CN219543020U

CN219543020U - Mounting jig for shielding piece

Info

Publication number: CN219543020U
Application number: CN202320553205.7U
Authority: CN
Inventors: 童许樑
Original assignee: Semiconductor Manufacturing Electronics Shaoxing Corp SMEC
Current assignee: Semiconductor Manufacturing Electronics Shaoxing Corp SMEC
Priority date: 2023-03-17
Filing date: 2023-03-17
Publication date: 2023-08-18
Anticipated expiration: 2033-03-17

Abstract

The present utility model relates to a mounting jig for a shield having a plurality of through holes, the mounting jig comprising: an inner bracket having a connection post portion and at least two holding portions for inserting into the through hole of the shield member and capable of holding the shield member after the inner bracket rotates by a predetermined angle; the outer bracket is provided with a mounting hole, and the mounting hole is used for the connecting column part to penetrate through; the connector is used for being connected with the connecting column part so as to realize the connection of the inner bracket and the outer bracket. The mounting jig for the shielding member is beneficial to conveniently and efficiently mounting and dismounting the shielding member.

Description

Mounting jig for shielding piece

Technical Field

The utility model relates to the field of installation jigs, in particular to an installation jig for shielding pieces.

Background

In semiconductor processing, a wafer is usually placed in a chamber of a processing apparatus to perform processing (e.g., film plating), so as to avoid adverse effects on the chamber wall surface of the chamber during processing (e.g., film plating is performed on the chamber wall surface while the wafer is being film-plated), a removable shielding member is usually disposed in the chamber to isolate and protect the chamber wall surface, which is beneficial to protecting the chamber wall surface of the processing apparatus and improving the service life of the processing apparatus.

At present, no special installation jig is used for assisting in installing the shielding piece in the process of dismounting and mounting, and the shielding piece is usually directly carried and installed by hands. The inner side of the shielding piece is sharp and is easy to scratch when being carried by hands; meanwhile, the shielding piece is heavy and has no force points, so that the carrying is difficult; in addition, a cavity for installing the shielding piece is higher, the installation is difficult, and a gap between the cavity and the shielding piece is small during the installation, so that scratch damage is easy to occur.

Disclosure of Invention

Based on the above-mentioned drawbacks of the prior art, an object of the present utility model is to provide an installation jig for a shielding member, which can make it convenient and efficient to disassemble and assemble the shielding member.

Therefore, the utility model provides the following technical scheme.

The utility model provides a mounting jig for a shield member, the shield member having a plurality of through holes, the mounting jig comprising:

an inner bracket having a connection post portion and at least two holding portions for inserting into the through hole of the shield member and capable of holding the shield member after the inner bracket rotates by a predetermined angle;

the outer bracket is provided with a mounting hole, and the mounting hole is used for the connecting column part to penetrate through;

the connector is used for being connected with the connecting column part so as to realize the connection of the inner bracket and the outer bracket.

In at least one embodiment, the inner bracket is provided with a locking hole,

the mounting jig further includes a locking member for being inserted into the locking hole and the through hole of the shield member when the inner bracket holds the shield member, so as to lock the inner bracket and the shield member.

In at least one embodiment, the inner bracket comprises a body part and at least two strut parts, one end of each strut part is connected with the body part, and the other end of each strut part extends towards the outer side of the body part;

the supporting rod parts are arranged in one-to-one correspondence with the supporting parts, and the supporting parts are arranged at the other ends of the supporting rod parts.

In at least one embodiment, the locking hole is provided at the other end of the strut portion, and the locking piece and the holding portion are for insertion into the same through hole of the shield.

In at least one embodiment, the connecting post portion is disposed at a central position of the body portion, one end of the connecting post portion is connected to the body portion, and the other end is perpendicular to the body portion and extends away from the holding portion.

In at least one embodiment, the at least two strut portions are disposed at regular intervals in the circumferential direction of the body portion.

In at least one embodiment, the holding portion includes montant portion and step portion, the one end of montant portion with branch portion is connected, the other end with step portion is connected, step portion follow montant portion extends the setting along the protruding extension of horizontal direction, just the step portion of at least two holding portions is in the circumference of inner support is upwards protruding the setting towards same direction.

