CN203548933U - Fast and slow integral vacuum valve - Google Patents
Fast and slow integral vacuum valve Download PDFInfo
- Publication number
- CN203548933U CN203548933U CN201320735637.6U CN201320735637U CN203548933U CN 203548933 U CN203548933 U CN 203548933U CN 201320735637 U CN201320735637 U CN 201320735637U CN 203548933 U CN203548933 U CN 203548933U
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- China
- Prior art keywords
- cylinder
- valve body
- vacuum
- valve
- vacuum valve
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- Expired - Fee Related
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Abstract
The utility model discloses a fast and slow integral vacuum valve which comprises a first cylinder, a second cylinder, a first valve body, a first cylinder shaft and a second cylinder shaft. One end of the first cylinder shaft is arranged in the first cylinder, and the other end of the first cylinder shaft is located in the second cylinder shaft to form a second valve body. One end of the second cylinder shaft is located in the second cylinder, and the other end of the second cylinder shaft is arranged in the vacuum valve. A gas inlet and a gas outlet of the second valve body are formed in the second cylinder shaft, and the gas inlet and the air outlet of the second valve body are communicated with an air inlet and an air outlet of the first valve body respectively. The small cylinder is added on the fast and slow integral vacuum valve, the cylinder shaft is added in the main valve cylinder shaft, when vacuumizing is slowly conducted, the small cylinder is used, gas flows out from a gas channel in the main valve cylinder shaft, two vacuum valve bodies are made into one vacuum valve body, and a fast function and a slow function are achieved in one vacuum valve body, so that the number of vacuum connectors is reduced, and the fast and slow integral vacuum valve is convenient to mount and use.
Description
Technical field
The utility model relates to a kind of vacuum valve, relates in particular to a kind of speed integral vacuum valve.
Background technique
At present domestic to vacuum cavity exhaust, only use a vacuum valve, because gas is divided into 4 kinds in pipeline in flow process, turbulent flow, stickiness flow, transition flow, molecule flow etc.Turbulent flow endurance in low-pressure fluid pipeline is very short, but this pumping process is very strong, can cause that in vacuum chamber, dust is kicked up, and quality of product is had to impact.Existing improvement project is to require, on higher cavity, two vacuum valves are installed, a large vacuum valve, a little vacuum valve.In order to reduce the impact of turbulent flow on cavity, while just starting to vacuumize, the little vacuum valve of opening.But two vacuum are installed and need on cavity, do two interfaces, pipe arrangement is also more, and installing space is had to requirement.
Model utility content
The purpose of this utility model is: in order to address the above problem, a kind of speed integral vacuum valve simple in structure, easy to use is provided, increases a little cylinder, simultaneously in main valve cylinder axis, increasing a cylinder axis, during slow vacuum, use little cylinder, gas flows out from the gas circuit in main valve cylinder axis, realized two vacuum valves have been made to a vacuum valve, in a vacuum valve, realize two functions of speed, therefore can reduce vacuum connect, easy to use and installation.
To achieve these goals, the technical solution of the utility model is:
A speed integral vacuum valve, comprises the first cylinder, the second cylinder, the first valve body, the first cylinder axis and the second cylinder axis; One end of described the first cylinder axis is arranged in described the first cylinder, and the other end is positioned at described the second cylinder axis, forms the second valve body; One end of described the second cylinder axis is positioned at described the second cylinder, and the other end is arranged in described vacuum valve; In described the second cylinder axis, be provided with suction port and the air outlet of described the second valve body; The suction port of described the second valve body and air outlet are connected respectively at suction port and the air outlet of described the first valve body.
Further, the suction port of described the first valve body is connected with vacuum pump with vacuum chamber with the second flanged joint by the first flanged joint respectively with air outlet.
Gas circuit in the first valve body 3 is that the gas circuit in gas circuit 1, the second valve body 8 is gas circuit 2.
The utility model is owing to having adopted above-mentioned technology, and the good effect that makes it compared with prior art to have is:
The utility model arranges the first cylinder axis in the second cylinder axis, in conjunction with the first cylinder, formed the second valve body, and suction port and the air outlet of the second valve body are set in the second cylinder axis, the suction port of the second valve body and air outlet are connected respectively at suction port and the air outlet of described the first valve body, and two vacuum valves are made to a vacuum valve, realize two functions of speed in a vacuum valve, therefore can reduce vacuum connect, easy to use and installation.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model speed integral vacuum valve.
