CN219665402U - Laser adjusting tool and laser processing equipment - Google Patents
Laser adjusting tool and laser processing equipment Download PDFInfo
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- CN219665402U CN219665402U CN202320206451.5U CN202320206451U CN219665402U CN 219665402 U CN219665402 U CN 219665402U CN 202320206451 U CN202320206451 U CN 202320206451U CN 219665402 U CN219665402 U CN 219665402U
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Abstract
The utility model provides a laser adjusting tool and laser processing equipment, wherein the laser adjusting tool comprises: a first adjustment mechanism; the second adjusting mechanism is arranged on the first adjusting mechanism and is driven by the first adjusting mechanism to move along a first direction; the adjusting seat is arranged on the second adjusting mechanism through a third adjusting mechanism and is driven by the second adjusting mechanism to move along a second direction, the third adjusting mechanism is used for adjusting the inclination angle of the adjusting seat, and the driving piece is arranged on the adjusting seat and used for installing an optical lens and driving the optical lens to move along the third direction so as to adjust the focal length of the optical lens. The laser adjusting tool provided by the utility model realizes the rapid alignment of laser and effectively improves the working efficiency. Meanwhile, the driving piece is arranged on the adjusting seat, and the optical mirror is arranged on the driving piece, so that the focal length adjustment of the optical mirror is realized, and the optical lens has a simple and compact integral structure and small occupied space.
Description
Technical Field
The utility model belongs to the technical field of laser processing, and particularly relates to a laser adjusting tool and laser processing equipment.
Background
In a process for processing a workpiece such as a semiconductor, the workpiece such as the semiconductor is generally cut by a laser processing apparatus. In order to realize accurate cutting of workpieces such as semiconductors, laser is generally straightened by a laser adjusting tool before cutting, so that the laser can be aligned to the workpieces such as semiconductors. However, the laser adjusting tool in the related art is very complicated in adjusting operation, so that the working efficiency is low.
Disclosure of Invention
The utility model aims to provide a laser adjusting tool which can be used for quickly straightening laser so as to improve the working efficiency.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a laser adjusts frock, include:
a first adjustment mechanism;
the second adjusting mechanism is arranged on the first adjusting mechanism and is driven by the first adjusting mechanism to move along a first direction;
the adjusting seat is arranged on the second adjusting mechanism through a third adjusting mechanism and is driven by the second adjusting mechanism to move along a second direction, the third adjusting mechanism is used for adjusting the inclination angle of the adjusting seat,
the driving piece is arranged on the adjusting seat and used for installing the optical lens and driving the optical lens to move along a third direction so as to adjust the focal length of the optical lens.
Further, the driving piece is provided with a light path channel for laser to enter the optical mirror.
Further, one end of the driving member is connected with a joint communicated with the light path channel, and the joint is used for guiding the laser into the light path channel.
Further, a mounting hole is formed in the adjusting seat, and one end, away from the driving piece, of the joint penetrates through the mounting hole and extends out of the mounting hole.
Further, the first adjusting mechanism comprises a fixed seat, a first movable seat movably arranged on the fixed seat along a first direction, and a first adjusting component for driving the first movable seat to move along the first direction;
the second adjusting mechanism comprises a second movable seat and a second adjusting component, the second movable seat can be movably arranged on the first movable seat along a second direction, the second adjusting component is used for driving the second movable seat to move along the second direction, and the adjusting seat is arranged on the second movable seat.
Further, the first adjustment assembly includes:
the first screw rod is rotatably arranged on the fixed seat, and the first movable seat is in threaded connection with the first screw rod; the method comprises the steps of,
the first adjusting piece is in transmission connection with the first screw rod and is used for driving the first screw rod to rotate;
and/or the number of the groups of groups,
the second adjustment assembly includes:
the second screw rod is rotatably arranged on the first movable seat and is in threaded connection with the second screw rod; the method comprises the steps of,
and the second adjusting piece is in transmission connection with the second screw rod and is used for driving the second screw rod to rotate.
Further, the third adjusting mechanism comprises a plurality of third adjusting parts, a plurality of adjusting holes are formed in the adjusting seat, each third adjusting part can be adjustably arranged in each corresponding adjusting hole along the third direction, and one end of each third adjusting part penetrates through each adjusting hole and abuts against the second adjusting mechanism.
