CN219520822U - Excimer laser light path debugging system - Google Patents

Abstract

The utility model provides an excimer laser optical path debugging system, which comprises: an excimer laser, a beam delivery structure, and a laser modulation structure; the laser adjusting structure comprises a first reflecting component connected with the excimer laser and a second reflecting component connected with the beam conveying structure, and the first reflecting component and the second reflecting component are arranged on a conveying path of laser so that the laser emitted by the excimer laser enters the beam conveying structure; the first reflecting component and the second reflecting component can move relatively, so that the intensity of laser light input to the beam conveying structure is adjusted. Through the laser regulation structure that can adjust laser beam transmission path length, realized the compensation to the energy loss that laser beam transmission path buckled and caused, need not to move the scanner, the regulation mode is nimble, and the accuracy is higher.

Description

Excimer laser light path debugging system

Technical Field

The utility model relates to the technical field of excimer lasers, in particular to an excimer laser optical path debugging system.

Background

Excimer laser refers to laser light generated by stimulated dimer. Molecules once formed but evanescent in a series of physical and chemical reactions caused by the excitation of the laser gas mixture by external energy, the lifetime of which is only tens of nanoseconds. Excimer lasers are currently widely used in clinical medicine as well as in scientific research and industrial applications, such as: drilling, surface treatment of marks, laser chemical vapor deposition, physical vapor deposition, cleaning of magnetic heads and optical lenses and silicon wafers, micro-fabrication techniques associated with micro-electromechanical systems, and the like.

However, the light beam emitted by the excimer laser cannot be directly applied to the micromachining process, an initial light beam needs to be adjusted by a superimposed light path adjustment system, and when the excimer laser is used, the light beam path in the light path adjustment system cannot adopt a straight line, and generally, the initial laser light beam is subjected to transreflective treatment so as to achieve the purposes of attenuation, direction adjustment and the like. Experiments show that energy loss is generated in the bent laser beam, about 4% of the energy loss is generated in the final output beam after each bending of the laser beam, and the deviation is not considered in the whole attenuation of the optical path system, when the bending times of the laser beam are large, the lost energy will cause the result to deviate, and a large operation error exists, the existing method for solving the problem generally needs to increase the initial beam power or frequently move the position of the scanner, but the former has poor precision, and the latter is inconvenient to operate, so that an excimer laser optical path debugging system capable of compensating the energy loss of the output beam is needed.

Disclosure of Invention

The utility model aims to at least solve one of the technical problems of inconvenient operation and low adjustment precision of the traditional solution mode that the energy loss of the final output light beam is caused when the light beam transmission path is bent in the optical path debugging system of the excimer laser in the prior art.

Therefore, the utility model provides an excimer laser optical path debugging system.

The utility model provides an excimer laser optical path debugging system, which comprises:

an excimer laser;

a beam delivery structure;

the laser adjusting structure comprises a first reflecting component connected with the excimer laser and a second reflecting component connected with the beam conveying structure, wherein the first reflecting component and the second reflecting component are arranged on a conveying path of laser, so that the laser emitted by the excimer laser enters the beam conveying structure; the first reflecting component and the second reflecting component can move relatively, so that the intensity of laser light input to the beam conveying structure is adjusted.

The utility model provides an optical path debugging system of an excimer laser, which is used for emitting excimer laser as an initial beam, the initial beam is input into a laser adjusting structure and is conveyed to a beam conveying structure through the laser adjusting structure, and finally the beam conveying structure conveys the initial beam to a target position, wherein the target position can be any working position needing the excimer laser, such as a wafer surface, a scanner workbench and the like.

The laser adjusting structure adjusts the length of a transmission path of the excimer laser through a first reflecting component and a second reflecting component which can move relatively, so that the adjustment of the final output laser intensity of the beam conveying structure is realized; specifically, when the laser beam generates energy loss due to bending of the transmission path, the first reflection assembly and the second reflection assembly can be made to move oppositely, so that the transmission path of the laser beam is shortened, the energy loss in the transmission process is reduced, and the energy compensation of the laser beam transmission structure for finally outputting the laser is realized; the relative movement of the first reflecting component and the second reflecting component can be the independent movement of the first reflecting component or the second reflecting component or the independent movement of the first reflecting component and the second reflecting component, and the positions of the first reflecting component and the second reflecting component tend to be fixed in other traditional modes, so that the positions of the first reflecting component or the second reflecting component are set to be adjustable, the use is convenient, and the adjustment precision of the mode is higher because the energy change related to the adjustment mode for reducing the transmission path is smaller; more specifically, the position of the first reflecting component or the second reflecting component can be adjusted manually or automatically, for example, by adjusting through a bolt or adjusting through a motor, so long as the device between the two components can synchronously change in volume along with the approach or the separation of the two components.

