CN219657736U - Automatic wafer probe card replacing mechanism and wafer detecting equipment - Google Patents

Abstract

The utility model relates to the technical field of wafer testing, in particular to an automatic wafer probe card replacing mechanism and wafer detecting equipment. Wherein, one end of the case is provided with an opening, a four-dimensional platform is arranged in the case, the four-dimensional platform comprises an X-axis bottom plate and a Y-axis driving piece connected with the X-axis bottom plate, wherein the Y-axis driving piece is used for driving the X-axis bottom plate to move; the card holder is arranged in the case and is positioned at the top of the case; the card changing device is arranged on the X-axis bottom plate and close to the opening, and comprises a support frame and a needle card tray arranged on the support frame, wherein the support frame is arranged on the X-axis bottom plate, the needle card tray is used for supporting and fixing a probe card, and the card holder is used for clamping and fixing the needle card tray. The utility model has the effect of being convenient for replacing the probe card.

Description

Automatic wafer probe card replacing mechanism and wafer detecting equipment

Technical Field

The present utility model relates to the field of wafer testing, and in particular, to an automatic wafer probe card replacement mechanism and a wafer inspection apparatus.

Background

Currently, probe cards are a type of test tool used for testing chips prior to packaging to find defects in wafers. When the probe card is used for testing a wafer, the probe card needs to be fixed and then is connected with a chip.

For the related art in the above: in the wafer test apparatus, the probe card is usually fixed inside the apparatus by using a jig, so that it is inconvenient to replace the probe card.

Disclosure of Invention

In order to facilitate replacement of a probe card, the utility model provides an automatic wafer probe card replacement mechanism and wafer detection equipment.

In a first aspect, the present utility model provides an automatic wafer probe card replacement mechanism, which adopts the following technical scheme:

an automatic wafer probe card change mechanism comprising:

the machine box comprises a machine box body, wherein an opening is formed in one end of the machine box body, a four-dimensional platform is arranged in the machine box body, the four-dimensional platform comprises an X-axis bottom plate and a Y-axis driving piece connected with the X-axis bottom plate, and the Y-axis driving piece is used for driving the X-axis bottom plate to move;

the card holder is arranged in the case and is positioned at the top of the case;

the card changing device is arranged on the X-axis bottom plate and close to the opening, and comprises a supporting frame and a needle card tray arranged on the supporting frame, wherein the supporting frame is arranged on the X-axis bottom plate, the needle card tray is used for supporting and fixing a probe card, and the card holder is used for clamping and fixing the needle card tray.

Through adopting above-mentioned technical scheme, operating personnel can fix the probe card on the needle card tray outside the machine case to place the needle card tray on the support frame from the opening part, and Y axle driving piece can drive X axle bottom plate and remove at quick-witted incasement portion, and X axle bottom plate can drive the support frame and remove, thereby be convenient for the support frame drive needle card tray and remove to holding card ware department from the opening, so that hold card ware and carry out the centre gripping fixed to the needle card tray, and then be convenient for change the probe card.

Optionally, trade the card device and include trading card drive assembly and trade needle card platform board, trade card drive assembly setting is in on the support frame, trade needle card platform board rotate connect on the support frame and with trade card drive assembly connects, trade card drive assembly be used for the drive trade needle card platform board by vertical conversion level and go up and down at the horizontality, be provided with the locating pin on trading needle card platform board, set up the constant head tank on the needle card tray, the locating pin inserts and establishes in the constant head tank.

Through adopting above-mentioned technical scheme, through the locating pin connection between trading needle card platform board and the needle card tray, and trade the card drive assembly and can drive trading needle card platform board and carry out level and vertical state's conversion to make trading needle card platform board can be vertical state in the opening part, and make trading needle card platform board be horizontal state in card holder department, so that place the needle card tray on trading needle card platform board, perhaps take off the needle card tray from trading needle card platform board, and then be convenient for change needle card tray.

Optionally, the machine case is internally provided with the guide rail along the direction of movement of X axle bottom plate, the guide rail is located one side that the X axle bottom plate is close to machine case bottom, the support frame includes bottom plate, smooth support and slide, the bottom plate slides and sets up on the guide rail and with the X axle bottom plate is connected, trade card drive assembly including turning to cylinder and lift cylinder, the lift cylinder sets up on the bottom plate, the slide with the lift cylinder is connected, turn to the cylinder respectively with the slide with trade needle card platform board rotates to be connected, smooth support respectively with trade needle card platform board with the slide rotates to be connected, turn to the cylinder and be used for the drive trade needle card platform board is changed into the level by vertical.

