CN219597586U - Automatic cleaning device - Google Patents
Automatic cleaning device Download PDFInfo
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- CN219597586U CN219597586U CN202223542259.8U CN202223542259U CN219597586U CN 219597586 U CN219597586 U CN 219597586U CN 202223542259 U CN202223542259 U CN 202223542259U CN 219597586 U CN219597586 U CN 219597586U
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Abstract
An automatic cleaning device comprising: the first container is used for containing cleaning liquid; a second container for collecting waste liquid; the air supply device is connected with the first container through a first ventilation pipeline and is used for supplying compressed air to the first container through the first ventilation pipeline so as to convey the cleaning liquid from the first container to the second container; the switch mechanism is arranged on the first ventilating pipeline and used for switching on or switching off the compressed air provided by the air supply device to the first container. The above scheme can realize automatic cleaning of the waste liquid collecting container.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to an automatic cleaning device.
Background
In semiconductor manufacturing processes, chemical solutions are required in many situations. For example, in a coating process, photoresist is required to be spin coated on the wafer surface and a developer is also required during development. These chemical solutions may be pretreated before use, for example, in a scenario where photoresist is coated on the wafer surface, if the photoresist contains bubbles, the photoresist may cause anomalies such as coating pits on the wafer surface, which may affect the product quality. Therefore, prior to spraying the photoresist, it is generally necessary to perform a bubble removal treatment to remove bubbles into a waste liquid collection container. In addition, the residual liquid after use in other scenes is usually collected by a waste liquid collecting container, and then is uniformly discharged to a factory waste liquid treatment center through a liquid outlet and a liquid outlet pipeline.
In practical application, a plurality of waste liquids are often collected in the waste liquid collecting container, the waste liquids are easy to crystallize, and particularly when the waste liquid amount is large, the waste liquid collecting container, a liquid outlet and a liquid outlet pipeline of the waste liquid collecting container are often blocked, so that the waste liquid collecting container and the liquid outlet pipeline cannot be used continuously.
In the prior art, when the waste liquid collecting container and the liquid outlet pipeline thereof are blocked, two treatment modes are generally adopted: firstly, the waste liquid collecting container and the pipeline are disassembled for manual cleaning; and secondly, the whole waste liquid collecting container and the liquid outlet pipeline are replaced. However, the process of removing and reloading the waste liquid container and the liquid outlet line is complicated, may be subject to long downtime, and may cause safety hazards due to the chemical liquid being generally corrosive or chemically toxic. Furthermore, higher replacement costs may be required if the replacement process is directly performed.
Disclosure of Invention
The technical problem solved by the embodiment of the utility model is how to automatically clean the waste liquid collecting container.
In order to solve the above technical problems, an embodiment of the present utility model provides an automatic cleaning device, which specifically includes: the first container is used for containing cleaning liquid; a second container for collecting waste liquid; the air supply device is connected with the first container through a first ventilation pipeline and is used for supplying compressed air to the first container through the first ventilation pipeline so as to convey the cleaning liquid from the first container to the second container; the switch mechanism is arranged on the first ventilating pipeline and used for switching on or switching off the compressed air provided by the air supply device to the first container.
Optionally, the switching mechanism includes: the first switch assembly is used for supplying compressed air to the first container when being opened, and closing air supply when being closed; and the pulse trigger is used for generating a first pulse signal, and the first pulse signal is used for opening or closing the first switch assembly.
Optionally, the first pulse signal includes a first signal for opening the first switch component and a second signal for closing the first switch component.
Optionally, the greater the proportion of the duration of the first signal occupied in the first pulse signal, the longer the duration of the supply of compressed air by the air supply device to the first container, the more cleaning liquid is delivered from the first container to the second container.
Optionally, the automatic cleaning device further includes: the foam discharging device is connected with the air supply device through a second air passage and is used for containing liquid to be foamed, and the liquid to be foamed contains bubbles; the air supply device is also used for supplying compressed air to the bubble discharging device through the second ventilation pipeline so as to discharge bubbles contained in the liquid to be discharged to the second container.
Optionally, the switch mechanism further includes a second switch component, when the second switch component is turned on, the air supply device supplies compressed air to the bubble removing device, and when the second switch component is turned off, air supply is turned off; the pulse trigger is also used for generating a second pulse signal, and the second pulse signal is used for opening or closing the second switch assembly.
