CN219572697U

CN219572697U - Diffusion furnace tail gas collecting and treating device

Info

Publication number: CN219572697U
Application number: CN202223251057.8U
Authority: CN
Inventors: 刘明利; 王佩佩; 周文智
Original assignee: Qingdao Saier Technology Co ltd
Current assignee: Qingdao Saier Technology Co ltd
Priority date: 2022-12-06
Filing date: 2022-12-06
Publication date: 2023-08-22
Anticipated expiration: 2032-12-06

Abstract

The utility model relates to the technical field of diffusion furnace tail gas collection and treatment, and discloses a diffusion furnace tail gas collection and treatment device, which solves the problem that the cited patent does not filter and remove reaction byproducts in gas, so that the environment is polluted, and comprises a first cooling box body, wherein a box cover is arranged at the top end of the first cooling box body, support columns are symmetrically arranged at the bottom end of the first cooling box body, a second cooling box body positioned in the first cooling box body is arranged at the bottom end of the box cover, a fixing rod is symmetrically arranged at the bottom end of the second cooling box body, the bottom end of the fixing rod is contacted with the inner bottom end of the first cooling box body, a third cooling box body positioned in the second cooling box body is arranged at the middle position of the box cover, an exhaust pipe is arranged at the middle position of the third cooling box body, and the top end of the exhaust pipe is connected with a guide pipe; this design realizes the multiple cooling to gas to the cooperation is handled the effect of group, and effectual gas to filter, and then has improved gaseous cleanliness, avoids polluting the environment, and then realizes the protection to the environment.

Description

Diffusion furnace tail gas collecting and treating device

Technical Field

The utility model belongs to the technical field of diffusion furnace tail gas collection and treatment, and particularly relates to a diffusion furnace tail gas collection and treatment device.

Background

The crystalline silicon solar cell has good process stability and mature process flow, is applied to the energy industry on a large scale, the most core process in the manufacturing process of the crystalline silicon solar cell is PN junction manufacturing, namely diffusion process, the silicon wafer is filled with POCL3, BCL3 and other gases in a diffusion furnace tube, the corresponding doped impurities are deposited on the surface of the silicon wafer to form PN junctions through reaction, some byproducts are generated in the reaction process, and the PN junctions need to be discharged from a tail gas tube and enter a waste gas tower for treatment.

According to the patent number CN208839300U, a diffusion furnace tail gas treatment device is disclosed, the patent adopts a double condensation design, and by means of the principle that cooling liquid exchanges heat with the outside rapidly, the tail gas is cooled rapidly, so that a good cooling effect is achieved, then further cooling is achieved through contact with a cooling medium, and finally the waste gas is discharged through a waste gas discharge pipe, however, reaction byproducts in the gas are not filtered and removed in the process, and therefore the gas is directly discharged to pollute the environment.

Disclosure of Invention

Aiming at the situation, in order to overcome the defects of the prior art, the utility model provides a diffusion furnace tail gas collecting and treating device, which effectively solves the problem that the cited patent in the background art does not filter and remove reaction byproducts in gas, so that the environment is polluted.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a diffusion furnace tail gas collection processing apparatus, including cooling box one, cooling box one's top is equipped with the case lid, cooling box one's bottom symmetry is equipped with the support column, the bottom of case lid is equipped with the cooling box two that are located cooling box one inside, cooling box two's bottom symmetry is equipped with the dead lever, the bottom of dead lever and cooling box one's inner bottom end contact, cooling box three that is located cooling box two inside is installed to the intermediate position of case lid, cooling box three's intermediate position is equipped with the blast pipe, the top of blast pipe is connected with the pipe, one side top of cooling box one is equipped with the intake pipe, the one end of intake pipe runs through cooling box two's bottom intermediate position and extends to cooling box two's inside, cooling box three's bottom equidistance leaves and is equipped with the through-hole, cooling box two's outer wall is equipped with water cooling mechanism, cooling box one's bottom is equipped with the forced air cooling mechanism that is located cooling box two below, cooling box one's outer wall end is equipped with the backup pad, the top of backup pad is equipped with the water tank, the top of backup pad is equipped with the inlet tube, the one end of pipe extends to the inner bottom of water tank's end, the top of water tank is equipped with the treatment group.

