CN219658672U - Manual adjusting device for film expansion height of film expander - Google Patents

Abstract

The utility model relates to the technical field of wafer film expanding equipment, in particular to a manual adjusting device for the film expanding height of a film expander, which is characterized in that a film expanding carrier is vertically and slidably connected to a substrate, a first auxiliary plate is detachably connected to a mounting seat, a first photoelectric switch is connected to the first auxiliary plate, two groups of first guide rods which are vertically and slidably matched with the substrate are fixedly connected to the film expanding carrier at intervals along the circumferential direction, an induction plate matched with the first photoelectric switch is detachably connected to the bottom of one group of first guide rods, a bearing seat is arranged on the mounting seat, a lead screw fixedly connected with an inner ring of the bearing seat is rotatably connected to the substrate, a second auxiliary plate is in threaded connection with the lead screw, a second photoelectric switch corresponding to the induction plate is detachably connected to the second auxiliary plate, an adjusting knob is fixedly connected to one end of the lead screw, and the film expanding carrier is driven by a power device.

Description

Manual adjusting device for film expansion height of film expander

Technical Field

The utility model relates to the technical field of wafer film expansion equipment, in particular to a manual film expansion height adjusting device of a film expander.

Background

When processing a wafer, a film expander is often used to perform a film expanding operation on the wafer after the dicing or the surface cutting, so that the wafer is split into individual grains, and subsequent packaging operation is facilitated. In the market, wafers are various in variety, not only are various specifications divided in the radius of the wafer, but also differences in the thickness, the grain size and the like of the wafer are also present, and the protective films of the wafer are also different. Aiming at different conditions, the matched film expansion degree is often needed to achieve a good film expansion effect, and in a film expander, the film expansion degree refers to the expansion degree of a film, and the expansion of the film is directly controlled by the film expansion height;

in the existing equipment, the adjustment of the membrane expansion height is realized through two proximity switches, and the side cover plate is often required to be detached during operation, so that the position of the proximity switches is manually adjusted, and the operation is very inconvenient.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model aims to provide a manual adjusting device for the film expansion height of a film expander, which solves the technical problems that in the prior equipment, the adjustment of the film expansion height is realized through two proximity switches, a side cover plate is often required to be detached during operation, and the position of the proximity switches is manually adjusted, so that the operation is inconvenient.

The scheme adopted by the utility model is as follows: the utility model provides a manual adjusting device of membrane height is expanded to inflation film manufacturing machine, includes base plate, mount pad, its characterized in that, the base plate on vertical sliding connection have the inflation film manufacturing microscope stage, the mount pad on can dismantle and be connected with first auxiliary plate, first auxiliary plate on be connected with first photoelectric switch, the inflation film manufacturing microscope stage on along circumference interval fixedly connected with base plate vertical sliding fit's two sets of first guide bars, a set of first guide bar bottom can dismantle and be connected with first photoelectric switch complex induction plate, the mount pad on be equipped with the bearing frame, the base plate on rotate and be connected with the lead screw with bearing frame inner circle fixed connection, the lead screw on threaded connection have the second auxiliary plate, the second auxiliary plate on can dismantle and be connected with the second photoelectric switch that corresponds with the induction plate, base plate bottom fixedly connected with and second auxiliary plate sliding connection's second guide bar, lead screw one end fixedly connected with adjust knob, the inflation film manufacturing microscope stage by power device drive.

Preferably, the upper end of the screw rod is fixedly connected with a pinion, the rotating shaft end of the adjusting knob is fixedly connected with a large gear meshed with the pinion, and the bottom of the base plate is provided with a shell corresponding to the pinion and the large gear.

Preferably, the power device comprises an auxiliary rod fixedly connected with the bottom of the membrane expanding carrier, the auxiliary rod is driven by a pneumatic telescopic rod, and the pneumatic telescopic rod is electrically connected with the controller.

The utility model has the beneficial effects that:

through knob handle, drive gear wheel and pinion rotation, through the transmission, finally make the lead screw rotate and drive second photoelectric switch and make elevating movement, reach the purpose of adjusting the membrane height that expands, compensate general lead screw lead not big defect through gear wheel and pinion simultaneously, make the membrane machine that expands more convenient, nimble when adjusting the membrane height that expands.

Drawings

Fig. 1 is one of the perspective views of the present utility model.

Fig. 2 is a second perspective view of the present utility model.

Fig. 3 is a partial enlarged view of a of fig. 2.

Fig. 4 is one of the perspective cross-sectional views of the present utility model.

Reference numerals: 1. a substrate; 2. a mounting base; 3. a film spreading carrier; 4. a first auxiliary plate; 5. a first photoelectric switch; 6. a first guide bar; 7. an induction plate; 8. a bearing seat; 9. a screw rod; 10. a second auxiliary plate; 11. a second photoelectric switch; 12. a second guide bar; 13. an adjustment knob; 14. a pinion gear; 15. a large gear; 16. a housing; 17. an auxiliary rod.

Detailed Description

The foregoing and other features, aspects and advantages of the present utility model will become more apparent from the following detailed description of the embodiments with reference to the accompanying drawings. The following embodiments are described in detail with reference to the drawings.

Exemplary embodiments of the present utility model will be described below with reference to the accompanying drawings.

