CN219759552U - Machine calibration system - Google Patents

Abstract

The embodiment of the utility model discloses a machine calibration system, which relates to the technical field of semiconductors, wherein a machine comprises a base, a fixed part and at least one adjustable part, the fixed part and the adjustable part are connected to the base, the axes of the fixed part and the adjustable part are parallel, the distance between the center of the fixed part and the base is fixed, and the distance between the center of the adjustable part and the base is adjustable; the calibration system comprises a calibration device, the calibration device comprises a positioning part and a stopping part, a first end of the stopping part is fixedly connected with the positioning part, and a second end of the stopping part is provided with a stopping structure; the positioning part is used for positioning the calibration device to a calibration position, when the calibration device is positioned at the calibration position, the distance between the stop structure and the center of the fixed part in the axial direction of the fixed part is equal to half of the axial dimension of the adjustable part, and the stop structure can be projected onto the adjustable part along the axial direction of the adjustable part. The utility model can improve the adjusting efficiency of the adjustable component and ensure the adjusting accuracy of the adjustable component.

Description

Machine calibration system

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a machine calibration system.

Background

In the process of manufacturing semiconductor devices, a CVD tool (Producer GT Chamber) is required to rotate a uv light source by a belt rotating device during film formation to uniformly irradiate uv light on a wafer.

A typical belt turning device includes an adjustable bearing that supports a driven pulley shaft and a fixed bearing that supports a driving pulley shaft. When the equipment is installed or after corresponding work, the height of the bearing needs to be adjusted when the machine cavity is restored, so that the belt always keeps at the center of the bearing when rotating, and machine alarming and part loss caused by extra abrasion due to position deviation are avoided. The bearing position is mainly determined through naked eyes when the bearing position is adjusted at the present stage, the bearing position possibly needs to be adjusted for many times due to the influence of the watching angle and the subjective consciousness of individuals, and the adjusted position has deviation due to the fact that the belt can not be quantized, and extra loss is caused by friction of the belt on the gear teeth of the rotary wheel or the edge of the bearing during rotation.

Therefore, it is necessary to provide a machine calibration system to improve the adjustment efficiency and the adjustment accuracy of the bearing position.

Disclosure of Invention

In order to solve the technical problems, the utility model provides a machine calibration system, wherein the machine comprises a base, a fixed part and at least one adjustable part, the fixed part and the adjustable part are connected to the base, the axes of the fixed part and the adjustable part are parallel, the distance between the center of the fixed part and the base is fixed, and the distance between the center of the adjustable part and the base is adjustable;

the calibration system comprises a calibration device, wherein the calibration device comprises a positioning part and a stopping part, the positioning part is provided with a positioning structure, a first end of the stopping part is fixedly connected with the positioning part, and a second end of the stopping part is provided with a stopping structure;

the positioning structure of the positioning part positions the calibrating device to a calibrating position, when the calibrating device is positioned at the calibrating position, the distance between the stop structure and the center of the fixed part in the axial direction of the fixed part is equal to half of the axial dimension of the adjustable part, and the stop structure can be projected onto the adjustable part along the axial direction of the adjustable part.

In one embodiment of the machine calibration system, the fixing component and the adjustable component are both located below the base, the lower surface of the positioning portion forms the positioning structure, and the lower surface of the positioning portion contacts with the upper surface of the base, so as to position the calibration device to the calibration position.

In one embodiment of the machine calibration system, the center of the adjustable component is lower than the center of the fixed component, and when the calibration device is in the calibration position, the lower surface of the stop portion is higher than the upper surface of the adjustable component, and the lower surface of the stop portion forms the stop structure.

In one embodiment of the machine calibration system, the center of the adjustable component is higher than the center of the fixed component, when the calibration device is located at the calibration position, the upper surface of the stop portion is lower than the lower surface of the adjustable component, and the upper surface of the stop portion forms the stop structure.

In one embodiment of the machine calibration system, gaskets are arranged on the surfaces, which are contacted with the machine, of the calibration device.

In one embodiment of the machine calibration system, the stop portion has a baffle protruding from the second end surface, and when the calibration device is located at the calibration position, the baffle is located above the adjustable component and the lower surface of the baffle forms the stop structure, or the baffle is located below the adjustable component and the upper surface of the baffle forms the stop structure.

