CN219574493U - Quantum microscope - Google Patents

Abstract

The utility model discloses a quantum microscope, comprising: a beam splitting component, an image acquisition component and an objective lens. The light splitting assembly comprises a base and a spectroscope, the base is provided with a light splitting cavity, a first hole, a second hole and a third hole, the first hole, the second hole and the third hole are communicated with the light splitting cavity, the first hole is used for introducing light beams, the second hole and the third hole are opposite to each other and form a light path channel, the spectroscope is movably arranged in the light splitting cavity, and the spectroscope can move in or out of the light path channel; the image acquisition component is arranged on the base and is opposite to the second hole; the objective lens is arranged on the base and is opposite to the third hole and used for observing the sample to be detected. According to the utility model, the base and the spectroscope are arranged on the base, so that the light path system is integrated in the quantum microscope, and the spectroscope can move in or out of the light path channel formed by the second hole and the third hole, so that the quantum microscope can switch different light path systems for illumination and fluorescence collection.

Description

Quantum microscope

Technical Field

The utility model relates to the technical field of microscope manufacturing, in particular to a quantum microscope.

Background

Quantum Diamond Microscopy (QDM) is a wide field magnetic microscope based on the principle of spin magnetic resonance based on the NV colour centre. The spin quantum states of nitrogen-vacancy (NV) color center luminescence defects in diamond are susceptible to surrounding microwave and static magnetic fields and can be read out using lasers. The traditional method is applied to NV color center ensemble fluorescence collection, imaging and illumination to form two independent light path systems, and occupied space is compared.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present utility model is to provide a quantum microscope integrated with two systems of imaging and illumination, which improves the integration level of the quantum microscope and reduces the space occupation ratio.

According to an embodiment of the present utility model, a quantum microscope includes: a beam splitting component, an image acquisition component and an objective lens. The light splitting assembly comprises a base and a spectroscope, a light splitting cavity, a first hole, a second hole and a third hole are formed in the base, the first hole is communicated with the light splitting cavity, the first hole is used for introducing light beams, the second hole and the third hole are opposite to each other and form a light path channel, the spectroscope is movably arranged in the light splitting cavity, and the spectroscope can move in or out of the light path channel; the image acquisition component is arranged on the base and is opposite to the second hole; the objective lens is arranged on the base and is opposite to the third hole and used for observing the sample to be detected.

According to the quantum microscope provided by the embodiment of the utility model, the light path system is integrated in the quantum microscope by arranging the light splitting component, and the light path channel formed by the second hole and the third hole can be moved in or out by the spectroscope, so that the quantum microscope can switch different light path systems for illumination and fluorescence collection, the light path device is prevented from being additionally arranged outside the quantum microscope, the space occupation rate of the quantum microscope is reduced, the structure is simple, and the integration degree of the quantum microscope is improved.

In some embodiments of the utility model, the second aperture and the third aperture are aligned in a first direction, and the beam splitter is moved in a second direction, the second direction being perpendicular to the first direction.

In some embodiments of the present utility model, the light splitting assembly includes a support and a driving member, an opening is disposed at one end of the base located in the second direction, a portion of the support is covered on the opening, the spectroscope is movably disposed on the support, and the driving member is in driving connection with the spectroscope.

In some embodiments of the present utility model, the support includes a slide bar and an end cap, the end cap is covered on the opening, the slide bar is located in the light splitting cavity and connected with the end cap, the slide bar extends along the second direction, and the spectroscope is slidably disposed on the slide bar.

In some embodiments of the present utility model, the support includes a fixing plate and a connecting rod, the fixing plate is located in the spectroscopic cavity and located on a side of the spectroscope away from the end cover, a peripheral wall of the fixing plate abuts against a cavity wall of the spectroscopic cavity, and the connecting rod connects the fixing plate and the end cover.

In some embodiments of the present utility model, the end cover is provided with a through hole, the driving member is a pull rod, and the pull rod is arranged on the through hole in a penetrating way, and one end of the pull rod is connected with the spectroscope.

