CN219689162U

CN219689162U - Ceramic disc carrying tool for wafer production

Info

Publication number: CN219689162U
Application number: CN202320568377.1U
Authority: CN
Inventors: 肖迪; 张强; 李健
Original assignee: Qingdao Xinkang Semiconductor Technology Co ltd
Current assignee: Qingdao Xinkang Semiconductor Technology Co ltd
Priority date: 2023-03-22
Filing date: 2023-03-22
Publication date: 2023-09-15
Anticipated expiration: 2033-03-22

Abstract

The utility model relates to the technical field of wafer production and discloses a ceramic disc carrying tool for wafer production, wherein a plurality of groups of carrying discs are sleeved on the outer side of a cylinder of a supporting cylinder frame along the direction of a cylinder rod of the supporting cylinder frame, a transmission rack is arranged on one side of an arm rod of a lifting guide rod, a transmission gear meshed with the transmission rack is arranged in a sleeve of a guide sleeve, and a hook is hung at the bottom end of the arm rod of the lifting guide rod. According to the utility model, the ceramic discs are loaded by using the mutually stacked loading discs, one side of the ceramic discs can uniformly load a plurality of groups of ceramic discs, on the other hand, the mutually stacked loading discs have good sealing performance, and the ceramic discs in the loading discs can be rotated, opened and closed by using the rotary opening and closing mechanism to drive the loading discs to swing along the supporting cylinder frame, so that the ceramic discs in the loading discs are rotated, opened and closed, and the ceramic discs have good mechanical independent type and opening and closing performance, and can reduce the material taking and placing strength of workers.

Description

Ceramic disc carrying tool for wafer production

Technical Field

The utility model relates to the technical field of wafer production, in particular to a ceramic disc carrying tool for wafer production.

Background

In the process of polishing semiconductor wafers with wax, the wafers are adhered to the surface of a ceramic carrier plate by using wax, and then grinding, rough polishing, fine polishing and other procedures are performed, so that the number of ceramic plates is necessarily increased correspondingly with the increase of the wafer yield, and then a large number of holding frames for holding the ceramic plates are also increased, for example, as shown in the prior patent technology: through searching, the Chinese patent network discloses a ceramic disc containing frame (publication No. CN 205410295U) for attaching an LED chip, and the ceramic disc is carried and protected by pushing the containing frame through sequentially placing the ceramic discs inside a protecting sleeve.

However, there are some disadvantages to the ceramic tray holders adopted in the above-mentioned published patent and the existing market: the ceramic disc is loaded by the combination of the protective sleeve and the containing frame, when the ceramic disc is used, the ceramic disc is manually taken, and when the size of the ceramic disc is large, the ceramic disc is heavy, and the operation intensity of taking the ceramic disc is high. Therefore, a ceramic disc carrying tool for wafer production is provided by a person skilled in the art to solve the problems set forth in the background art.

Disclosure of Invention

The utility model mainly aims to provide a ceramic disc carrying tool for wafer production, which can effectively solve the problems that the ceramic disc is taken manually by adopting a manual mode in the prior art, and the ceramic disc is large in weight and high in taking operation intensity when the ceramic disc is large in size.

In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: the ceramic disc carrying tool for wafer production comprises a supporting cylinder frame, wherein a plurality of groups of carrying discs are sleeved on the outer side of a cylinder of the supporting cylinder frame along the direction of a cylinder rod of the supporting cylinder frame, and a rotary opening and closing mechanism is arranged at the top end of the cylinder rod of the supporting cylinder frame;

the rotary opening and closing mechanism comprises a rotating seat arranged at the top end of a loading disc cylinder rod, the upper output end of the rotating seat is rotationally connected with a lifting shell frame, one end of the lifting shell frame is in through connection with a guide sleeve, the upper end and the lower end of the sleeve of the guide sleeve are respectively provided with a guide shaft sleeve, the inside of the guide sleeve is in through connection with a lifting guide rod, one side of an arm rod of the lifting guide rod is provided with a transmission rack, the inside of the sleeve of the guide sleeve is provided with a transmission gear meshed with the transmission rack, and a hook is hung at the bottom end of the arm rod of the lifting guide rod.