According to the technical scheme, the excimer laser optical path debugging system can also have the following additional technical characteristics:

in the above technical solution, the laser adjusting structure further includes:

the first pipeline is arranged between the first reflecting component and the second reflecting component, and laser output by the excimer laser is coaxial with an optical axis of the first pipeline after being reflected by the first reflecting component; the first pipe is capable of contracting in a direction in which the first and second reflecting members are close to each other and elongating in a direction in which the first and second reflecting members are far from each other.

In the technical scheme, the first pipeline is used for restraining a transmission path of a laser beam, an optical axis of the first pipeline is a central axis of the first pipeline, specifically, two ends of the first pipeline are respectively connected with the first reflecting component and the second reflecting component, an incident direction and an emergent direction of laser in the first reflecting component are vertical, and an incident direction and an emergent direction of laser in the second reflecting component are vertical, so that the first reflecting component and the second reflecting component are adjustable in reflection angle for convenience of use and adjustment; the length of the transmission path of the laser beam in the laser adjusting structure is adjusted by the contraction and the extension of the first pipeline, when the first pipeline is contracted, the transmission path of the laser beam is shortened, and the energy loss is reduced; when the first pipeline is extended, the transmission path of the laser beam is shortened, and the energy loss is increased; the length of the first pipeline can be adjusted according to the bending times of the laser beam transmission path of the excimer laser optical path debugging system and the final energy loss of the laser beam; the first pipeline can be telescopic by selecting a corrugated pipe or telescopic by arranging two branch pipes capable of relatively moving, and it should be noted that the telescopic mode is not limited to the above two modes, and other modes can be adopted.

In the above technical solution, the first pipeline includes:

fixing a pipeline;

the telescopic pipeline is coaxially arranged with the fixed pipeline and is in sliding fit with the fixed pipeline;

the fixed pipeline is connected with one of the first reflecting component and the second reflecting component, and the telescopic pipeline is connected with the other one of the first reflecting component and the second reflecting component.

In the technical scheme, when the fixed pipeline is fixedly connected with the first reflecting assembly, the telescopic pipeline is connected with the second reflecting assembly, and when the fixed pipeline is fixedly connected with the second reflecting assembly, the telescopic pipeline is connected with the first reflecting assembly; as an example, the fixed pipeline is fixedly connected to the second reflection assembly, and the position of the fixed pipeline is fixed; the telescopic pipeline is fixedly connected to the first reflecting component, and the position of the telescopic pipeline is synchronously changed along with the action of the first reflecting component; the fixed pipeline can be sleeved on the telescopic pipeline, the fixed pipeline and the telescopic pipeline are in sliding fit, when the fixed pipeline and the telescopic pipeline slide in opposite directions, the first pipeline is in a contracted state, when the fixed pipeline and the telescopic pipeline slide in opposite directions, the first pipeline is in an extended state, and when the telescopic pipeline is specifically used, a certain damping or position locking device can be added between the fixed pipeline and the telescopic pipeline, so that the telescopic length of the first pipeline can be controlled accurately.

In the above technical solution, the first pipeline further includes:

the scale part is arranged on the fixed pipeline or the telescopic pipeline and is used for displaying the relative distance between the fixed pipeline and the telescopic pipeline.

In the technical scheme, the scale part can be arranged on the telescopic pipe, a plurality of scale marks are marked on the scale part, and the relative distance reading between the telescopic pipe and the fixed pipe is carried out by taking the end part of the fixed pipe as a reference.

In the above technical solution, the laser adjusting structure further includes:

and the driving assembly is connected with the first reflecting assembly and used for driving the first reflecting assembly to move towards the direction approaching and/or away from the second reflecting assembly.

In this technical scheme, drive assembly can be electric transmission structure, like motor etc. also can be manual mechanical transmission structure, like adjusting bolt etc. drive assembly butt in first reflection subassembly or with first reflection subassembly fixed connection, along with drive assembly's action, first reflection subassembly removes and drives first pipeline and stretch out and draw back, realizes the regulation of laser beam transmission path length.