Optionally, the foam discharging device includes: the third container is used for containing the liquid to be foam-removed; the fourth container is connected with the third container through a first infusion pipeline and is connected with the second container through a second infusion pipeline; the compressed air provided by the air supply device is also used for conveying at least part of the liquid to be foam-removed contained in the third container to the fourth container through the first infusion pipeline, and then discharging the air bubbles on the surface of the liquid to be foam-removed in the fourth container to the second container through the second infusion pipeline.
Optionally, the liquid inlet port of the second infusion line is connected with the fourth container, and one or more of the following is satisfied: the distance between the liquid inlet of the second infusion pipeline and the surface of the liquid to be foam-removed in the fourth container is in a first interval; the distance between the liquid inlet of the second infusion pipeline and the top of the fourth container is in a second interval.
Optionally, the first interval and the second interval are 0cm to 1cm.
Optionally, a one-way valve is arranged on the second infusion tube.
Optionally, the second container has a liquid outlet, and a ratio between a distance between the liquid outlet and a bottom of the second container and a height value of the second container is within a third interval.
Optionally, the third interval is 1/3 to 2/3.
Optionally, the first ventilation pipeline is further provided with a pressure adjusting device, which is used for adjusting the pressure of the compressed air provided by the air supply device to the first container, and the higher the pressure is, the higher the conveying rate of the cleaning liquid is.
Compared with the prior art, the technical scheme of the embodiment of the utility model has the following beneficial effects:
the embodiment of the utility model provides an automatic cleaning device, which comprises a first container, a second container and a cleaning device, wherein the first container is used for containing cleaning liquid; a second container for collecting waste liquid; the air supply device is connected with the first container through a first ventilation pipeline and is used for supplying compressed air to the first container through the first ventilation pipeline so as to convey the cleaning liquid from the first container to the second container; the switch mechanism is arranged on the first ventilating pipeline and used for switching on or switching off the compressed air provided by the air supply device to the first container. By using the air supply device to supply compressed air to the second container (e.g., waste liquid collection container), a conveying power can be provided to automatically convey the cleaning liquid from the first container (e.g., a container for containing the cleaning liquid) to the second container, so that the cleaning liquid and the waste liquid in the second container are subjected to chemical reaction, and the waste liquid in the second container is prevented from crystallizing to cause blockage. In addition, by adopting the pneumatic switch mechanism, the cleaning liquid can be conveniently controlled to be conveyed to be started or stopped, and the convenience of use is improved.
Further, in an embodiment of the present utility model, the switching mechanism includes: the first switch assembly is used for supplying compressed air to the first container when being opened, and closing air supply when being closed; and the pulse trigger is used for generating a first pulse signal, and the first pulse signal is used for opening or closing the first switch assembly. Because the pulse signal can have the characteristics of discreteness, periodicity and the like, compared with the method of manually opening and closing the first switch assembly periodically or irregularly, or adopting other non-discrete electric signals, the pulse signal can be used for controlling the opening and closing of the first switch assembly more conveniently and automatically.
Further, the first pulse signal includes a first signal for opening the first switching assembly and a second signal for closing the first switching assembly. And, the greater the proportion of the duration of the first signal occupied in the first pulse signal, the longer the duration of the air supply device supplying compressed air to the first container, the more cleaning liquid is delivered from the first container to the second container. In practical applications, the proportion of the duration of the first signal occupied in the first pulse signal (e.g., the duration of a single trigger of the first signal, or the trigger frequency of the first signal) may be set appropriately to automatically control the amount of cleaning fluid delivered to the second container, in accordance with specific needs.
Further, in an embodiment of the present utility model, the automatic cleaning device further includes: the foam discharging device is connected with the air supply device through a second air passage and is used for containing liquid to be foamed, and the liquid to be foamed contains bubbles; the air supply device is also used for supplying compressed air to the bubble discharging device through the second ventilation pipeline so as to discharge bubbles contained in the liquid to be discharged to the second container. Through setting up arrange bubble device, can satisfy simultaneously and arrange bubble and waste liquid cleaning's needs, specifically, not only can realize discharging the bubble in the liquid to waste liquid collecting vessel voluntarily, can also carry out self-cleaning to waste liquid collecting vessel, prevent liquid crystallization and jam container.