Through adopting above-mentioned technical scheme, the guide rail can support the bottom plate and play the guide effect to the bottom plate, turns to the cylinder and can drive and trade needle card platform board and carry out the conversion of level and vertical state, and the lift cylinder can drive and trade needle card platform board and go up and down to be convenient for remove the needle card tray that is located on the needle card platform board to holding card ware department, and then be convenient for hold card ware and carry out the centre gripping to the needle card tray.

Optionally, trade the card device still includes locking subassembly, locking subassembly includes locking drive piece, colludes board, guiding axle and loop column, locking drive piece sets up on the bottom plate, it sets up to collude the board on the locking drive piece, it is provided with the opposite locking of orientation respectively to collude the both ends of board and collude, the guiding axle sets up on the quick-witted case inner wall, the loop column sets up X axle bottom plate is close to one side of bottom plate, locking drive piece is used for the drive locking collude with guiding axle or loop column joint.

Through adopting above-mentioned technical scheme, when locking collude with the guiding axle joint, the removal of X axle bottom plate is difficult for driving the bottom plate and removes, when locking collude with the cover post joint, the bottom plate removes along with the removal of X axle bottom plate to be convenient for when not needing to change the probe card, make the fixed position of bottom plate.

Optionally, the card holder includes the centre gripping drive assembly and with the centre gripping subassembly that the centre gripping drive assembly is connected, the centre gripping subassembly sets up the top of machine case, the centre gripping drive assembly is used for the drive the centre gripping subassembly centre gripping or release the needle card tray.

By adopting the technical scheme, the needle card tray is convenient to replace.

Optionally, the clamping assembly is in including setting up at the anchor clamps bottom plate at quick-witted case top and setting up internal fixation ring, needle clamping holding ring, rotatory track ring and external fixation ring on the anchor clamps bottom plate, needle clamping holding ring rotates the cover and establishes outside the internal fixation ring, rotatory track ring rotates the cover and establishes outside the needle clamping holding ring, external fixation ring cover is established rotatory track ring, rotatory track ring with the clamping drive assembly is connected, the clamping drive assembly is used for the drive rotatory track encircles self axis and takes place to rotate, rotatory track ring is used for driving needle clamping holding ring rotates, needle clamping holding ring is used for pressing from both sides tightly the needle card tray.

Through adopting above-mentioned technical scheme, the centre gripping drive assembly can drive needle clamping holding ring through rotatory track ring and rotate to be convenient for make needle clamping holding ring press from both sides tight needle card tray, and when the centre gripping drive assembly drives needle clamping holding ring reverse rotation through rotatory track ring, needle clamping holding ring can release needle card tray, and then be convenient for change needle card tray.

Optionally, the lifting groove that inclines has been seted up along circumference on the rotatory track ring, the track groove has been seted up along circumference on the outer fixed ring, on the rotatory track ring needle clamping ring is provided with the cam bearing follower respectively, on the rotatory track ring the cam bearing follower slides and inserts and establish in the track inslot, the needle clamping ring on the cam bearing follower slides and inserts and establish in the lifting groove, be provided with the arch on the circumference inner wall of needle clamping ring, the logical groove has been seted up along circumference on the needle clamping tray, the arch slides and inserts and establish in the logical inslot.

Through adopting above-mentioned technical scheme, when the rotatory orbital ring of centre gripping drive assembly drive rotates, the orbital groove can apply the guiding force to the cam bearing follower on the rotatory orbital ring for rotatory orbital ring drives needle clamping ring and rotates around self axis on the plane, and the elevating groove can apply the guiding force to the cam bearing follower on the needle clamping ring, makes needle clamping ring follow self axis direction mode and remove, thereby makes the arch can remove on needle clamping tray's surface promptly, can insert again and establish in logical inslot, and then makes needle clamping ring can be with needle clamping tray centre gripping between arch and internal fixation ring again, can make needle clamping tray break away from needle clamping ring, is convenient for change needle clamping tray to a certain extent.

Optionally, be provided with the elastic component between the internal fixation ring with needle clamping holding ring, the elastic component is used for driving needle clamping holding ring rotates, the needle clamping holding ring is close to one side of internal fixation ring has seted up the spacing groove, also set up cam bearing follower on the internal fixation ring, cam bearing follower slides and inserts and establish in the spacing groove.

Through adopting above-mentioned technical scheme, the setting of elastic component for when rotatory track ring drove needle clamping ring and rotates, needle clamping ring is difficult for taking place to remove along self axis, and the cam bearing follower on the internal fixation ring mutually support with needle clamping ring, when making needle clamping ring take place to remove along self axis, is difficult for taking place to rotate along with rotatory track ring, thereby is convenient for utilize needle clamping ring to press from both sides tightly or release needle clamping tray.

