CN219581295U - Automatic chemical reagent cleaning system - Google Patents

Automatic chemical reagent cleaning system Download PDF

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Publication number
CN219581295U
CN219581295U CN202320198927.5U CN202320198927U CN219581295U CN 219581295 U CN219581295 U CN 219581295U CN 202320198927 U CN202320198927 U CN 202320198927U CN 219581295 U CN219581295 U CN 219581295U
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liquid
storage device
siphon
piece
liquid storage
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CN202320198927.5U
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崔松清
陆宏煜
李贞�
彭成盼
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Zhejiang Core Microelectronics Co ltd
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Zhejiang Core Microelectronics Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model relates to an automatic chemical reagent cleaning system; comprising the following steps: the device comprises a first liquid storage device, a second liquid storage device, a liquid pump, a third liquid storage device, a liquid supply pipe, a piece to be cleaned, a siphon pipe and an air exhaust device; the liquid outlet of the first liquid storage device and the liquid outlet of the second liquid storage device are respectively connected with the liquid inlet of the liquid pump, the liquid outlet of the liquid pump is connected with the liquid inlet of the third liquid storage device, the liquid outlet of the third liquid storage device is connected with the liquid inlet of the liquid supply pipe, the liquid outlet of the liquid supply pipe and the liquid inlet of the siphon are both positioned in a piece to be cleaned, the siphon is connected with the air extractor, and the liquid outlet of the siphon is connected with the liquid inlet of the second liquid storage device; according to the utility model, through the cooperation of the lifting device and the air exhaust device, the siphon can drain the acid liquor in the to-be-cleaned piece back to the second liquid storage device through the siphon principle, or the waste liquid in the to-be-cleaned piece is discharged through the waste liquid discharge pipe, so that manual dumping is not needed, and the cleaning efficiency and the safety coefficient are improved.