As still further aspects of the utility model: the bottom end of the barrel rod of the supporting barrel frame is provided with a carrying cart in a matching way.

As still further aspects of the utility model: the loading disc comprises a rotary shaft sleeve which is rotationally connected with the supporting cylinder frame, a stacking tray is installed at the output end of the rotary shaft sleeve, a plurality of groups of material containing convex handles are arranged in the tray frame of the stacking tray along the circumferential direction of the tray frame, and a hanging ring matched with the hanging hook is arranged on one side of the tray frame of the stacking tray.

As still further aspects of the utility model: the loading discs are stacked with each other relative to the cylinder rod direction of the supporting cylinder frame.

As still further aspects of the utility model: the rotary seat is connected with a rotary shaft in a rotary mode, the rotary seat is connected with the lifting shell frame through the rotary shaft, and a rotary motor connected with the rotary shaft is installed at the lower support end of the rotary seat.

As still further aspects of the utility model: the lifting shell comprises a lifting shell body, wherein a lifting motor is arranged in the lifting shell body, a synchronous belt wheel A is arranged at the output end of the lifting motor, a synchronous belt wheel B is arranged at the output end of one side of the transmission gear, and the synchronous belt wheel A and the synchronous belt wheel B are connected through a synchronous belt.

Compared with the prior art, the utility model has the following beneficial effects:

according to the utility model, the ceramic discs are loaded by utilizing the mutually stacked loading discs, so that the ceramic discs have good modularized loading performance, a plurality of groups of ceramic discs can be uniformly loaded, the mutually stacked loading discs have good sealing performance, foreign matters such as external dust can be prevented from falling onto the ceramic discs, the clean and tidy protection performance of ceramic disc loading is improved, and the ceramic discs in the loading discs can be rotated and swung along the supporting cylinder frame by utilizing the rotary opening and closing mechanism while being loaded, so that the ceramic discs in the loading discs can be opened and closed in a rotary mode, and the ceramic discs have good mechanical independent opening and closing performance, and can reduce the material taking and placing strength of workers.

Drawings

FIG. 1 is a schematic diagram of a ceramic disc carrier tool for wafer production according to the present utility model;

FIG. 2 is a schematic diagram of a rotary opening and closing mechanism in a ceramic disc carrier tool for wafer production according to the present utility model;

fig. 3 is a schematic structural view of a loading disc in a ceramic disc loading tool for wafer production according to the present utility model.

In the figure: 1. a support cylinder frame; 2. loading a disc; 21. rotating the shaft sleeve; 22. stacking the trays; 23. a material holding convex handle; 24. hanging rings; 3. a rotating seat; 4. lifting the shell frame; 5. a guide sleeve; 6. lifting guide rods; 7. a hook; 8. a rotating electric machine; 9. a rotation shaft; 10. a lifting motor; 11. a synchronous belt wheel A; 12. a synchronous belt; 13. a synchronous belt wheel B; 14. a transmission gear; 15. a drive rack; 16. and a guide shaft sleeve.

Detailed Description

The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "provided," "connected," and the like are to be construed broadly, and may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1-3, a ceramic disc carrying tool for wafer production includes a supporting cylinder frame 1, wherein a carrying cart is mounted at the bottom end of a cylinder rod of the supporting cylinder frame 1, and when the ceramic disc for wafer production is carried by the carrying tool, the carrying cart mounted at the bottom of the supporting cylinder frame 1 can push the carrying tool to a designated direction for carrying the ceramic disc.

