CN219633683U

CN219633683U - Disassembling tool for electrostatic chuck

Info

Publication number: CN219633683U
Application number: CN202320111222.5U
Authority: CN
Inventors: 王郁景
Original assignee: Yuexin Semiconductor Technology Co ltd
Current assignee: Yuexin Semiconductor Technology Co ltd
Priority date: 2023-01-13
Filing date: 2023-01-13
Publication date: 2023-09-05
Anticipated expiration: 2033-01-13

Abstract

The utility model relates to a disassembling tool of an electrostatic chuck, when a set screw on the electrostatic chuck needs to be disassembled, an inserting part extends into an installation hole, two protruding blocks of the inserting part are respectively aligned with two operation holes on the end face of the set screw positioned in the installation hole and are respectively inserted into the two operation holes, then the main body is forced, and the set screw is turned to realize the outward disassembly of the set screw from the inside of the installation hole of the electrostatic chuck; in addition, the fixing screw can be locked and fixed in the mounting hole of the electrostatic chuck. Compared with the disassembly and assembly mode in the prior art, the disassembly and assembly tool in the embodiment can improve the accuracy, the safety and the disassembly and assembly efficiency in the disassembly and assembly process, can avoid influencing the capability of the electrostatic chuck for magnetically attracting the wafer when the follow-up equipment is dispatched due to the fact that the ceramic on the surface of the electrostatic chuck is damaged as far as possible, and can avoid the waste of ageing and parts caused by follow-up re-replacement of a material part and a cavity opening due to inaccurate operation of replacing a set screw.

Description

Disassembling tool for electrostatic chuck

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a disassembly and assembly tool of an electrostatic chuck.

Background

In the conventional technology, when a Stick Wafer (Stick Wafer) is synchronously observed during the running of a semiconductor device, when the adhesion of the Stick Wafer on an electrostatic Chuck is not improved in the working process of a Power Cycle electrostatic Chuck Controller (Power Cycle E-Chuck Controller), a set screw (pin) arranged on the back of the electrostatic Chuck needs to be replaced in time and cleaning work is performed after the subsequent shutdown. In the prior art, a straight knife and pliers are used in cooperation to remove a set screw (pin) arranged on the back of the electrostatic chuck.

However, in the process of disassembling a set screw (pin) arranged on the back of the electrostatic chuck by adopting a traditional mode, ceramic on the surface of the electrostatic chuck is easily damaged due to improper operation, so that the capability of the electrostatic chuck for magnetically attracting wafers in the subsequent dispatching of semiconductor equipment is affected; and because of the inaccurate replacement operation of the set screw (pin) installed on the back of the electrostatic chuck, the ageing and the waste of Parts (Parts) are easily caused when the material is replaced again and the Chamber (Chamber) is opened later.

Disclosure of Invention

Based on this, it is necessary to overcome the defect of prior art, provide an electrostatic chuck's assembly and disassembly tools, it can improve the accuracy and the security of dismouting in-process, can reduce the damage that the dismouting in-process caused electrostatic chuck to and can improve dismouting efficiency.

The technical scheme is as follows: an electrostatic chuck disassembly tool, the electrostatic chuck disassembly tool comprising:

the main body is connected with at least one insertion part; the external dimension of the insertion part is smaller than or equal to the aperture of the mounting hole of the electrostatic chuck, so that the insertion part can extend into the mounting hole; the inserting part is provided with two protruding blocks which are arranged at intervals, and the outline dimension of each protruding block is smaller than or equal to the aperture of an operation hole on the end face of a positioning screw of the electrostatic chuck, so that the two protruding blocks can respectively extend into the two operation holes.

In one embodiment, the insertion portion is cylindrical, and the shape of the insertion portion is adapted to the mounting hole.

In one embodiment, the number of the insertion parts is at least two, and the insertion parts are arranged on the main body at intervals; the external dimensions of the insertion parts are different, and the distances between the two protruding blocks of the insertion parts are different.

In one embodiment, the number of the insertion parts is two, and the two insertion parts are respectively arranged at two opposite ends of the main body; or the number of the insertion parts is four, the main body is provided with four side surfaces, and the four insertion parts are respectively and correspondingly connected with the four side surfaces of the main body.

In one embodiment, at least two of the inserts are equally spaced apart from the body.

In one embodiment, the insert is formed with axially disposed grooves.