In some embodiments of the present utility model, the image acquisition assembly includes a lens barrel extending along the first direction and connected to the base, a nozzle of the lens barrel facing the second hole, a first lens disposed within the lens barrel at one end of the lens barrel near the second hole, and an image sensor disposed at the other end of the lens barrel far from the second hole.

In some embodiments of the present utility model, the quantum microscope includes a detection assembly, where the detection assembly includes a detection bin, an NV color center probe, and an optical fiber coupler, where an opening is provided on the detection bin, a portion of the objective lens is disposed through the opening and connected to the detection bin, the NV color center probe is disposed in the detection bin and faces the objective lens, and the optical fiber coupler is located on one side of the NV color center probe and is disposed on the detection bin.

In some embodiments of the utility model, the detection bin comprises a bin body and a bin door, wherein a bin opening is formed in the bin body, and the bin door is arranged in the opening in an openable and closable manner.

In some embodiments of the utility model, the quantum microscope includes a light source assembly disposed on the base and facing the first aperture, the light source assembly configured to emit a light beam along a third direction, the second direction, and the first direction being perpendicular to each other.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a cross-sectional view of a quantum microscope of an embodiment of the utility model;

FIG. 2 is a schematic diagram of a three-dimensional structure of a quantum microscope according to an embodiment of the present utility model;

FIG. 3 is a second cross-sectional view of a quantum microscope of an embodiment of the utility model;

fig. 4 is a schematic perspective view of a spectroscopic assembly without a base of a quantum microscope according to an embodiment of the present utility model.

Reference numerals:

100. a quantum microscope;

10. a light splitting component;

11. a base; 111. an end portion;

11a, a light splitting cavity; 11b, a first hole; 11c, a second hole; 11d, a third hole; 11e, open; 11f, optical path channel;

12. a beam splitter;

13. a bracket;

131. an end cap; 131a, through holes;

132. a fixing plate; 133. a connecting rod; 1331. a slide bar;

14. a driving member;

20. an image acquisition component; 21. a lens barrel; 22. a first lens; 23. an image sensor;

30. an objective lens;

40. a detection assembly;

41. a detection bin; 41a, openings;

411. a bin body; 412. a bin gate; 411a, bin mouth;

42. NV color center probe; 43. an optical fiber coupler;

50. a light source assembly.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

A quantum microscope 100 according to an embodiment of the present utility model is described below with reference to fig. 1-4.

As shown in fig. 1, a quantum microscope 100 according to an embodiment of the present utility model includes: a beam splitting assembly 10, an image acquisition assembly 20, an objective lens 30. The light splitting assembly 10 comprises a base 11 and a spectroscope 12, wherein a light splitting cavity 11a is arranged on the base 11, a first hole 11b, a second hole 11c and a third hole 11d which are communicated with the light splitting cavity 11a are formed in the base 11, the first hole 11b is used for introducing light beams, the second hole 11c and the third hole 11d are opposite to each other and form a light path channel 11f, the spectroscope 12 is movably arranged in the light splitting cavity 11a, and the spectroscope 12 can move in or out of the light path channel 11f; the image acquisition assembly 20 is arranged on the base 11 and faces the second hole 11c; an objective lens 30 is provided on the base 11 and facing the third hole 11d for observing the sample to be measured.

That is, before the sample to be measured is observed by using the quantum microscope 100, the sample to be measured is first subjected to position alignment, specifically, the sample to be measured is first placed on a side of the objective lens 30 away from the base 11 (for example, on the lower side of the objective lens 30 in fig. 1), meanwhile, the beam splitter 12 is moved into the optical path channel 11f, the light beam emitted by the external light source enters the inside of the beam splitting cavity 11a from the first hole 11b, is reflected by the beam splitter 12 to reach the objective lens 30 and the sample to be measured, is focused by the objective lens 30, returns through the original path, and reaches the image acquisition assembly 20 through the beam splitter 12, the rough contour of the sample to be measured can be observed by the image acquisition assembly 20, further, the region to be measured on the sample to be measured is locked, the position of the sample to be measured is adjusted, and the position alignment of the sample to be measured can be completed by the beam splitter 12 in cooperation with the external light source in the above manner, thereby improving the accuracy of the detection of the quantum microscope 100. When the sample to be detected needs to be observed, the spectroscope 12 moves out of the light path channel 11f, and no shielding object exists in the light path channel 11f, so that detection of the sample to be detected can be completed through the image acquisition assembly 20, the objective lens 30 and other components of the quantum microscope 100.

It should be noted that, the beam splitter 12 may be configured as a light-transmitting triangular prism, and the beam splitter 12 may be configured as other structural members capable of implementing the above functions, which will not be described herein.

According to the quantum microscope 100 of the embodiment of the utility model, the base 11 is arranged, the spectroscope 12 is arranged on the base 11, so that the light path system is integrated in the quantum microscope 100, and the spectroscope 12 can move in or out of the light path channel 11f formed by the second hole 11c and the third hole 11d, so that the quantum microscope 100 can switch different light path systems for illumination and fluorescence collection, the light path device is prevented from being additionally arranged outside the quantum microscope 100, the space occupation rate of the quantum microscope 100 is reduced, the structure is simple, and the integration degree of the quantum microscope 100 is improved.

As shown in fig. 1 and 3, in some embodiments of the present utility model, the second hole 11c and the third hole 11d are aligned in a first direction (up-down direction as shown in fig. 1), and the beam splitter 12 is moved in a second direction (left-right direction as shown in fig. 3), which is perpendicular to the first direction. That is, the optical path channel 11f extends along the first direction, and by providing the second hole 11c and the third hole 11d in the first direction, and the second hole 11c and the third hole 11d communicate with the optical path channel 11f, the base 11 is prevented from shielding the optical path channel 11f, and the transmission efficiency of light in the optical path channel 11f is improved.

When the spectroscope 12 moves onto the light path channel 11f, the spectroscope 12 reflects the light beam incident into the base 11 from the first hole 11b onto the light path channel 11f, so that the light beam can be transmitted along the extending direction of the light path channel 11f, and illumination of the sample to be detected is further realized; when the spectroscope 12 moves out of the light path channel 11f in the light splitting cavity 11a, the laser transmitted along the light path channel 11f is prevented from being shielded by the spectroscope 12, the transmission efficiency of the laser is improved, and further the detection of the quantum microscope 100 is clearer and more accurate.

As shown in fig. 2, 3 and 4, in some embodiments of the present utility model, the light splitting assembly 10 includes a support 13 and a driving member 14, one end of the base 11 located in the second direction is provided with an opening 11e, a part of the support 13 is covered on the opening 11e, the beam splitter 12 is movably disposed on the support 13, and the driving member 14 is connected to the beam splitter 12 in a driving manner. That is, the driving member 14 is connected to the beam splitter 12, so that the beam splitter 12 moves reciprocally along the second direction on the support 13, and a user can freely control the beam splitter 12 to move in the beam splitting cavity 11a, thereby improving convenience of moving the beam splitter 12 by the user.

Wherein, the driving member 14 may be configured as a driving rod, the driving rod is installed at one end of the beam splitter 12 along the second direction, and the driving of the beam splitter 12 is achieved by pushing and pulling the driving rod; the driving member 14 may also be provided as a rack and pinion driving structure; the driving member 14 may also be configured as an air cylinder, and the driving member 14 may be configured as any driving structure or driving device capable of achieving the above functions, which will not be described herein.

