CN219586181U - Sealed housing device and chemical vapor deposition equipment - Google Patents
Sealed housing device and chemical vapor deposition equipment Download PDFInfo
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- CN219586181U CN219586181U CN202223212105.2U CN202223212105U CN219586181U CN 219586181 U CN219586181 U CN 219586181U CN 202223212105 U CN202223212105 U CN 202223212105U CN 219586181 U CN219586181 U CN 219586181U
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- sealing strip
- cover body
- sealed housing
- spiral sealing
- housing device
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Abstract
The utility model provides a sealed shell device and chemical vapor deposition equipment, wherein the sealed shell device comprises a frame part of a shell and a cover body part movably connected to the frame part; wherein, a limit boss is arranged at the joint of the frame part and the cover body part, and an avoidance gap matched with the limit boss is arranged on the cover body part; a spiral sealing strip is embedded in the side wall of the avoidance gap, which is attached to the limit boss; the spiral sealing strip is used for sealing the frame part and the cover body part and isolating radio frequency radiation inside the shell. The utility model can effectively seal the gap between the shells and shield the radio frequency radiation inside the shells.
Description
Technical Field
The utility model relates to the technical field of chemical vapor deposition, in particular to a sealed shell device and chemical vapor deposition equipment.
Background
In the existing chemical vapor deposition (Chemical Vapor Deposition, abbreviated as CVD) apparatus, a housing is generally provided to isolate an internal component or a chemical process of the apparatus from the outside, for example, when a cover of the housing is opened, a certain gap needs to be provided between the cover and the housing below the cover in order to improve the interference caused by the radius of rotation of the cover, and the existence of the gap can cause radio frequency microwave inside the housing to radiate out, resulting in communication errors of electrical components inside the housing.
At present, in order to realize effective sealing between the cover and the shell, sealing elements such as an elastic gasket and the like are generally arranged between the cover and the shell for sealing, but the sealing elements can only realize sealing effect and cannot realize electromagnetic shielding effect; in addition, in the repeated opening and closing process of the cover, the sealing element can be easily separated, the service life is limited, and the development requirement of chemical vapor deposition equipment cannot be met.
Disclosure of Invention
In view of the above problems, the present utility model is to provide a sealed housing device and a chemical vapor deposition apparatus, so as to solve the problems of poor sealing effect between housings, easy falling of sealing members, and influence on performance of the apparatus in the conventional chemical vapor deposition apparatus.
The utility model provides a sealed shell device, which comprises a frame part of a shell and a cover body part movably connected to the frame part; wherein, a limit boss is arranged at the joint of the frame part and the cover body part, and an avoidance gap matched with the limit boss is arranged on the cover body part; a spiral sealing strip is embedded in the side wall of the avoidance gap, which is attached to the limit boss; the spiral sealing strip is used for sealing the frame part and the cover body part and isolating radio frequency radiation inside the shell.
Furthermore, the frame part and the cover body part are connected through at least one hinge; the limiting bosses are respectively arranged on the inner sides of the hinges.
In addition, the optional structure is that the cross section of the limiting boss is a trapezoid structure, or at least one inclined chamfer is arranged on the limiting boss.
In addition, the spiral sealing strip is an alternative structure which is a spiral hollow strip structure.
In addition, an alternative structure is that the spiral sealing strip is arranged at the avoiding notch of the cover body in a groove mode.
In addition, the optional structure is that a strip-shaped limit groove is arranged in the side wall of the avoidance gap, which is attached to the limit boss; the spiral sealing strip is limited in the limiting groove, and at least part of the structure of the spiral sealing strip extends to the outer side of the limiting groove.
In addition, the optional structure is that in the cross section of the limit groove, the opening size of the limit groove is smaller than the maximum size of the limit groove; and the diameter of the spiral sealing strip is larger than the opening size of the limiting groove and smaller than the maximum size of the limiting groove.
In addition, the size of the part of the structure of the spiral sealing strip extending to the outer side of the limit groove is not smaller than that of the part of the spiral sealing strip, and a gap is formed between the frame part and the cover body part in the closed state of the shell.
Furthermore, an alternative construction is that the spiral seal is an electromagnetic interference shield.