Description

Automatic chemical reagent cleaning system
Technical Field
The utility model relates to the field of chemical reagent treatment, in particular to an automatic chemical reagent cleaning system.
Background
In the single crystal material growth process, the cleaning process of the quartz crucible requires a large amount of corrosive chemical agents. In the traditional cleaning operation flow, the acid liquid needs to be poured into the crucible from the acid liquid tank manually, the acid liquid needs to be poured back into the acid liquid tank from the crucible manually after the cleaning is finished, the chemical reagent is operated frequently and time-consuming manually, and the risk of acid liquid splashing caused by unstable operation exists in the acid liquid pouring process.
Therefore, there is a need for a chemical reagent cleaning system that increases the safety factor, is easy to operate, is fast and stable.
Disclosure of Invention
The utility model aims at overcoming the defects in the prior art and provides an automatic chemical reagent cleaning system.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
an automated chemical reagent cleaning system is provided, comprising: the device comprises a first liquid storage device, a second liquid storage device, a liquid pump, a third liquid storage device, a liquid supply pipe, a piece to be cleaned, a siphon pipe and an air exhaust device;
the liquid outlet of the first liquid storage device and the liquid outlet of the second liquid storage device are respectively connected with the liquid inlet of the liquid pump, the liquid outlet of the liquid pump is connected with the liquid inlet of the third liquid storage device, the liquid outlet of the third liquid storage device is connected with the liquid inlet of the liquid supply pipe, the liquid outlet of the liquid supply pipe and the liquid inlet of the siphon are both positioned in the piece to be cleaned, the liquid outlet of the liquid supply pipe is far higher than the liquid inlet of the siphon, the siphon is connected with the air exhaust device, and the liquid outlet of the siphon is connected with the liquid inlet of the second liquid storage device;
the connection is pipeline connection.
Preferably, the liquid inlet of the first liquid storage device is connected with a deionized water supply pipe through a pipeline, and a second diaphragm valve is connected to the upper pipeline of the deionized water supply pipe.
Preferably, the liquid outlet of the first liquid storage device, the liquid outlet of the second liquid storage device and the liquid inlet of the liquid pump are connected through a fourth three-way valve pipeline.
Preferably, a first diaphragm valve is connected to the upper pipeline of the liquid supply pipe.
Preferably, the method further comprises: a fixing device;
wherein, the fixing device includes: the first fixing piece is used for lifting the to-be-cleaned piece or/and the second fixing piece is used for clamping the to-be-cleaned piece.
Preferably, the method further comprises: an anti-overflow device;
the anti-overflow device is fixedly arranged at the bottom of the to-be-cleaned piece, and the length or the width of the longitudinal section of the anti-overflow device is larger than that of the longitudinal section.
Preferably, the method further comprises: a lifting device;
the lifting device is used for moving the liquid inlet of the siphon tube into or out of the piece to be cleaned.
Preferably, the upper pipeline of the siphon is connected with a third diaphragm valve, and the third diaphragm valve is connected between the air extracting device and the liquid inlet of the second liquid storage device.
More preferably, the siphon upper pipeline is connected with a fifth three-way valve, the fifth three-way valve is connected between the third diaphragm valve and the liquid inlet of the second liquid storage device, and the fifth three-way valve is also connected with a waste liquid drain pipe.
Compared with the prior art, the utility model has the following technical effects:
according to the automatic chemical reagent cleaning system, the lifting device is matched with the air extracting device, so that the siphon can drain the acid liquor in the to-be-cleaned piece back to the second liquid storage device through the siphon principle, or the waste liquor in the to-be-cleaned piece is drained through the waste liquor drain pipe, so that the acid liquor can be recycled, and the acid liquor and the waste liquor in the to-be-cleaned piece do not need to be poured manually, so that the cleaning efficiency is improved, and the safety coefficient is improved.
Drawings
FIG. 1 is a schematic diagram of the basic structure of an automated chemical reagent cleaning system according to the present utility model;
reference numerals in the drawings include:
a first liquid storage device 1; a second liquid storage device 2; a liquid pump 3; a third liquid storage device 4; a piece 5 to be cleaned; an air extracting device 6; a first fixing member 7; a second fixing member 8; an anti-overflow device 9; a lifting device 10; a first diaphragm valve V1; a second diaphragm valve V2; a third diaphragm valve V3; a fourth three-way valve V4; and a fifth three-way valve V5.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.
The utility model is further described below with reference to the drawings and specific examples, which are not intended to be limiting.
Examples
The present embodiment provides an automated chemical reagent cleaning system comprising: the device comprises a first liquid storage device 1, a second liquid storage device 2, a liquid pump 3, a third liquid storage device 4, a liquid supply pipe, a piece to be cleaned 5, a siphon pipe and an air extractor 6;