In one embodiment of the machine calibration system, the stop portion includes two baffles, a first baffle and a second baffle, when the calibration device is located at the calibration position, the first baffle is located above the adjustable component and the lower surface of the baffle forms the stop structure, the second baffle is located below the adjustable component and the upper surface of the baffle forms the stop structure, and a distance between the lower surface of the first baffle and the upper surface of the second baffle is equal to an axial dimension of the adjustable component.

In one embodiment of the machine calibration system, the baffle includes an open slot, the adjustable member is connected to the base by a shaft, and an opening size of the open slot is greater than a diameter of the shaft.

In one embodiment of the machine calibration system, the calibration system includes an actuating device, the actuating device is connected with the calibration device, and the actuating device drives the calibration device to move to the calibration position.

In one embodiment of the machine calibration system, the calibration system includes a control device, and the control device is electrically connected with the action device and controls the action device to drive the calibration device to reciprocate between a storage position and the calibration position. When the calibrating device is positioned at the calibrating position, the stop structure can be projected onto the adjustable component along the axial direction of the adjustable component, so that the adjustable component can be abutted against the stop structure of the calibrating device by axially moving the adjustable component. Since the distance between the stop structure and the center of the fixed part in the axial direction of the fixed part is equal to half of the axial dimension of the adjustable part when the calibrating device is positioned at the calibrating position, when the adjustable part is in interference with the stop structure of the calibrating device, the center of the adjustable part is exactly flush with the center of the fixed part.

Therefore, when the position of the adjustable component is adjusted by the calibrating device, the adjustable component is known to be adjusted in place when the adjustable component is in conflict with the stop structure of the calibrating device positioned at the calibrating position, and whether the adjustable component is adjusted in place can be known without repeated observation by naked eyes, so that the adjusting efficiency is improved. Moreover, the adjustment result is not influenced by the observation deviation of operators, and the center of the adjustable component is enabled to be flush with the center of the fixed component only by abutting the adjustable component against the stop structure of the calibration device positioned at the calibration position, so that the adjustment accuracy is ensured.

Drawings

FIG. 1 is a schematic view of a CVD apparatus;

FIG. 2 is a schematic diagram of a first embodiment of a calibration system provided by the present utility model;

FIG. 3 is a schematic view of the calibration system of the first embodiment in a calibration position;

FIG. 4 is a graph of the position of the adjustable bearing in position relative to a calibration system in a calibration position;

FIG. 5 is a schematic diagram of a second embodiment of a calibration system according to the present utility model in a calibration position;

FIG. 6 is a schematic diagram of a third embodiment of a calibration system according to the present utility model in a calibration position;

FIG. 7 is a schematic diagram of a third embodiment of a calibration system according to the present utility model;

FIG. 8 is a top view of one embodiment of a baffle of the calibration system provided by the present utility model;

fig. 9 is a schematic diagram of a fourth embodiment of the calibration system provided by the present utility model.

Fig. 10 is a schematic diagram of a fifth embodiment of the calibration system provided by the present utility model.

The reference numerals are explained as follows:

1a calibration system, 11a calibration device, 11a positioning parts, 11B stopping parts, A baffles, A1 first baffles, A2 second baffles, B gaskets, 12 action devices, 12a vertical moving structures and 12B horizontal moving structures;

2CVD machine, 21 rotating base, 22 adjustable bearing, 23 fixed bearing.

Detailed Description

In order to make the technical scheme of the present utility model better understood by those skilled in the art, the present utility model will be further described in detail with reference to the accompanying drawings and the detailed description.

A typical machine comprises a base, a fixing part and at least one adjustable part, wherein the fixing part and the adjustable part are connected to the base, the axes of the fixing part and the adjustable part are parallel, the distance between the center of the fixing part and the base is fixed, and the distance between the center of the adjustable part and the base is adjustable.

In one embodiment (see fig. 1), the machine is a CVD machine 2 (Producer GT Chamber), the base of the CVD machine 2 is a rotating base 21, the stationary components of the CVD machine 2 are stationary bearings 23, and the adjustable components are adjustable bearings 22. For the convenience of understanding, the CVD machine 2 will be described as an example.

As shown in fig. 2, the calibration system 1 provided by the utility model comprises a calibration device 11, and the position of the adjustable bearing 22 of the CVD machine 2 can be adjusted by means of the calibration device 11, so that the center of the adjustable bearing 22 is level with the center of the fixed bearing 23.