In at least one embodiment, the connection post portion has an external threaded portion and the connection head has an internal threaded portion for mating with the external threaded portion to effect connection of the connection post portion and the connection head.

In at least one embodiment, the outer bracket includes a connection portion, a link, and a cylindrical portion, the connection portion and the cylindrical portion being connected by the link, the connection portion being disposed concentrically with the cylindrical portion.

In at least one embodiment, the connecting portion is provided with a positioning groove, the connecting head is provided with a positioning boss, and the positioning boss is used for being matched with the positioning groove to realize positioning and installation of the connecting head.

In at least one embodiment, the outer bracket further includes a positioning skirt portion provided at a lower end of the cylindrical portion and protruding from an outer wall surface of the cylindrical portion in a radial direction of the cylindrical portion;

the locating skirt portion is configured to match a size of a cavity for mounting the shield such that the shield is located in the cavity when mounted.

Advantageous effects

According to the installation jig for the shielding piece, the shielding piece is supported by the inner support with the supporting part, and the connecting column part is connected with the outer support through the connector, so that the shielding piece can be conveyed and installed only by operating the outer support, the scratch of an operator is effectively avoided, and the shielding piece is installed efficiently, conveniently and safely.

Drawings

Fig. 1 shows a structural exploded view of a mounting jig for a shield according to the present utility model.

Fig. 2 shows a schematic structural view of the shield of the present utility model.

Fig. 3 shows a schematic view of the structure of the inner bracket and the locking member of the present utility model.

Fig. 4 shows a schematic structural view of the outer bracket of the present utility model.

Fig. 5 shows a schematic structural view of the connector of the present utility model.

Description of the reference numerals

1. An inner bracket; 11. a connecting column part; 12. a holding part; 121. a vertical rod part; 122. a step portion; 13. a locking hole; 14. a body portion; 15. a strut section;

2. an outer bracket; 21. a mounting hole; 22. a connection part; 221. a positioning groove; 23. a connecting rod; 24. a cylindrical portion; 25. positioning the skirt edge part;

3. a connector; 31. positioning the boss; 32. an operation lever;

4. a locking member;

10. and a through hole.

Detailed Description

In order to make the technical scheme and the beneficial effects of the utility model more obvious and understandable, the following detailed description is given by way of example. Unless defined otherwise, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs.

In the description of the present utility model, unless explicitly defined otherwise, terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., refer to an orientation or positional relationship based on that shown in the drawings, and are merely for convenience of simplifying the description of the present utility model, and do not indicate that the apparatus or element referred to must have a specific orientation, be constructed and operated in a specific orientation, i.e., are not to be construed as limiting the present utility model.

In the present utility model, the terms "first", "second" are used for descriptive purposes only and are not to be construed as relative importance of the features indicated or the number of technical features indicated. Thus, a feature defining "first", "second" may explicitly include at least one such feature. In the description of the present utility model, "plurality" means at least two; "plurality" means at least one; unless otherwise specifically defined.

In the present utility model, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly, unless otherwise specifically limited. For example, "connected" may be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, or can be communicated between two elements or the interaction relationship between the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless explicitly defined otherwise, a first feature "on", "above", "over" and "above", "below" or "under" a second feature may be that the first feature and the second feature are in direct contact, or that the first feature and the second feature are in indirect contact via an intermediary. Moreover, a first feature "above," "over" and "on" a second feature may be that the first feature is directly above or obliquely above the second feature, or simply indicates that the level of the first feature is higher than the level of the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the level of the first feature is less than the level of the second feature.

In particular, reference to a "shield" in the present utility model refers to a component that is disposed in a chamber of a processing tool and that serves to isolate and protect the chamber walls.

Specific embodiments of the mounting jig for the shield according to the present utility model are described in detail below with reference to fig. 1 to 5.