On the other hand, the utility model also provides chemical vapor deposition equipment which comprises the sealing shell device.
By utilizing the sealing shell device and the chemical vapor deposition equipment, the limiting boss is arranged at the joint of the frame part and the cover body part, the cover body part is provided with the avoidance notch matched with the limiting boss, the spiral sealing strip is embedded in the side wall of the avoidance notch, which is attached to the limiting boss, on one hand, the effective sealing between the frame part and the cover body part can be realized through the spiral sealing strip, on the other hand, the radio frequency radiation inside the shell can be isolated, the device has simple structure, the spiral sealing strip can be prevented from falling off under high-frequency use, and the overall performance is stable and reliable.
To the accomplishment of the foregoing and related ends, one or more aspects of the utility model comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the utility model. These aspects are indicative, however, of but a few of the various ways in which the principles of the utility model may be employed. Furthermore, the utility model is intended to include all such aspects and their equivalents.
Drawings
Other objects and attainments together with a more complete understanding of the utility model will become apparent and appreciated by referring to the following description taken in conjunction with the accompanying drawings. In the drawings:
FIG. 1 is a perspective view of a seal housing device according to an embodiment of the present utility model;
FIG. 2 is an enlarged view of a portion A of FIG. 1;
FIG. 3 is a partial cross-sectional view of a seal housing device according to an embodiment of the present utility model;
FIG. 4 is an enlarged view of a portion B of FIG. 3;
FIG. 5 is a partial side view of a cover portion according to an embodiment of the utility model;
FIG. 6 is a partial cross-sectional view of a cover portion according to an embodiment of the present utility model;
wherein reference numerals include: the novel sealing device comprises a cover body part 1, an avoidance notch 11, a limiting groove 12, a frame part 2, a limiting boss 21, an inclined chamfer 22, a hinge 3 and a spiral sealing strip 4.
The same reference numerals will be used throughout the drawings to refer to similar or corresponding features or functions.
Detailed Description
In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that such embodiment(s) may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.
In the description of the present utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. are directional or positional relationships indicated below as based on the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the utility model.
In order to solve the problems that the sealing effect is poor, radio frequency radiation is emitted by gaps between a shell and a cover body of the traditional chemical vapor deposition equipment, communication errors occur to internal electric components, and the sealing piece between the traditional shell and the cover body is easy to fall off in the repeated use process, so that the service performance of the equipment is affected, and the like, the utility model provides the sealing shell device.
For a detailed description of the structure of the seal housing device of the present utility model, specific embodiments of the present utility model will be described in detail with reference to the accompanying drawings.
Fig. 1 and 2 show a schematic perspective structure of a seal housing device and a partially enlarged structure thereof, respectively, according to an embodiment of the present utility model; fig. 3 and 4 show a partial cross-sectional structure of a seal housing device and a partial enlarged structure thereof, respectively, according to an embodiment of the present utility model.
As shown collectively in fig. 1 to 4, a sealed housing device of an embodiment of the present utility model includes a frame portion 2 forming a housing, and a cover portion 1 movably connected to the frame portion 2, the cover portion 1 and the frame portion 2 cooperating to form a housing structure accommodating equipment devices; wherein, in order to ensure the sealed effect of both under the closed condition, be provided with spacing boss 21 in the junction of frame part 2 and lid 1, be provided with on lid 1 with spacing boss 21 looks adaptation dodge breach 11, simultaneously dodge breach 11 and spacing boss 21 mutually the lateral wall of laminating be embedded be equipped with spiral sealing strip 4, when lid 1 and frame part 2 lid, the clearance between accessible spiral sealing strip 4 sealed frame part 2 and the lid 1, the inside radio frequency radiation of still accessible spiral sealing strip 4 isolation casing simultaneously ensures the effective seal of casing under the closed condition.
Wherein, to enable the cover 1 to be opened or closed on the frame 2, in some embodiments, the frame 2 and the cover 1 may be connected by at least one hinge 3, and the limiting boss 21 may be respectively disposed inside each hinge 3; in other words, at the hinge 3 where the frame part 2 and the cover body are connected, corresponding limiting bosses 21 can be provided, and the corresponding cover body 1 is provided with avoiding notches 11, and sealing and electromagnetic shielding effects are realized through the spiral sealing strip 4 between the two.