Preferably, the treatment group comprises a conduction pipe, a treatment tank, a sealing cover and a filter screen, the treatment tank is arranged at the top end of the water tank, the conduction pipe extending to the inside of the treatment tank is arranged at the top end of the water tank, the sealing cover is arranged at the top end of the treatment tank, and two filter screens are arranged in the treatment tank.

Preferably, the water cooling mechanism comprises a communicating pipe, a sleeve pipe and a water pump, the sleeve pipe is sleeved on the outer wall of the second cooling box body at equal intervals, the communicating pipes communicated with the sleeve pipe are symmetrically arranged on two sides of the second cooling box body, the communicating pipes extend to the upper portion of the box cover, and one ends of the communicating pipes are respectively connected with the water pump positioned at the top end of the box cover.

Preferably, the air cooling mechanism comprises a motor, a rotating shaft, a single belt pulley, a double belt pulley, fan blades and a connecting belt, wherein the motor is arranged at the middle position of the bottom end of the first cooling box body, the double belt pulley is sleeved on an output shaft of the motor, the rotating shaft which is rotationally connected is symmetrically arranged at the inner bottom end of the first cooling box body, the single belt pulley is arranged on the rotating shaft, the single belt pulley is connected with the double belt pulley through the connecting belt, and the fan blades are arranged at the top ends of the output shaft of the motor and the rotating shaft.

Compared with the prior art, the utility model has the beneficial effects that:

(1) In operation, through being provided with cooling box first, case lid, support column, cooling box second, dead lever, cooling box third, blast pipe, intake pipe, through-hole, pipe, backup pad, water tank, water-cooling mechanism forced air cooling mechanism, realize the water-cooling and the forced air cooling of gas, and then realize the multiple cooling to gas, improved cooling efficiency, when gas and water mix simultaneously, and then realize gaseous cooling and realize the edulcoration to gas to the cooperation is handled the effect of group, and effectually filters gas, and then has improved the cleanliness of gas, avoids the polluted environment, and then realizes the protection to the environment.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model.

In the drawings:

FIG. 1 is a schematic diagram of the structure of a diffusion furnace tail gas collecting and treating device according to the present utility model;

FIG. 2 is an enlarged schematic view of the structure of FIG. 1A according to the present utility model;

FIG. 3 is a schematic view of the external structure of FIG. 1 according to the present utility model;

in the figure: 1. cooling the first box body; 2. a case cover; 3. a support column; 4. a second cooling box body; 5. a fixed rod; 6. a third cooling box body; 7. an exhaust pipe; 8. an air inlet pipe; 9. a through hole; 10. a conduit; 11. a support plate; 12. a water tank; 13. a water inlet pipe; 14. a conduit; 15. a treatment tank; 16. sealing cover; 17. a filter screen; 18. a communicating pipe; 19. a ferrule; 20. a water pump; 21. a motor; 22. a rotation shaft; 23. a single pulley; 24. a double belt pulley; 25. a fan blade; 26. and (5) connecting the belt.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model; all other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1 to 3, the utility model comprises a first cooling box body 1, a box cover 2 is arranged at the top end of the first cooling box body 1, a supporting column 3 is symmetrically arranged at the bottom end of the first cooling box body 1, a second cooling box body 4 positioned in the first cooling box body 1 is arranged at the bottom end of the second cooling box body 2, a fixing rod 5 is symmetrically arranged at the bottom end of the second cooling box body 4, the bottom end of the fixing rod 5 is contacted with the inner bottom end of the first cooling box body 1, a third cooling box body 6 positioned in the second cooling box body 4 is arranged at the middle position of the box cover 2, an exhaust pipe 7 is arranged at the middle position of the third cooling box body 6, a conduit 10 is connected to the top end of the exhaust pipe 7, the bottom end of the exhaust pipe 7 is of a funnel-shaped structure, an air inlet pipe 8 is arranged at the top end of one side of the first cooling box body 1, one end of the air inlet pipe 8 penetrates through the middle position of the bottom end of the second cooling box body 4 and extends to the inside the second cooling box body 4, a through hole 9 is arranged at the equidistant bottom end of the second cooling box body 6, a water cooling mechanism is arranged on the outer wall of the second cooling box body 4, an air cooling mechanism is arranged at the bottom end of the first cooling box body 1 and an air cooling mechanism positioned below the second cooling box body 4, a conduit 10 is connected to the top end of the first support plate 11 is arranged at the top end of the first water tank 12, a water tank 12 is arranged at the top end of the water tank 12, and a top end 12 is arranged at the top end of the water tank 12 is arranged at the top of the water tank 12, and the top of the water tank 12 is arranged at the top end of the top end 12 is in the water tank 12;