Further, in an embodiment of the present utility model, the liquid inlet port of the second infusion line is connected to the fourth container, and one or more of the following is satisfied: the distance between the liquid inlet of the second infusion pipeline and the surface of the liquid to be foam-removed in the fourth container is in a first interval; the distance between the liquid inlet of the second infusion pipeline and the top of the fourth container is in a second interval. It will be appreciated that it is difficult to expel air bubbles floating on the surface of the liquid to be expelled if the distance between the inlet port of the second infusion line and the surface of the liquid to be expelled is too great, or if the distance between the inlet port of the second infusion line and the top of the fourth container is too great. Therefore, by properly setting the distance between the liquid inlet of the second infusion pipeline and the surface of the liquid to be foam-removed in the fourth container and the distance between the liquid inlet and the top of the fourth container, all the air bubbles floating on the surface of the liquid to be foam-removed can be completely removed as much as possible, and the quality of the liquid after foam removal treatment is improved.
In an embodiment of the present utility model, the second container has a liquid outlet, and a ratio between a distance between the liquid outlet and a bottom of the second container and a height value of the second container is within a third interval. It will be appreciated that if the distance between the liquid outlet and the bottom of the second container is too short, the cleaning liquid may flow out of the liquid outlet soon after flowing into the second container, so that the duration of the chemical reaction between the cleaning liquid and the waste liquid is too short, which affects the cleaning effect; if the distance between the liquid outlet and the bottom of the second container is too large, it may be difficult to drain the waste liquid after the chemical reaction from the liquid outlet. Therefore, by properly setting the distance between the liquid outlet and the bottom of the second container, the embodiment of the utility model can ensure that the cleaning liquid and the waste liquid generate enough chemical reaction in the second container and simultaneously facilitate the waste liquid after the reaction to be discharged from the liquid outlet in time.
Drawings
FIG. 1 is a schematic view of an automatic cleaning device according to an embodiment of the present utility model;
fig. 2 is a schematic structural view of another automatic cleaning device according to an embodiment of the present utility model.
Detailed Description
As mentioned in the background, in the field of semiconductor technology, many scenarios generate waste liquid, which needs to be collected using a waste liquid collection container. Because often collect multiple waste liquid in the waste liquid collecting container, these waste liquid is relatively easy crystallization, especially when waste liquid volume is more, often can cause waste liquid collecting container and liquid outlet, the jam of liquid outlet pipeline, leads to waste liquid collecting container and liquid outlet pipeline unable continuous use.
In the prior art, when the waste liquid collecting container and the liquid outlet pipeline thereof are blocked, two treatment modes are generally adopted: firstly, the waste liquid collecting container and the pipeline are disassembled for manual cleaning; and secondly, the whole waste liquid collecting container and the liquid outlet pipeline are replaced. However, the process of removing and reloading the waste liquid container and the liquid outlet line is complicated, may be subject to long downtime, and may cause safety hazards due to the chemical liquid being generally corrosive or chemically toxic. Furthermore, higher replacement costs may be required if the replacement process is directly performed.
In order to solve the above technical problems, an embodiment of the present utility model provides an automatic cleaning device, which specifically includes: the first container is used for containing cleaning liquid; a second container for collecting waste liquid; the air supply device is connected with the first container through a first ventilation pipeline and is used for supplying compressed air to the first container through the first ventilation pipeline so as to convey the cleaning liquid from the first container to the second container; the switch mechanism is arranged on the first ventilating pipeline and used for switching on or switching off the compressed air provided by the air supply device to the first container.
From the above, in the embodiment of the present utility model, by using the air supply device to supply compressed air to the second container (e.g., the waste liquid collecting container), a conveying power can be provided to automatically convey the cleaning liquid from the first container (e.g., a container for containing the cleaning liquid) to the second container, so that the cleaning liquid and the waste liquid in the second container are chemically reacted, and the waste liquid in the second container is prevented from crystallizing to cause clogging. In addition, by adopting the pneumatic switch mechanism, the cleaning liquid can be conveniently controlled to be conveyed to be started or stopped, and the convenience of use is improved.
In order to make the above objects, features and advantages of the present utility model more comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1, fig. 1 is a schematic structural view of an automatic cleaning device according to an embodiment of the present utility model.
The automatic cleaning device may include: a first container 10 for containing a cleaning liquid; a second container 11 for collecting waste liquid; an air supply device 12 connected to the first container 10 through a first air line 13 for supplying compressed air to the first container 10 through the first air line 13 to transfer the cleaning liquid from the first container 10 to the second container 11; a switching mechanism 14 provided on the first ventilation pipe 13 for opening or closing the compressed air supplied from the air supply device 12 to the first container 10.