Specifically, in order to ensure the stability of the spiral sealing strip 4 and prevent the spiral sealing strip 4 from falling off during frequent use, the cross section of the limiting boss 21 in the present utility model may be provided with a trapezoid structure, or at least one inclined chamfer 22, i.e. an inclined chamfer, is provided on the limiting boss 21, at this time, corresponding to the structure of the limiting boss 21, the avoidance notch 11 on the cover body 1 also forms a stepped structure with a corresponding inclined angle, and the spiral sealing strip 4 located therebetween is distributed along the whole limiting boss 21 and the inclined chamfer 22, which can prevent the spiral sealing strip 4 from falling off during repeated use and ensure the stability thereof.
Wherein, the inclination angle of the inclined chamfer 22 can be set to be an obtuse angle larger than 90 degrees, and compared with the inclination angle set to be 90 degrees, the sealing effect can be better, and the spiral sealing strip 4 is effectively prevented from being separated in the use process.
In a specific embodiment of the present utility model, the spiral sealing strip 4 may be installed at the avoidance gap 11 of the cover portion 1 by adopting a groove, where a strip-shaped limit groove may be disposed in a side wall (end surface) where the avoidance gap 11 is attached to the limit boss 21, the spiral sealing strip 4 is limited in the limit groove, and at least part of the structure of the spiral sealing strip 4 extends to the outside of the limit groove, and when the cover portion 1 and the frame portion 2 are fastened, part of the structure of the spiral sealing strip 4 located outside the limit groove may contact with the positioning boss on the frame portion 2, so as to achieve sealing and electromagnetic isolation effects.
It can be known that the part of the spiral sealing strip 4 located in the limit groove can cooperate with the limit groove to realize the limit function, while the part of the spiral sealing strip located outside the limit groove can cooperate with the positioning boss in the closed state of the cover body 1 to realize the sealing and signal shielding effects on the gap between the cover body 1 and the frame 2.
Specifically, fig. 5 and 6 show a partial side view structure and a partial cross-sectional structure of the cover portion according to an embodiment of the present utility model, respectively.
As shown in fig. 1 to 6 together, in the cover portion 1 of the embodiment of the present utility model, in the cross section of the limit groove 12, the limit groove 12 may be provided with a cavity structure that is laterally opened, and the opening size of the limit groove 12 is smaller than the maximum size of the limit groove 12; in addition, the diameter of the spiral sealing strip 4 is larger than the opening size of the limiting groove 12 and smaller than the maximum size of the limiting groove 12, so that the limiting effect on the spiral sealing strip 4 can be achieved through the limiting groove 12, at least part of the structure of the spiral sealing strip 4 protrudes from the inside of the limiting groove 12 and is used for sealing a gap between the cover body 1 and the frame 2 and shielding radio frequency signals, and specifically, the cross section of the limiting groove 12 can be set to be rectangular, circular or runway-shaped and other shapes, and the structure is not limited to the specific structure shown in fig. 6 in the utility model.
Wherein, in order to ensure stable and reliable sealing effect, the size of the part structure of the spiral sealing strip 4 extending to the outer side of the limit groove 12 is not less than that of the shell in the closed state, the gap between the frame part 2 and the cover part 1 is not smaller than that of the shell, and when the frame part 2 and the shell are buckled, the gap between the frame part 2 and the shell can be effectively compensated by the spiral sealing strip 4, and as the elastic sealing strip is extruded by external force, certain elastic deformation can occur in the limit groove 12, the elastic sealing strip cannot be damaged, and the stable performance and reliability can be ensured when the elastic sealing strip is repeatedly used.
It should be noted that, the spiral sealing strip 4 of the present utility model may be a structural member having an electromagnetic shielding effect, for example, an electromagnetic interference shielding member, and the spiral sealing member is spirally distributed along the extending direction of the limiting groove 12, and may be configured as a spiral hollow strip structure, for example, as shown in fig. 5, and may be elastically deformed in a transverse direction or a longitudinal direction when subjected to an external force.