through water cooling mechanism, can make cooling box 1 and cooling box inside temperature reduction of second 4, then cool down the gas again in the intake pipe 8 with the inside temperature of gas introduction, because the structural design of intake pipe 8 makes gas carry in cooling box 1 when carrying to cooling box second 4, therefore cooling box 1 inside temperature is lower can carry out first cooling to gas, then through the effect of forced air cooling mechanism, realize blowing to intake pipe 8, and then further cool down gas, then the inside back of cooling box second 4 is got into to the gas, because the effect of water cooling mechanism makes cooling box second 4 inside temperature reduce, and then get into cooling box second inside gas and receive the low temperature effect again in, then the gas after the cooling passes through hole 9 and gets into in the cooling box third 6, because cooling medium has been placed to cooling box third 6 inside, cooling medium can cool down gas again, then the gas is discharged through blast pipe 7, and pour into in the cold water of water tank 12 inside through pipe 10, realize gas and cold water mixing, realize the water cooling operation to gas, simultaneously water can get rid of most of reaction in the gas, then realize cooling down to gas, then the gas is carried out the filter effect in the gas, and the realization is more than can be carried out the filter to the gas, and the filter effect is realized to the gas in the filter group in the gas, and the realization is convenient for the realization of the filter effect is more than the air, and the realization is cooled down to the air, and the air is more than the air, and further pollution is removed.

The treatment group comprises a conducting pipe 14, a treatment tank 15, a sealing cover 16 and a filter screen 17, wherein the treatment tank 15 is arranged at the top end of the water tank 12, the conducting pipe 14 extending to the inside of the treatment tank 15 is arranged at the top end of the water tank 12, the sealing cover 16 is arranged at the top end of the treatment tank 15, and two filter screens 17 are arranged in the treatment tank 15; after gas enters cold water in the guide pipe 14 through the guide pipe 10, mixing of the gas and the cold water is achieved, further filtering of the gas is achieved, then the gas enters the treatment tank 15 through the guide pipe 14, then the gas is filtered through the double-layer filter screen 17, the gas is effectively filtered in a double mode, then the filtered gas is discharged, and environmental pollution is effectively reduced.

The water cooling mechanism comprises a communicating pipe 18, a sleeve pipe 19 and a water pump 20, wherein the sleeve pipe 19 is sleeved on the outer wall of the second cooling box body 4 at equal intervals, the communicating pipes 18 communicated with the sleeve pipe 19 are symmetrically arranged on two sides of the second cooling box body 4, the communicating pipes 18 extend to the upper part of the box cover 2, and one ends of the communicating pipes 18 are respectively connected with the water pump 20 positioned at the top end of the box cover 2; staff is through being connected with external cold water pipe with the one end of water pump 20, and then starts water pump 20, and water pump 20 can drive external cold water and get into in the ferrule 19 through communicating pipe 18, because ferrule 19 cup joints the outer wall at cooling box two 4, and then the low temperature of cold water can transmit for cooling box two 4, makes cooling box two 4 inside temperature reduce, and then in gas carries out cooling box two 4 after, can realize the cooling operation to gas, and then can realize handling to gas.