In the above technical solution, the driving assembly includes:

a driving motor;

the transmission piece is arranged between the driving motor and the first reflecting component and used for transmitting the power of the driving motor to the first reflecting component.

In the technical scheme, the driving motor is used for providing power, the transmission piece is used for converting the power of the driving motor into pushing force or pulling force which can enable the first reflection assembly to face/be far away from the second reflection assembly, and one end of the transmission piece is in transmission connection with the driving motor, such as gear connection, hinge connection and the like; the other end of the transmission piece is abutted against the first reflection assembly.

In the above technical solution, the driving motor is a stepper motor.

In the technical scheme, the stepping motor is adopted to be more convenient to adjust, and the adjusting precision is improved.

In any of the above solutions, the transmission member includes:

the limiting plate is arranged between the driving motor and the first reflecting component;

the transmission screw is in transmission connection with the driving motor and is in threaded fit with the limiting plate.

In this technical scheme, the limiting plate can be fixed in the optional position of working plane for the drive direction of restriction drive screw improves stability. The drive screw can be driven by the driving motor to continuously screw into the limiting plate, so that the first reflecting assembly moves towards the second reflecting assembly.

In any of the foregoing solutions, the first reflecting assembly includes:

a first mirror;

the second pipeline is arranged between the first reflecting mirror and the excimer laser and keeps relative static with the first reflecting mirror.

In this technical scheme, the optical axis of second pipeline is coaxial with the initial light beam of excimer laser output, and first speculum and second pipeline remain relatively static, and synchronous action promptly, when first speculum takes place the displacement, second pipeline synchronous action, first reflection subassembly still includes the casing, and first speculum setting is in the casing, and second pipeline and casing intercommunication can link to each other drive assembly and first reflection subassembly's casing when need carry out the position to first speculum.

In any of the foregoing solutions, the second reflection assembly includes:

a second mirror;

and the third pipeline is arranged between the second reflecting mirror and the light beam conveying structure.

In this technical scheme, second reflection subassembly still includes the casing, and the second speculum sets up in the casing, and the third pipeline communicates with the casing, because second reflection subassembly links to each other with light beam transport structure, and light beam transport structure internal connection is complicated, should make second speculum and third pipeline keep static for the convenience of guaranteeing the operation, carry out the position change to first reflection subassembly can.

In summary, due to the adoption of the technical characteristics, the utility model has the beneficial effects that:

through the laser regulation structure that can adjust laser beam transmission path length, realized the compensation to the energy loss that laser beam transmission path buckled and caused, need not to move the scanner, the regulation mode is nimble, and the accuracy is higher.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic diagram of an excimer laser optical path tuning system according to one embodiment of the present utility model;

fig. 2 is a schematic diagram showing a part of an optical path adjustment system a of the excimer laser shown in fig. 1 in an enlarged manner.

The correspondence between the reference numerals and the component names in fig. 1 to 2 is:

1. an excimer laser; 2. a beam delivery structure; 3. a laser adjustment structure;

31. a first reflective component; 32. a second reflective component; 33. a first pipeline; 34. a drive assembly;

311. a first mirror; 312. a second pipeline;

321. a second mirror; 322. a third pipeline;

331. fixing a pipeline; 332. a telescopic pipeline; 333. a scale section;

341. a driving motor; 342. a limiting plate; 343. and (5) driving a screw.

Detailed Description

In order that the above-recited objects, features and advantages of the present utility model will be more clearly understood, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description. It should be noted that, without conflict, the embodiments of the present utility model and features in the embodiments may be combined with each other.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced otherwise than as described herein, and therefore the scope of the present utility model is not limited to the specific embodiments disclosed below.

An excimer laser optical path tuning system according to some embodiments of the present utility model is described below with reference to fig. 1 and 2.

Some embodiments of the utility model provide an excimer laser optical path tuning system.

As shown in fig. 1 and 2, a first embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, which includes:

an excimer laser 1;

a beam delivery structure 2;

the laser adjusting structure 3 comprises a first reflecting component 31 connected with the excimer laser 1 and a second reflecting component 32 connected with the beam conveying structure 2, wherein the first reflecting component 31 and the second reflecting component 32 are arranged on a conveying path of laser light, so that the laser light emitted by the excimer laser 1 enters the beam conveying structure 2; the first and second reflecting assemblies 31 and 32 are capable of relative movement to adjust the intensity of the laser light input to the beam delivery structure 2.