Optionally, the centre gripping drive assembly includes clamp driving piece, anchor clamps pushing seat and anchor clamps push rod, the clamp driving piece sets up on the quick-witted case inner wall, the anchor clamps pushing seat with the clamp driving piece is connected, the groove of stepping down has been seted up along circumference on the outer solid fixed ring, the one end of anchor clamps push rod passes the groove of stepping down with rotatory track ring is connected, the spout has been seted up along self length direction to the other end of anchor clamps push rod, also set up cam bearing follower on the anchor clamps pushing seat, cam bearing follower slides and inserts and establish in the spout.

Through adopting above-mentioned technical scheme, the anchor clamps drive piece can drive anchor clamps and promote the seat and remove, and the anchor clamps promotes the seat and can drive the anchor clamps push rod through the cam bearing follower and rotate to be convenient for drive rotatory track ring through the anchor clamps push rod and rotate.

In a second aspect, the present utility model provides a wafer inspection apparatus, including any one of the foregoing automatic wafer probe card replacement mechanisms, which adopts the following technical scheme:

the utility model provides a wafer check out test set, includes the chuck, four-dimensional platform includes X axle driving piece, Z axle driving piece and loading board, the loading board slides and sets up on the X axle bottom plate, X axle driving piece sets up on the X axle bottom plate and with the loading board is connected, X axle driving piece is used for the drive the loading board is in move on the X axle bottom plate, Z axle driving piece the chuck sets up respectively on the loading board, Z axle driving piece with the chuck is connected, Z axle driving piece is used for the drive the chuck goes up and down, the chuck is used for bearing the wafer.

Through adopting above-mentioned technical scheme, the Y axle driving piece can drive X axle bottom plate and remove along the Y axle, and the X axle driving piece can drive the loading board and remove along the X axle, and the Z axle driving piece can drive the chuck and remove along the Z axle to be convenient for remove the chuck to the position that is close to the probe card, and can bear the wafer on the chuck, make the wafer can contradict with the probe card, and then be convenient for detect the wafer.

In summary, the present utility model includes at least one of the following beneficial technical effects:

1. through the mutual matching of the Y-axis driving piece, the X-axis bottom plate, the supporting frame, the needle card tray, the card changing driving assembly, the needle card changing platform plate and the card holder, the needle card tray can move from the opening of the case to the card holder and be clamped by the card holder, thereby being convenient for replacing the needle card tray and further being convenient for replacing the probe card;

2. through the mutual matching of the bottom plate, the sliding support, the sliding plate, the needle changing card platform plate, the steering cylinder and the lifting cylinder, the needle card tray can be converted into a horizontal state and a vertical state, and the needle card tray can be lifted, so that the needle card tray can be conveniently clamped by the card holder;

3. through the mutual matching of the locking driving piece, the hook plate, the guide shaft and the sleeve column, the bottom plate can not move along with the movement of the X-axis bottom plate when the probe card does not need to be replaced, so that the position of the bottom plate is convenient to fix;

4. through the mutually supporting of internal fixation ring, needle clamping ring, rotatory track ring, outer fixation ring, cam bearing follower, elastic component, anchor clamps driving piece, anchor clamps pushing seat and anchor clamps push rod for rotatory track ring can drive the needle clamping ring and rotate around self axis, can drive needle clamping ring and remove along self axis again, thereby is convenient for press from both sides tightly or release needle card tray with needle clamping ring.

Drawings

Fig. 1 is a schematic overall structure of an automatic wafer probe card replacement mechanism according to an embodiment of the present utility model.

Fig. 2 is a schematic structural diagram of a four-dimensional platform and a card changing device according to an embodiment of the utility model.

Fig. 3 is a schematic structural diagram of a card changing device according to an embodiment of the utility model.

Fig. 4 is a schematic structural view of a locking assembly according to an embodiment of the present utility model.

Fig. 5 is a schematic structural view of a card holder according to an embodiment of the present utility model.

Fig. 6 is an exploded view of the card holder according to the embodiment of the present utility model.

Fig. 7 is a schematic structural view of another view of the card holder according to the embodiment of the present utility model.

Fig. 8 is a schematic diagram of the overall structure of a wafer inspection apparatus according to an embodiment of the present utility model.

Fig. 9 is a schematic view of the structure of the inside of the casing in fig. 8.

Reference numerals illustrate:

1. a chassis; 11. an opening; 12. a four-dimensional platform; 121. an X-axis bottom plate; 122. a Y-axis driving member; 123. a Y-axis guide rail; 124. an X-axis driving member; 125. a Z-axis driving member; 126. a carrying plate; 127. an X-axis guide rail; 13. a guide rail; 14. a front roll-over door; 2. a card holder; 21. clamping the driving assembly; 211. a clamp driving member; 212. the clamp pushes the seat; 213. a clamp push rod; 2131. a chute; 22. a clamping assembly; 221. a clamp base plate; 222. an inner fixing ring; 223. a needle clamp tightening ring; 2231. a limit groove; 2232. a protrusion; 224. rotating the orbital ring; 2241. a lifting groove; 225. an outer fixing ring; 2251. a relief groove; 2252. a track groove; 226. an elastic member; 23. cam bearing follower; 3. a card changing device; 31. a support frame; 311. a bottom plate; 312. a sliding support; 313. a slide plate; 32. a needle card tray; 321. a positioning groove; 322. a through groove; 33. a card changing driving assembly; 331. a steering cylinder; 332. a lifting cylinder; 34. needle changing card platform plate; 341. a positioning pin; 35. a locking assembly; 351. a locking drive; 352. a hook plate; 3521. a locking hook; 353. a guide shaft; 354. a sleeve column; 4. a chuck.

Detailed Description

The utility model is described in further detail below with reference to fig. 1-9.

The embodiment of the utility model discloses an automatic wafer probe card replacing mechanism.

Referring to fig. 1, an automatic wafer probe card replacing mechanism includes a chassis 1, a card holder 2, and a card replacing device 3. An opening 11 is formed at one end of the case 1, a four-dimensional platform 12 is arranged in the case 1, the four-dimensional platform 12 comprises an X-axis bottom plate 121 and a Y-axis driving piece 122 connected with the X-axis bottom plate 121, and the Y-axis driving piece 122 is used for driving the X-axis bottom plate 121 to move; the card holder 2 is arranged in the case 1 and is positioned at the top of the case 1; the card changing device 3 is arranged on the X-axis bottom plate 121 and is close to the opening 11, the card changing device 3 comprises a supporting frame 31 and a needle card tray 32 arranged on the supporting frame 31, the supporting frame 31 is arranged on the X-axis bottom plate 121, the needle card tray 32 is used for supporting and fixing a probe card, and the card holder 2 is used for clamping and fixing the needle card tray 32.

Referring to fig. 1 and 2, the four-dimensional stage 12 includes two Y-axis rails 123 mounted on the bottom wall of the cabinet 1, and the two Y-axis rails 123 are parallel to each other and located on a side of the X-axis bottom plate 121 near the base. The Y-axis driving member 122 is located between two Y-axis guide rails 123, and the X-axis bottom plate 121 is slidably connected to the two Y-axis guide rails 123, respectively. In this embodiment, the Y-axis driving member 122 is driven by a motor screw, so that the Y-axis driving member 122 is used to drive the X-axis bottom plate 121 to move along the Y-axis guide rail 123 in the chassis 1.

Referring to fig. 1 and 2, a guide rail 13 is fixedly installed in the cabinet 1, the guide rail 13 is parallel to the Y-axis guide rails 123, and the guide rail 13 is located between the two Y-axis guide rails 123.

The support 31 includes a base 311, a slide support 312, and a slide 313. Wherein the bottom plate 311 is slidably connected to the two Y-axis rails 123 and one rail 13, respectively, and the bottom plate 311 is located at one side of the X-axis bottom plate 121 near the opening 11. The guide rail 13 is located at the middle of the bottom plate 311 so that the guide rail 13 can support and guide the bottom plate 311.

Referring to fig. 3 and 4, the card changing device 3 includes a card changing drive assembly 33, a card changing platform plate 34, and a lock assembly 35. The locking assembly 35 includes a locking driving member 351, a hook plate 352, a guide shaft 353 and a sleeve column 354, the locking driving member 351 is fixedly mounted on the bottom plate 311, the hook plate 352 is fixedly connected with the locking driving member 351, and two ends of the hook plate 352 are respectively and fixedly connected with locking hooks 3521 with opposite directions.

Referring to fig. 1 and 4, a guide shaft 353 is installed on the inner wall of the cabinet 1, and the guide shaft 353 is positioned at one side of the bottom plate 311 near the opening 11. The sleeve 354 is mounted on the side of the X-axis base plate 121 adjacent to the base plate 311.

Referring to fig. 2 and 4, the locking driving member 351 in this embodiment is an air cylinder, so that the locking driving member 351 can drive the hook plate 352 to move along the length direction of the bottom plate 311, so that the locking hook 3521 can hook the guide shaft 353 or the sleeve post 354.

When the locking hook 3521 hooks the guide shaft 353, there is no connection between the locking hook 3521 and the sleeve column 354, so that the bottom plate 311 is not connected with the X-axis bottom plate 121, and when the Y-axis driving member 122 drives the X-axis bottom plate 121 to move, the bottom plate 311 is not easy to move along with the movement of the X-axis bottom plate 121, and the position of the bottom plate 311 is fixed.

When the locking hook 3521 hooks the sleeve column 354, the locking hook 3521 does not hook the guide shaft 353 any more, so that the bottom plate 311 is connected with the X-axis bottom plate 121, and the X-axis bottom plate 121 can drive the bottom plate 311 to move, so that the bottom plate 311 is conveniently driven to move by the Y-axis driving member 122.

Referring to fig. 3, the card changing drive assembly 33 includes a steering cylinder 331 and a lifting cylinder 332. Wherein, lift cylinder 332 fixed mounting is on bottom plate 311, and slide 313 and lift cylinder 332 fixed connection to make lift cylinder 332 can drive slide 313 go up and down.

Referring to fig. 1 and 3, in this embodiment, two sliding supports 312 are provided, the two sliding supports 312 are symmetrically distributed on the sliding plate 313 and are rotatably connected to the sliding plate 313, and one ends of the two sliding supports 312 away from the sliding plate 313 are respectively rotatably connected to the needle changing card platform plate 34. The needle changing card platform plate 34 is arranged near the opening 11 in this embodiment.

The steering cylinder 331 is rotatably connected to one side of the sliding plate 313 away from the opening 11, and one end of the steering cylinder 331 away from the sliding plate 313 is rotatably connected to the needle changing card platform plate 34, so that the needle changing card platform plate 34 can be driven to switch between a vertical state and a horizontal state by the operation of the steering cylinder 331, and the relative position of the needle changing card platform plate 34 can be kept stable when the steering cylinder 331 does not operate.

Referring to fig. 2, positioning pins 341 are fixedly connected to the needle changing card platform plate 34, in this embodiment, three positioning pins 341 are provided, and the three positioning pins 341 are uniformly distributed on the needle changing card platform plate 34. The needle card tray 32 is provided with positioning grooves 321, and the number of the positioning grooves 321 is equal to that of the positioning pins 341. When the card tray 32 is placed on the card changing platform plate 34, the positioning pins 341 can be inserted into the positioning grooves 321, so that the card tray 32 is not easy to move on the card changing platform plate 34.

Referring to fig. 5 and 6, the card holder 2 includes a grip driving assembly 21 and a grip assembly 22 connected to the grip driving assembly 21. The clamping assembly 22 includes a clamp base 221 fixed to the top of the casing 1 (see fig. 1), and an inner fixing ring 222, a needle clamp tightening ring 223, a rotation track ring 224, and an outer fixing ring 225 coaxially provided on the clamp base 221.

The inner fixing ring 222 is fixedly connected to the clamp bottom plate 221, the needle clamp tightening ring 223 is rotatably sleeved outside the inner fixing ring 222, the needle clamp tightening ring 223 can move along the axis direction of the needle clamp tightening ring 223, the rotary track ring 224 is rotatably sleeved outside the needle clamp tightening ring 223, and the outer fixing ring 225 is rotatably sleeved outside the rotary track ring 224.

Referring to fig. 5 and 6, the clamp driving assembly 21 includes a clamp driving member 211, a clamp pushing seat 212, and a clamp pushing rod 213. Wherein, the clamp driving member 211 is fixedly connected to the inner wall of the chassis 1 (refer to fig. 1), and the clamp pushing base 212 is connected to the clamp driving member 211. In this embodiment, the clamp driving member 211 is a magnetic coupling type rodless cylinder, so that the clamp driving frame can drive the clamp pushing base 212 to reciprocate.

The outer fixing ring 225 is provided with a yielding groove 2251 along the circumferential direction, one end of the clamp push rod 213 passes through the yielding groove 2251 and is fixedly connected with the rotating track ring 224, and the other end of the clamp push rod 213 is provided with a sliding groove 2131 along the length direction thereof. In this embodiment, the clamp pushing seat 212 is provided with a cam follower 23, and the cam follower 23 is slidably inserted in the chute 2131, so that when the clamp pushing seat 212 moves, the cam follower 23 can drive the clamp push rod 213 to rotate, and the clamp push rod 213 can drive the rotating track ring 224 to rotate around the axis thereof.

Referring to fig. 6, the rotating track ring 224 is provided with a plurality of inclined elevating grooves 2241 in the circumferential direction, and the elevating grooves 2241 are uniformly distributed around the axis of the rotating track groove 2252.

The outer fixing ring 225 is provided with track grooves 2252 along the circumferential direction, the number of the track grooves 2252 is equal to the number of the lifting grooves 2241, and the lifting grooves 2241 and the track grooves 2252 are arranged in a staggered manner in this embodiment.

The rotating track ring 224 and the needle clamp tightening ring 223 are respectively provided with a plurality of cam bearing followers 23, the cam bearing followers 23 on the rotating track ring 224 are glidingly inserted in the track grooves 2252, and the cam bearing followers 23 on the needle clamp tightening ring 223 are glidingly inserted in the lifting grooves 2241.

Referring to fig. 6 and 7, an elastic member 226 is disposed between the inner fixing ring 222 and the needle clip tightening ring 223, and the elastic member 226 is used for driving the needle clip tightening ring 223 to rotate, in this embodiment, the elastic member 226 is an extension spring.

The needle clamp tightening ring 223 is provided with a limit groove 2231 at one side close to the inner fixing ring 222, the inner fixing ring 222 is also provided with a cam bearing follower 23, and the cam bearing follower 23 is inserted in the limit groove 2231 in a sliding way.

The protrusion 2232 is integrally formed on the circumferential inner wall of the needle clip fastening ring 223, the through groove 322 is formed on the needle clip tray 32 along the circumferential direction, the protrusion 2232 can be slidably inserted into the through groove 322, and the protrusion 2232 can abut against the needle clip tray 32, so that the needle clip tray 32 is clamped and fixed between the protrusion 2232 and the inner fixing ring 222, and at this time, the elastic piece 226 is in an extension state.

Referring to fig. 5 and 6, when it is required to remove the card tray 32 clamped between the boss 2232 and the inner fixing ring 222, the clamp driving member 211 is activated, and the clamp driving member 211 rotates the rotation rail ring 224 through the clamp pushing seat 212, the cam bearing follower 23 and the clamp push rod 213. At this time, the track groove 2252 can apply a guiding force to the cam bearing follower 23 on the rotating track ring 224, and at the same time, the elastic member 226 contracts to drive the needle clip tightening ring 223 to rotate on the plane along with the rotating track ring 224 around its own axis, so that the needle clip tightening ring 223 drives the protrusion 2232 to rotate to a position close to the through groove 322.

At this time, the rotating track ring 224 continues to rotate, so that the lifting groove 2241 applies a guiding force to the cam bearing follower 23 on the needle clip tightening ring 223, so as to drive the needle clip tightening ring 223 to move along the self axis to a direction close to the clamp bottom plate 221, so that the protrusion 2232 is inserted into the through groove 322, and further, the protrusion 2232 does not limit the needle clip tray 32 any more, so that the needle clip tray 32 is convenient to take down.

The above operation is reversed, so that the card tray 32 is clamped between the protrusion 2232 and the inner fixing ring 222.

The implementation principle of the automatic wafer probe card replacement mechanism provided by the embodiment of the utility model is as follows: when the needle card tray 32 needs to be replaced, the steering cylinder 331 is started first to convert the needle card platform plate 34 from a vertical state to a horizontal state, and meanwhile, the locking driving piece 351 is started, so that the locking hook 3521 hooks the sleeve column 354, the Y-axis driving piece 122 is started again, and the needle card platform plate 34 is moved to be right below the needle card clamping ring 223 through the X-axis bottom plate 121 and the bottom plate 311. Then, the lifting cylinder 332 is started to drive the needle changing platform plate 34 to move towards the needle clamping tightening ring 223, and the clamp driving piece 211 is started, so that the protrusion 2232 on the needle clamping tightening ring 223 does not limit the needle changing platform plate 32 any more, and the needle changing platform plate 34 is dropped onto the needle changing platform plate 32. Then the lifting cylinder 332, the Y-axis driving piece 122 and the steering cylinder 331 are sequentially and reversely started, and the needle card tray 32 is driven to the opening 11 by the needle card changing platform plate 34, so that an operator can conveniently take out the needle card tray 32.

Then, a new card tray 32 is placed on the card changing platform plate 34, and the steering cylinder 331, the Y-axis driving member 122, and the lifting cylinder 332 are sequentially activated to move the new card tray 32 to the card clamping ring 223. At this time, the protrusion 2232 is inserted into the through groove 322. The clamp driving member 211 is then activated, so that the protrusion 2232 passes through the through groove 322 and moves to the side of the card tray 32 facing away from the inner fixing ring 222, thereby clamping and fixing the card tray 32.

Finally, the lifting cylinder 332, the Y-axis driver 122 and the steering cylinder 331 are sequentially and reversely started to move the needle changing card platform plate 34 to the opening 11, and the locking driver 351 is reversely started to enable the locking hook 3521 to hook the guide shaft 353. Replacement of the card tray 32 is completed.