In the present embodiment, as shown in fig. 1 and 2, the mounting jig for a shield of the present utility model includes an inner bracket 1, an outer bracket 2, and a connection head 3. Wherein the shielding member is provided with a plurality of through holes 10, and the inner bracket 1 and the outer bracket 2 are connected through a connector 3.

Specifically, as shown in fig. 2, the inner bracket 1 is provided with a connecting post portion 11 and a holding portion 12. The holding portion 12 is configured to be inserted into the through hole 10 of the shielding member, and after the inner bracket 1 rotates by a predetermined angle, the holding portion 12 holds the shielding member. As shown in fig. 2, the number of the holding portions 12 is four, and the four holding portions 12 are disposed at regular intervals in the circumferential direction of the inner bracket 1. Of course, the present utility model is not limited thereto, and the number of the holders 12 may be 2, 3, 5 or more.

As shown in fig. 4, the outer bracket 2 is provided with a mounting hole 21, and the mounting hole 21 is used for the connection post 11 to pass therethrough. Further, the connector 3 is used for being connected with the connecting column part 11, so that the connection between the inner bracket 1 and the outer bracket 2 is realized.

Through adopting above-mentioned technical scheme, hold the shield through setting up the inner support 1 that has to hold portion 12 and hold, and set up that spliced pole portion 11 is connected through connector 3 with outer support 2 for as long as operation outer support 2 can carry and install the shield, effectively avoid the operator fish tail, make the installation of shield high-efficient, convenient and safe.

Further, in an embodiment, the connection post 11 has an external screw thread portion, the connection head 3 has an internal screw thread portion, and the connection post 11 and the connection head 3 can be connected by the cooperation of the external screw thread portion and the internal screw thread portion. It can be understood that the connection post 11 and the connector 3 are connected by screw threads, so that the descending installation of the shielding member can be realized only by rotating and operating the connector 3 when the shielding member is installed, which further improves the convenience and safety of the installation of the shielding member.

Of course, the present utility model is not limited thereto, and the connection post 11 and the connector 3 may be connected by other means, for example, an interference connection may be formed between the connection post 11 and the connector 3, or a locking may be formed between the connection post 11 and the connector 3.

In one embodiment, as shown in fig. 3, the inner bracket 1 is further provided with a locking hole 13. The mounting jig of the present utility model further comprises a locking piece 4, wherein the locking piece 4 is used for being inserted into the locking hole 13 and the through hole 10 of the shielding piece when the inner bracket 1 holds the shielding piece, so as to lock the inner bracket 1 and the shielding piece, and prevent the inner bracket 1 from rotating relative to the shielding piece to separate the inner bracket 1 from the shielding piece. Wherein the locking member 4 may be configured as a latch structure.

In one embodiment, as shown in fig. 3, the inner stent 1 includes a body section 14 and a strut section 15. One end of the strut portion 15 is connected to the main body portion 14, and the other end extends outward of the main body portion 14. Alternatively, the number of the strut parts 15 is four, and the four strut parts 15 are disposed at regular intervals in the circumferential direction of the body part 14. Further alternatively, the body portion 14 may be configured as a rectangle, with four strut portions 15 disposed at four right angles to the rectangle. Of course, the present utility model is not limited thereto, and the number of the strut parts 15 may be 2, 3, 5 or more, and the shape of the body part 14 may be a circle or other polygon.

Further, in an embodiment, as shown in fig. 3, the supporting rod portions 15 and the supporting portions 12 may be disposed in a one-to-one correspondence, and the supporting portions 12 are disposed at the other end of the supporting rod portions 15 facing away from the body portion 14.

Preferably, in an embodiment, the locking hole 13 is provided at the other end of the strut part 15. In this way, the locking hole 13 and the holding portion 12 are provided at the other end of each strut portion 15 at the same time, and the locking piece 4 and the holding portion 12 can be inserted into the same through hole 10 of the shielding piece, which can simplify the overall structure of the inner bracket 1.

It should be understood that the strut parts 15 and the supporting parts 12 may not be arranged in a one-to-one correspondence, and the number of the strut parts 15 may be greater than the number of the supporting parts 12, in which case, one part of the strut parts 15 may be provided with the supporting parts 12, and the other part with the locking holes 13, in which case, the locking member 4 and the supporting parts 12 may be inserted into different through holes 10 of the shielding member to achieve locking and supporting.

