CN219731055U - Annular heater for deposition furnace - Google Patents
Annular heater for deposition furnace Download PDFInfo
- Publication number
- CN219731055U CN219731055U CN202321371959.7U CN202321371959U CN219731055U CN 219731055 U CN219731055 U CN 219731055U CN 202321371959 U CN202321371959 U CN 202321371959U CN 219731055 U CN219731055 U CN 219731055U
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- Prior art keywords
- graphite
- connecting ring
- heater
- ring
- bending plates
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Links
- 230000008021 deposition Effects 0.000 title claims abstract description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 102
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 99
- 239000010439 graphite Substances 0.000 claims abstract description 99
- 238000005452 bending Methods 0.000 claims abstract description 57
- 238000010438 heat treatment Methods 0.000 claims abstract description 56
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000000151 deposition Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Furnace Details (AREA)
Abstract
The utility model discloses an annular heater for a deposition furnace, which comprises a heating rod, an upper connecting ring, a lower connecting ring and a graphite electrode. The upper connecting ring and the lower connecting ring are respectively composed of a group of graphite bending plates which are arranged in a circumferential direction, and gaps are reserved between the graphite bending plates from head to tail; the graphite bending plate in the upper connecting ring is staggered with the graphite bending plate in the lower connecting ring; the upper end and the lower end of the heating rod are respectively fixed on the upper connecting ring and the lower connecting ring, so that the heater with the cylindrical shape is integrally formed; the graphite electrode is connected to two spaced apart graphite bending plates on the upper connecting ring. The heater comprises a plurality of parts, the parts are fixed through graphite nuts, and the size of the appearance of the heater can be adjusted according to the requirements of a thermal field, so that the heater is suitable for deposition furnaces of different specifications. Each heating rod on the heater is independent, and the graphite piece on the heater can be independently replaced after being damaged, so that the use cost can be reduced.
Description
Technical Field
The utility model relates to the field of inorganic nonmetallic material preparation equipment, in particular to an annular heater suitable for deposition furnace equipment.
Background
The chemical vapor deposition furnace consists of a deposition chamber, an air supply system and an exhaust system, and is production equipment for densifying composite materials by introducing deposition gas in a vacuum environment in a resistance heating or induction heating mode, generating cracking at high temperature and depositing the cracking gas on a workpiece. At present, the heating mode of the deposition furnace on the market mainly adopts resistance heating, the volume of a part to be deposited is increased piece by piece based on market demands, the corresponding thermal field of the deposition furnace is also gradually increased, and the size requirement on graphite raw materials is also increased by adopting an integrated heater for the deposition furnace at present. Thus, the size of the existing graphite raw materials limits the heater's size, thereby limiting the throughput of the deposition furnace. Once the integral heater is cracked, the whole heater can not be used any more, and the production cost is increased.
Disclosure of Invention
The utility model aims to: the utility model aims to solve the technical problem of providing the annular heater for the deposition furnace, aiming at the defects of the prior art, and the size of the appearance can be adjusted according to the requirements of a thermal field, so that the annular heater is suitable for deposition furnaces with different specifications.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
an annular heater for a deposition furnace comprises a heating rod, an upper connecting ring, a lower connecting ring and a graphite electrode.
The upper connecting ring and the lower connecting ring are respectively composed of a group of graphite bending plates which are arranged in a circumferential direction, and gaps are reserved between the graphite bending plates from head to tail; the graphite bending plates in the upper connecting ring and the lower connecting ring are staggered; the upper end and the lower end of the heating rod are respectively fixed on the upper connecting ring and the lower connecting ring, so that the heater with the cylindrical shape is integrally formed; the graphite electrode is connected to two spaced graphite bending plates on the upper connecting ring.
Specifically, the number of the graphite electrodes is three, and the graphite electrodes are arranged at intervals of 120 degrees in central angles; each graphite electrode is respectively connected with three graphite bending plates which are arranged at intervals on the upper connecting ring. The graphite electrode 40 is connected with an external copper electrode, so that the whole heater is heated by three-phase alternating current.
Specifically, a graphite bending plate in a lower connecting ring is correspondingly arranged at a gap between two adjacent graphite bending plates in the upper connecting ring, so that a current path of a heating rod between the upper connecting ring and the lower connecting ring is realized.
Further, two adjacent graphite bending plates in the upper connecting ring and the graphite bending plates in the lower corresponding lower connecting ring are connected with the same number of heating rods.
Further, the two ends of the heating rod are provided with external threads, and the two ends respectively penetrate into the graphite bending plates corresponding to the upper part and the lower part and are locked and fixed through the fastening nuts.
Further, the heating rods are arranged at equal intervals along each graphite bending plate.
Further, the graphite electrode is connected to the center of the outer side face of the graphite bending plate, and the two sides are divided into the same number of heating rods.
Still further, the heater further comprises a support rod connected to the graphite bending plate in which the graphite electrode is not arranged in the upper connecting ring.
