twelve sets of LED lamp pearl (8) have been evenly arranged to the surface of annular lamp stand (7) in the fan-shape, and every set of LED lamp pearl (8) all includes two lamp pearls, and three sets of switch control all the way in twelve sets of LED lamp pearl (8) and three sets of adoption all the way down, and three sets of switch control all the way in the left and three sets of adoption of right, two way switch mutual independence.
2. An annular light source for a wafer cutter as defined in claim 1, wherein: the outside of annular light source (4) is equipped with a circular shape light source shell (6), the centre of a circle department of the perpendicular insertion light source shell (6) of head of camera lens (2) to with light source shell (6) fixed mounting, one side of light source shell (6) still is equipped with one and connects (5), connect (5) with annular lamp stand (7) and external control system electric connection.
3. An annular light source for a wafer cutter as defined in claim 1, wherein: the center of the annular lamp holder (7) is the center of the target object, each group of LED lamp beads (8) are positioned in the radial direction, and the included angle between two adjacent groups is 30 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320358689.XU CN219761169U (en) | 2023-03-02 | 2023-03-02 | Annular light source suitable for wafer cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320358689.XU CN219761169U (en) | 2023-03-02 | 2023-03-02 | Annular light source suitable for wafer cutting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219761169U true CN219761169U (en) | 2023-09-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320358689.XU Active CN219761169U (en) | 2023-03-02 | 2023-03-02 | Annular light source suitable for wafer cutting machine |
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| Country | Link |
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| CN (1) | CN219761169U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117663024A (en) * | 2023-12-14 | 2024-03-08 | 苏州天准科技股份有限公司 | Combined light source and imaging system for chip mounter |
-
2023
- 2023-03-02 CN CN202320358689.XU patent/CN219761169U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117663024A (en) * | 2023-12-14 | 2024-03-08 | 苏州天准科技股份有限公司 | Combined light source and imaging system for chip mounter |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 518000 Room 501, Building 2, Senyang Electronic Science and Technology Park, Guangming Gaoxin Park, Tianliao Community, Yutang Street, Guangming District, Shenzhen, Guangdong Patentee after: Shenzhen Zhisai Precision Equipment Co.,Ltd. Country or region after: China Address before: 518000 Room 501, Building 2, Senyang Electronic Science and Technology Park, Guangming Gaoxin Park, Tianliao Community, Yutang Street, Guangming District, Shenzhen, Guangdong Patentee before: Shenzhen Zhisai Robot Co.,Ltd. Country or region before: China |
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| CP03 | Change of name, title or address |