Embodiment one, a manual adjusting device of membrane expanding height of membrane expanding machine, including base plate 1, mount pad 2, its characterized in that, base plate 1 on vertical sliding connection have the membrane expanding carrier 3, the mount pad on can dismantle and be connected with first auxiliary plate 4, first auxiliary plate 4 on be connected with first photoelectric switch 5, the membrane expanding carrier 3 on along circumference interval fixedly connected with base plate 1 vertical sliding fit's two sets of first guide bar 6, wherein a set of first guide bar 6 bottom can dismantle and be connected with first photoelectric switch 5 complex induction plate 7, mount pad 2 on be equipped with bearing frame 8, base plate 1 on rotate and be connected with bearing frame 8 inner circle fixed connection's lead screw 9, lead screw 9 on threaded connection have second auxiliary plate 10, second auxiliary plate 10 on can dismantle be connected with the second photoelectric switch 11 that corresponds with induction plate 7, base plate 1 bottom fixedly connected with and second auxiliary plate 10 sliding connection's second guide bar 12, guide bar's one end of power adjusting device by lead screw 13.

In the second embodiment, on the basis of the first embodiment, the upper end of the screw rod 9 is fixedly connected with a pinion 14, the rotating shaft end of the adjusting knob 13 is fixedly connected with a large gear 15 meshed with the pinion 14, and the bottom of the base plate 1 is provided with a shell 16 corresponding to the pinion 14 and the large gear 15.

In the third embodiment, on the basis of the second embodiment, the power device comprises an auxiliary rod 17 fixedly connected with the bottom of the film expanding carrier 3, the auxiliary rod 17 is driven by a pneumatic telescopic rod, and the pneumatic telescopic rod is electrically connected with the controller.

When the embodiment is used, the utility model is designed according to the characteristics of the film expander, and the film expander drives the film expanding carrier 3 to reciprocate through an external power source in the operation process, so that the film expanding process is completed;

because the wafer has differences in the types of adhesive films, the sizes of crystal grains, the thicknesses of the wafer, the cutting conditions and the like, the film expansion height needs to be adjusted during film expansion so as to adapt to different conditions;

the lower limit of the film expansion height is generally 0, the first photoelectric switch 5 is fixedly arranged on the mounting seat 2 to limit, when the upper limit of the film expansion height is required to be adjusted, the adjusting knob 13 is rotated, the screw rod 9 is enabled to rotate through the transmission structure, the second photoelectric switch 11 is driven to move up and down along with the rotation of the screw rod, the adjustment of the upper limit of the film expansion height is completed, the pneumatic telescopic rod drives the film expansion carrier 3 to move up and down, the sensing plate 7 is matched with the first photoelectric switch 5 and the second photoelectric switch 11, when the sensing head reaches the second photoelectric switch 11, the pneumatic telescopic rod stops acting, the wafer film expansion work is completed, and the film expansion of different adhesive films can be suitable by rotating the adjusting knob 13; the technical problems that the side cover plate is often required to be detached during operation in the prior art, and the position of the proximity switch is manually adjusted are solved, so that the operation is very inconvenient;

since the lead of the screw rod is generally not high, a manual adjustment mode is added, so that a large gear 15 and a small gear 14 are additionally arranged between the screw rod and the knob to be matched, and the adjustment range brought by one rotation of the knob can be multiple times of the lead of the screw rod;

when the film expansion carrier 3 is in an initial position in standby, the film expansion height is 0 at the moment, the adjusting knob 13 sets an upper limit height, the main drive is started, and when the film expansion carrier 3 reaches the upper limit height, the connected sensing head triggers the upper limit photoelectric switch, and the upper limit photoelectric switch is fed back to the main control system to stop the main drive, so that one-time film expansion operation is completed.

The above description is only for the purpose of illustrating the utility model, and it should be understood that the utility model is not limited to the above embodiments, but various modifications consistent with the idea of the utility model are within the scope of the utility model.

Claims (3)

1. The utility model provides a manual adjusting device of film expander film height, includes base plate (1), mount pad (2), its characterized in that, base plate (1) on vertical sliding connection have film expander carrier (3), mount pad (2) on can dismantle and be connected with first auxiliary plate (4), first auxiliary plate (4) on be connected with first photoelectric switch (5), film expander carrier (3) on along circumference interval fixedly connected with base plate (1) vertical sliding fit's two sets of first guide bar (6), a set of first guide bar (6) bottom can dismantle and be connected with first photoelectric switch (5) complex induction plate (7), mount pad (2) on be equipped with bearing frame (8), base plate (1) on rotate and be connected with lead screw (9) with bearing frame (8) inner circle fixed connection, lead screw (9) on threaded connection have second auxiliary plate (10), second auxiliary plate (10) on can dismantle and be connected with induction plate (7) and correspond second photoelectric switch (1) second guide bar (13) fixed connection with second guide bar (13), the film expansion carrying platform (3) is driven by a power device.

2. The manual film expanding height adjusting device of the film expanding machine according to claim 1, wherein a pinion (14) is fixedly connected to the upper end of the screw rod (9), a large gear (15) meshed with the pinion (14) is fixedly connected to the rotating shaft end of the adjusting knob (13), and a shell (16) corresponding to the pinion (14) and the large gear (15) is arranged at the bottom of the base plate (1).

3. The manual film expanding height adjusting device of the film expanding machine according to claim 2, wherein the power device comprises an auxiliary rod (17) fixedly connected with the bottom of the film expanding carrying platform (3), the auxiliary rod (17) is driven by a pneumatic telescopic rod, and the pneumatic telescopic rod is electrically connected with the controller.