The cylinder outside of the support cylinder frame 1 is sleeved with a plurality of groups of loading discs 2 along the cylinder rod direction, the loading discs 2 comprise rotary shaft sleeves 21 which are rotationally connected with the support cylinder frame 1, the output ends of the rotary shaft sleeves 21 are provided with stacking discs 22, a plurality of groups of material containing convex handles 23 are arranged in the disc frame of the stacking discs 22 along the circumferential direction of the disc frame, the plurality of groups of loading discs 2 are mutually stacked relative to the cylinder rod direction of the support cylinder frame 1, when ceramic discs for crystal production are loaded by utilizing a carrying tool, the loading discs 2 can be sequentially rotated to open and close by utilizing the rotary shaft sleeves 21 in the loading discs 2 and the rotary hoops of the support cylinder frame 1, then the corresponding ceramic discs are placed in the corresponding stacking discs 22 to carry out stacking loading and holding work on the corresponding ceramic discs.

The rotary opening and closing mechanism is installed at the barrel rod top of the supporting barrel frame 1, the rotary opening and closing mechanism comprises a rotary seat 3 installed at the barrel rod top end of the loading disc 2, the upper output end of the rotary seat 3 is rotationally connected with a lifting shell frame 4, the upper support end of the rotary seat 3 is rotationally connected with a rotary shaft 9, the rotary seat 3 is connected with the lifting shell frame 4 through the rotary shaft 9, a rotary motor 8 connected with the rotary shaft 9 is installed at the lower support end of the rotary seat 3, when a carrying tool is used for loading and holding ceramic discs for wafer production, when the ceramic discs are required to be subjected to material taking and placing work, the rotary motor 8 works, the rotary seat 3 is driven to rotate, then the lifting shell frame 4 is driven to rotationally swing, and a hook 7 is rotationally pushed to one side close to the loading disc 2 so as to carry out mechanical autonomous opening and closing work on the loading disc 2.

A guide sleeve 5 is arranged at one end of the lifting shell frame 4 in a penetrating way, a guide shaft sleeve 16 is arranged at the upper end and the lower end of the sleeve of the guide sleeve 5, a lifting guide rod 6 is clamped in the guide shaft sleeve 16 in a penetrating way, a transmission rack 15 is arranged at one side of an arm rod of the lifting guide rod 6, a transmission gear 14 meshed with the transmission rack 15 is arranged in the sleeve of the guide sleeve 5, a hook 7 is hung at the bottom end of the arm rod of the lifting guide rod 6, a lifting motor 10 is arranged in a shell of the lifting shell frame 4, a synchronous pulley A11 is arranged at the output end of the lifting motor 10, a synchronous pulley B13 is arranged at the output end of one side of the transmission gear 14, the synchronous pulley A11 is connected with the synchronous pulley B13 through a synchronous belt 12, a hanging ring 24 matched with the hook 7 is arranged at one side of a tray frame of a stacking tray 22, and when the hook 7 is rotationally pushed to be close to a loading tray 2 in the process of taking and placing ceramic trays, the lifting motor 10 works to drive the synchronous pulley A11 to rotate, the synchronous pulley B13 is driven to rotate through the transfer transmission of the synchronous belt 12, the synchronous pulley B13 drives the transmission gear 14 to synchronously rotate while rotating, then the meshing transmission of the transmission gear 14 and the transmission rack 15 converts meshing thrust into lifting thrust to push the lifting guide rod 6 to lift and slide along the inside of the guide shaft sleeve 16, the lifting hook of the hook 7 is adjusted in height, the hook 7 is displaced to one side of the appointed loading disc 2, then the hook 7 is hung with the corresponding hanging ring 24, the rotating motor 8 is used for driving the reverse rotation swing of the lifting shell frame 4 to rotationally push out the loading disc 2, and the ceramic disc is contained or taken, so that the lifting mechanism has good mechanical autonomy, opening and closing performances and can reduce the material taking and placing strength of workers.