Corresponding to the sealing shell device, the utility model also provides chemical vapor deposition equipment, which comprises the sealing shell device, wherein the sealing shell device can be arranged at the joint of a cover body part and a frame part of the equipment or any other position with a hole between the openable and closable shells, so that the effective sealing among the shells is realized, and the effective communication of internal electric components is ensured.
Specifically, embodiments of the chemical vapor deposition apparatus may refer to descriptions in specific embodiments of the seal housing device, which are not described herein.
By utilizing the sealing shell device and the chemical vapor deposition equipment, the limit boss with the bevel chamfer is arranged at the joint of the frame part and the cover body part of the equipment, the cover body part is provided with the avoidance notch matched with the limit boss, the side wall of the avoidance notch, which is matched with the limit boss, is embedded with the spiral sealing strip, and the spiral sealing strip can be extruded and deformed between the frame part and the cover body part, so that the effective sealing between the frame part and the cover body part is realized; in addition, the spiral sealing strip can also isolate radio frequency radiation in the shell, ensure reliable communication of electric components in the shell, has simple structure, can prevent damage and falling off under high-frequency use, and has stable and reliable overall performance.
The sealed housing device and the chemical vapor deposition apparatus according to the present utility model are described above by way of example with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that various modifications may be made to the seal housing apparatus and chemical vapor deposition apparatus set forth above without departing from the scope of the utility model. Accordingly, the scope of the utility model should be determined from the following claims.
Claims (10)
1. A sealed housing device, comprising a frame part of a housing and a cover part movably connected to the frame part; wherein, the liquid crystal display device comprises a liquid crystal display device,
a limiting boss is arranged at the joint of the frame part and the cover body part, and an avoidance gap matched with the limiting boss is arranged on the cover body part;
a spiral sealing strip is embedded in the side wall, which is attached to the limit boss, of the avoidance notch;
the spiral sealing strip is used for sealing the frame part and the cover body part and isolating radio frequency radiation inside the shell.
2. The sealed housing device of claim 1, wherein,
the frame part is connected with the cover body part through at least one hinge;
the limiting bosses are respectively arranged on the inner sides of the hinges.
3. The sealed housing device of claim 1, wherein,
the cross section of the limiting boss is of a trapezoid structure, or at least one inclined chamfer is arranged on the limiting boss.
4. The sealed housing device of claim 1, wherein,
the spiral sealing strip is of a spiral hollow strip structure.
5. The sealed housing device of claim 1, wherein,
the spiral sealing strip is arranged at the gap avoiding position of the cover body in a groove mode.
6. The sealed housing device of claim 4, wherein,
a strip-shaped limit groove is formed in the side wall, which is attached to the limit boss, of the avoidance notch;
the spiral sealing strip is limited in the limiting groove, and at least part of the structure of the spiral sealing strip extends to the outer side of the limiting groove.
7. The sealed housing device of claim 6, wherein,
in the cross section of the limit groove, the opening size of the limit groove is smaller than the maximum size of the limit groove; and, in addition, the processing unit,
the diameter of the spiral sealing strip is larger than the opening size of the limiting groove and smaller than the maximum size of the limiting groove.
8. The sealed housing device of claim 6, wherein,
the size of the part structure of the spiral sealing strip extending to the outer side of the limiting groove is not smaller than that of the gap between the frame part and the cover body part in the closed state of the shell.
9. The sealed housing device of claim 1, wherein,
the spiral sealing strip is an electromagnetic interference shielding piece.
10. Chemical vapor deposition apparatus comprising a sealed enclosure device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223212105.2U CN219586181U (en) | 2022-11-29 | 2022-11-29 | Sealed housing device and chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223212105.2U CN219586181U (en) | 2022-11-29 | 2022-11-29 | Sealed housing device and chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219586181U true CN219586181U (en) | 2023-08-25 |
Family
ID=87691415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223212105.2U Active CN219586181U (en) | 2022-11-29 | 2022-11-29 | Sealed housing device and chemical vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219586181U (en) |
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2022
- 2022-11-29 CN CN202223212105.2U patent/CN219586181U/en active Active
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