In some embodiments, the switching mechanism 14 is configured to switch on or off the compressed air provided by the air supply device 12 to the first container 10, which may specifically mean that the switching mechanism 14 switches on or off the first ventilation line 13, the switched on first ventilation line 13 enables the compressed air provided by the air supply device 12 to be delivered to the first container 10, and the switched off first ventilation line 13 disables the compressed air provided by the air supply device 12 from being delivered to the first container 10.
Wherein the first container 10 and the second container 11 can be connected through a first liquid outlet pipeline 101. Further, the first liquid outlet pipe 101 may be provided with a check valve 20. By arranging the one-way valve 20, the one-way conveying of the cleaning liquid to the second container 11 can be controlled, the waste liquid in the second container 11 is prevented from flowing back to the first container 10, and the cleaning liquid in the first liquid outlet pipeline 101 and the first container 10 is prevented from being polluted.
Further, the switching mechanism 14 includes: a first switch assembly 141, wherein when the first switch assembly 141 is opened, the air supply device 12 supplies compressed air to the first container 10, and when the first switch assembly 141 is closed, air supply is closed; a pulse trigger 142 for generating a first pulse signal 1421, wherein the first pulse signal 1421 is used for opening or closing the first switch assembly 141.
In an implementation, the switching mechanism 14 may further include a power source (not shown in the figure) for supplying power to the pulse trigger 142, where the power source, the pulse trigger 142, and the first switching component 141 are electrically connected.
In the embodiment of the present utility model, since the pulse signal itself has the characteristics of discreteness, periodicity, etc., compared with the case where the first switch assembly 141 is periodically or aperiodically opened or closed by using a manual method, or other non-discrete electrical signals are used, the first pulse signal 1421 can be used to control the opening and closing of the first switch assembly 141 more conveniently and automatically.
Still further, the first pulse signal 1421 may include a first signal for opening the first switching assembly 141 and a second signal for closing the first switching assembly 141.
In a specific implementation, the first signal may be one of a high level signal and a low level signal, for example, a high level signal, and may be a digital signal "1"; the second signal may be the other of the high level signal and the low level signal, for example, the low level signal, and may be a digital signal "0".
Wherein the greater the proportion of the duration of the first signal occupied in the first pulse signal 1421, the longer the duration of the air supply 12 supplying compressed air to the first container 10, the more cleaning liquid is delivered from the first container 10 to the second container 11.
Specifically, the duration of the first signal and the duration of the second signal may be different within a single signal period of the first pulse signal 1421.
In a specific implementation, taking the first pulse signal 1421 generated within a preset duration as an example, the proportion of the total duration of the first signal occupied by the preset duration can be increased by increasing the trigger frequency of the first signal; the proportion of the total duration of the first signal occupied by the preset duration can be improved by improving the single trigger duration of the first signal.
In an embodiment of the present utility model, the proportion of the duration of the first signal occupied in the first pulse signal 1421 (for example, the one-shot duration of the first signal is appropriately set, or the trigger frequency of the first signal is appropriately set) may be appropriately set according to specific needs, so as to automatically control the amount of the cleaning liquid delivered to the second container 11.
Further, the first ventilation pipe 13 is further provided with a pressure adjusting device 15 for adjusting the pressure of the compressed air supplied from the air supply device 12 to the first container 10, and the higher the pressure is, the higher the delivery rate of the cleaning liquid is.
Further, the second container 11 has a liquid outlet 111, and a ratio between a distance between the liquid outlet 111 and a bottom of the second container 11 and a height value of the second container 11 is within a third interval.
In some non-limiting embodiments, the third interval may be set to any value from 1/3 to 2/3, for example, may be set to 1/2.
In a specific implementation, the liquid outlet 111 of the second container 11 may be connected to a second liquid outlet pipe 112, where the second liquid outlet pipe 112 is used to convey the waste liquid in the second container 11 to a plant waste liquid collecting place for unified collection treatment.
It will be appreciated that if the distance between the liquid outlet 111 and the bottom of the second container 11 is too short, the cleaning liquid may flow out of the liquid outlet 111 soon after flowing into the second container 11, so that the duration of the chemical reaction between the cleaning liquid and the waste liquid is too short, which affects the cleaning effect; if the distance between the liquid outlet 111 and the bottom of the second container 11 is too long, it may be difficult to discharge the waste liquid after the chemical reaction from the liquid outlet 111. Therefore, by properly setting the distance between the liquid outlet 111 and the bottom of the second container 11, the embodiment of the utility model can make the cleaning solution and the waste liquid have enough chemical reaction in the second container 11, and simultaneously facilitate the waste liquid after the reaction to be discharged from the liquid outlet 111 in time.