The air cooling mechanism comprises a motor 21, a rotating shaft 22, a single belt pulley 23, double belt pulleys 24, fan blades 25 and a connecting belt 26, wherein the motor 21 is arranged in the middle of the bottom end of the first cooling box body 1, the double belt pulleys 24 are sleeved on an output shaft of the motor 21, the rotating shaft 22 which is rotationally connected is symmetrically arranged at the inner bottom end of the first cooling box body 1, the single belt pulleys 23 are arranged on the rotating shaft 22, the single belt pulleys 23 are connected with the double belt pulleys 24 through the connecting belt 26, and the fan blades 25 are arranged at the top ends of the output shaft of the motor 21 and the rotating shaft 22; through start motor 21, motor 21 drives double belt pulley 24 and rotates, through the relation of connection belt 26, can make two single belt pulley 23 rotate, and then single belt pulley 23 can drive rotation axis 22 rotation, and rotation axis 22 and motor 21 can realize the rotation of flabellum 25, and then flabellum 25 bloies in the inside of cooling box one 1, the effectual inside temperature of cooling box one 1 that has reduced, and then carries out the forced air cooling operation for the gas that gets into cooling box one 1 inside.

Claims

1. The utility model provides a diffusion furnace tail gas collection processing apparatus, includes cooling box one (1), its characterized in that: the top of cooling box one (1) is equipped with case lid (2), the bottom symmetry of cooling box one (1) is equipped with support column (3), the bottom of case lid (2) is equipped with cooling box two (4) that are located cooling box one (1) inside, the bottom symmetry of cooling box two (4) is equipped with dead lever (5), the bottom of dead lever (5) and the interior bottom contact of cooling box one (1), the cooling box three (6) that are located cooling box two (4) inside are installed to the intermediate position of case lid (2), the intermediate position of cooling box three (6) is equipped with blast pipe (7), the top of blast pipe (7) is connected with pipe (10), one side top of cooling box one (1) is equipped with intake pipe (8), the one end of intake pipe (8) runs through the bottom intermediate position of cooling box two (4) and extends to the inside of cooling box two (4), the bottom equidistance of cooling box three (6) leaves and is equipped with through-hole (9), the outer wall of cooling box two (4) is equipped with water cooling mechanism, the bottom of cooling box one (1) is equipped with cooling box two (4) inside cooling box one side's) is equipped with blast pipe (11), the top (12) of cooling box one side (1) is equipped with water inlet pipe (11), one end of the conduit (10) extends to the inner bottom end of the water tank (12), and the top end of the water tank (12) is provided with a treatment group.

2. The diffusion furnace tail gas collection and treatment device according to claim 1, wherein: the treatment group comprises a conduction pipe (14), a treatment tank (15), a sealing cover (16) and a filter screen (17), wherein the treatment tank (15) is arranged at the top end of the water tank (12), the conduction pipe (14) extending to the inside of the treatment tank (15) is arranged at the top end of the water tank (12), the sealing cover (16) is arranged at the top end of the treatment tank (15), and two filter screens (17) are arranged in the treatment tank (15).

3. The diffusion furnace tail gas collection and treatment device according to claim 1, wherein: the water cooling mechanism comprises a communicating pipe (18), a sleeve pipe (19) and a water pump (20), wherein the sleeve pipe (19) is sleeved on the outer wall of the second cooling box body (4) at equal intervals, the communicating pipe (18) communicated with the sleeve pipe (19) is symmetrically arranged on two sides of the second cooling box body (4), the communicating pipe (18) extends to the upper portion of the box cover (2), and one end of the communicating pipe (18) is connected with the water pump (20) located at the top end of the box cover (2) respectively.

4. The diffusion furnace tail gas collection and treatment device according to claim 1, wherein: the air cooling mechanism comprises a motor (21), a rotating shaft (22), a single belt pulley (23), double belt pulleys (24), fan blades (25) and a connecting belt (26), wherein the motor (21) is arranged at the middle position of the bottom end of the first cooling box body (1), the double belt pulleys (24) are sleeved on the output shaft of the motor (21), the rotating shaft (22) which is rotationally connected is symmetrically arranged at the inner bottom end of the first cooling box body (1), the single belt pulley (23) is arranged on the rotating shaft (22), the single belt pulley (23) is connected with the double belt pulleys (24) through the connecting belt (26), and the fan blades (25) are arranged at the top ends of the output shaft of the motor (21) and the rotating shaft (22).