In one embodiment, as shown in fig. 3, the connection post 11 is disposed at a central position of the main body 14, one end of the connection post 11 is connected to the main body 14, and the other end is perpendicular to the main body 14 and extends away from the supporting portion 12.

In one embodiment, as shown in fig. 3, the holding portion 12 includes a vertical rod portion 121 and a step portion 122. One end of the vertical rod portion 121 is connected to the strut portion 15, the other end is connected to the step portion 122, and the step portion 122 is provided to extend in a horizontal direction from the vertical rod portion 121. Alternatively, the stepped portion 122 of each holding portion 12 is provided to be convex in the same direction in the circumferential direction of the inner holder 1, so that the inner holder 1 is rotated by a predetermined angle in the same direction, so that all the stepped portions 122 can hold the shield.

It will be appreciated that the locking hole 13 and the vertical rod portion 121 are offset, and the relative positions of the two are configured as follows: when the holding portion 12 is inserted into the through hole 10 of the shielding member, the inner bracket 1 is integrally rotated by a predetermined angle, and at this time, the stepped portion 122 holds the shielding member, and the locking hole 13 is aligned with the above-mentioned through hole 10 of the shielding member, so that the locking member 4 can be inserted into the locking hole 13 and the through hole 10, thereby locking the inner bracket 1 and the shielding member.

It should be understood that the inner bracket 1 may be provided with a locking hole 13 to lock the inner bracket 1 to the shielding member, and that not every strut portion 15 need be provided with a locking hole 13.

In one embodiment, as shown in fig. 4, the outer bracket 2 includes a connection portion 22, a link 23, and a cylindrical portion 24, and the connection portion 22 and the cylindrical portion 24 are connected by the link 23. Alternatively, the connecting portion 22 and the cylindrical portion 24 may be arranged concentrically, which is advantageous in improving the stability of the overall structure of the outer bracket 2.

In one embodiment, as shown in fig. 4, the mounting hole 21 is opened at a central position of the connection portion 22. The connecting portion 22 is provided with a positioning groove 221, correspondingly, as shown in fig. 5, the connector 3 is provided with a positioning boss 31, the positioning boss 31 is matched with the positioning groove 221 in size, and the positioning groove 221 is used for being matched with the positioning boss 31 to realize accurate positioning and installation of the connector 3. Alternatively, the positioning groove 221 is provided concentrically with the mounting hole 21. Further alternatively, both the positioning groove 221 and the positioning boss 31 may be circular, and the connection portion 22 may be circular.

In one embodiment, as shown in fig. 4, there may be 4 links 23, with 4 links 23 forming a cross shape. Of course, the present utility model is not limited thereto, and the number of the links 23 may be 2, 3, 5, 6 or more.

In one embodiment, the connecting portion 22, the connecting rod 23 and the cylindrical portion 24 may be made of stainless steel.

In one embodiment, as shown in fig. 4, the outer bracket 2 further includes a positioning skirt portion 25, and the positioning skirt portion 25 is provided at the lower end of the cylindrical portion 24 and is provided protruding from the outer wall surface of the cylindrical portion 24 in the radial direction of the cylindrical portion 24. Wherein the locating skirt portion 25 is configured to match the size of the cavity for mounting the shield such that the shield is located in the cavity when mounted. Through setting up location shirt rim portion 25, can realize the location installation of shield, cut the cavity of rubbing when preventing the shield installation, and then prevent the damage of equipment.

In one embodiment, the positioning skirt portion 25 may be made of polytetrafluoroethylene (teflon). Of course, the present utility model is not limited thereto, and the positioning skirt portion 25 may be made of other polymer or other materials.

In one embodiment, as shown in fig. 5, the connector 3 further includes an operation lever 32, and the operation lever 32 is disposed at an upper position of the connector 3. Through setting up action bars 32, the operating personnel of being convenient for operate and rotate connector 3, realize the connection between inner support 1 and the outer support 2 fixed.