Referring to fig. 2, fig. 2 is a schematic structural view of another automatic cleaning device according to an embodiment of the present utility model. The following describes a portion of the another automatic cleaning apparatus different from that of fig. 1.
The other automatic cleaning device may further include, on the basis of the embodiment shown in fig. 1: the foam discharging device 16 is connected with the air supply device 12 through a second air passage 17 and is used for containing liquid 161 to be foamed, and the liquid 161 to be foamed contains bubbles 1611; the air supply device 12 is further configured to supply compressed air to the bubble removal device 16 through the second ventilation line 17 to discharge air bubbles 1611 contained in the liquid 161 to be bubble removed to the second container 11.
In the embodiment of the present utility model, by adding the foam discharging device 16 on the basis of the embodiment shown in fig. 1, the requirements of foam discharging and waste liquid cleaning can be simultaneously satisfied, specifically, not only can the foam discharging liquid 161 containing the air bubbles 1611 be automatically discharged to the second container 11, but also the second container 11 can be automatically cleaned, and the waste liquid crystallization can be prevented from blocking the second container 11.
Further, the switch mechanism 14 may further include a second switch assembly 143, wherein when the second switch assembly 143 is turned on, the air supply device 12 supplies compressed air to the bubble removal device 16, and when the second switch assembly 143 is turned off, the air supply is turned off; the pulse trigger 142 is further configured to generate a second pulse signal 1422, where the second pulse signal 1422 is used to open or close the second switch assembly 143.
Regarding the related principle and technical effect of the pulse trigger 142 controlling the second switch assembly 143, reference is made to the related content of the pulse trigger 142 controlling the first switch assembly 141 in the embodiment shown in fig. 1, which is not described herein.
Further, the bubble removing device 16 may include: a third container 162 for containing the liquid 161 to be foamed; a fourth container 163 connected to the third container 162 via a first infusion line 18 and connected to the second container 11 via a second infusion line 19; the compressed air provided by the air supply device 12 is further used for conveying at least a portion of the liquid 161 to be foamed contained in the third container 162 to the fourth container 163 via the first infusion line 18, and then discharging the air bubbles 1611 on the surface of the liquid 161 to be foamed in the fourth container 163 to the second container 11 via the second infusion line 19.
Still further, the inlet port 191 of the second infusion line 19 is connected to the fourth container 163 and satisfies one or more of the following: the distance between the liquid inlet port 191 of the second infusion line 19 and the surface of the liquid 161 to be foamed in the fourth container 163 is within a first interval; the distance between the inlet port 191 of the second infusion line 19 and the top of the fourth container 163 is within a second interval.
In some non-limiting embodiments, the first and second intervals may be set to 0cm to 1cm.
In the embodiment of the present utility model, the fourth container 163 functions as a buffer container. The bubbles contained in the liquid 161 to be foamed and the bubbles additionally generated during the transportation process are transported to the fourth container 163 by the compressed air provided by the air supply device 12, and as the amount of the liquid in the fourth container 163 increases, most of the bubbles float on the surface of the liquid 161 to be foamed in the fourth container 163 until the amount of the liquid 161 to be foamed in the fourth container 163 approaches the total volume of the fourth container 163, and the bubbles 1611 floating on the surface of the liquid 161 to be foamed are extruded by the liquid 161 to be foamed and discharged to the second container 11 through the second infusion line 19.
Based on the above-described bubble discharge principle, it is understood that if the distance between the liquid inlet port 191 of the second infusion line 19 and the surface of the liquid 161 to be bubble-discharged is too large, or if the distance between the liquid inlet port 191 of the second infusion line 19 and the top of the fourth container 163 is too large, it is difficult to discharge the bubbles 1611 floating on the surface of the liquid 161 to be bubble-discharged. Therefore, by properly setting the distance between the liquid inlet 191 of the second infusion line 19 and the surface of the liquid 161 to be frothed in the fourth container 163 and the distance between the liquid inlet and the top of the fourth container 163, all the bubbles 1611 floating on the surface of the liquid 161 to be frothed can be drained as much as possible, and the quality of the liquid after the frothing treatment can be improved.
Further, the second infusion line 19 may also be provided with a one-way valve 20. By providing the check valve 20, the waste liquid in the second container 11 can be prevented from flowing back to the fourth container 163, and the liquid in the second infusion line 19 and the fourth container 163 is prevented from being contaminated.