Further, the third adjusting mechanism further comprises a connecting piece, a through hole is formed in the adjusting seat, a connecting hole is formed in the second adjusting mechanism, and the connecting piece penetrates through the through hole and is fixedly connected with the connecting hole.
Further, the laser adjusting tool further comprises an air blowing assembly, wherein the air blowing assembly comprises an air blowing frame arranged on one side, far away from the adjusting seat, of the first adjusting mechanism, and an air blowing sleeve arranged on the air blowing frame and covered outside the optical lens.
The utility model also provides laser processing equipment, which comprises the laser adjusting tool.
The laser adjusting tool provided by the utility model has the beneficial effects that: through the setting of first adjustment mechanism and second adjustment mechanism, can realize adjusting the seat along the regulation on first direction and the second direction, and then realize the regulation of optical mirror on first direction and second direction for laser can be aligned with the optical mirror, and cooperate the setting of third adjustment mechanism, adjustable inclination of adjusting the seat, and then realize the gradient adjustment of optical mirror, realize straightening laser fast, effectively improved work efficiency. Meanwhile, the driving piece is arranged on the adjusting seat, and the optical mirror is arranged on the driving piece, so that the focal length adjustment of the optical mirror is realized, and the optical lens has a simple and compact integral structure and small occupied space.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic perspective view of a laser adjustment tool according to an embodiment of the present utility model;
fig. 2 is an exploded structure schematic diagram of a laser adjustment tool according to an embodiment of the present utility model;
fig. 3 is a schematic perspective view of a first adjusting mechanism and a second adjusting mechanism according to an embodiment of the present utility model.
Wherein, each reference sign in the figure:
10. a first adjustment mechanism; 11. a fixing seat; 111. a first chute; 112. a mounting plate; 113. a positioning plate; 12. a first movable seat; 121. a first slider; 122. a second chute; 13. a first adjustment assembly; 131. a first screw rod; 132. a first adjustment member; 14. a first locking member; 20. a second adjustment mechanism; 21. a second movable seat; 211. a second slider; 22. a second adjustment assembly; 221. a second screw rod; 222. a second adjusting member; 23. a second locking member; 24. a connection hole; 30. an adjusting seat; 31. a mounting hole; 32. an adjustment aperture; 33. a through hole; 40. a driving member; 41. an optical path channel; 42. a joint; 50. an air blowing assembly; 51. a blowing frame; 52. and (5) an air blowing sleeve.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Referring to fig. 1, a description will now be given of a laser adjustment tool provided in an embodiment of the present utility model. The laser adjusting tool provided by the embodiment of the utility model can straighten laser. Including a first adjustment mechanism 10, a second adjustment mechanism 20, an adjustment seat 30, a third adjustment mechanism (not shown), and a drive member 40 of fig. 2. The second adjusting mechanism 20 is disposed on the first adjusting mechanism 10, and is driven by the first adjusting mechanism 10 to move in the first direction. The adjusting seat 30 is disposed on the second adjusting mechanism 20 through the third adjusting mechanism, and is driven by the second adjusting mechanism 20 to move along the second direction. The third adjusting mechanism is used for adjusting the inclination angle of the adjusting seat 30.
As shown in fig. 2, a driving member 40 is disposed on the adjustment base 30 for mounting an optical lens (not shown) and for driving the optical lens to move in a third direction to adjust a focal length of the optical lens. Wherein, the driving member 40 drives the optical lens to move along the third direction, so as to adjust the focal length of the optical lens. The driving piece 40 is arranged on the adjusting seat 30, and the whole structure is simple and compact and occupies small space. The optical lens can be an objective lens, a field lens, a beam expander and the like.
The first direction, the second direction and the third direction are perpendicular to each other. For convenience of understanding, as shown in fig. 1, the X-axis direction in fig. 1 is denoted by a "first direction", the Y-axis direction in fig. 1 is denoted by a "second direction", and the Z-axis direction in fig. 1 is denoted by a "third direction", it is to be understood that the above definition is only for convenience of understanding the relative positional relationship of the respective components, and is not to be construed as limiting the present utility model.