In one embodiment, the two opposite sides of the main body are respectively connected with a holding part; the grip portion includes at least one connection post and/or connection plate connected to the body.

In one embodiment, the insertion part is movably arranged on the main body, a driving part is arranged on the main body, the driving part is connected with the insertion part, and the driving part is used for driving the insertion part to move, so that the insertion part extends out of the main body or retracts into the main body.

In one embodiment, the driving part comprises a rotating part, a rotating shaft and a first gear, wherein the rotating part is positioned outside the main body, the rotating shaft is rotatably connected to the main body, and two opposite ends of the rotating shaft are respectively connected with the rotating part and the first gear; the disassembling tool of the electrostatic chuck further comprises a transmission part arranged between the driving part and the inserting part, the transmission part comprises a screw rod and a second gear, the screw rod is connected with the second gear, the screw rod is further rotationally connected with the main body, and the second gear is meshed with the first gear; the insertion part is slidably arranged on the main body, the insertion part is provided with a threaded channel which is matched with the screw rod, and the screw rod is arranged in the threaded channel.

In one embodiment, the rotating part and the inserting part are respectively positioned at the side surface and the bottom surface of the main body, and the first gear and the second gear are bevel gears; and/or the main body is provided with a cavity, the bottom wall of the cavity is provided with a through hole, the insertion part movably penetrates through the through hole, one end of the insertion part, which is provided with a lug, is positioned outside the main body, the other end of the insertion part is provided with an anti-falling part, and the anti-falling part is used for being mutually abutted with the bottom wall of the cavity.

According to the disassembling tool of the electrostatic chuck, when the set screw on the electrostatic chuck is required to be disassembled, the insertion part extends into the mounting hole, the two protruding blocks of the insertion part are respectively aligned with the two operation holes on the end face of the set screw positioned in the mounting hole and are respectively inserted into the two operation holes, then the force is applied to the main body, and the set screw is turned, so that the set screw can be disassembled outwards from the inside of the mounting hole of the electrostatic chuck; on the contrary, through the dismounting tool, the positioning screw can be locked and fixed in the mounting hole of the electrostatic chuck. Compared with the disassembly and assembly mode in the prior art, the disassembly and assembly tool in the embodiment can improve the accuracy, the safety and the disassembly and assembly efficiency in the disassembly and assembly process, can avoid influencing the capability of the electrostatic chuck for magnetically attracting the wafer when the follow-up equipment is dispatched due to the fact that the ceramic on the surface of the electrostatic chuck is damaged as far as possible, and can avoid the waste of ageing and parts caused by follow-up re-replacement of a material part and a cavity opening due to inaccurate operation of replacing a set screw.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model.

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a block diagram of an electrostatic chuck assembly and disassembly tool according to an embodiment of the present utility model;

FIG. 2 is another view of the structure of FIG. 1;

FIG. 3 is a further view of the structure of FIG. 1;

FIG. 4 is a view of a further view of the structure of FIG. 1;

FIG. 5 is a block diagram of an electrostatic chuck assembly and disassembly tool according to another embodiment of the present utility model;

fig. 6 is a structural view of an electrostatic chuck attachment/detachment tool according to still another embodiment of the present utility model.

10. A main body; 11. a chamber; 20. an insertion section; 21. a bump; 22. a groove; 23. a threaded passage; 24. an anti-falling part; 30. a grip portion; 40. a driving section; 41. a rotating part; 42. a rotating shaft; 43. a first gear; 50. a transmission part; 51. a screw; 52. a second gear; 53. and a supporting sleeve.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

Referring to fig. 1 to 4, fig. 1 to 4 respectively show four different structural diagrams of an electrostatic chuck assembly and disassembly tool according to an embodiment of the utility model. An embodiment of the utility model provides an electrostatic chuck dismounting tool, which comprises: a main body 10 and at least one insertion portion 20 connected to the main body 10. The external dimension of the insertion portion 20 is smaller than or equal to the aperture of a mounting hole of an electrostatic chuck (not shown in the drawings) so that the insertion portion 20 can be inserted into the mounting hole. The insertion portion 20 is provided with two protruding blocks 21 arranged at intervals, and the outline dimension of each protruding block 21 is smaller than or equal to the aperture of an operation hole on the end face of a positioning screw of the electrostatic chuck, so that the two protruding blocks 21 can respectively extend into the two operation holes.

