CN219701433U - Dust filtering device of vacuum ion coating equipment - Google Patents
Dust filtering device of vacuum ion coating equipment Download PDFInfo
- Publication number
- CN219701433U CN219701433U CN202223003211.XU CN202223003211U CN219701433U CN 219701433 U CN219701433 U CN 219701433U CN 202223003211 U CN202223003211 U CN 202223003211U CN 219701433 U CN219701433 U CN 219701433U
- Authority
- CN
- China
- Prior art keywords
- transition pipe
- high valve
- coating equipment
- extraction opening
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001914 filtration Methods 0.000 title claims abstract description 22
- 239000000428 dust Substances 0.000 title claims abstract description 14
- 239000011248 coating agent Substances 0.000 title claims abstract description 9
- 238000000576 coating method Methods 0.000 title claims abstract description 9
- 230000007704 transition Effects 0.000 claims abstract description 21
- 238000000605 extraction Methods 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000007733 ion plating Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Abstract
The utility model belongs to a dust filtering device of vacuum ion coating equipment, which comprises a furnace body (1), and is characterized in that a high valve chamber (8) of the furnace body (1) is connected with a high valve (2), the rear end of the high valve (2) is connected with an extraction opening of a molecular pump (3), the extraction opening of the molecular pump (3) is connected with a transition pipe (4), the other end of the transition pipe (4) is connected to a filtering tank (5), a filtering element (6) is arranged in the filtering tank (5), the other end of the filtering tank (5) is connected to the transition pipe (4), and the other end of the transition pipe (4) is connected to the extraction opening of a vacuum pump (7), so that the filtering element (6) with holes of different sizes can be replaced according to the use requirement.
Description
Technical Field
The utility model belongs to a pipeline dust removing assembly of vacuum ion coating equipment, and particularly relates to a dust filtering device of the vacuum ion coating equipment.
Background
At present, the vacuum ion plating equipment has no pipeline dust removing component, and the pipeline is directly connected to the vacuum pump in the prior equipment, so that dust can be directly pumped into the pump cavity by the vacuum pump, the vacuum pump is damaged, the service life is reduced, and the production cost is increased.
Disclosure of Invention
The utility model aims to overcome the technical defects and provide the dust filtering device of the vacuum ion coating equipment, which can prolong the service life of the vacuum pump and reduce the production cost.
The technical scheme adopted for solving the technical problems is as follows: the dust filtering device of the vacuum ion coating equipment comprises a furnace body and is characterized in that a high valve chamber of the furnace body is connected with a high valve, the rear end of the high valve is connected with a molecular pump, the molecular pump is connected with a transition pipe, and the other end of the transition pipe is connected with a filtering tank; the filter element is arranged in the filter tank, the other end of the filter tank is connected to the transition pipe, and the other end of the transition pipe is connected to the pump suction position of the vacuum pump; therefore, when the vacuum pump is used for pumping air, dust in the furnace is adsorbed onto the filter element by the filter element in the filter tank, and the dust cannot enter the pump cavity of the vacuum pump.
The beneficial effects of the utility model are as follows: the utility model has simple structure, can effectively prolong the service life of the vacuum pump, reduce the production cost and improve the production efficiency.
Drawings
The following is a detailed description of embodiments with reference to the accompanying drawings.
FIG. 1 is a main view of a dust filter device of a vacuum ion plating apparatus;
in the figure: 1-a furnace body; 2-high valve; 3-molecular pump; 4-a transition pipe; 5-a filter tank; 6-filtering core; 7-a vacuum pump; 8-high valve chamber.
Detailed Description
The embodiment, refer to the accompanying drawings, a dust filtering device of vacuum ion coating equipment, including the furnace body 1, characterized by that the high valve chamber 8 of the furnace body 1 connects the high valve 2, the rear end of the high valve 2 connects to the molecular pump 3, the molecular pump 3 connects the transition pipe 4, the other end of the transition pipe 4 connects to the filtering tank 5; the filter element 6 is arranged in the filter tank 5, the other end of the filter tank 5 is connected to the transition pipe 4, and the other end of the transition pipe 4 is connected to the extraction opening of the vacuum pump 7.