the liquid inlet of the first liquid storage device 1 is connected with a deionized water supply pipe through a pipeline, and a second diaphragm valve V2 is connected to the upper pipeline of the deionized water supply pipe; the liquid outlet of the first liquid storage device 1, the liquid outlet of the second liquid storage device 2 and the liquid inlet of the liquid pump 3 are connected through a fourth three-way valve V4 pipeline, the liquid outlet of the liquid pump 3 is connected with the liquid inlet pipeline of the third liquid storage device 4, the liquid outlet of the third liquid storage device 4 is connected with the liquid inlet pipeline of the liquid supply pipe, the upper pipeline of the liquid supply pipe is connected with a first diaphragm valve V1, the liquid outlet of the liquid supply pipe and the liquid inlet of the siphon are both positioned in the piece to be cleaned 5, the liquid outlet of the liquid supply pipe is far higher than the liquid inlet of the siphon, the upper pipeline of the siphon is connected with an air exhaust device 6, the liquid outlet of the siphon is connected with the liquid inlet pipeline of the second liquid storage device 2, the upper pipeline of the siphon is connected with a third diaphragm valve V3, the third diaphragm valve V3 is connected between the air exhaust device 6 and the liquid inlet pipeline of the second liquid storage device 2, the upper pipeline is connected with a fifth three-way valve V5, and the liquid outlet of the siphon is connected with the fifth three-way valve V5;
the automated chemical reagent cleaning system further comprises: a fixing device, an overflow preventing device 9 and a lifting device 10; the fixing device includes: a first fixing piece 7 for lifting the piece 5 to be cleaned or/and a second fixing piece 8 for clamping the piece 5 to be cleaned; the anti-overflow device 9 is fixedly arranged at the bottom of the to-be-cleaned piece 5, and the length or the width of the longitudinal section of the anti-overflow device 9 is larger than the length or the width of the longitudinal section of the to-be-cleaned piece 5; the lifting device 10 is used for moving the liquid inlet of the siphon into or out of the piece 5 to be cleaned.
As a preferred embodiment, the lifting device 10 is a lifting pulley block.
When in use, the second fixing piece 8 is adjusted according to the outer diameter of the piece 5 to be cleaned, so that the second fixing piece 8 can clamp the piece 5 to be cleaned and fix the piece 5 to be cleaned; the first fixing piece 7 is adjusted according to the height of the piece 5 to be cleaned, so that the liquid outlet of the liquid supply pipe is lower than the opening 5cm of the piece 5 to be cleaned, and the liquid is ensured not to splash out; the height of the siphon is controlled by the lifting device 10, so that the liquid inlet of the siphon reaches the bottom of the piece 5 to be cleaned, and the system installation is completed;
after the system is installed, the liquid pump 3 and the second liquid storage device 2 are communicated through the fourth three-way valve V4, the liquid pump 3 is started, acid liquid in the second liquid storage device 2 is pumped to the third liquid storage device 4, the first diaphragm valve V1 is opened, the acid liquid in the third liquid storage device 4 is injected into a piece 5 to be cleaned, and after the injection is completed, the first diaphragm valve V1 and the liquid pump 3 are closed; after the acid liquor is washed, the third diaphragm valve V3 is closed, and air in the siphon is pumped and discharged by using the air pumping device 6, wherein the liquid level in the siphon is lower than the liquid level in the piece 5 to be washed; the third three-way valve V5 is communicated with the to-be-cleaned piece 5 and the second liquid storage device 2, acid liquor in the to-be-cleaned piece 5 is discharged into the second liquid storage device 2 due to siphon effect, and meanwhile, the first diaphragm valve V1 is opened, so that the third liquid storage device 4 and the acid liquor in the to-be-cleaned piece 5 are emptied, and then the acid liquor flushing is completed;
after the acid liquor flushing is finished, a liquid pump 3 and a first liquid storage device 1 are communicated through a fourth three-way valve V4, a second diaphragm valve V2 is opened, the liquid pump 3 is started, deionized water in the first liquid storage device 1 is pumped into a third liquid storage device 4, and the first diaphragm valve V1 is opened, so that deionized water in the third liquid storage device 4 is injected into a piece 5 to be cleaned for cleaning; closing the third diaphragm valve V3, sucking air in the siphon by using the air sucking device 6 to form a siphon effect, communicating the to-be-cleaned piece 5 and the waste liquid discharge pipe through the fifth three-way valve V5, and opening the third diaphragm valve V3, wherein waste liquid in the to-be-cleaned piece 5 is discharged through the waste liquid discharge pipe due to the siphon effect; after the deionized water flushing is finished, closing the second diaphragm valve V2 and the liquid pump 3, simultaneously opening the first diaphragm valve V1, emptying the third liquid storage device 4 and the waste liquid in the piece to be cleaned 5, and closing the third diaphragm valve V3 to finish the deionized water flushing;
after the deionized water flushing is finished, the lifting device 10 is used for lifting the siphon pipe, the piece 5 to be cleaned is taken down, the operation table is cleaned, and the overflow preventing device 9 is flushed.
In summary, according to the automatic chemical reagent cleaning system disclosed by the utility model, through the cooperation of the lifting device and the air exhaust device, the siphon pipe can drain the acid liquor in the to-be-cleaned part back to the second liquid storage device through the siphon principle, or the waste liquor in the to-be-cleaned part is drained through the waste liquor drain pipe, so that the acid liquor can be recycled, and the acid liquor and the waste liquor in the to-be-cleaned part do not need to be manually dumped, so that the cleaning efficiency is improved, and the safety coefficient is also improved.
The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.