When the laser needs to be adjusted, first, the first adjusting mechanism 10 and the second adjusting mechanism 20 can be used to adjust the adjusting seat 30 to move along the first direction and the second direction, so as to drive the optical mirror on the driving element 40 to move along the first direction and the second direction, so that the laser is aligned with the optical mirror. Then, the inclination angle of the adjusting seat 30 can be adjusted by the third adjusting mechanism, so that the inclination angle of the optical mirror can be adjusted, and the laser can vertically irradiate to the workpiece. The adjustment is very convenient and fast, and the working efficiency can be effectively improved.
According to the laser adjusting tool provided by the embodiment of the utility model, the adjustment of the adjusting seat 30 along the first direction and the second direction can be realized through the arrangement of the first adjusting mechanism 10 and the second adjusting mechanism 20, so that the adjustment of the optical mirror along the first direction and the second direction can be realized, the laser can be aligned with the optical mirror, the inclination angle of the adjusting seat 30 can be adjusted by matching with the arrangement of the third adjusting mechanism, the inclination adjustment of the optical mirror can be realized, the laser can be quickly straightened, and the working efficiency is effectively improved. Meanwhile, the driving piece 40 is arranged on the adjusting seat 30, and then the optical mirror is arranged on the driving piece 40, so that the focal length adjustment of the optical mirror is realized, and the optical lens has a simple and compact integral structure and small occupied space.
Referring to fig. 2, the driving member 40 may be provided with an optical path 41, and the optical path 41 is used for passing through the laser to make the laser enter the optical mirror, so as to avoid the shielding of the driving member 40 to the laser.
Referring to fig. 2, a connector 42 may be connected to one end of the driving member 40, and the connector 42 is in communication with the optical path 41, so that the laser light can be guided into the optical path 41 through the connector 42. The driving member 40 may be a motor, however, the arrangement of the driving member 40 is not limited thereto, and for example, in other embodiments of the present utility model, the driving member 40 may be a cylinder.
Referring to fig. 1 to 2, the adjusting seat 30 may be provided with a mounting hole 31, and an end of the joint 42 remote from the driving member 40 passes through the mounting hole 31 and protrudes out of the mounting hole 31. By forming the mounting hole 31 on the adjusting seat 30, the joint 42 can pass through the mounting hole 31 and extend out of the mounting hole 31, thereby facilitating the introduction of laser.
Referring to fig. 1 to 2, the first adjusting mechanism 10 may include a fixed base 11, a first movable base 12, and a first adjusting component 13. The first movable seat 12 is movably disposed on the fixed seat 11 along a first direction. The first adjusting component 13 is used for driving the first movable seat 12 to move along the first direction. The second adjusting mechanism 20 may include a second movable seat 21 and a second adjusting component 22, where the second movable seat 21 is movably disposed on the first movable seat 12 along the second direction. The second adjusting component 22 is used for driving the second movable seat 21 to move along the second direction. The adjusting seat 30 is disposed on the second movable seat 21.
When the position of the optical lens in the first direction needs to be adjusted, only the first adjusting component 13 is required to drive the first movable seat 12 to move along the first direction, so that the first movable seat 12 moves along the first direction, and the adjusting seat 30 is synchronously driven to move along the first direction, thereby realizing the position adjustment of the optical lens along the first direction.
When the position of the optical lens in the second direction needs to be adjusted, only the second adjusting component 22 is required to drive the second movable seat 21 to move along the second direction, so that the second movable seat 21 moves along the second direction, and the adjusting seat 30 is synchronously driven to move along the second direction, thereby realizing the position adjustment of the optical lens along the second direction.
Referring to fig. 3, the first adjusting assembly 13 may include a first screw 131 and a first adjusting member 132. The first screw rod 131 is rotatably installed on the fixed seat 11, and the first movable seat 12 is in threaded connection with the first screw rod 131. The first adjusting piece 132 is in transmission connection with the first screw rod 131, and is used for driving the first screw rod 131 to rotate, so that the first movable seat 12 moves along the first direction relative to the fixed seat 11. Specifically, the first adjusting member 132 may be a manual adjusting knob, and of course, the first adjusting member 132 may also be an automatic adjusting member, for example, may be a motor, and the first screw 131 may be driven to rotate by rotating the motor.