In an embodiment, the stainless steel tooth socket can be embedded in the central hole of the connector 3, which is beneficial to ensuring the connection stability between the inner bracket 1 and the outer bracket 2 and also beneficial to prolonging the service life of the connector 3.

The following briefly describes a method of using the mounting jig for a shield according to the present utility model.

First, the inner bracket 1 is connected to the shield. Specifically, each of the holders 12 is inserted into a corresponding through-hole 10 in the shield, and then the inner bracket 1 is rotated by a predetermined angle so that each of the holders 12 holds the shield.

Then, the locking piece 4 is inserted into the locking hole 13 on the inner bracket 1 and the corresponding through hole 10 on the shielding piece, so that the inner bracket 1 and the shielding piece are locked, and the inner bracket 1 is prevented from being separated from each other due to accidental rotation of the inner bracket 1 relative to the shielding piece.

Then, the inner stent 1 and the outer stent 2 are connected. Specifically, the connection post 11 is inserted into the mounting hole 21 of the outer bracket 2, and the connection head 3 is used to connect with the connection post 11, thereby achieving the connection of the inner bracket 1 and the outer bracket 2.

Finally, the outer support 2 can be held by hand to carry the shielding piece into the cavity for installing the shielding piece, the shielding piece slowly descends into the cavity by slowly loosening the connector 3, the safety installation of the shielding piece is finally realized, and finally the inner support 1 and the outer support 2 are detached. Wherein it will be appreciated that the locating skirt portion 25 enables safe locating of the shield when placed in the cavity, preventing snagging between the shield and the cavity.

It should be understood that the above embodiments are exemplary and not intended to encompass all possible embodiments encompassed by the claims. Various modifications and changes may be made in the above embodiments without departing from the scope of the utility model. Likewise, the individual technical features of the above embodiments may also be combined arbitrarily to form further embodiments of the utility model which may not be explicitly described. Therefore, the above embodiments merely represent several embodiments of the present utility model, and do not limit the scope of the present utility model.

Claims

1. A mounting jig for a shield, the shield having a plurality of through holes, the mounting jig comprising:

2. The mounting jig for a shield according to claim 1, wherein the inner bracket is provided with a locking hole,

3. The mounting jig for a shield according to claim 2, wherein the inner bracket includes a body portion and at least two strut portions, one end of the strut portion is connected to the body portion, and the other end is provided to extend toward an outside of the body portion;

4. A mounting jig for a shield according to claim 3, wherein the locking hole is provided at the other end of the strut portion, and the locking piece and the holding portion are for insertion into the same through hole of the shield.

5. The mounting jig for a shield according to claim 3, wherein the connection post portion is provided at a central position of the body portion, one end of the connection post portion is connected with the body portion, and the other end is perpendicular to the body portion and extends away from the holding portion.

6. The mounting jig for a shield according to claim 3, wherein the holding portion includes a vertical rod portion and a step portion, one end of the vertical rod portion is connected to the strut portion, the other end is connected to the step portion, the step portion is provided protruding from the vertical rod portion in a horizontal direction, and the step portions of the at least two holding portions are provided protruding in the same direction in a circumferential direction of the inner bracket.

7. The mounting jig for a shield according to claim 1, wherein the connection post portion has an external screw thread portion, and the connection head has an internal screw thread portion for mating with the external screw thread portion to achieve connection of the connection post portion and the connection head.

8. The mounting jig for a shield according to claim 1, wherein the outer bracket includes a connection portion, a link, and a cylindrical portion, the connection portion and the cylindrical portion being connected by the link, the connection portion being disposed concentrically with the cylindrical portion.

9. The mounting jig for the shield according to claim 8, wherein the connection portion is provided with a positioning groove, the connector is provided with a positioning boss for cooperation with the positioning groove to achieve positioning mounting of the connector.

10. The mounting jig for a shield according to claim 8, wherein the outer bracket further includes a positioning skirt portion provided at a lower end of the cylindrical portion and protruding from an outer wall surface of the cylindrical portion in a radial direction of the cylindrical portion;