As shown in fig. 2, the alignment device 11 includes a positioning portion 11a and a stopper portion 11b, the positioning portion 11a being provided with a positioning structure (a lower surface of the positioning portion 11a in fig. 2). The first end of the stopper 11b is connected to the positioning portion 11a, and the second end of the stopper 11b is provided with a stopper structure (the lower surface of the stopper 11b is stopped in fig. 2).

The positioning structure of the positioning portion 11a is used for positioning the calibration device 11 to the calibration position, and fig. 3 shows a state in which the calibration device 11 is located at the calibration position.

As shown in fig. 3, when the calibrating device 11 is in the calibrating position, the distance (M in the drawing) between the stop structure and the center of the fixed bearing 23 in the axial direction of the fixed bearing 23 is equal to half the axial dimension (2M in the drawing) of the adjustable bearing 22.

Furthermore, the stop structure can be projected onto the adjustable component in the axial direction of the adjustable bearing 22 when the calibration device 11 is in the calibration position, i.e. the stop structure at least partially overlaps with the projection of the adjustable bearing 22 onto a plane perpendicular to the axis of the adjustable bearing 22.

The adjustment of the position of the adjustable bearing 22 by means of the calibration device 11 is: the positioning portion 11a is used to position the calibration device 11 to a calibration position, and then the adjustable bearing 22 is driven to axially move so that the adjustable bearing 22 gradually approaches to the stop structure of the calibration device 11 until the end face of the adjustable bearing 22 abuts against the stop structure of the calibration device 11 (see fig. 4), and the center of the adjustable bearing 22 is exactly flush with the center of the fixed bearing 23 during abutting.

Since the stop structure can be projected onto the adjustable member in the axial direction of the adjustable member when the alignment device 11 is in the alignment position, axially moving the adjustable bearing 22 can cause the adjustable bearing 22 to interfere with the stop structure of the alignment device 11.

Since the distance between the stop structure and the center of the fixed bearing 23 in the axial direction of the fixed bearing 23 is equal to half the axial dimension of the adjustable bearing 22 when the calibration device 11 is in the calibration position, the center of the adjustable bearing 22 is exactly flush with the center of the fixed bearing 23 when the end surface of the adjustable bearing 22 abuts against the stop structure of the calibration device 11.

Therefore, when the position of the adjustable bearing 22 is adjusted by the calibrating device 11, when the end surface of the adjustable bearing 22 is abutted against the stop structure of the calibrating device 11 positioned at the calibrating position, the adjustable bearing 22 is known to be adjusted in place, and whether the adjustable bearing 22 is adjusted in place can be known without repeated observation by naked eyes, so that the adjusting efficiency is improved. Moreover, the adjustment result is not affected by the observation deviation of the operator, so long as the end face of the adjustable bearing 22 is in conflict with the stop structure of the calibrating device 11 positioned at the calibrating position, the center of the adjustable bearing 22 is ensured to be level with the center of the fixed bearing 23, and the adjustment accuracy is ensured.

In one embodiment (see fig. 3), the adjustable bearing 22 and the fixed bearing 23 are located below the rotating base 21, and the lower surface of the positioning portion 11a forms a positioning structure. The lower surface of the positioning portion 11a contacts the upper surface of the rotation base 21, and the alignment device 11 is positioned to the alignment position by the contact relationship between the two.

Since the rotating base 21 is an inherent part of the machine, and the distance between the upper surface of the rotating base 21 and the center of the fixed bearing 23 is fixed, when the positioning structure of the positioning portion 11a positions the calibration device 11 by being in contact with the upper surface of the rotating base 21, the distance between the positioning structure of the positioning portion 11a of the calibration device 11 and the stopper structure of the stopper portion 11b can be calculated from the distance between the upper surface of the rotating base 21 and the center of the fixed bearing 23, whereby the calibration device 11 is manufactured, and thus the size of the calibration device 11 can be determined from the inherent parameters of the machine. Specifically:

if the calibration device 11 is in the calibration position, the positioning structure of the positioning portion 11a and the stop structure of the stop portion 11b are both located on the same side of the center of the fixed bearing 23 (e.g. in fig. 3, both are located on the upper side of the center of the fixed bearing 23), then the distance X between the positioning structure and the stop structure is equal to H minus M, where M is half of the axial dimension of the adjustable bearing 22, H is the distance between the center of the fixed bearing 23 and the upper surface of the rotating base 21, and M and H are the intrinsic parameters of the machine.

