CN219637323U - Vacuum coating device - Google Patents
Vacuum coating device Download PDFInfo
- Publication number
- CN219637323U CN219637323U CN202321331424.7U CN202321331424U CN219637323U CN 219637323 U CN219637323 U CN 219637323U CN 202321331424 U CN202321331424 U CN 202321331424U CN 219637323 U CN219637323 U CN 219637323U
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- China
- Prior art keywords
- main body
- vacuum
- vacuum coating
- sealing plate
- connecting rod
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 31
- 238000001704 evaporation Methods 0.000 claims abstract description 27
- 230000008020 evaporation Effects 0.000 claims abstract description 27
- 238000007789 sealing Methods 0.000 claims abstract description 25
- 238000000926 separation method Methods 0.000 claims abstract description 3
- 230000008602 contraction Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 abstract description 6
- 238000005086 pumping Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a vacuum coating device which comprises a base, a first main body, a second main body, a vacuumizing mechanism, a control mechanism, a corrugated pipe, a sealing plate, a connecting rod and an evaporation source, wherein the first main body is arranged on the base and provided with a first cavity, the second main body is communicated with the first main body and provided with a second cavity, the vacuumizing mechanism is used for vacuumizing the first main body and the second main body respectively, the control mechanism is arranged between the first main body and the second main body and used for controlling the communication or the separation of the first main body and the second main body, the corrugated pipe is communicated with the second main body through one end, the sealing plate is detachably sealed at the other end of the corrugated pipe, one end of the connecting rod is connected to the sealing plate and penetrates through the corrugated pipe, and the evaporation source is arranged at the other end of the connecting rod; the sealing plate and the connecting rod can synchronously reciprocate along a first direction, an opening used for being penetrated by the evaporation source is formed in the first main body, and the control mechanism is used for opening or closing the opening; the vacuum coating device also comprises a driving mechanism for driving the sealing plate to move. The vacuum coating device can replace the evaporation source on the premise of not damaging the vacuum degree, and ensures the coating efficiency.
Description
Technical Field
The utility model relates to a vacuum coating device.
Background
The sample is coated by the evaporation source in a vacuum environment, and when the coating material needs to be replaced or the evaporation source is exhausted, the evaporation source in the vacuum environment needs to be taken out for replacement. Taking out the evaporation source inevitably damages the vacuum environment, which results in the need of consuming a long time to make the vacuum degree in the vacuum environment meet the coating requirement again, thereby not only improving the coating cost, but also having relatively low coating efficiency.
Disclosure of Invention
The utility model aims to provide a vacuum coating device which can replace an evaporation source on the premise of not damaging the vacuum degree and ensure the coating efficiency.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the vacuum coating device comprises a base, a first main body, a second main body, a vacuumizing mechanism, a control mechanism, a corrugated pipe, a sealing plate, a connecting rod and an evaporation source, wherein the first main body is arranged on the base and provided with a first cavity, the second main body is communicated with the first main body and provided with a second cavity, the vacuumizing mechanism is used for vacuumizing the first main body and the second main body respectively, the control mechanism is arranged between the first main body and the second main body and used for controlling the communication or the separation of the first main body and the second main body, the corrugated pipe is communicated with the second main body through one end, the sealing plate is detachably sealed at the other end of the corrugated pipe, the connecting rod is connected with the sealing plate and penetrates through the corrugated pipe, and the evaporation source is arranged at the other end of the connecting rod;
the sealing plate and the connecting rod can synchronously reciprocate along a first direction, an opening used for being penetrated in and out by the evaporation source along the first direction is formed in the first main body, and the control mechanism is used for controlling the opening to be opened or closed;
the vacuum coating device further comprises a driving mechanism which is arranged on the base and used for driving the sealing plate to move back and forth along the first direction.
Preferably, the connecting rod is parallel to the expansion and contraction direction of the corrugated pipe, and the connecting rod and the expansion and contraction direction of the corrugated pipe are respectively parallel to the first direction.
Preferably, the vacuum pumping mechanism comprises a first vacuum pump for pumping vacuum to the first main body, and a second vacuum pump for pumping vacuum to the second main body.