Embodiment
Below in conjunction with accompanying drawing, further illustrate embodiment of the present utility model.
Shown in Figure 1, a kind of speed integral vacuum valve, comprises the first cylinder 1, the second cylinder 2, the first valve body 3, the first cylinder axis 7 and the second cylinder axis 4; One end of described the first cylinder axis 7 is arranged in described the first cylinder 1, and the other end is positioned at described the second cylinder axis 4, forms the second valve body 8; One end of described the second cylinder axis 4 is positioned at described the second cylinder 2, and the other end is arranged in described vacuum valve 3; In described the second cylinder axis 4, be provided with suction port 41 and the air outlet 42 of described the second valve body 8; The suction port 41 of described the second valve body 8 and air outlet 42 are connected with suction port 31 and the air outlet 32 of described the first valve body 3 respectively.
Preferably, the suction port 31 of described the first valve body 3 is connected with vacuum pump with vacuum chamber with the second flanged joint 6 by the first flanged joint 5 respectively with air outlet 32.
At interior first cylinder axis 7 that arranges of the second cylinder axis 4, in conjunction with the first cylinder 1, formed the second valve body 8, and be connected with suction port 31 and the air outlet 32 of described the first valve body 3 respectively at the interior suction port 41 of the second valve body 8 and the suction port 41 of air outlet 42, the second valve bodies 8 and air outlet 42 of arranging of the second cylinder axis 4; When pumping speed is slow, with the second valve body 8, gas is through gas circuit 2; When pumping speed is fast, with the first valve body 3, gas is through gas circuit 1; Two vacuum valves are made to a vacuum valve, in a vacuum valve, realize two functions of speed, therefore can reduce vacuum connect, easy to use and installation.
In sum, the utility model is simple in structure, easy to use, increases a little cylinder, simultaneously in main valve cylinder axis, increasing a cylinder axis, during slow vacuum, use little cylinder, gas flows out from the gas circuit in main valve cylinder axis, realized two vacuum valves have been made to a vacuum valve, in a vacuum valve, realize two functions of speed, therefore can reduce vacuum connect, easy to use and installation.
Claims (2)
1. a speed integral vacuum valve, is characterized in that: comprise the first cylinder (1), the second cylinder (2), the first valve body (3), the first cylinder axis (7) and the second cylinder axis (4); One end of described the first cylinder axis (7) is arranged in described the first cylinder (1), and the other end is positioned at described the second cylinder axis (4), forms the second valve body (8); One end of described the second cylinder axis (4) is positioned at described the second cylinder (2), and the other end is arranged in described vacuum valve (3); In described the second cylinder axis (4), be provided with suction port (41) and air outlet (42) of described the second valve body (8); The suction port (41) of described the second valve body (8) and air outlet (42) are connected respectively at suction port (31) and air outlet (32) of described the first valve body (3).
2. speed integral vacuum valve according to claim 1, is characterized in that: the suction port (31) of described the first valve body (3) is connected with vacuum pump with vacuum chamber with the second flanged joint (6) by the first flanged joint (5) respectively with air outlet (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320735637.6U CN203548933U (en) | 2013-11-20 | 2013-11-20 | Fast and slow integral vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320735637.6U CN203548933U (en) | 2013-11-20 | 2013-11-20 | Fast and slow integral vacuum valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203548933U true CN203548933U (en) | 2014-04-16 |
Family
ID=50467053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320735637.6U Expired - Fee Related CN203548933U (en) | 2013-11-20 | 2013-11-20 | Fast and slow integral vacuum valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203548933U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020526725A (en) * | 2017-07-25 | 2020-08-31 | ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ | Proportional valve for controlling gaseous media |
-
2013
- 2013-11-20 CN CN201320735637.6U patent/CN203548933U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020526725A (en) * | 2017-07-25 | 2020-08-31 | ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ | Proportional valve for controlling gaseous media |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140416 Termination date: 20191120 |