Referring to fig. 3, the second adjusting assembly 22 may include a second screw 221 and a second adjusting member 222. The second screw rod 221 is rotatably installed on the first movable seat 12, and the second movable seat 21 is in threaded connection with the second screw rod 221. The second adjusting piece 222 is in transmission connection with the second screw rod 221, and is used for driving the second screw rod 221 to rotate, so as to realize the movement of the second movable seat 21 relative to the first movable seat 12 along the second direction. Specifically, the second adjusting member 222 may be a manual adjusting knob, and of course, the second adjusting member 222 may also be an automatic adjusting member, for example, may be a motor, and the second screw 221 may be driven to rotate by rotating the motor.
Referring to fig. 3, a first sliding groove 111 may be disposed on the fixed seat 11, and a first sliding block 121 for matching with the first sliding groove 111 may be disposed on the first movable seat 12, so that the movement accuracy of the first movable seat 12 may be improved through the matching between the first sliding groove 111 and the first sliding block 121. The first movable seat 12 may be provided with a second sliding groove 122, the second movable seat 21 may be provided with a second sliding block 211 for matching with the second sliding groove 122, and the movement accuracy of the second movable seat 21 may be improved by matching the second sliding groove 122 with the second sliding block 211.
Referring to fig. 3, the first adjusting mechanism 10 may further include a first locking member 14, where the first locking member 14 is mounted on the fixed seat 11 and is used for being connected and fixed with the first movable seat 12 after the first adjusting member 132 is adjusted in place. After the first adjusting member 132 is adjusted in place, the first movable seat 12 can be fixed at a predetermined position by the first locking member 14, so as to avoid the first movable seat 12 from being displaced. When the position of the first movable seat 12 in the first direction needs to be adjusted, only the first locking member 14 needs to be released.
Referring to fig. 3, the second adjusting mechanism 20 may further include a second locking member 23, where the second locking member 23 is mounted on the first movable seat 12, and is used to abut against the second screw rod 221 after the second adjusting member 222 is adjusted in place so as to lock and fix the second screw rod 221. After the second adjusting member 222 is adjusted in place, the second movable seat 21 can be fixed at a predetermined position by the second locking member 23, so as to avoid the second movable seat 21 from being displaced. When the position of the second movable seat 21 in the second direction needs to be adjusted, only the second locking member 23 needs to be released.
Referring to fig. 3, the fixing base 11 may include a mounting plate 112 and a positioning plate 113, where the mounting plate 112 is used to mount the laser adjustment tool on a device, such as a laser processing device. The positioning plate 113 is fixedly connected with the mounting plate 112, and the first screw rod 131 is rotatably mounted on the positioning plate 113.
Referring to fig. 1 to 2, the third adjusting mechanism may include a plurality of third adjusting members, the adjusting seat 30 is provided with a plurality of adjusting holes 32, each third adjusting member is adjustably disposed in each corresponding adjusting hole 32 along the third direction, and one end of each third adjusting member passes through the adjusting hole 32 and abuts against the second adjusting mechanism 20. By adjusting the length of the third adjusting members extending out of the adjusting holes 32, the inclination angle of the adjusting seat 30 and thus the inclination angle of the optical mirror can be adjusted, so that the laser passing through the optical mirror can be kept vertical. Specifically, the third adjusting member may be an adjusting screw, the adjusting hole 32 may be a threaded hole, and the inclination angle of the adjusting seat 30 may be adjusted by rotating the adjusting screw, so that the adjustment is very simple and convenient.
Referring to fig. 1 to 2, the third adjusting mechanism may further include a connecting piece (not shown in the drawings), the adjusting seat 30 is provided with a through hole 33, the second adjusting mechanism 20 is provided with a connecting hole 24, and the connecting piece passes through the through hole 33 and is fixedly connected with the connecting hole 24. After the third adjusting member is adjusted, the connecting member is matched with the connecting hole 24, so that the adjusting seat 30 is fixed. Specifically, the connecting member may be a screw, and the connecting hole 24 may be a threaded hole.
Referring to fig. 1 to 2, the laser adjustment tool may further include an air blowing assembly 50, where the air blowing assembly 50 includes an air blowing frame 51 and an air blowing sleeve 52. The air blowing frame 51 is arranged on one side of the first adjusting mechanism 10 far away from the adjusting seat 30, and the air blowing sleeve 52 is arranged on the air blowing frame 51 and covers the outside of the optical mirror. By arranging the air blowing assembly 50, air blowing can be performed during workpiece processing, so that dust blowing can be realized, and the processing quality is improved.
The embodiment of the utility model also provides laser processing equipment, which comprises the laser adjusting tool in any embodiment.
The laser processing device provided by the embodiment of the utility model has the beneficial effects of the laser adjusting tool in any embodiment because the laser adjusting tool in any embodiment is adopted, and the description is omitted here.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (10)
1. Laser regulation frock, its characterized in that: comprising the following steps:
a first adjustment mechanism;
the second adjusting mechanism is arranged on the first adjusting mechanism and is driven by the first adjusting mechanism to move along a first direction;
the adjusting seat is arranged on the second adjusting mechanism through a third adjusting mechanism and is driven by the second adjusting mechanism to move along a second direction, the third adjusting mechanism is used for adjusting the inclination angle of the adjusting seat,
the driving piece is arranged on the adjusting seat and used for installing the optical lens and driving the optical lens to move along a third direction so as to adjust the focal length of the optical lens.
2. The laser tuning tool of claim 1, wherein: the driving piece is provided with a light path channel for laser to enter the optical mirror.
3. The laser tuning tool of claim 2, wherein: one end of the driving piece is connected with a connector communicated with the light path channel, and the connector is used for guiding the laser into the light path channel.
4. A laser tuning tool as claimed in claim 3, wherein: and the adjusting seat is provided with a mounting hole, and one end of the joint, which is far away from the driving piece, penetrates through the mounting hole and extends out of the mounting hole.
5. The laser tuning tool of claim 1, wherein: the first adjusting mechanism comprises a fixed seat, a first movable seat which can be movably arranged on the fixed seat along a first direction, and a first adjusting component for driving the first movable seat to move along the first direction;
the second adjusting mechanism comprises a second movable seat and a second adjusting component, the second movable seat can be movably arranged on the first movable seat along a second direction, the second adjusting component is used for driving the second movable seat to move along the second direction, and the adjusting seat is arranged on the second movable seat.
6. The laser tuning tool of claim 5, wherein: the first adjustment assembly includes:
the first screw rod is rotatably arranged on the fixed seat, and the first movable seat is in threaded connection with the first screw rod; the method comprises the steps of,
the first adjusting piece is in transmission connection with the first screw rod and is used for driving the first screw rod to rotate;
and/or the number of the groups of groups,
the second adjustment assembly includes:
the second screw rod is rotatably arranged on the first movable seat and is in threaded connection with the second screw rod; the method comprises the steps of,
and the second adjusting piece is in transmission connection with the second screw rod and is used for driving the second screw rod to rotate.
7. The laser tuning tool of claim 1, wherein: the third adjusting mechanism comprises a plurality of third adjusting parts, a plurality of adjusting holes are formed in the adjusting seat, each third adjusting part can be adjustably arranged in each corresponding adjusting hole along the third direction, and one end of each third adjusting part penetrates through each adjusting hole and abuts against the second adjusting mechanism.
8. The laser tuning tool of claim 7, wherein: the third adjusting mechanism further comprises a connecting piece, a through hole is formed in the adjusting seat, a connecting hole is formed in the second adjusting mechanism, and the connecting piece penetrates through the through hole and is fixedly connected with the connecting hole.
9. The laser tuning tool of any one of claims 1-8, wherein: the laser adjusting tool further comprises an air blowing assembly, wherein the air blowing assembly comprises an air blowing frame arranged on one side, far away from the adjusting seat, of the first adjusting mechanism, and an air blowing sleeve arranged on the air blowing frame and covered outside the optical lens.
10. A laser processing apparatus characterized in that: comprising a laser tuning tool according to any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320206451.5U CN219665402U (en) | 2023-01-31 | 2023-01-31 | Laser adjusting tool and laser processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320206451.5U CN219665402U (en) | 2023-01-31 | 2023-01-31 | Laser adjusting tool and laser processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219665402U true CN219665402U (en) | 2023-09-12 |
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ID=87926586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320206451.5U Active CN219665402U (en) | 2023-01-31 | 2023-01-31 | Laser adjusting tool and laser processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219665402U (en) |
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2023
- 2023-01-31 CN CN202320206451.5U patent/CN219665402U/en active Active
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