When the set screw on the electrostatic chuck needs to be removed, the insertion part 20 extends into the mounting hole, the two protruding blocks 21 of the insertion part 20 are respectively aligned with the two operation holes on the end face of the set screw positioned in the mounting hole and are respectively inserted into the two operation holes, then the main body 10 is forced, and the set screw is turned, so that the set screw can be removed from the mounting hole of the electrostatic chuck; on the contrary, through the dismounting tool, the positioning screw can be locked and fixed in the mounting hole of the electrostatic chuck. Compared with the disassembly and assembly mode in the prior art, the disassembly and assembly tool in the embodiment can improve the accuracy, the safety and the disassembly and assembly efficiency in the disassembly and assembly process, can avoid influencing the capability of the electrostatic chuck for magnetically attracting the wafer when the follow-up equipment is dispatched due to the fact that the ceramic on the surface of the electrostatic chuck is damaged as far as possible, and can avoid the waste of ageing and parts caused by the fact that the follow-up material replacement part and the cavity opening 11 are replaced again due to the inaccuracy of the operation of replacing the set screw.

Generally, the mounting hole on the electrostatic chuck is a circular hole, or can be adjusted to other various regular shapes or irregular shapes according to actual requirements. Further, the number of mounting holes on the electrostatic chuck is not limited to one, and may be, for example, two, three, four, five, six, or other numbers, and accordingly, the number of set screws to be mounted on the electrostatic chuck is two, three, four, five, six, or other numbers, respectively.

Referring to fig. 1 to 4, in one embodiment, the insertion portion 20 is cylindrical, and the shape of the insertion portion 20 corresponds to the mounting hole. In this way, after the insertion portion 20 is inserted into the mounting hole, the two protrusions 21 can be aligned with the two operation holes on the end surface of the set screw by rotating, so that the two protrusions 21 can be accurately inserted into the two operation holes at the same time. In addition, after the two protrusions 21 are respectively inserted into the two operation holes of the set screw, since the shape of the insertion portion 20 is adapted to the mounting hole, that is, the insertion portion 20 can freely rotate in the mounting hole, the assembly and disassembly operations of the set screw can be completed by screwing the main body 10.

The type of the plurality of mounting holes on the same electrostatic chuck is not limited to one specification, but may be two, three, four, five, six or more specifications, and the aperture sizes of the mounting holes of different specification types are different. In addition, the installation holes of different specification types are correspondingly provided with the positioning screws of different specification types, and the distance between the two operation holes of the positioning screws of different specification types is different.

In addition, the types and the number of the mounting holes on the electrostatic chucks of different types can be the same or different, and the mounting holes can be flexibly arranged and adjusted according to actual conditions.

Referring to fig. 1 to 4 or fig. 5, fig. 5 is a block diagram showing a disassembling tool of an electrostatic chuck according to another embodiment of the utility model. In one embodiment, the insertion portions 20 are at least two and are disposed on the main body 10 at intervals. The external dimensions of the insertion portions 20 are different, and the pitch of the two projections 21 of the insertion portions 20 is different. Therefore, the dismounting tool can be suitable for dismounting and mounting the positioning screws of various different specifications and types no matter the same electrostatic chuck or different electrostatic chucks.

In one embodiment, referring to fig. 1 to 4, the number of the insertion portions 20 is two, and the insertion portions 20 are disposed at opposite ends of the main body 10. The two insertion portions 20 have different external dimensions and are adapted to extend into the two mounting holes of different types of specifications, and the two positioning screws of different types of specifications are correspondingly assembled and disassembled. In addition, the grip parts 30 are respectively connected to opposite sides of the body 10, and the grip parts 30 can facilitate the gripping and screwing operations.

In another embodiment, referring to fig. 5, the number of the insertion portions 20 is four, the main body 10 is provided with four sides, and the four insertion portions 20 are respectively connected to the four sides of the main body 10. The four insertion portions 20 have different external dimensions, and are adapted to extend into the four mounting holes of different types of specifications, and accordingly, the four positioning screws of different types of specifications are assembled and disassembled.

In one embodiment, at least two of the inserts 20 are equally spaced apart from the body 10.

Referring to fig. 2, in one embodiment, the insertion portion 20 is formed with axially disposed grooves 22. In this manner, the recess 22 reduces the material of the insert 20 and reduces the overall weight of the removal tool.