According to the optical path debugging system of the excimer laser 1, the excimer laser 1 is used for emitting excimer laser as an initial beam, the initial beam is input into the laser adjusting structure 3 and is transmitted to the beam transmitting structure 2 through the laser adjusting structure 3, and finally the excimer laser is transmitted to a target position by the beam transmitting structure 2, wherein the target position can be any working position requiring excimer laser, such as a wafer surface, a scanner workbench and the like; in some embodiments, the beam delivery structure 2 may include an attenuator, a homogenizer, a diaphragm, and the like.

The laser adjusting structure 3 adjusts the transmission path length of the excimer laser through a first reflecting component 31 and a second reflecting component 32 which can relatively move, so that the adjustment of the final output laser intensity of the beam conveying structure 2 is realized; specifically, when the laser beam generates energy loss due to bending of the transmission path, the first reflection assembly 31 and the second reflection assembly 32 can be made to move in opposite directions, so that the transmission path of the laser beam is shortened, the energy loss in the transmission process is reduced, and the energy compensation of the laser beam output by the beam transmission structure 2 is realized; the relative movement of the first reflecting component 31 and the second reflecting component 32 can be that the first reflecting component 31 or the second reflecting component 32 acts independently or simultaneously, so that the positions of the first reflecting component 31 and the second reflecting component 32 tend to be fixed in other traditional modes, the positions of the first reflecting component 31 or the second reflecting component 32 are set to be adjustable, the use is convenient, and the energy change related to the adjustment mode for reducing the transmission path is smaller, so that the adjustment precision of the mode is higher; more specifically, the position of the first reflecting component 31 or the second reflecting component 32 may be adjusted manually or automatically, for example, by adjusting with a bolt or adjusting with a motor, so long as the device between the two components can be ensured to be capable of changing in volume along with the approaching or separating of the two components.

The second embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of the first embodiment, as shown in fig. 1 and 2, the laser adjustment structure 3 further includes:

the first pipeline 33 is arranged between the first reflecting component 31 and the second reflecting component 32, and the laser light output by the excimer laser 1 is coaxial with the optical axis of the first pipeline 33 after being reflected by the first reflecting component 31; the first pipe 33 is capable of being contracted in a direction in which the first and second reflection assemblies 31 and 32 are close to each other, and is elongated in a direction in which the first and second reflection assemblies 31 and 32 are far from each other.

In this embodiment, the first pipe 33 is used for restricting a transmission path of a laser beam, an optical axis of the first pipe 33 is a central axis of the first pipe 33, specifically, two ends of the first pipe 33 are respectively connected with the first reflection component 31 and the second reflection component 32, an incident direction and an outgoing direction of laser light in the first reflection component 31 are perpendicular, an incident direction and an outgoing direction of laser light in the second reflection component 32 are perpendicular, and for convenience of use and adjustment, reflection angles in the first reflection component 31 and the second reflection component 32 are adjustable; the contraction and the extension of the first pipeline 33 adjust the transmission path length of the laser beam in the laser adjusting structure 3, when the first pipeline 33 contracts, the transmission path of the laser beam is shortened, and the energy loss is reduced; when the first pipe 33 is extended, the transmission path of the laser beam is shortened, and the energy loss increases; the length of the first pipeline 33 can be adjusted according to the bending times of the laser beam transmission path of the excimer laser 1 optical path debugging system and the final energy loss of the laser beam; the first pipe 33 may be a bellows to achieve expansion and contraction, or may be a bellows to achieve expansion and contraction by providing two sub-pipes capable of moving relatively, and it should be noted that the expansion and contraction methods are not limited to the above two methods, and other methods may be adopted.

A third embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and 2, the first pipeline 33 includes:

a fixed pipe 331;

a telescopic pipeline 332 coaxially arranged with the fixed pipeline 331 and in sliding fit with the fixed pipeline;

the fixed line 331 is connected to one of the first and second reflecting assemblies 31 and 32, and the telescopic line 332 is connected to the other of the first and second reflecting assemblies 31 and 32.