As shown in fig. 3 and 4, in some embodiments of the present utility model, the bracket 13 includes a sliding rod 1331 and an end cover 131, the end cover 131 is covered on the opening 11e, the sliding rod 1331 is located in the light splitting cavity 11a and is connected to the end cover 131, the sliding rod 1331 extends along the second direction, and the light splitter 12 is slidably disposed on the sliding rod 1331. That is, by arranging the end cover 131 to seal the opening 11e, the light beam entering the light path channel 11f is prevented from being emitted from the opening 11e, so that the light beam is completely limited in the light path channel 11f, the brightness of the light beam is further improved, and the definition of the observation of the quantum microscope 100 is further improved; meanwhile, the beam splitter 12 is slidably arranged on the sliding rod 1331, so that the beam splitter 12 can reciprocate along the second direction and limit other directions of the beam splitter 12, and the beam splitter 12 is prevented from shifting to influence the transmission of light beams.

In addition, the beam splitter 12 is disposed on the sliding rod 1331, and can be detached from the base 11 together with the end cover 131, so that the beam splitter 12 can be conveniently maintained or replaced in a later period.

As shown in fig. 3, in some embodiments of the present utility model, the bracket 13 includes a fixing plate 132 and a connecting rod 133, where the fixing plate 132 is located in the spectroscopic cavity 11a and is located on a side of the spectroscopic 12 away from the end cover 131, and a peripheral wall of the fixing plate 132 abuts against a cavity wall of the spectroscopic cavity 11a, and the connecting rod 133 connects the fixing plate 132 and the end cover 131. That is, by arranging the fixing plate 132 and fixedly mounting the fixing plate 132 in the light splitting cavity 11a, the connecting rod 133 and the end cover 131 connected with the fixing plate 132 are fixedly mounted in the base 11, further, the beam splitter 12 mounted on the bracket 13 is prevented from moving along with the bracket 13, the set angle of the beam splitter 12 on the bracket 13 is prevented from being changed, the light reflected by the beam splitter 12 is prevented from being deviated, and the accuracy of the reflected light path of the beam splitter 12 is improved.

In some embodiments, the bracket 13 includes an end cap 131 and a connecting rod 133, one end of the connecting rod 133 is connected to the end cap 131, and the other end of the connecting rod 133 is connected to the base 11 away from the end 111 of the end cap 131 in the second direction. By connecting the connecting rod 133 to the end 111 of the base 11, the addition of a fixed structure is avoided, the weight of the quantum microscope 100 is reduced, and the structural composition of the quantum microscope 100 is simplified.

It should be noted that the number of the connecting rods 133 is plural, all or part of the plurality of connecting rods 133 may be used as the sliding rod 1331 for installing the beam splitter 12, and the number of the connecting rods 133 may be 3, 4, 5, 6 or more, which will not be described in detail herein.

As shown in fig. 2, 3 and 4, in some embodiments of the present utility model, a through hole 131a is formed in the end cover 131, the driving member 14 is a pull rod, and the pull rod is disposed on the through hole 131a in a penetrating manner, and one end of the pull rod is connected to the beam splitter 12. That is, by setting the driving member 14 as a pull rod, the structure of the driving member 14 is simplified, so that the operation mode of the driving member 14 is simple and convenient, the user can control the driving member 14 to drive the spectroscope 12 to move in the spectroscopic cavity 11a conveniently, and the driving member 14 is set as the pull rod to further enable the driving member 14 to have low weight, thereby meeting the light weight requirement of the quantum microscope 100.

As shown in fig. 1, 2 and 3, in some embodiments of the present utility model, the image acquisition assembly 20 includes a lens barrel 21, a first lens 22 and an image sensor 23, the lens barrel 21 extends along a first direction and is connected to the base 11, a nozzle of the lens barrel 21 faces the second hole 11c, the first lens 22 is disposed in the lens barrel 21 and is located at one end of the lens barrel 21 near the second hole 11c, and the image sensor 23 is disposed at the other end of the lens barrel 21 far from the second hole 11 c. That is, the optical path channel 11f extending along the first direction is defined by the lens barrel 21, so that the light beam is transmitted and deflected along the first direction in which the lens barrel 21 extends, and at the same time, the quantum microscope 100 converts the light irradiated to the image sensor 23 in the optical path channel 11f into an image by mounting the image sensor 23 at one end of the lens barrel 21, so that the quantum microscope 100 can accurately observe the sample to be measured, wherein the first lens 22 mounted in the lens barrel 21 focuses the light beam irradiated to the image sensor 23 onto the image sensor 23, thereby further improving the image definition of the quantum microscope 100. As shown in fig. 1, 2 and 3, in some embodiments of the present utility model, the quantum microscope 100 includes a detection assembly 40, where the detection assembly 40 includes a detection bin 41, an NV color center probe 42, and an optical fiber coupler 43, an opening 41a is provided on the detection bin 41, a portion of the objective lens 30 is disposed through the opening 41a and connected to the detection bin 41, the NV color center probe 42 is disposed in the detection bin 41 and faces the objective lens 30, and the optical fiber coupler 43 is disposed on one side of the NV color center probe 42 and is disposed on the detection bin 41.