If the calibration device 11 is in the calibration position, the positioning structure of the positioning portion 11a and the stop structure of the stop portion 11b are respectively located at two sides of the center of the fixed bearing 23 (for example, in fig. 5, the positioning structure of the positioning portion 11a is located at the upper center of the fixed bearing 23, and the stop structure of the stop portion 11b is located at the lower center of the fixed bearing 23), then the distance X between the positioning structure and the stop structure is equal to H plus M, where M is half of the axial dimension of the adjustable bearing 22, H is the distance between the center of the fixed bearing 23 and the upper surface of the rotating base 21, and M and H are both intrinsic parameters of the machine.

Of course, the positioning structure of the positioning portion 11a is not limited to the positioning by contact with the upper surface of the rotating base 21, and may be the positioning by contact with other surfaces of the rotating base 21, and may be the positioning by contact with any fixed member (i.e., any member fixed in position with respect to the fixed bearing 23). The positioning portion 11a is not limited to the positioning by surface contact with the fixing member, and may be positioned by point contact or line contact with the fixing member.

In one embodiment (see fig. 3), when the positioning structure of the positioning portion 11a is in contact with the upper surface of the rotation base 21, the side wall surface of the first end of the stopper portion 11b is in contact with the side wall surface of the rotation base 21, so that the positioning reliability of the alignment device 11 is high.

In one embodiment (see fig. 3), the center of the adjustable bearing 22 is lower than the center of the fixed bearing 23. When the calibrating device 11 is in the calibrating position, the lower surface of the stop portion 11b is higher than the upper end surface of the adjustable bearing 22, and the lower surface of the stop portion 11b forms a stop structure. In this case, the adjustable bearing 22 is moved upward until the upper end surface of the adjustable bearing 22 abuts against the lower surface of the stopper 11b during adjustment.

In one embodiment (see fig. 5), the center of the adjustable bearing 22 is higher than the center of the fixed bearing 23. When the calibrating device 11 is in the calibrating position, the upper surface of the stop portion 11b is lower than the lower end surface of the adjustable component, and the upper surface of the stop portion 11b forms a stop structure. In this case, the adjustable bearing 22 is moved downward until the lower end surface of the adjustable bearing 22 abuts against the lower surface of the stopper 11b at the time of adjustment.

In one embodiment (see fig. 5), the stop 11b has a baffle a protruding from its second end surface. When the calibrating device 11 is in the calibrating position, the baffle A is positioned below the adjustable bearing 22 and the upper surface of the baffle A forms a stop structure. Alternatively, when the calibrating device 11 is in the calibrating position, the baffle a is located above the adjustable bearing 22 and the lower surface of the baffle a forms a stop structure.

The stop structure is formed by the upper surface or the lower surface of the baffle plate A protruding from the second end of the stop part 11b, and the formed stop structure can be abutted against the upper end surface or the lower end surface of the adjustable bearing 22 in a larger area, so that the stop effect is better, and the adjustment accuracy is more favorably ensured.

In one embodiment (see fig. 6), the stop portion 11b is provided with two above-mentioned baffles a, a first baffle A1 and a second baffle A2, respectively. When the calibrating device 11 is in the calibrating position, the first baffle A1 is positioned above the adjustable bearing 22 and the lower surface of the first baffle A1 forms a stop structure, the second baffle A2 is positioned below the adjustable bearing 22 and the upper surface of the second baffle A2 forms a stop structure. The distance between the lower surface of the first shutter A1 and the upper surface of the second shutter A2 is equal to the axial dimension (2M in the figure) of the adjustable member. In this way, the adjustable bearing 22 can be positionally adjusted by means of the calibration device 11, whether it is centered above or below the center of the fixed bearing 23.

Specifically, the baffle a may be a flat plate (see fig. 6) or a stepped plate (see fig. 7) with steps. If a stepped plate is used, the maximum distance between the lower surface of the first shutter a and the upper surface of the second shutter a is equal to the axial dimension (2M in the drawing) of the adjustable member.

In one embodiment (see fig. 8), the baffle a is provided with an open groove, the adjustable bearing 22 is connected to the rotating base 21 through a rotating shaft, and the opening size of the open groove is larger than the diameter of the rotating shaft of the adjustable bearing 22, so that the open groove can be sleeved on the periphery of the rotating shaft of the adjustable bearing 22, thereby avoiding the rotating shaft of the adjustable bearing 22 and preventing the influence on the axial movement of the adjustable bearing 22. Specifically, the shape of the open slot may be any shape such as a rectangle, a circular arc, or the like that can be sleeved on the outer periphery of the rotating shaft of the adjustable bearing 22. Through setting up the baffle that has the open slot, can increase the area of contact between backstop portion and the adjustable bearing, avoid because area of contact is too little, in carrying out the adjustment process, lead to contact pressure too big, damage the surface of adjustable bearing.