Preferably, the upper connecting ring and the lower connecting ring are composed of six graphite bending plates, and each graphite bending plate is connected with six heating rods.
Specifically, the heating rod, the upper connecting ring and the lower connecting ring are all made of graphite; the supporting rod is made of carbon.
The beneficial effects are that:
the heater is mainly applied to heating of a thermal field in a deposition furnace. The heater comprises a plurality of parts, the parts are fixed through graphite nuts, and the size of the appearance of the heater can be adjusted according to the requirements of a thermal field, so that the heater is suitable for deposition furnaces of different specifications. Each heating rod on the heater is independent, and the graphite piece on the heater can be independently replaced after being damaged, so that the use cost can be reduced.
Drawings
The foregoing and/or other advantages of the utility model will become more apparent from the following detailed description of the utility model when taken in conjunction with the accompanying drawings and detailed description.
Fig. 1 is a schematic perspective view of a ring heater according to an embodiment.
Fig. 2 is a side view of the ring heater.
Fig. 3 is a top view of the ring heater.
Fig. 4 is a schematic circuit diagram of the ring heater.
Wherein each reference numeral represents:
10-heating rod; 20-an upper connecting ring; 30-a lower connecting ring; 40-graphite electrode; 50-graphite bending plates; 60-tightening the nut; 70-supporting rods.
Detailed Description
The utility model will be better understood from the following examples.
The structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the disclosure of the present utility model, and are not intended to limit the scope of the utility model, which is defined by the claims, but rather by the terms of modification, variation of proportions, or adjustment of sizes, without affecting the efficacy or achievement of the present utility model, should be understood as falling within the scope of the present utility model. Also, the terms such as "upper", "lower", "front", "rear", "middle", and the like are used herein for descriptive purposes only and are not intended to limit the scope of the utility model for which the utility model may be practiced or for which the relative relationships may be altered or modified without materially altering the technical context.
As shown in fig. 1, the ring heater for a deposition furnace includes a heating rod 10, an upper connection ring 20, a lower connection ring 30, a graphite electrode 40, and a support rod 70.
The upper connecting ring 20 and the lower connecting ring 30 are respectively composed of a group of graphite bending plates 50 which are arranged in a circumferential direction, and gaps are reserved between the graphite bending plates 50 from head to tail; the graphite bending plates 50 in the upper connecting ring 20 are staggered with the graphite bending plates 50 in the lower connecting ring 30; the heating rod 10 is a group, and the upper and lower ends thereof are respectively fixed on the upper connecting ring 20 and the lower connecting ring 30, thereby integrally forming a heater with a cylindrical shape; graphite electrode 40 is attached to two spaced apart graphite bending plates 50 on upper attachment ring 20.
The heating rod 10 is a main heating part of the heater, and the heating rod 10 is made of graphite and has high temperature resistance. The number and length of the heating rods 10 can be adjusted according to the space of the thermal field in the deposition furnace and the heating temperature.
The graphite electrodes 40 are arranged in three at intervals of 120 degrees; each graphite electrode 40 is connected to three graphite bending plates 50 spaced apart from the upper connecting ring 20. The graphite electrode 40 is connected with an external copper electrode, so that the whole heater is heated by three-phase alternating current.
The graphite bending plates 50 in the lower connecting ring 30 are correspondingly arranged at the gap between two adjacent graphite bending plates 50 in the upper connecting ring 20, so that a current path of the heating rod between the upper connecting ring and the lower connecting ring is realized.
The same number of heating rods 10 are connected between two adjacent graphite bending plates 50 in the upper connecting ring 20 and the graphite bending plates 50 in the lower corresponding lower connecting ring 30.
The two ends of the heating rod 10 are provided with external thread structures, and the two ends respectively penetrate into the upper and lower corresponding graphite bending plates 50 and lock and fix the heating rod 10 through the fastening nuts 60.
The heating rods 10 are disposed at equal intervals along each graphite bending plate 50. The graphite electrode 40 is connected to the center of the outer side surface of the graphite bending plate 50, and the same number of heating rods 10 are distributed at both sides.
The support bar 70 is connected to the graphite bending plate 50 in which the graphite electrode 40 is not disposed in the upper connection ring 20. The support rod 70 mainly plays a role in supporting the graphite bending plate 50 and the heating rod 10, and in order to ensure the strength of the support rod 70, the support rod 70 is generally made of carbon.