In this embodiment, when the fixed pipe 331 is fixedly connected to the first reflecting component 31, the telescopic pipe 332 is connected to the second reflecting component 32, and when the fixed pipe 331 is fixedly connected to the second reflecting component 32, the telescopic pipe 332 is connected to the first reflecting component 31; as an example, the fixed pipeline 331 is fixedly connected to the second reflecting component 32, and the position is fixed; the telescopic pipeline 332 is fixedly connected to the first reflecting component 31, and the position of the telescopic pipeline is synchronously changed along with the action of the first reflecting component 31; the fixed pipeline 331 can be sleeved on the telescopic pipeline 332, and the fixed pipeline 331 and the telescopic pipeline 332 are in sliding fit, when the fixed pipeline 331 and the telescopic pipeline 332 slide in opposite directions, the first pipeline 33 is in a contracted state, when the fixed pipeline 331 and the telescopic pipeline 332 slide in opposite directions, the first pipeline 33 is in an extended state, and when the fixed pipeline 331 and the telescopic pipeline 332 are used specifically, a certain damping or position locking device can be added between the fixed pipeline 331 and the telescopic pipeline 332, so that the telescopic length of the first pipeline 33 can be controlled accurately.

A fourth embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and fig. 2, the first pipeline 33 further includes:

the scale part 333 is disposed on the fixed pipeline 331 or the telescopic pipeline 332, and the scale part 333 is used for displaying the relative distance between the fixed pipeline 331 and the telescopic pipeline 332.

In this embodiment, a scale 333 may be disposed on the telescopic pipe 332, and a plurality of scale marks are marked on the scale 333, and the distance between the telescopic pipe 332 and the fixed pipe 331 is read based on the end of the fixed pipe 331.

A fifth embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and fig. 2, the laser adjustment structure 3 further includes:

and a driving assembly 34 connected to the first reflecting assembly 31 for driving the first reflecting assembly 31 to move toward and/or away from the second reflecting assembly 32.

In this embodiment, the driving component 34 may be an electric transmission structure, such as a motor, or a manual mechanical transmission structure, such as an adjusting bolt, where the driving component 34 abuts against the first reflecting component 31 or is fixedly connected with the first reflecting component 31, and along with the action of the driving component 34, the first reflecting component 31 moves and drives the first pipeline 33 to stretch and retract, so as to implement adjustment of the length of the transmission path of the laser beam.

A sixth embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and 2, the driving assembly 34 includes:

a driving motor 341;

and a transmission member, disposed between the driving motor 341 and the first reflection assembly 31, for transmitting the power of the driving motor 341 to the first reflection assembly 31.

In this embodiment, the driving motor 341 is used to provide power, and the transmission member is used to convert the power of the driving motor 341 into a pushing force or a pulling force that can make the first reflecting assembly 31 face/separate from the second reflecting assembly 32, where one end of the transmission member is in driving connection with the driving motor 341, such as using a gear connection, a hinge connection, or the like; the other end of the transmission member abuts against the first reflecting component 31.

A seventh embodiment of the present utility model proposes a system for adjusting an optical path of an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and fig. 2, the driving motor 341 is a stepper motor.

In the embodiment, the stepping motor is adopted to be more convenient to adjust, and the adjusting precision is improved.

An eighth embodiment of the present utility model provides an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and fig. 2, the transmission member includes:

the limiting plate 342 is arranged between the driving motor 341 and the first reflecting component 31;

the driving screw 343 is in driving connection with the driving motor 341 and is in threaded fit with the limiting plate 342.

In this embodiment, the limiting plate 342 may be fixed at any position on the working plane, so as to limit the driving direction of the driving screw 343 and improve stability. The driving screw 343 can be continuously screwed into the limiting plate 342 under the driving of the driving motor 341, so that the first reflecting component 31 moves towards the second reflecting component 32.

A ninth embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and 2, the first reflection assembly 31 includes:

a first mirror 311;

the second pipeline 312 is arranged between the first reflecting mirror 311 and the excimer laser 1, and keeps relative static with the first reflecting mirror 311.

In this embodiment, the optical axis of the second tube 312 is coaxial with the initial beam output by the excimer laser 1, the first mirror 311 and the second tube 312 are kept relatively stationary, i.e. synchronously operated, when the first mirror 311 is displaced, the second tube 312 synchronously operates, the first reflecting component 31 further includes a housing, the first mirror 311 is disposed in the housing, the second tube 312 is in communication with the housing, and when the position of the first mirror 311 needs to be adjusted, the driving component 34 can be connected to the housing of the first reflecting component 31.