Specifically, the detection bin 41 is arranged to enable the sample to be detected to be placed in the detection bin, interference of an external environment to the detection process of the sample to be detected is avoided, and further, the optical fiber coupler 43 and the NV color center probe 42 are arranged to enable 532nm laser emitted by the optical fiber coupler 43 to irradiate the NV color center probe 42 to emit red fluorescence, so that the sample to be detected in the detection bin can be detected by the image sensor 23. The objective lens 30 is provided on the detection chamber 41 to collect the red fluorescence, so that the red fluorescence can be irradiated to the image sensor 23 along the first direction, thereby further improving the detection definition of the quantum microscope 100.

It should be noted that, the NV color center probe 42 may be a diamond quantum probe, and the NV color center probe 42 may also be another probe capable of achieving the above functions, which will not be described in detail here.

As shown in fig. 2, in some embodiments of the present utility model, the detection bin 41 includes a bin body 411 and a bin gate 412, wherein a bin opening 411a is provided on the bin body 411, and the bin gate 412 is openably and closably provided in the opening 41 a. Specifically, by providing the bin port 411a and the bin gate 412 on the detection bin 41, when the bin gate 412 is opened, the sample to be detected can pass through the bin port 411a and enter the bin body 411, or the sample to be detected can be taken out from the bin body 411 through the bin port 411a, thereby improving the convenience of using the quantum microscope 100; when the bin gate 412 is closed, the detection bin 41 forms a completely closed structure, so that external light is prevented from entering the bin body 411 to interfere with the detection process, and the accuracy of the detection of the quantum microscope 100 is improved.

In some embodiments of the present utility model, the quantum microscope 100 includes a light source assembly 50, the light source assembly 50 being disposed on the base 11 and facing the first hole 11b, the light source assembly 50 for emitting a light beam in a third direction (front-rear direction as shown in fig. 1), the third direction, the second direction, and the first direction being perpendicular to each other. That is, by providing the light source assembly 50 at the position of the first hole 11b of the quantum microscope 100, the external light source is avoided from being used when the quantum microscope 100 works, and the integration level of the quantum microscope 100 is improved.

Specifically, the light source assembly 50 may include a light source (not shown), a second lens (not shown), and a third lens (not shown), and the light beam of the light source may be focused by the second lens and the third lens and then irradiated onto the beam splitter 12.

In some embodiments of the present utility model, the light source assembly 50 further includes a beam expander (not shown) mounted on the fiber coupler 43. By providing the beam expander, the 532nm laser beam emitted from the optical fiber coupler 43 can be formed into a high-quality gaussian beam with a small spread angle, and the detection resolution of the quantum microscope 100 can be further improved.