The application method of the utility model is as follows: firstly, a high valve 2 is connected to a furnace body 1 through a high valve chamber 8, the rear end of the high valve 2 is connected with an air extraction opening of a molecular pump 3, the air extraction opening of the molecular pump 3 is connected with a transition pipe 4, the other end of the transition pipe 4 is connected to a filtering tank 5, a filtering core 6 is arranged in the filtering tank 5, the other end of the filtering tank 5 is connected to the transition pipe 4, and the other end of the transition pipe 4 is connected to an air extraction opening of a vacuum pump 7; the filter element 6 with different size pores can be replaced according to the use requirement.
Claims (1)
1. The utility model provides a vacuum ion coating equipment dust filter equipment, including furnace body (1), high valve (2) are connected through high valve chamber (8) in its characterized in that furnace body (1), molecular pump (3) extraction opening department is connected to high valve (2) rear end, transition pipe (4) are connected in molecular pump (3) extraction opening department, transition pipe (4) other end is connected on filtering jar (5), filter core (6) are equipped with in filtering jar (5), on the transition pipe (4) are received to the other end of filtering jar (5), the extraction opening department of vacuum pump (7) is received to the other end of transition pipe (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223003211.XU CN219701433U (en) | 2022-11-11 | 2022-11-11 | Dust filtering device of vacuum ion coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223003211.XU CN219701433U (en) | 2022-11-11 | 2022-11-11 | Dust filtering device of vacuum ion coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219701433U true CN219701433U (en) | 2023-09-19 |
Family
ID=88014342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223003211.XU Active CN219701433U (en) | 2022-11-11 | 2022-11-11 | Dust filtering device of vacuum ion coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219701433U (en) |
-
2022
- 2022-11-11 CN CN202223003211.XU patent/CN219701433U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN219701433U (en) | Dust filtering device of vacuum ion coating equipment | |
| CN202360357U (en) | Air valve type check valve for piston type compressor | |
| CN208185086U (en) | A kind of dumper hydraulic oil container that band is magnetic-type | |
| CN201330710Y (en) | One-way valve of electric braking air compressor exhaust port | |
| CN205820350U (en) | A kind of sucking disc mechanism of porose circuit board | |
| CN202482460U (en) | Wafer electroplating pretreatment device | |
| CN203999803U (en) | A kind of coating equipment pumped vacuum systems | |
| CN103470783B (en) | Vacuum pressure relief valve | |
| CN212585449U (en) | Vacuum system buffer tank for vacuum rotary atmosphere furnace | |
| CN204877986U (en) | Doublestage water ring compressor | |
| CN202390480U (en) | Cover type annealing device of titanium coiled tape | |
| CN204911070U (en) | High -efficient sealing system of air cleaner | |
| CN216044506U (en) | Vacuum pump for vacuum coating equipment | |
| CN218935387U (en) | High strength stainless steel check valve subassembly | |
| CN204357711U (en) | A kind of energy-saving frequency conversion screw machine suction valve | |
| CN204637750U (en) | A kind of super accurate filter of optimization | |
| CN204673638U (en) | Vacuum generator | |
| CN204402889U (en) | A kind of Novel dry vacuum pump structure | |
| CN216998557U (en) | Cathode end socket base of magnetron sputtering equipment | |
| CN217096032U (en) | Semiconductor power-on device | |
| CN208749651U (en) | A kind of small flow pump | |
| CN203239574U (en) | Exhaust filtering mechanism of ratary vane type vacuum pump | |
| CN203548933U (en) | Fast and slow integral vacuum valve | |
| CN203785461U (en) | Automatic gas ballasting device for vacuum degreasing and sintering furnace | |
| CN212291913U (en) | Automatic control device of vacuum generator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |