CN219560160U - Spray head support and corrosion cleaning machine - Google Patents
Spray head support and corrosion cleaning machine Download PDFInfo
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- CN219560160U CN219560160U CN202320645821.5U CN202320645821U CN219560160U CN 219560160 U CN219560160 U CN 219560160U CN 202320645821 U CN202320645821 U CN 202320645821U CN 219560160 U CN219560160 U CN 219560160U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model provides a spray head support and a corrosion cleaning machine, and relates to the technical field of semiconductor manufacturing. The spray head support comprises a fixed support, an extension support and a corrosive liquid spray head. The fixed bolster includes first stiff end, the extension support includes first link and second link, the corrosive liquid shower nozzle includes shower nozzle body and dead lever, the dead lever includes second stiff end and third link, the shower nozzle body is fixed the second stiff end of dead lever. Through the structure, the direction of the nozzle of the corrosive liquid spray head can be aligned with the central area of the silicon wafer to be corroded in a vertical mode, and the spraying mode ensures that the corrosive liquid corrodes the silicon wafer more uniformly, so that the product yield is improved.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing, in particular to a spray head support and a corrosion cleaning machine.
Background
The etching cleaner is a wet automatic etching equipment for semiconductor manufacture. A nozzle is arranged above the side of the reaction chamber of the corrosion cleaning machine, and can spray corrosion liquid according to the process requirement. In the corrosion process, a tray (CHUCK) in the reaction chamber is connected with a rotating main shaft through a part of structure, so that a silicon wafer placed on the tray is driven by the main shaft to rotate, and a nozzle is controlled by a nozzle bracket to enable corrosion liquid sprayed out of the nozzle to fall in the central area of the silicon wafer.
In the prior art, the nozzle bracket controls the corrosive liquid sprayed by the nozzle to fall on the central area of the silicon wafer in a non-vertical track, and the falling point position of the corrosive liquid has close relation with the corrosion uniformity of the silicon wafer, but the vibration of the equipment or the change of the pressure of the nozzle can cause the falling point position of the corrosive liquid to change frequently so as to deviate from the central area of the silicon wafer, thereby causing the bad corrosion effect of the silicon wafer.
Disclosure of Invention
In order to overcome the defects in the prior art, the utility model aims to provide a spray head support and a corrosion cleaning machine, wherein an extension support is added on a spray nozzle support in the prior art, so that corrosion liquid can fall on the central area of a silicon wafer to be corroded in a vertical track, the position state of a spray head can be ensured not to be interfered by external factors, and the corrosion effect and yield of the silicon wafer are improved.
In a first aspect, an embodiment of the present utility model provides a spray head holder, including: fixed bolster, extension support and corrosive liquid shower nozzle.
The fixed bolster includes first stiff end, the extension support includes first link and second link, the corrosive liquid shower nozzle includes shower nozzle body and dead lever, the dead lever includes second stiff end and third link, the shower nozzle body is fixed the second stiff end of dead lever.
The first fixed end of the fixing support is connected with the first connecting end of the extension support, the second connecting end of the spray head support is connected with the third connecting end of the fixing rod, and the extending direction of the fixing rod is the same as that of the extension support.
The spray direction of the spray head body is perpendicular to the extending direction of the extension bracket, so that the spray liquid of the spray head body vertically acts on the central area of the silicon wafer to be corroded, which is placed in the corrosion cleaning machine.
In one possible implementation, the fixing bracket includes a first fixing portion and a second fixing portion parallel to each other, and the fixing bracket further includes a first movable space between the first fixing portion and the second fixing portion.
The first connecting end of the extension bracket is accommodated and fixed in the first movable space.
In one possible implementation manner, the fixing support comprises a first fixing piece and a second fixing piece, the first fixing portion and the second fixing portion are correspondingly provided with a rotating hole and a sliding hole, and the first connecting end of the extension support is provided with a first connecting hole and a second connecting hole.
The first connecting hole and the rotating hole are fixed through the first fixing piece, and the second connecting hole and the sliding hole are fixed through the second fixing piece.
In one possible implementation manner, the sliding hole is an arc hole, and the circle center of the corresponding arc of the sliding hole coincides with the geometric center of the rotating hole.
The position relation between the extension bracket and the fixed bracket is adjusted by sliding the extension bracket in the sliding hole.
In one possible implementation manner, the second connection end of the extension bracket includes a connection fixing portion, and a first connection portion and a second connection portion connected on the same side of the connection fixing portion and parallel to each other, the first connection end of the extension bracket is connected with the connection fixing portion, and the fixing rod is fixed between the first connection portion and the second connection portion.
In one possible implementation manner, the second connection end is provided with a third connection hole and a fourth connection hole, the third connection hole and the fourth connection hole penetrate through the first connection portion and the second connection portion, and the third connection end further includes a third fixing piece and a fourth fixing piece.