Preferably, the vacuumizing mechanism comprises a third vacuum pump, a first pipeline, a first control valve, a second pipeline and a second control valve, wherein two ends of the first pipeline are respectively communicated with the third vacuum pump and the first main body, the first control valve is arranged on the first pipeline, two ends of the second pipeline are respectively communicated with the third vacuum pump and the second main body, and the second control valve is arranged on the second pipeline.
Preferably, the control mechanism is a vacuum gate valve, and the upper end and the lower end of the vacuum gate valve are respectively communicated with the first main body and the second main body.
More preferably, the vacuum gate valve comprises a valve seat arranged between the first body and the second body, and a valve core slidably arranged in the valve seat, wherein the valve core is used for controlling the on-off between the first body and the second body through sliding.
Still further preferably, the direction of movement of the spool is perpendicular to the first direction.
Preferably, the driving mechanism comprises a nut which is rotatably arranged on the base around the direction of the axis of the driving mechanism, a screw rod which is arranged in the nut in a penetrating way and is connected with the sealing plate, and a driving motor which is arranged on the base and is used for driving the nut to rotate.
More preferably, the nut is provided with a driven gear which rotates synchronously with the nut, the output end of the driving motor is provided with a driving gear which is connected with the driven gear through a transmission belt, and the screw rod passes through the driven gear downwards.
Preferably, the vacuum coating device further comprises a support column arranged on the base and used for bearing the first main body.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages: according to the vacuum coating device, the first main body and the corrugated pipe which are respectively communicated with the second main body are arranged, when the evaporation source needs to be replaced, the evaporation source is firstly sent into the corrugated pipe, and then the opening is closed, so that the vacuum degree in the first main body is not influenced; after the evaporation source is replaced, the corrugated pipe is vacuumized and then the opening is opened, the evaporation source is sent into the first main body, the evaporation source can be replaced on the premise that the vacuum degree is not damaged, and the film coating efficiency is guaranteed.
Drawings
FIG. 1 is a schematic view of a vacuum coating apparatus according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a vacuum coating apparatus according to an embodiment of the present utility model;
fig. 3 is a schematic structural diagram of a second vacuum coating apparatus according to an embodiment of the present utility model. Wherein: 1. a base; 2. a first body; 21. a first cavity; 3. a second body; 31. a second cavity; 4. a vacuum pumping mechanism; 41. a first vacuum pump; 42. a second vacuum pump; 43. a third vacuum pump; 44. a first pipeline; 45. a first control valve; 46. a second pipeline; 47. a second control valve; 5. a vacuum gate valve; 6. a bellows; 7. a sealing plate; 8. a connecting rod; 9. a driving mechanism; 91. a nut; 92. a screw rod; 93. a driving motor; 94. a driven gear; 95. a drive gear; 96. a transmission belt; 10. an evaporation source; 11. and (5) supporting the column.
Detailed Description
The technical scheme of the utility model is further described below with reference to specific embodiments and drawings.
Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in numerous different ways without departing from the spirit or scope of the embodiments of the present utility model. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.
In the description of the embodiments of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "length", "inner", etc. are based on the orientation or positional relationship shown in the drawings, and are merely for convenience in describing the embodiments of the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element in question must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the embodiments of the present utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present utility model, the meaning of "plurality" is two or more, unless explicitly defined otherwise.
In the embodiments of the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured" and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the embodiments of the present utility model will be understood by those of ordinary skill in the art according to specific circumstances.
In embodiments of the utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, or may include both the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
The following disclosure provides many different implementations, or examples, for implementing different configurations of embodiments of the utility model. In order to simplify the disclosure of embodiments of the present utility model, components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit embodiments of the present utility model. Furthermore, embodiments of the present utility model may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed.
Referring to fig. 1-2, a first embodiment provides a vacuum coating apparatus, which includes a base 1, a first body 2 disposed on the base 1 and having a first cavity 21, a second body 3 communicating with the first body 2 and having a second cavity 31, a vacuum pumping mechanism 4 for pumping vacuum to the first body 2 and the second body 3, respectively, and a control mechanism disposed between the first body 2 and the second body 3 and for controlling communication or disconnection of the two.