In one embodiment, the stop portion may further include a stop ring protruding from the second end surface of the stop portion, where the stop ring may be in a shape of "C" or "Y", so long as the opening size of the stop ring is ensured to be greater than the diameter of the rotating shaft of the adjustable bearing 22, and thus the stop ring may be sleeved on the outer periphery of the rotating shaft of the adjustable bearing 22, so as to avoid the rotating shaft of the adjustable bearing 22 and prevent the influence on the axial movement of the adjustable bearing 22. Through the setting of backing ring, also can increase the area of contact between backstop portion and the adjustable bearing, reduce the contact pressure in the adjustment process, avoid damaging the surface of adjustable bearing.

In one embodiment (see fig. 5), the surfaces of the calibration device 11 that contact the machine are each provided with a pad B. The surface of the calibration device 11 that contacts the machine includes a surface that contacts the rotating base 21 of the machine (e.g., the lower surface of the positioning portion 11a in fig. 5) and a surface that contacts the adjustable bearing 22 of the machine (e.g., the upper surface of the shutter a in fig. 5).

The provision of the spacer B on the surface of the alignment device 11 in contact with the base of the machine can increase the friction between the alignment device 11 and the base so that the alignment device 11 can be more firmly positioned in the alignment position. The pad B is arranged on the contact surface of the calibration device 11 and the adjustable bearing 22 of the machine table, so that the problem of damage caused by collision of the adjustable bearing 22 with the calibration device 11 when the adjustable bearing 22 is adjusted in place can be avoided. Further, as shown in fig. 9 or 10, the calibration system 1 may be further provided with an actuation device 12. The actuating device 12 is connected to the calibration device 11, so that the calibration device 11 is moved to and from the storage position and the calibration position by the actuating device 12. The actuation means 12 may be mobile and/or rotary.

In one embodiment (see fig. 9), the actuating device 12 includes a vertical moving structure 12a and a horizontal moving structure 12b, wherein a fixed portion of the vertical moving structure 12a is fixed on a vertical side wall of the machine, a movable portion of the vertical moving structure 12a is vertically movable up and down with respect to the fixed portion, the fixed portion of the horizontal moving structure 12b is connected with the movable portion of the vertical moving structure 12a, the movable portion of the horizontal moving structure 12b is horizontally movable left and right with respect to the fixed portion thereof, and the movable portion of the horizontal moving structure 12b is connected with the calibrating device 11.

In one embodiment (see fig. 10), the actuating device 12 includes a vertical moving structure 12a and a horizontal moving structure 12b, a fixed portion of the horizontal moving structure 12b is fixed above a top wall of the machine, a movable portion of the horizontal moving structure 12b is horizontally movable left and right with respect to the fixed portion thereof, the fixed portion of the vertical moving structure 12a is connected with the movable portion of the horizontal moving structure 12b, the movable portion of the vertical moving structure 12a is vertically movable up and down with respect to the fixed portion, and the movable portion of the vertical moving structure 12a is connected with the calibrating device 11.

The vertical moving structure 12a and the horizontal moving structure 12b may be a slide rail pair, a telescopic rod, or the like. The horizontal moving structure 12b may be linear or circular arc, and may be disposed according to the internal space of the actual machine.

Further, the calibration system 1 may be provided with a control device (not shown). The control device is electrically connected with the actuating device 12, and controls the actuating device 12 to actuate so as to drive the calibration device 11 to move to and from the storage position and the calibration position. The storage position can be an idle corner position inside the machine, and when the machine works normally, the calibrating device is positioned at the storage position, so that the normal work of the machine is prevented from being influenced. Specifically, the control device can be linked with the controller of the machine, and when the machine finishes one operation task, the control device automatically drives the action device 12 to drive the calibration device 11 to reach the calibration position. In addition, the control device can also set a fixed calibration period, for example, after a certain operation batch of the machine is completed, the control device automatically drives the action device to drive the calibration device to move to the calibration position, and the working position of the adjustable component is adjusted, so that the actual production efficiency of the machine is better considered.