The embodiment of the utility model also discloses wafer detection equipment which comprises the automatic wafer probe card replacing mechanism.

Referring to fig. 8 and 9, a wafer inspection apparatus includes a chuck 4. Four-dimensional stage 12 includes an X-axis drive 124, a Z-axis drive 125, and a carrier plate 126. The bearing plate 126 is slidably disposed on the X-axis bottom plate 121, the X-axis driving member 124 is disposed on the X-axis bottom plate 121 and connected to the bearing plate 126, an X-axis guide rail 127 is fixedly connected to the X-axis bottom plate 121, and the X-axis guide rail 127 is perpendicular to the Y-axis guide rail 123.

The Z-axis driving member 125 and the chuck 4 are respectively disposed on the carrier plate 126, and the Z-axis driving member 125 is connected to the chuck 4, the Z-axis driving member 125 is used for driving the chuck 4 to lift, and the chuck 4 is used for carrying a wafer.

Referring to fig. 8 and 9, when a wafer needs to be inspected, the Y-axis driving member 122 is sequentially utilized to drive the X-axis bottom plate 121 to move along the Y-axis guide rail 123, the X-axis driving member 124 drives the carrier plate 126 to move along the X-axis guide rail 127, and the Z-axis driving member 125 drives the chuck 4 to lift, so that the chuck 4 is conveniently moved to a position close to the probe card on the probe card tray 32, and the wafer on the chuck 4 is made to collide with the probe card, so that the wafer is conveniently inspected.

Referring to fig. 1 and 8, in this embodiment, a front door 14 is hinged to the chassis 1, and the front door 14 is used for sealing the opening 11, so that the interior of the chassis 1 is in a sealed state during wafer inspection.

The above embodiments are not intended to limit the scope of the present utility model, so: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.

Claims (10)

1. An automatic wafer probe card replacement mechanism, comprising:

the machine comprises a machine case (1), wherein an opening (11) is formed in one end of the machine case (1), a four-dimensional platform (12) is arranged in the machine case (1), the four-dimensional platform (12) comprises an X-axis bottom plate (121) and a Y-axis driving piece (122) connected with the X-axis bottom plate (121), and the Y-axis driving piece (122) is used for driving the X-axis bottom plate (121) to move;

the card holder (2) is arranged in the case (1) and is positioned at the top of the case (1);

the card changing device (3) is arranged on the X-axis bottom plate (121) and is close to the opening (11), the card changing device (3) comprises a supporting frame (31) and a needle card tray (32) arranged on the supporting frame (31), the supporting frame (31) is arranged on the X-axis bottom plate (121), the needle card tray (32) is used for supporting and fixing a probe card, and the card holder (2) is used for clamping and fixing the needle card tray (32).

2. The automatic wafer probe card replacement mechanism of claim 1, wherein: the card changing device (3) comprises a card changing driving assembly (33) and a card changing platform plate (34), the card changing driving assembly (33) is arranged on the supporting frame (31), the card changing platform plate (34) is rotationally connected to the supporting frame (31) and connected with the card changing driving assembly (33), the card changing driving assembly (33) is used for driving the card changing platform plate (34) to be horizontally converted from vertical and lifted in a horizontal state, a positioning pin (341) is arranged on the card changing platform plate (34), a positioning groove (321) is formed in the card changing platform plate (32), and the positioning pin (341) is inserted into the positioning groove (321).

3. The automatic wafer probe card replacement mechanism according to claim 2, wherein: the machine box is characterized in that a guide rail (13) is arranged in the machine box (1) along the moving direction of the X-axis bottom plate (121), the guide rail (13) is located on one side, close to the bottom of the machine box (1), of the X-axis bottom plate (121), the support frame (31) comprises a bottom plate (311), a sliding support (312) and a sliding plate (313), the bottom plate (311) is arranged on the guide rail (13) in a sliding mode and is connected with the X-axis bottom plate (121), the card changing driving assembly (33) comprises a steering cylinder (331) and a lifting cylinder (332), the lifting cylinder (332) is arranged on the bottom plate (311), the sliding plate (313) is connected with the lifting cylinder (332), the steering cylinder (331) is respectively connected with the sliding plate (313) and the card changing platform plate (34) in a rotating mode, and the steering cylinder (331) is used for driving the card changing platform plate (34) to be horizontal from vertical to horizontal.