Claims (9)

1. An automated chemical reagent cleaning system, comprising: the device comprises a first liquid storage device (1), a second liquid storage device (2), a liquid pump (3), a third liquid storage device (4), a liquid supply pipe, a piece to be cleaned (5), a siphon pipe and an air exhaust device (6);
the liquid outlet of the first liquid storage device (1) and the liquid outlet of the second liquid storage device (2) are respectively connected with the liquid inlet of the liquid pump (3), the liquid outlet of the liquid pump (3) is connected with the liquid inlet of the third liquid storage device (4), the liquid outlet of the third liquid storage device (4) is connected with the liquid inlet of the liquid supply pipe, the liquid outlet of the liquid supply pipe and the liquid inlet of the siphon are both positioned in the piece (5) to be cleaned, the liquid outlet of the liquid supply pipe is far higher than the liquid inlet of the siphon, the siphon is connected with the air exhaust device (6), and the liquid outlet of the siphon is connected with the liquid inlet of the second liquid storage device (2);
the connection is pipeline connection.
2. The automatic chemical reagent cleaning system according to claim 1, wherein the liquid inlet of the first liquid storage device (1) is connected with a deionized water supply pipe, and a second diaphragm valve (V2) is connected to the upper pipe of the deionized water supply pipe.
3. The automatic chemical reagent cleaning system according to claim 1, wherein the liquid outlet of the first liquid storage device (1), the liquid outlet of the second liquid storage device (2) and the liquid inlet of the liquid pump (3) are connected through a fourth three-way valve (V4) pipeline.
4. An automatic chemical reagent cleaning system according to claim 1, characterized in that the first diaphragm valve (V1) is connected to the supply line.
5. The automated chemical cleaning system of claim 1, further comprising: a fixing device;
wherein, the fixing device includes: a first fixing piece (7) for heightening the piece (5) to be cleaned or/and a second fixing piece (8) for clamping the piece (5) to be cleaned.
6. The automated chemical cleaning system of claim 1, further comprising: an anti-overflow device (9);
the overflow preventing device (9) is fixedly arranged at the bottom of the to-be-cleaned piece (5), and the length or the width of the longitudinal section of the overflow preventing device (9) is larger than that of the to-be-cleaned piece (5).
7. The automated chemical cleaning system of claim 1, further comprising: a lifting device (10);
the lifting device (10) is used for moving the liquid inlet of the siphon into or out of the piece (5) to be cleaned.
8. An automatic chemical reagent cleaning system according to claim 1, characterized in that a third diaphragm valve (V3) is connected to the siphon pipe, and the third diaphragm valve (V3) is connected between the air extractor (6) and the liquid inlet of the second liquid storage device (2).
9. The automatic chemical reagent cleaning system according to claim 8, wherein a fifth three-way valve (V5) is connected to the siphon pipe, the fifth three-way valve (V5) is connected between the third diaphragm valve (V3) and the liquid inlet of the second liquid storage device (2), and the fifth three-way valve (V5) is further connected to the liquid waste drain pipe.
CN202320198927.5U 2023-02-13 2023-02-13 Automatic chemical reagent cleaning system Active CN219581295U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320198927.5U CN219581295U (en) 2023-02-13 2023-02-13 Automatic chemical reagent cleaning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320198927.5U CN219581295U (en) 2023-02-13 2023-02-13 Automatic chemical reagent cleaning system

Publications (1)

Publication Number Publication Date
CN219581295U true CN219581295U (en) 2023-08-25

Family

ID=87694263

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320198927.5U Active CN219581295U (en) 2023-02-13 2023-02-13 Automatic chemical reagent cleaning system

Country Status (1)

Country Link
CN (1) CN219581295U (en)

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