In this embodiment, the vacuum coating apparatus further includes a support column 11 disposed on the base 1 and used for carrying the first body 2, and the second body 3 is connected below the first body 2. The evacuation mechanism 4 includes a first vacuum pump 41 for evacuating the first body 2, and a second vacuum pump 42 for evacuating the second body 3.
The vacuum coating device further comprises a corrugated pipe 6 communicated with the second main body 3 through the upper end, a sealing plate 7 detachably sealed at the lower end of the corrugated pipe 6, a connecting rod 8 with the lower end connected to the sealing plate 7 and penetrating upwards into the corrugated pipe 6, and an evaporation source 10 detachably arranged at the upper end of the connecting rod 8.
The sealing plate 7 and the connecting rod 8 can synchronously reciprocate along a first direction (arrow direction in fig. 1), an opening used for being penetrated and penetrated by the evaporation source 10 along the first direction is arranged at the bottom of the first main body 2, and the control mechanism is used for controlling the opening to be opened or closed.
In the present embodiment, the link 8 is parallel to the expansion and contraction direction of the bellows 6, both of which are parallel to the first direction, respectively.
In this embodiment, the control mechanism is a vacuum gate valve 5, and the upper and lower ends of the vacuum gate valve 5 are respectively communicated with the first body 2 and the second body 3. Specifically, in order to ensure the vacuum degree, the upper and lower ends of the vacuum gate valve 5 are respectively communicated with the first body 2 and the second body 3 through flanges.
In the present embodiment, the vacuum gate valve 5 includes a valve seat provided between the first body 2 and the second body 3, a valve spool (not shown in the drawings) slidably provided in the valve seat for controlling on-off between the first body 2 and the second body 3 by sliding. Specifically, when the valve core slides to the position right below the opening, the first main body 2 and the second main body 3 are separated; when the valve core slides to be far away from the opening, the first main body 2 and the second main body 3 are communicated, and the moving direction of the valve core is perpendicular to the first direction.
The vacuum coating device further comprises a driving mechanism 9 arranged on the base 1 and used for driving the sealing plate 7 to move back and forth along the first direction, wherein the driving mechanism 9 comprises a nut 91 rotatably arranged on the base 1 around the direction of the axis of the driving mechanism, a screw rod 92 which is arranged in the nut 91 in a penetrating manner and the upper end of which is connected with the sealing plate 7, and a driving motor 93 arranged on the base 1 and used for driving the nut 91 to rotate. When the nut 91 rotates, the screw 92 can be driven to move up and down in the first direction.
In this embodiment, the nut 91 is provided with a driven gear 94 coaxially connected to the nut and synchronously rotated, the output end of the driving motor 93 is provided with a driving gear 95 drivingly connected to the driven gear 94 through a driving belt 96, and the screw 92 passes through the driven gear 94.
Referring to fig. 3, a second embodiment provides a vacuum coating apparatus, and the difference between the second embodiment and the first embodiment is mainly that:
the vacuum pumping mechanism 4 includes a third vacuum pump 43, a first pipeline 44 with both ends respectively communicating with the third vacuum pump 43 and the first main body 2, a first control valve 45 provided on the first pipeline 44, a second pipeline 46 with both ends respectively communicating with the third vacuum pump 43 and the second main body 3, and a second control valve 47 provided on the second pipeline 46. The third vacuum pump 43 is capable of evacuating the first body 2 and the second body 3, respectively.
The following specifically describes the operation of the first embodiment:
when the evaporation source 10 needs to be replaced:
s1: the driving mechanism 9 drives the screw rod 92 to descend so that the evaporation source 10 downwards enters the second cavity 31 and the corrugated tube 6 from the first cavity 21 through the opening;
s2: the valve core moves forward to close the opening, so that the first cavity 21 and the second cavity 31 are blocked;
s3: removing the sealing plate 7 from the lower end of the corrugated tube 6, taking out the evaporation source 10 and replacing;
s4: a sealing plate 7 is arranged at the lower end of the corrugated pipe 6, and the second cavity 31 and the corrugated pipe 6 are vacuumized through a second vacuum pump 42;
s5: the valve core moves reversely to open the opening, so that the first cavity 21 and the second cavity 31 are communicated;
s6: the driving mechanism 9 drives the screw 92 to rise so that the evaporation source 10 passes upward through the opening into the first cavity 21.