4. The automatic wafer probe card replacement mechanism according to claim 3, wherein: the card changing device (3) further comprises a locking assembly (35), the locking assembly (35) comprises a locking driving piece (351), a hook plate (352), a guide shaft (353) and a sleeve column (354), the locking driving piece (351) is arranged on the bottom plate (311), the hook plate (352) is arranged on the locking driving piece (351), locking hooks (3521) with opposite directions are respectively arranged at two ends of the hook plate (352), the guide shaft (353) is arranged on the inner wall of the chassis (1), the sleeve column (354) is arranged on one side, close to the bottom plate (311), of the X-axis bottom plate (121), and the locking driving piece (351) is used for driving the locking hooks (3521) to be clamped with the guide shaft (353) or the sleeve column (354).

5. The automatic wafer probe card replacement mechanism of claim 1, wherein: the card holder (2) comprises a clamping driving assembly (21) and a clamping assembly (22) connected with the clamping driving assembly (21), wherein the clamping assembly (22) is arranged at the top of the case (1), and the clamping driving assembly (21) is used for driving the clamping assembly (22) to clamp or release the needle card tray (32).

6. The automatic wafer probe card replacement mechanism according to claim 5, wherein: the clamping assembly (22) comprises a clamp bottom plate (221) arranged at the top of the machine case (1) and an inner fixing ring (222), a needle clamping tightening ring (223), a rotating track ring (224) and an outer fixing ring (225) which are arranged on the clamp bottom plate (221), the needle clamping tightening ring (223) is rotationally sleeved outside the inner fixing ring (222), the rotating track ring (224) is rotationally sleeved outside the needle clamping tightening ring (223), the outer fixing ring (225) is sleeved outside the rotating track ring (224), the rotating track ring (224) is connected with the clamping driving assembly (21), the clamping driving assembly (21) is used for driving the rotating track ring (224) to rotate around the axis of the rotating track ring (224), the rotating track ring (224) is used for driving the needle clamping tightening ring (223) to rotate, and the needle clamping tightening ring (223) is used for clamping the needle clamping tray (32).

7. The automatic wafer probe card replacement mechanism of claim 6, wherein: the lifting groove (2241) of slope has been seted up along circumference on rotatory track ring (224), track groove (2252) has been seted up along circumference on outer fixed ring (225), be provided with cam bearing follower (23) on rotatory track ring (224) on needle clamping holding ring (223) respectively, cam bearing follower (23) on rotatory track ring (224) slide and insert establish in track groove (2252), cam bearing follower (23) on needle clamping holding ring (223) slide and insert establish in lifting groove (2241), be provided with arch (2232) on the circumference inner wall of needle clamping holding ring (223), through groove (322) have been seted up along circumference on needle clamping holding plate (32), arch (2232) slide and insert and establish in through groove (322).

8. The automatic wafer probe card replacement mechanism of claim 7, wherein: an elastic piece (226) is arranged between the inner fixing ring (222) and the needle clamp fastening ring (223), the elastic piece (226) is used for driving the needle clamp fastening ring (223) to rotate, a limit groove (2231) is formed in one side, close to the inner fixing ring (222), of the needle clamp fastening ring (223), a cam bearing follower (23) is also arranged on the inner fixing ring (222), and the cam bearing follower (23) is slidably inserted into the limit groove (2231).

9. The automatic wafer probe card replacement mechanism of claim 6, wherein: the clamping driving assembly (21) comprises a clamp driving piece (211), a clamp pushing seat (212) and a clamp pushing rod (213), wherein the clamp driving piece (211) is arranged on the inner wall of the chassis (1), the clamp pushing seat (212) is connected with the clamp driving piece (211), a yielding groove (2251) is formed in the outer fixing ring (225) along the circumferential direction, one end of the clamp pushing rod (213) penetrates through the yielding groove (2251) and is connected with the rotating track ring (224), a sliding groove (2131) is formed in the other end of the clamp pushing rod (213) along the length direction of the other end of the clamp pushing rod, a cam bearing follower (23) is also arranged on the clamp pushing seat (212), and the cam bearing follower (23) is slidably inserted in the sliding groove (2131).

10. Wafer inspection apparatus comprising the automatic wafer probe card changing mechanism according to any one of claims 1 to 9, characterized in that: including chuck (4), four-dimensional platform (12) include X axle driving piece (124), Z axle driving piece (125) and loading board (126), loading board (126) slide and set up on X axle bottom plate (121), X axle driving piece (124) set up on X axle bottom plate (121) and with loading board (126) are connected, X axle driving piece (124) are used for the drive loading board (126) are in X axle bottom plate (121) are gone up and down, Z axle driving piece (125) chuck (4) set up respectively on loading board (126), Z axle driving piece (125) with chuck (4) are connected, Z axle driving piece (125) are used for the drive chuck (4) go up and down, chuck (4) are used for bearing the wafer.