The fixing rod is provided with a first fixing hole and a second fixing hole, the first fixing hole and the second fixing hole penetrate through the fixing rod respectively, the first fixing hole and the third connecting hole are fixed through the third fixing piece, and the second fixing hole and the fourth connecting hole are fixed through the fourth fixing piece.
In one possible implementation manner, the distribution directions of the first connection hole, the second connection hole, the third connection hole and the fourth connection hole are the same as the extension direction of the extension bracket.
In one possible implementation, the first fixing member, the second fixing member, the third fixing member, and the fourth fixing member are fixing screws.
In one possible implementation manner, the fixing support, the extension support and the corrosive liquid spray head are all made of corrosion-resistant materials.
In a second aspect, the embodiment of the utility model further provides an etching cleaning machine, wherein the nozzle support is fixed inside a reaction chamber of the etching cleaning machine and is used for cleaning the surface of a silicon wafer to be etched, which is placed inside the reaction chamber, through etching liquid sprayed in the etching liquid nozzle.
Based on any one of the aspects, the spray head support and the corrosion cleaning machine provided by the embodiment of the utility model have the beneficial effects that compared with the prior art, the spray head support and the corrosion cleaning machine provided by the utility model have the advantages that the extension support is added on the basis of the prior art, one end of the extension support is connected with the fixed support, and the other end of the extension support is connected with the corrosion liquid spray head, so that the position of the corrosion liquid spray head is closer to the central area of a silicon wafer to be corroded than the prior art, the sprayed corrosion liquid can fall on the central area of the silicon wafer to be corroded in a vertical track, the corrosion uniformity of the corrosion liquid on the silicon wafer is improved, the yield of products is further improved, and the problem that the silicon wafer is high in breakage rate due to frequent change of the falling point position of the corrosion liquid in the prior art is solved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings required for the embodiments, it being understood that the following drawings illustrate only some embodiments of the present utility model and are therefore not to be considered limiting of the scope, and that other related drawings may be obtained according to these drawings without the inventive effort of a person skilled in the art.
FIG. 1 is a schematic view of an assembly of a nozzle holder according to the present utility model;
FIG. 2 is a schematic view of the fixing bracket in FIG. 1;
FIG. 3 is a schematic view of the structure of the extension bracket of FIG. 1;
fig. 4 is a schematic view of the structure of the etching solution nozzle in fig. 1.
Icon: 10-head holder, 110-fixed holder, 111-first fixed end, 1111-first fixed portion, 1112-first movable space, 1113-second fixed portion, 1114-first fixed piece, 1115-second fixed piece, 1111A-rotation hole, 1111B-sliding hole, 120-extension holder, 121-first connecting end, 1211 first connecting hole, 1212 second connecting hole, 122-second connecting end, 1221-connecting fixed portion, 1222-first connecting portion, 1223-second connecting portion, 130-corrosive liquid head, 131-fixed rod, 1311-third connecting end, 1312-second fixed end, 1313-first fixed hole, 1314 second fixed hole, 1315 third fixed piece, 1316-fourth fixed piece, 132-head body.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be noted that, the azimuth or positional relationship indicated by the terms "upper", "lower", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship that is commonly put in use of the product of the application, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
It should be noted that, in the case of no conflict, different features in the embodiments of the present utility model may be combined with each other.
In order to solve the technical problems mentioned in the foregoing background art, the inventor innovatively designs the following technical solutions, and detailed descriptions of specific embodiments of the present utility model will be provided below with reference to the accompanying drawings. Referring to fig. 1, the showerhead holder 10 includes a fixing holder 110, an extension holder 120, and a etchant showerhead 130.
The fixing bracket 110 comprises a first fixing end 111, the extension bracket 120 comprises a first connecting end 121 and a second connecting end 122, the corrosive liquid spray head 130 comprises a spray head body 132 and a fixing rod 131, the fixing rod 131 comprises a second fixing end 1312 and a third connecting end 1311, and the spray head body 132 is connected with the second fixing end 1312 of the fixing rod 131.
The first fixed end 111 of the fixing bracket 110 is connected with the first connection end 121 of the extension bracket 120, the second connection end 122 of the extension bracket 120 is connected with the third connection end 1311 of the fixing rod 131, the extension direction of the fixing rod 131 is the same as the extension direction of the extension bracket 120,
the spray direction of the spray head body 132 is perpendicular to the extension direction of the extension bracket 120, so that the sprayed etching liquid of the spray head body 132 can act on the central region of the silicon wafer to be etched placed in the etching cleaner in a perpendicular track.
In the above structure, compared with the prior art, an extension bracket 120 is added, a first connecting end 121 of the extension bracket 120 is connected to a first fixed end 111 of the fixed bracket 110, and a second connecting end 122 of the extension bracket 120 is connected to a fixed rod 131 of the corrosive liquid spray head 130. Through the connection relationship, compared with the prior art, the etching solution spray head 130 is closer to the center of the silicon wafer to be etched, so that the spray nozzle direction of the etching solution spray head 130 can be aligned to the center area of the silicon wafer to be etched in a vertical mode, the etching solution can fall on the center area of the silicon wafer to be etched in a vertical track, the etching uniformity of the etching solution on the silicon wafer is improved, and the product yield is improved.
In the present embodiment, the first fixing end 111 of the fixing bracket 110 includes a first fixing portion 1111 and a second fixing portion 1113 parallel to each other, and further includes a first movable space 1112 between the first fixing portion 1111 and the second fixing portion 1113.
The first connection end 121 of the extension bracket 120 is fixed in the first movable space 1112.
Further, referring to fig. 2 and 3, the fixing bracket 110 further includes a first fixing member 1114 and a second fixing member 1115, the first fixing portion 1111 and the second fixing portion 1113 are correspondingly provided with a rotation hole 1111A and a sliding hole 1111B, and the first connecting end 121 of the extension bracket 120 is provided with a first connecting hole 1211 and a second connecting hole 1212.
When the first connection end 121 of the extension bracket 120 is connected to the first fixed end 111 of the fixed bracket 110, the rotation hole 1111A is connected to the first connection hole 1211 via the first fixing member 1114, and the sliding hole 1111B is connected to the second connection hole 1212 via the second fixing member 1115.
In this embodiment, the sliding hole 1111B provided on the fixed bracket 110 is an arc hole, and in order to achieve position adjustment of the extension bracket 120 in the first movable space 1112, the arc center corresponding to the arc hole coincides with the geometric center of the rotating hole 1111A. The extension bracket 120 is guided in the first movable space 1112 by the sliding direction of the second fixing member 1115 in the sliding hole 1111B around the first connecting hole 1211, so that the entire extension bracket 120 is rotated around the rotation hole 1111A to adjust the position of the corrosive liquid spray head 130.
Further, the second connecting end 122 of the extension bracket 120 includes a connecting and fixing portion 1221, and a first connecting portion 1222 and a second connecting portion 1223 connected on the same side of the connecting and fixing portion 1221 and parallel to each other, the first connecting end 121 of the extension bracket 120 is vertically connected to the connecting and fixing portion 1221, the first connecting portion 1222 and the second connecting portion 1223 are vertically connected to the connecting and fixing portion 1221, and the fixing rod 131 of the corrosive liquid nozzle 130 is fixed between the first connecting portion 1222 and the second connecting portion 1223.
In this embodiment, referring to fig. 4, the second connecting end 122 of the extension bracket 120 is provided with a third connecting hole 1224 and a fourth connecting hole 1225, and the third connecting hole 1224 and the fourth connecting hole 1225 penetrate the first connecting portion 1222 and the second connecting portion 1223. The third connection end 1311 further includes third and fourth fixing members 1315 and 1316, and first and second fixing holes 1313 and 1314 are provided at the second fixing end 1312 of the fixing lever 131. When the etching solution spray head 130 and the extension bracket 120 are in a connection state, the third connection hole 1224 and the first fixing hole 1313 are connected and fixed through the third fixing piece 1315, and the fourth connection hole 1225 and the second fixing hole 1314 are connected and fixed through the fourth fixing piece 1316.
In the present embodiment, the distribution directions of the first connecting hole 1211, the second connecting hole 1212, the third connecting hole 1224, and the fourth connecting hole 1225 are the same as the extending direction of the extension bracket 120.
In another implementation of this embodiment, the first mount 1114, the second mount 1115, the third mount 1315, and the fourth mount 1316 are set screws.
In another implementation of this embodiment, the internal chamber of the etching cleaner is in an etching environment, and accordingly, the material of the nozzle support 10 is a corrosion-resistant material.
Preferably, the material of the extension bracket 120 is polytetrafluoroethylene (Poly tetra fluoroethylene, teflon for short)
The utility model also provides a corrosion cleaning machine, which cleans the related materials on the silicon wafer by utilizing a wet corrosion mode, specifically, the corrosion liquid is sprayed on the center of the silicon wafer to be corroded by utilizing a corrosion liquid spray head, and in order to improve the corrosion uniformity of the corrosion liquid, the falling point position of the corrosion liquid needs to fall on the center area of the silicon wafer; the wafer being etched needs to be maintained in a rotated state.