The working principle of the utility model is as follows: when the carrying tool is used for carrying the ceramic disc for wafer production, when the ceramic disc needs to be subjected to material taking and placing operation, the rotary motor 8 starts to operate, the rotary seat 3 is driven to rotate, the lifting shell frame 4 is driven to rotate and swing, the hook 7 is rotationally pushed to one side close to the loading disc 2, then after the hook 7 is rotationally pushed to the position close to the loading disc 2, the lifting motor 10 operates, the synchronous pulley A11 is driven to rotate, the synchronous pulley B13 is driven to rotate through the transfer transmission of the synchronous belt 12, the synchronous pulley B13 is driven to rotate while rotating, the transmission gear 14 is driven to synchronously rotate, then the meshing thrust is converted into lifting thrust through the meshing transmission of the transmission gear 14 and the transmission rack 15, the lifting guide rod 6 is pushed to lift and slide along the inside the guide shaft sleeve 16, the hook 7 is regulated to be displaced to one side of the designated loading disc 2, then the hook 7 is hung on one side of the corresponding hanging ring 24, the lifting shell frame 4 is driven to reversely rotate and swing by the rotary motor 8, the loading disc 2 is rotationally pushed out, the ceramic disc is placed or taken into the material taking operation, and the ceramic disc is stacked by the rotary drum 2 through the rotary drum 2, and the corresponding material taking drum 21 is stacked by the rotary drum 2, and the ceramic disc is stacked by the rotary drum 2, and the corresponding material taking drum is stacked by the rotary drum 2, and the stacking drum is stacked by the corresponding material taking and the ceramic disc is stacked by the stacking drum.

The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The ceramic disc carrying tool for wafer production comprises a supporting cylinder frame (1) and is characterized in that a plurality of groups of carrying discs (2) are sleeved on the outer side of a cylinder of the supporting cylinder frame (1) along the direction of a cylinder rod of the supporting cylinder frame, and a rotary opening and closing mechanism is arranged at the top end of the cylinder rod of the supporting cylinder frame (1);

the rotary opening and closing mechanism comprises a rotating seat (3) arranged at the top end of a cylinder rod of a loading disc (2), a lifting shell frame (4) is rotationally connected to the upper output end of the rotating seat (3), one end of the lifting shell frame (4) is connected with a guide sleeve (5), the upper end and the lower end of the sleeve of the guide sleeve (5) are respectively provided with a guide shaft sleeve (16), the inside of the guide sleeve (16) is connected with a lifting guide rod (6) in a penetrating manner, one side of an arm rod of the lifting guide rod (6) is provided with a transmission rack (15), a transmission gear (14) meshed with the transmission rack (15) is arranged in the sleeve of the guide sleeve (5), and a hook (7) is hung at the bottom end of the arm rod of the lifting guide rod (6).

2. The ceramic disc carrying tool for wafer production according to claim 1, wherein a carrying cart is arranged at the bottom end of a cylinder rod of the supporting cylinder frame (1) in a matched mode.

3. The ceramic disc carrying tool for wafer production according to claim 1, wherein the carrying disc (2) comprises a rotary shaft sleeve (21) rotationally connected with the supporting cylinder frame (1), a stacking disc (22) is installed at the output end of the rotary shaft sleeve (21), a plurality of groups of material containing convex handles (23) are circumferentially distributed inside the disc frame of the stacking disc (22), and a hanging ring (24) matched with the hanging hook (7) is arranged on one side of the disc frame of the stacking disc (22).

4. Ceramic disc carrier tool for wafer production according to claim 1, characterized in that the plurality of groups of loading discs (2) are stacked on each other with respect to the shaft direction of the supporting shaft (1).

5. The ceramic disc carrying tool for wafer production according to claim 1, wherein a rotating shaft (9) is rotatably connected to an upper support end of the rotating base (3), the rotating base (3) is connected with the lifting shell frame (4) through the rotating shaft (9), and a rotating motor (8) connected with the rotating shaft (9) is mounted to a lower support end of the rotating base (3).

6. The ceramic disc carrying tool for wafer production according to claim 1, wherein a lifting motor (10) is installed inside a shell of the lifting shell frame (4), a synchronous pulley A (11) is arranged at an output end of the lifting motor (10), a synchronous pulley B (13) is arranged at an output end of one side of the transmission gear (14), and the synchronous pulley A (11) is connected with the synchronous pulley B (13) through a synchronous belt (12).