The above embodiments are provided to illustrate the technical concept and features of the present utility model and are intended to enable those skilled in the art to understand the content of the present utility model and implement the same, and are not intended to limit the scope of the present utility model. All equivalent changes or modifications made in accordance with the spirit of the present utility model should be construed to be included in the scope of the present utility model.
Claims (10)
1. A vacuum coating device, characterized in that: the device comprises a base, a first main body, a second main body, a vacuumizing mechanism, a control mechanism, a corrugated pipe, a sealing plate, a connecting rod and an evaporation source, wherein the first main body is arranged on the base and is provided with a first cavity, the second main body is communicated with the first main body and is provided with a second cavity, the vacuumizing mechanism is used for vacuumizing the first main body and the second main body respectively, the control mechanism is arranged between the first main body and the second main body and is used for controlling the communication or the separation of the first main body and the second main body, the corrugated pipe is communicated with the second main body through one end, the sealing plate is detachably sealed at the other end of the corrugated pipe, the connecting rod is connected with one end of the sealing plate and penetrates through the corrugated pipe, and the evaporation source is arranged at the other end of the connecting rod;
the sealing plate and the connecting rod can synchronously reciprocate along a first direction, an opening used for being penetrated in and out by the evaporation source along the first direction is formed in the first main body, and the control mechanism is used for controlling the opening to be opened or closed;
the vacuum coating device further comprises a driving mechanism which is arranged on the base and used for driving the sealing plate to move back and forth along the first direction.
2. The vacuum coating apparatus according to claim 1, wherein: the connecting rod is parallel to the expansion and contraction direction of the corrugated pipe, and the expansion and contraction direction of the connecting rod is parallel to the first direction respectively.
3. The vacuum coating apparatus according to claim 1, wherein: the vacuumizing mechanism comprises a first vacuum pump for vacuumizing the first main body and a second vacuum pump for vacuumizing the second main body.
4. The vacuum coating apparatus according to claim 1, wherein: the vacuumizing mechanism comprises a third vacuum pump, a first pipeline, a first control valve, a second pipeline and a second control valve, wherein two ends of the first pipeline are respectively communicated with the third vacuum pump and the first main body, the first control valve is arranged on the first pipeline, two ends of the second pipeline are respectively communicated with the third vacuum pump and the second main body, and the second control valve is arranged on the second pipeline.
5. The vacuum coating apparatus according to claim 1, wherein: the control mechanism is a vacuum gate valve, and the upper end and the lower end of the vacuum gate valve are respectively communicated with the first main body and the second main body.
6. The vacuum coating apparatus according to claim 5, wherein: the vacuum gate valve comprises a valve seat arranged between the first main body and the second main body and a valve core slidably arranged in the valve seat, wherein the valve core is used for controlling on-off between the first main body and the second main body through sliding.
7. The vacuum coating apparatus according to claim 6, wherein: the movement direction of the valve core is perpendicular to the first direction.
8. The vacuum coating apparatus according to claim 1, wherein: the driving mechanism comprises a nut which can be rotationally arranged on the base around the axis direction of the driving mechanism, a screw rod which is cooperatively arranged in the nut in a penetrating way and is connected with the sealing plate, and a driving motor which is arranged on the base and is used for driving the nut to rotate.
9. The vacuum coating apparatus according to claim 8, wherein: the nut is provided with a driven gear which synchronously rotates with the nut, the output end of the driving motor is provided with a driving gear which is in transmission connection with the driven gear through a transmission belt, and the screw rod downwards penetrates through the driven gear.
10. The vacuum coating apparatus according to claim 1, wherein: the vacuum coating device further comprises a support column which is arranged on the base and used for bearing the first main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321331424.7U CN219637323U (en) | 2023-05-30 | 2023-05-30 | Vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321331424.7U CN219637323U (en) | 2023-05-30 | 2023-05-30 | Vacuum coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219637323U true CN219637323U (en) | 2023-09-05 |
Family
ID=87806944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321331424.7U Active CN219637323U (en) | 2023-05-30 | 2023-05-30 | Vacuum coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219637323U (en) |
-
2023
- 2023-05-30 CN CN202321331424.7U patent/CN219637323U/en active Active
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