In summary, the present utility model provides a spray head bracket and an etching cleaner, wherein the spray head bracket includes a fixed bracket, an extension bracket and an etching liquid spray head. The fixed bolster includes first stiff end, and the extension support includes first link and second link, and the corrosive liquid shower nozzle includes shower nozzle body and dead lever, and the dead lever includes second stiff end and third link, and the shower nozzle body is fixed the second stiff end of dead lever. The first fixed end of the spray head support is connected with the first connecting end of the extension support, and the second connecting end of the spray head support is connected with the third connecting end of the fixing rod. After the fixed support, the extension support and the etching solution spray head are connected and fixed, the extension direction of the fixed rod is the same as the extension direction of the extension support, and the spray direction of the spray head body is perpendicular to the extension direction of the extension support, so that the spray of the spray head body vertically acts on the central area of the silicon wafer to be etched, which is placed in the etching cleaning machine.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. The spray head support is applied to the corrosion cleaning machine and is characterized by comprising a fixed support, an extension support and a corrosion liquid spray head;
the fixing support comprises a first fixing end, the extension support comprises a first connecting end and a second connecting end, the corrosive liquid spray head comprises a spray head body and a fixing rod, the fixing rod comprises a second fixing end and a third connecting end, and the spray head body is fixed at the second fixing end of the fixing rod;
the first fixed end of the fixed bracket is connected with the first connecting end of the extension bracket, the second connecting end of the extension bracket is connected with the third connecting end of the fixed rod, and the extension direction of the fixed rod is the same as the extension direction of the extension bracket;
the spray direction of the spray head body is perpendicular to the extending direction of the extension bracket, so that the spray liquid of the spray head body vertically acts on the central area of the silicon wafer to be corroded, which is placed in the corrosion cleaning machine.
2. The spray head bracket of claim 1, wherein the fixed bracket comprises a first fixed portion and a second fixed portion that are parallel to each other, the fixed bracket further comprising a first movable space between the first fixed portion and the second fixed portion;
the first connecting end of the extension bracket is accommodated and fixed in the first movable space.
3. The spray head bracket according to claim 2, wherein the fixing bracket comprises a first fixing piece and a second fixing piece, a rotating hole and a sliding hole are correspondingly arranged on the first fixing part and the second fixing part, and a first connecting hole and a second connecting hole are arranged at the first connecting end of the extension bracket;
the first connecting hole and the rotating hole are fixed through the first fixing piece, and the second connecting hole and the sliding hole are fixed through the second fixing piece.
4. The spray head bracket according to claim 3, wherein the sliding hole is an arc hole, and the circle center of the corresponding arc of the sliding hole coincides with the geometric center of the rotating hole;
the position relation between the extension bracket and the fixed bracket is adjusted by sliding the extension bracket in the sliding hole.
5. The spray head bracket as claimed in claim 3, wherein the second connection end of the extension bracket includes a connection fixing portion, and first and second connection portions connected to the same side of the connection fixing portion and parallel to each other, the first connection end of the extension bracket being connected to the connection fixing portion, the fixing rod being fixed between the first and second connection portions.
6. The spray head bracket according to claim 5, wherein the second connecting end is provided with a third connecting hole and a fourth connecting hole, the third connecting hole and the fourth connecting hole penetrate through the first connecting portion and the second connecting portion, and the third connecting end further comprises a third fixing piece and a fourth fixing piece;
the third connecting end of the fixing rod is provided with a first fixing hole and a second fixing hole, the first fixing hole and the second fixing hole penetrate through the fixing rod respectively, the first fixing hole and the third connecting hole are fixed through the third fixing piece, and the second fixing hole and the fourth connecting hole are fixed through the fourth fixing piece.
7. The head holder according to claim 6, wherein the first, second, third and fourth connection holes are arranged in the same direction as the extension direction of the extension bracket.
8. The spray head bracket of claim 6, wherein the first, second, third and fourth fixtures are set screws.
9. The spray head holder according to any one of claims 1 to 8, wherein the fixing holder, the extension holder, and the etchant spray head are each made of a corrosion-resistant material.
10. An etching cleaning machine, characterized by comprising the nozzle support according to any one of claims 1-9, wherein the nozzle support is fixed inside a reaction chamber of the etching cleaning machine and is used for cleaning the surface of a silicon wafer to be etched, which is placed inside the reaction chamber, by etching liquid sprayed in the etching liquid nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320645821.5U CN219560160U (en) | 2023-03-28 | 2023-03-28 | Spray head support and corrosion cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320645821.5U CN219560160U (en) | 2023-03-28 | 2023-03-28 | Spray head support and corrosion cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219560160U true CN219560160U (en) | 2023-08-22 |
Family
ID=87655723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320645821.5U Active CN219560160U (en) | 2023-03-28 | 2023-03-28 | Spray head support and corrosion cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219560160U (en) |
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2023
- 2023-03-28 CN CN202320645821.5U patent/CN219560160U/en active Active
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