Referring to fig. 1 to 3, the ring heater of the present embodiment is composed of thirty-six heating rods, three graphite electrodes, three support rods, six graphite bending plates each up and down, and seventy-two fastening nuts. Wherein, the length of the heating rod 10 is 1000mm, the effective space in the heater after composition is phi 1500mm x 1000mm, the three graphite electrodes 40 are connected with an external water-cooling cable to provide three-phase alternating current, and the three support rods 70 are used for supporting the heater and the graphite bending plate 50, so that the heating rod can keep the same level and verticality. The connection mode of the heater is triangle connection, every three heating rods 10 are connected in parallel to form a group of heating bodies (the square heating body in the figure represents three heating rods connected in parallel), four groups of heating bodies are connected in series between every two electrodes to form a heating mode, as shown in figure 4, the graphite electrode 40 is connected with voltage from 0 to 40V according to heating requirements, and current from 0 to 2000A is connected, so that the temperature can be raised to 1600 ℃ and the process production requirements are met. The heating rod 10 is made of isostatic graphite, the graphite electrode 40, the graphite bending plate 50 and the fastening nut 60 are made of medium-coarse graphite, and the support rod 70 is made of carbon. The isostatic pressing material has high strength, proper resistance, difficult breakage, small medium-coarse graphite resistance, difficult heating and highest strength of carbon and carbon materials, and is used for supporting. The support rod 70 and the outer ring of the graphite electrode 40 are provided with ceramic rings for isolating contact with the metal furnace barrel and preventing conduction. The heating rod 10 and the graphite bending plate 50 are fixed by metal nuts. In the use process, if a certain heating rod 10 or a graphite bending plate 50 is damaged, the fastening nut 60 can be detached, damaged parts can be replaced, and the loss is reduced to the greatest extent, so that the use cost can be reduced.
The utility model provides a thought and a method for realizing the technical scheme, namely, a method and a way for realizing the technical scheme are numerous, the above is only a preferred embodiment of the utility model, and it should be pointed out that a person skilled in the art can make a plurality of improvements and modifications without departing from the principle of the utility model, and the improvements and the modifications are also considered as the protection scope of the utility model. The components not explicitly described in this embodiment can be implemented by using the prior art.
Claims (10)
1. An annular heater for a deposition furnace is characterized by comprising a heating rod (10), an upper connecting ring (20), a lower connecting ring (30) and a graphite electrode (40);
the upper connecting ring (20) and the lower connecting ring (30) are respectively composed of a group of graphite bending plates (50) which are arranged in a circumferential direction, and gaps are reserved between the graphite bending plates (50) from head to tail; the graphite bending plates (50) in the upper connecting ring (20) are staggered with the graphite bending plates (50) in the lower connecting ring (30); the heating rods (10) are a group, and the upper end and the lower end of the heating rods are respectively fixed on the upper connecting ring (20) and the lower connecting ring (30), so that the heater with a cylindrical shape is integrally formed; the graphite electrode (40) is connected to two spaced apart graphite bending plates (50) on the upper connecting ring (20).
2. The annular heater for a deposition furnace according to claim 1, wherein the number of graphite electrodes (40) is three, and the graphite electrodes are arranged at 120 ° intervals; each graphite electrode (40) is respectively connected to three graphite bending plates (50) which are arranged at intervals on the upper connecting ring (20).
3. The ring heater for a deposition furnace according to claim 2, wherein a graphite bending plate (50) in one lower connection ring (30) is disposed correspondingly at a gap between two adjacent graphite bending plates (50) in the upper connection ring (20).
4. A ring heater for a deposition furnace according to claim 3, wherein the same number of heating rods (10) are connected between two adjacent graphite bending plates (50) in the upper connecting ring (20) and the graphite bending plates (50) in the lower corresponding lower connecting ring (30).
5. The annular heater for a deposition furnace according to claim 1, wherein the heating rod (10) is provided with external threads at both ends, and both ends are respectively inserted into the upper and lower corresponding graphite bending plates (50) and fastened and fixed by fastening nuts (60).
6. The ring heater for a deposition furnace according to claim 5, wherein the heating rods (10) are disposed at equal intervals along each graphite bending plate (50).
7. The ring heater for a deposition furnace according to claim 2, wherein the graphite electrode (40) is connected to the center of the outer side surface of the graphite bending plate (50), and the same number of heating rods (10) are distributed at both sides.
8. The ring heater for a deposition furnace according to claim 2, further comprising a support rod (70), wherein the support rod (70) is connected to a graphite bending plate (50) in which the graphite electrode (40) is not provided in the upper connection ring (20).
9. The ring heater for a deposition furnace according to claim 2, wherein the upper connecting ring (20) and the lower connecting ring (30) are each composed of six graphite bending plates (50), and six heating rods (10) are connected to each graphite bending plate (50).
10. The annular heater for the deposition furnace according to claim 8, wherein the heating rod (10), the upper connecting ring (20) and the lower connecting ring (30) are all made of graphite; the supporting rod (70) is made of carbon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321371959.7U CN219731055U (en) | 2023-05-31 | 2023-05-31 | Annular heater for deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321371959.7U CN219731055U (en) | 2023-05-31 | 2023-05-31 | Annular heater for deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219731055U true CN219731055U (en) | 2023-09-22 |
Family
ID=88052231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321371959.7U Active CN219731055U (en) | 2023-05-31 | 2023-05-31 | Annular heater for deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219731055U (en) |
-
2023
- 2023-05-31 CN CN202321371959.7U patent/CN219731055U/en active Active
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