In summary, the quantum microscope 100 irradiates the beam onto the beam splitter 12 through the first hole 11b by passing the sample to be measured through the bin opening 411a in the bin body 411, the beam splitter 12 reflects the beam onto the sample to be measured, further, the beam reaches the sample to be measured and irradiates the image sensor 23 along the optical path channel 11f after being reflected, so that the image sensor 23 can observe the rough contour of the sample, further, the position of the sample to be measured and the distance between the image sensor 23 and the NV color center probe 42 are observed, and at this time, the sample to be measured is in the set position by adjusting the position of the sample to be measured and the distance between the sample to be measured and the NV color center probe 42; when the sample to be measured is in the set position, the light source assembly 50 is closed, the bin gate 412 is closed, the optical fiber coupler 43 is opened to enable 532nm laser to be expanded by the beam expander to form high-quality Gaussian beams with small diffusion angles to be irradiated on the NV color center probe 42 to form red fluorescence, the red fluorescence is irradiated on the sample to be measured to form an image after being reflected, and the image is irradiated on the image sensor 23 through the optical path channel 11f, so that observation and detection of the sample to be measured are realized.

Other configurations and operations of the quantum microscope 100 according to embodiments of the present utility model are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and to simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the utility model, a "first feature" or "second feature" may include one or more of such features.

In the description of the present utility model, "plurality" means two or more.

In the description of the utility model, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, and may also include the first and second features not being in direct contact but being in contact with each other by another feature therebetween.

In the description of the utility model, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A quantum microscope, comprising:

the light splitting assembly comprises a base and a spectroscope, a light splitting cavity, a first hole, a second hole and a third hole are formed in the base, the first hole is communicated with the light splitting cavity, the first hole is used for introducing light beams, the second hole and the third hole are opposite to each other and form a light path channel, the spectroscope is movably arranged in the light splitting cavity, and the spectroscope can move in or out of the light path channel;

the image acquisition component is arranged on the base and is opposite to the second hole;

and the objective lens is arranged on the base and is opposite to the third hole and used for observing the sample to be detected.

2. The quantum microscope of claim 1, wherein the second aperture and the third aperture are directly opposite in a first direction, the beam splitter being movable in a second direction, the second direction being perpendicular to the first direction.

3. The quantum microscope according to claim 2, wherein the light splitting assembly comprises a bracket and a driving member, an opening is formed in one end of the base in the second direction, a part of the bracket is covered on the opening, the spectroscope is movably arranged on the bracket, and the driving member is in driving connection with the spectroscope.

4. The quantum microscope of claim 3, wherein the support comprises a slide bar and an end cap, the end cap is covered on the opening, the slide bar is located in the spectroscopic cavity and connected with the end cap, the slide bar extends along the second direction, and the spectroscope is slidably arranged on the slide bar.

5. The quantum microscope of claim 4, wherein the support comprises a fixing plate and a connecting rod, the fixing plate is located in the spectroscopic cavity and located on one side of the spectroscope away from the end cover, the peripheral wall of the fixing plate is abutted against the cavity wall of the spectroscopic cavity, and the connecting rod connects the fixing plate and the end cover.

6. The quantum microscope of claim 4, wherein the end cap is provided with a through hole, the driving member is a pull rod, and the pull rod is arranged on the through hole in a penetrating manner and one end of the pull rod is connected with the spectroscope.

7. The quantum microscope of claim 2, wherein the image acquisition assembly comprises a barrel extending along the first direction and connected to the base, a barrel opening of the barrel facing the second aperture, a first lens disposed within the barrel at an end of the barrel proximate the second aperture, and an image sensor disposed at another end of the barrel distal from the second aperture.

8. The quantum microscope of claim 1, wherein the quantum microscope comprises a detection assembly, the detection assembly comprises a detection bin, an NV color center probe and an optical fiber coupler, an opening is formed in the detection bin, a part of the objective lens penetrates through the opening and is connected with the detection bin, the NV color center probe is arranged in the detection bin and faces the objective lens, and the optical fiber coupler is located on one side of the NV color center probe and is arranged on the detection bin.

9. The quantum microscope of claim 8, wherein the detection chamber comprises a chamber body and a chamber door, the chamber body is provided with a chamber opening, and the chamber door is openably and closably arranged in the opening.

10. The quantum microscope of claim 2, comprising a light source assembly disposed on the base opposite the first aperture, the light source assembly configured to emit a light beam in a third direction, the second direction, and the first direction being perpendicular to one another.