Alternatively, the disassembly tools include, but are not limited to, being manufactured from metal pieces such as stainless steel, copper, aluminum, iron, etc., and may be integrally formed from non-metal pieces such as hard plastic, hard rubber, etc.

The "insertion portion 20" may be "a part of the main body 10", that is, the "insertion portion 20" is integrally formed with "other parts of the main body 10"; or may be a separate component from the other parts of the main body 10, i.e., the insertion portion 20 may be manufactured separately and then combined with the other parts of the main body 10 into a single body.

The "bump 21" may be "a part of the insertion portion 20", that is, the "bump 21" is integrally formed with "other parts of the insertion portion 20"; or may be a separate component from the other portion of the insert 20, i.e., the projection 21 may be manufactured separately and then integrated with the other portion of the insert 20.

Referring to fig. 1 to 4, in one embodiment, grip portions 30 are respectively connected to opposite sides of the main body 10. The grip portion 30 includes at least one connection post and/or connection plate connected to the body 10.

Referring to fig. 6, fig. 6 is a block diagram showing a tool for removing an electrostatic chuck according to still another embodiment of the present utility model. In one embodiment, the insert 20 is movably disposed on the body 10. The main body 10 is provided with a driving part 40, the driving part 40 is connected with the insertion part 20, and the driving part 40 is used for driving the insertion part 20 to move so that the insertion part 20 extends out of the main body 10 or retracts into the main body 10. Thus, by acting on the driving portion 40, the driving portion 40 drives the insertion portion 20 to move, so that the length of the insertion portion 20 extending out of the main body 10 is adjusted, and the insertion portion is suitable for mounting holes with different depths, and can be beneficial to disassembling or locking set screws in the mounting holes with different depths.

Referring to fig. 6, in one embodiment, the driving part 40 includes a rotating part 41, a rotating shaft 42, and a first gear 43. The rotating portion 41 is located outside the main body 10, the rotating shaft 42 is rotatably connected to the main body 10, and opposite ends of the rotating shaft 42 are connected to the rotating portion 41 and the first gear 43, respectively. The electrostatic chuck assembly and disassembly tool further includes a transmission portion 50 disposed between the driving portion 40 and the insertion portion 20, the transmission portion 50 including a screw 51 and a second gear 52. The screw 51 is connected to the second gear 52, and the screw 51 is also rotatably connected to the main body 10. The second gear 52 intermeshes with the first gear 43. The insertion portion 20 is slidably provided on the main body 10, and the insertion portion 20 is provided with a screw passage 23 adapted to the screw 51. A screw 51 is disposed in the threaded passage 23. Thus, when the rotating part 41 rotates, the rotating part 41 drives the rotating shaft 42 to rotate, the rotating shaft 42 drives the first gear 43 to rotate, the first gear 43 correspondingly drives the second gear 52 to rotate, and the second gear 52 correspondingly drives the screw rod 51 to rotate, and as the screw rod 51 is rotationally connected with the main body 10, the screw rod 51 rotates around the central axis thereof, and the corresponding driving insertion part 20 slides on the main body 10 in the rotating process of the screw rod 51, so that the outward extending length of the insertion part 20 is adjusted.

Referring to fig. 6, in one embodiment, the rotating portion 41 and the inserting portion 20 are located on the side surface and the bottom surface of the main body 10, respectively, and the first gear 43 and the second gear 52 are bevel gears. In this way, the rotating portion 41 located on the side surface of the main body 10 acts to drive the first gear 43 to rotate, and the first gear 43 and the second gear 52 are bevel gears, so that the steering can be realized, that is, the screw 51 is driven to rotate, so that the inserting portion 20 is driven to act correspondingly.

Referring to fig. 6, in one embodiment, a main body 10 is provided with a chamber 11, a bottom wall of the chamber 11 is provided with a through hole, an insertion portion 20 is movably inserted into the through hole, one end of the insertion portion 20 provided with a bump 21 is located outside the main body 10, the other end is provided with an anti-falling portion 24, and the anti-falling portion 24 is used for abutting against the bottom wall of the chamber 11.

Referring to fig. 6, in order to make the first gear 43 and the second gear 52 mesh with each other, the rotation shaft 42 and the first gear 43 extend into the chamber 11 through the main body 10, and the screw 51 and the second gear 52 are disposed in the chamber 11.