Further, as shown in fig. 3-6, the number of the adjustable bearings 22 may be plural, for example, may be 2, and they are respectively located at two sides of the fixed bearing 23; the number of the calibration devices 11 can be 1, the control device can control the action device 12 to move one calibration device 11 to the vicinity of different adjustable bearings 22 respectively, and the position calibration of a plurality of adjustable components is realized by using one calibration device 11, so that the component structure inside the machine can be simplified, and the installation of each component is facilitated.

In another possible implementation manner, the number of the calibration devices 11 may be set to be the same as the number of the adjustable components, each calibration device is correspondingly provided with a separate actuating device 12, the adjustment and control of the multiple actuating devices 12 are realized through one control device, and the calibration device 11 can be independently utilized to realize the position calibration of each adjustable component, so that the problem of the working positions of all adjustable components caused when the calibration device has a problem under the condition of only one calibration device can be avoided. And a plurality of calibrating devices can work simultaneously, so the design can once only adjust the axial position of two at least adjustable bearings, more does benefit to and promotes adjustment efficiency.

The foregoing has outlined rather broadly the principles and embodiments of the present utility model in order that the detailed description of the utility model may be better understood, and in order that the present utility model may be better understood. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the utility model can be made without departing from the principles of the utility model and these modifications and adaptations are intended to be within the scope of the utility model as defined in the following claims.

Claims (10)

1. The machine calibration system is characterized by comprising a base, a fixed part and at least one adjustable part, wherein the fixed part and the adjustable part are connected to the base, the axes of the fixed part and the adjustable part are parallel, the distance between the center of the fixed part and the base is fixed, and the distance between the center of the adjustable part and the base is adjustable;

the calibration system comprises a calibration device, wherein the calibration device comprises a positioning part and a stopping part, the positioning part is provided with a positioning structure, a first end of the stopping part is fixedly connected with the positioning part, and a second end of the stopping part is provided with a stopping structure;

the positioning structure of the positioning part positions the calibrating device to a calibrating position, when the calibrating device is positioned at the calibrating position, the distance between the stop structure and the center of the fixed part in the axial direction of the fixed part is equal to half of the axial dimension of the adjustable part, and the stop structure can be projected onto the adjustable part along the axial direction of the adjustable part.

2. The machine calibration system of claim 1, wherein the fixed component and the adjustable component are both positioned below the base, a lower surface of the positioning portion forms the positioning structure, and a lower surface of the positioning portion contacts an upper surface of the base, thereby positioning the calibration device to the calibration position.

3. The machine calibration system of claim 2, wherein the center of the adjustable member is lower than the center of the fixed member, and the lower surface of the stop portion is higher than the upper surface of the adjustable member when the calibration device is in the calibration position, and the lower surface of the stop portion forms the stop structure.

4. The machine calibration system of claim 2, wherein the center of the adjustable member is higher than the center of the fixed member, and the upper surface of the stop portion is lower than the lower surface of the adjustable member when the calibration device is in the calibration position, and the upper surface of the stop portion forms the stop structure.

5. A machine calibration system according to any one of claims 1 to 4, wherein the surfaces of the calibration device in contact with the machine are each provided with a spacer.

6. The machine calibration system according to any one of claims 1-4, wherein the stop has a stop protruding from the second end surface, the stop being located above the adjustable member and a lower surface of the stop forming the stop structure when the calibration device is in the calibration position, or the stop being located below the adjustable member and an upper surface of the stop forming the stop structure.

7. The machine calibration system of claim 6, wherein the stop portion includes two baffles, a first baffle and a second baffle, the first baffle being located above the adjustable member and a lower surface of the baffle forming the stop structure, the second baffle being located below the adjustable member and an upper surface of the baffle forming the stop structure, a distance between the lower surface of the first baffle and the upper surface of the second baffle being equal to an axial dimension of the adjustable member when the calibration device is in the calibration position.

8. The machine calibration system of claim 6, wherein the baffle includes an open slot, the adjustable member is coupled to the base via a shaft, and an opening size of the open slot is greater than a diameter of the shaft.

9. The machine calibration system according to any one of claims 1-4, wherein the calibration system comprises an actuation device, the actuation device being coupled to the calibration device, the actuation device driving the calibration device to move to the calibration position.

10. The machine calibration system of claim 9, wherein the calibration system comprises a control device electrically connected to the actuation device for controlling the actuation device to move the calibration device to and from the storage position and the calibration position.