A tenth embodiment of the present utility model proposes an optical path adjustment system for an excimer laser 1, and on the basis of any of the above embodiments, as shown in fig. 1 and 2, the second reflection assembly 32 includes:

a second mirror 321;

the third pipeline 322 is arranged between the second reflecting mirror 321 and the light beam conveying structure 2.

In this embodiment, the second reflecting component 32 further includes a housing, the second reflecting mirror 321 is disposed in the housing, and the third pipeline 322 is in communication with the housing, so that the second reflecting component 32 is connected to the beam delivery structure 2, and the beam delivery structure 2 has a complex internal connection relationship, so that the second reflecting mirror 321 and the third pipeline 322 should be kept stationary to change the position of the first reflecting component 31 for ensuring convenience of operation.

In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (10)

1. An excimer laser (1) optical path tuning system, characterized by comprising:

an excimer laser (1);

a beam delivery structure (2);

the laser adjusting structure (3) comprises a first reflecting component (31) connected with the excimer laser (1) and a second reflecting component (32) connected with the beam conveying structure (2), wherein the first reflecting component (31) and the second reflecting component (32) are arranged on a conveying path of laser, so that the laser emitted by the excimer laser (1) enters the beam conveying structure (2); the first reflecting component (31) and the second reflecting component (32) can relatively move, so that the intensity of laser light input into the beam conveying structure (2) is adjusted.

2. An excimer laser (1) optical path tuning system according to claim 1, wherein the laser tuning structure (3) further comprises:

the first pipeline (33) is arranged between the first reflecting component (31) and the second reflecting component (32), and laser light output by the excimer laser (1) is coaxial with an optical axis of the first pipeline (33) after being reflected by the first reflecting component (31); the first pipe (33) is capable of contracting in a direction in which the first reflecting member (31) and the second reflecting member (32) approach each other, and is capable of extending in a direction in which the first reflecting member (31) and the second reflecting member (32) depart from each other.

3. An excimer laser (1) optical path tuning system according to claim 2, wherein the first pipeline (33) comprises:

a fixed pipeline (331);

the telescopic pipeline (332) is coaxially arranged with the fixed pipeline (331) and is in sliding fit with the fixed pipeline;

the fixed pipeline (331) is connected with one of the first reflecting component (31) and the second reflecting component (32), and the telescopic pipeline (332) is connected with the other of the first reflecting component (31) and the second reflecting component (32).

4. An excimer laser (1) optical path tuning system as claimed in claim 3, wherein the first pipeline (33) further comprises:

the scale part (333) is arranged on the fixed pipeline (331) or the telescopic pipeline (332), and the scale part (333) is used for displaying the relative distance between the fixed pipeline (331) and the telescopic pipeline (332).

5. An excimer laser (1) optical path tuning system according to claim 1, wherein the laser tuning structure (3) further comprises:

and the driving assembly (34) is connected with the first reflecting assembly (31) and is used for driving the first reflecting assembly (31) to move towards and/or away from the second reflecting assembly (32).

6. An excimer laser (1) optical path tuning system as claimed in claim 5, wherein the drive assembly (34) comprises:

a drive motor (341);

and the transmission member is arranged between the driving motor (341) and the first reflecting assembly (31) and is used for transmitting the power of the driving motor (341) to the first reflecting assembly (31).

7. The system for tuning the optical path of an excimer laser (1) according to claim 6, wherein the driving motor (341) is a stepper motor.

8. An excimer laser (1) optical path tuning system as claimed in claim 6, wherein the transmission member comprises:

the limiting plate (342) is arranged between the driving motor (341) and the first reflecting component (31);

and the transmission screw (343) is in transmission connection with the driving motor (341) and is in threaded fit with the limiting plate (342).

9. An excimer laser (1) optical path tuning system according to any one of claims 1 to 8, wherein the first reflecting assembly (31) comprises:

a first mirror (311);

and a second pipeline (312) which is arranged between the first reflecting mirror (311) and the excimer laser (1) and keeps relative static with the first reflecting mirror (311).

10. An excimer laser (1) optical path tuning system according to any one of claims 1 to 8, wherein the second reflection assembly (32) comprises:

a second mirror (321);

and a third pipeline (322) arranged between the second reflecting mirror (321) and the light beam conveying structure (2).