Referring to fig. 6, in addition, in order to rotatably connect the screw 51 with the main body 10, the outside of the screw 51 is provided with a support sleeve 53, for example, the support sleeve 53 is fixedly connected with the main body 10, and the screw 51 is rotatably connected in the support sleeve 53.

Referring to fig. 6, in one embodiment, in order to make the insertion portion 20 movably pass through the through hole without rotating in the through hole, at least one guide block is disposed on the wall of the through hole, a guide groove corresponding to the guide block is disposed on the outer wall of the insertion portion 20, and the guide block is slidably disposed in the guide groove.

Referring to fig. 1 to 4, a detailed description is given of a process of assembling and disassembling the electrostatic chuck by using the electrostatic chuck disassembling tool in the present embodiment, including the following steps:

step S10, the chamber 11 of the semiconductor device needs to be opened first.

Step S20, measuring the height of the electrostatic chuck.

And S30, detaching the electrostatic chuck from the machine table of the semiconductor device, reversely turning the electrostatic chuck, and detaching the back set screw on the electrostatic chuck.

Step S40, cleaning each mounting hole position on the electrostatic chuck by using isopropyl alcohol (IPA).

And S50, cleaning the positioning holes on the electrostatic chuck.

And step S60, maintaining the original detached set screw or replacing a new set screw.

Step S70, locking the new set screw by the disassembling tool in the embodiment.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Claims

1. An electrostatic chuck assembly and disassembly tool, characterized in that the electrostatic chuck assembly and disassembly tool comprises:

2. The tool according to claim 1, wherein the insertion portion has a cylindrical shape, and the insertion portion has an outer shape corresponding to the mounting hole.

3. The electrostatic chuck assembly and disassembly tool according to claim 1, wherein the insertion portions are at least two and are provided at intervals on the main body; the external dimensions of the insertion parts are different, and the distances between the two protruding blocks of the insertion parts are different.

4. The electrostatic chuck assembly and disassembly tool according to claim 3, wherein the number of the insertion portions is two, and the two insertion portions are respectively provided at opposite ends of the main body; or the number of the insertion parts is four, the main body is provided with four side surfaces, and the four insertion parts are respectively and correspondingly connected with the four side surfaces of the main body.

5. The electrostatic chuck assembly and disassembly tool according to claim 3, wherein at least two of said insert sections are connected to said main body at equal intervals.

6. The tool according to claim 1, wherein the insertion portion is formed with a groove provided in an axial direction.

7. The electrostatic chuck assembly and disassembly tool according to any one of claims 1 to 6, wherein the opposite sides of the main body are each connected with a grip; the grip portion includes at least one connection post and/or connection plate connected to the body.

8. The tool according to claim 1, wherein the insertion portion is movably provided on the main body, a driving portion is provided on the main body, the driving portion is connected to the insertion portion, and the driving portion is used for driving the insertion portion to move so that the insertion portion protrudes to the outside of the main body or retracts to the inside of the main body.

9. The electrostatic chuck assembly and disassembly tool according to claim 8, wherein the driving part comprises a rotating part, a rotating shaft and a first gear, the rotating part is positioned outside the main body, the rotating shaft is rotatably connected to the main body, and opposite ends of the rotating shaft are respectively connected with the rotating part and the first gear; the disassembling tool of the electrostatic chuck further comprises a transmission part arranged between the driving part and the inserting part, the transmission part comprises a screw rod and a second gear, the screw rod is connected with the second gear, the screw rod is further rotationally connected with the main body, and the second gear is meshed with the first gear; the insertion part is slidably arranged on the main body, the insertion part is provided with a threaded channel which is matched with the screw rod, and the screw rod is arranged in the threaded channel.

10. The electrostatic chuck assembly and disassembly tool according to claim 9, wherein the rotating portion and the inserting portion are respectively located at a side surface and a bottom surface of the main body, and the first gear and the second gear are bevel gears; and/or the main body is provided with a cavity, the bottom wall of the cavity is provided with a through hole, the insertion part movably penetrates through the through hole, one end of the insertion part, which is provided with a lug, is positioned outside the main body, the other end of the insertion part is provided with an anti-falling part, and the anti-falling part is used for being mutually abutted with the bottom wall of the cavity.