Further, the second air passage 17 may also be provided with a pressure adjusting device 15 for adjusting the pressure of the compressed air supplied from the air supply device 12 to the third container 162, wherein the higher the pressure is, the higher the delivery rate of the liquid 161 to be foamed is.
The term "plurality" as used in the embodiments of the present utility model means two or more.
Although the present utility model is disclosed above, the present utility model is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the utility model, and the scope of the utility model should be assessed accordingly to that of the appended claims.
Claims (12)
1. An automatic cleaning device, comprising:
the first container is used for containing cleaning liquid;
a second container for collecting waste liquid;
the air supply device is connected with the first container through a first ventilation pipeline and is used for supplying compressed air to the first container through the first ventilation pipeline so as to convey the cleaning liquid from the first container to the second container;
the switch mechanism is arranged on the first air pipe and used for switching on or switching off the compressed air provided by the air supply device to the first container;
wherein, the switch mechanism includes:
the first switch assembly is used for supplying compressed air to the first container when being opened, and closing air supply when being closed;
a pulse trigger for generating a first pulse signal for opening or closing the first switch groupPiece。
2. The automatic cleaning device of claim 1, wherein the first pulse signal comprises a first signal for opening the first switch assembly and a second signal for closing the first switch assembly.
3. The automatic cleaning device according to claim 2, wherein the longer the period of time the first signal occupies in the first pulse signal, the longer the period of time the air supply device supplies compressed air to the first container, and the more cleaning liquid is supplied from the first container to the second container.
4. The automatic cleaning device according to claim 1, further comprising:
the foam discharging device is connected with the air supply device through a second air passage and is used for containing liquid to be foamed, and the liquid to be foamed contains bubbles;
the air supply device is also used for supplying compressed air to the bubble discharging device through the second ventilation pipeline so as to discharge bubbles contained in the liquid to be discharged to the second container.
5. The automatic cleaning device of claim 4, wherein the switch mechanism further comprises a second switch assembly, the air supply device providing compressed air to the bubble removal device when the second switch assembly is on, and closing the air supply when the second switch assembly is off;
the pulse trigger is also used for generating a second pulse signal, and the second pulse signal is used for opening or closing the second switch assembly.
6. The automatic cleaning device according to claim 4 or 5, wherein the bubble removing device comprises:
the third container is used for containing the liquid to be foam-removed;
the fourth container is connected with the third container through a first infusion pipeline and is connected with the second container through a second infusion pipeline;
the compressed air provided by the air supply device is also used for conveying at least part of the liquid to be foam-removed contained in the third container to the fourth container through the first infusion pipeline, and then discharging the air bubbles on the surface of the liquid to be foam-removed in the fourth container to the second container through the second infusion pipeline.
7. The automatic cleaning device of claim 6, wherein the liquid inlet port of the second infusion line is connected to the fourth container and meets one or more of the following:
the distance between the liquid inlet of the second infusion pipeline and the surface of the liquid to be foam-removed in the fourth container is in a first interval;
the distance between the liquid inlet of the second infusion pipeline and the top of the fourth container is in a second interval.
8. The automatic cleaning device of claim 7, wherein the first zone and the second zone are 0cm to 1cm.
9. The automatic cleaning device according to claim 6, wherein the second infusion line is provided with a one-way valve.
10. The automatic cleaning device according to claim 1, wherein the second container has a liquid outlet, and a ratio between a distance between the liquid outlet and a bottom of the second container and a height value of the second container is within a third interval.
11. The automatic cleaning device of claim 10, wherein the third interval is 1/3 to 2/3.
12. The automatic cleaning apparatus according to claim 1, wherein said first air pipe further has a pressure adjusting means for adjusting a pressure of compressed air supplied from said air supply means to said first container, said pressure being larger as a delivery rate of said cleaning liquid is higher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223542259.8U CN219597586U (en) | 2022-12-29 | 2022-12-29 | Automatic cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223542259.8U CN219597586U (en) | 2022-12-29 | 2022-12-29 | Automatic cleaning device |
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| Publication Number | Publication Date |
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| CN219597586U true CN219597586U (en) | 2023-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202223542259.8U Active CN219597586U (en) | 2022-12-29 | 2022-12-29 | Automatic cleaning device |
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| Country | Link |
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| CN (1) | CN219597586U (en) |
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- 2022-12-29 CN CN202223542259.8U patent/CN219597586U/en active Active
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