CN219509847U - Bearing mechanism - Google Patents
Bearing mechanism Download PDFInfo
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- CN219509847U CN219509847U CN202320490693.1U CN202320490693U CN219509847U CN 219509847 U CN219509847 U CN 219509847U CN 202320490693 U CN202320490693 U CN 202320490693U CN 219509847 U CN219509847 U CN 219509847U
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- bearing plate
- adjusting
- underframe
- molecular pump
- plate
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Abstract
The utility model provides a bearing mechanism, comprising: a chassis; one end of the underframe is provided with a first installation part for installing the swing valve, and the other end of the underframe is provided with a second installation part for installing the molecular pump; the bearing plate is arranged on the second installation part on the underframe; the support seat is arranged on the bearing plate and used for bearing the molecular pump; the transverse sliding mechanism is arranged between the bearing plate and the second mounting part of the underframe and is used for moving the bearing plate towards or away from the first mounting part of the underframe; the height adjusting mechanism is arranged between the supporting seat and the bearing plate and is used for adjusting the height of the supporting seat relative to the bearing plate. The bearing mechanism provided by the utility model can enable the docking or the separation of the molecular pump and the swing valve to be more convenient, eliminates potential safety hazards and is convenient for later maintenance operation.
Description
Technical Field
The utility model relates to a mechanism in semiconductor equipment, in particular to a supporting mechanism for mounting a molecular pump.
Background
In semiconductor devices, molecular pumps are often used as vacuum pumps, which need to be interfaced with a swing valve to achieve a vacuum pumping operation;
when the molecular pump is installed, the existing vertical or horizontal mode is adopted; when the transverse mode is adopted, a plurality of persons are required to cooperatively lift and support the molecular pump and the swing valve to be in butt joint, and then the molecular pump and the swing valve are connected through bolts; because the molecular pump is heavy, if the lifting time is long during installation, the molecular pump has the danger of falling when the force is high, and potential safety hazards exist; in addition, when the semiconductor equipment is maintained in the later period, the semiconductor equipment around the molecular pump has more parts and is inconvenient for personnel to operate.
Disclosure of Invention
In order to solve at least one technical problem in the prior art, the embodiment of the utility model provides a bearing mechanism which is used for enabling a molecular pump to be in butt joint or separation with a swing valve more conveniently, eliminating potential safety hazards and facilitating later maintenance operation. In order to achieve the technical purpose, the technical scheme adopted by the embodiment of the utility model is as follows:
the embodiment of the utility model provides a bearing mechanism, which comprises:
a chassis; one end of the underframe is provided with a first installation part for installing the swing valve, and the other end of the underframe is provided with a second installation part for installing the molecular pump;
the bearing plate is arranged on the second installation part on the underframe;
the support seat is arranged on the bearing plate and used for bearing the molecular pump;
the transverse sliding mechanism is arranged between the bearing plate and the second mounting part of the underframe and is used for moving the bearing plate towards or away from the first mounting part of the underframe;
the height adjusting mechanism is arranged between the supporting seat and the bearing plate and is used for adjusting the height of the supporting seat relative to the bearing plate.
Further, the transverse sliding mechanism is two groups of sliding block and sliding rail assemblies which are respectively arranged at two sides of the second installation part of the underframe; the sliding block and sliding rail assembly comprises a sliding block and a sliding rail, wherein the sliding block is arranged on a second installation part of the underframe, and the sliding rail is arranged at the bottom of the bearing plate.
Further, the front side and the rear side of the sliding block are respectively provided with a supporting block.
Further, the top end of the supporting block is provided with a pulley.
Further, the height adjusting mechanism comprises an adjusting plate and a plurality of adjusting bolts; the bearing plate is provided with an adjusting hole and a bolt hole, the adjusting plate is located below the bearing plate, the lower end of the supporting seat penetrates through the adjusting hole in the bearing plate to be connected with the adjusting plate, the lower end of the adjusting bolt is connected with the adjusting plate, and the upper end of the adjusting bolt penetrates through the bolt hole in the bearing plate to be connected with the nut.
More preferably, the bearing plate is also provided with a mounting hole.
Further, the supporting seat is a V-shaped seat.
Further, the two supporting seats are arranged at intervals in front and back.
The technical scheme provided by the embodiment of the utility model has the beneficial effects that:
1) When the molecular pump is installed, the bearing plate and the supporting seat can be placed at a position deviating from the swing valve so as to obtain a larger operation space; the molecular pump is supported by the supporting seat with adjustable height, and the molecular pump can be close to the pendulum valve through the sliding of the bearing plate, so that the molecular pump is easy to butt joint and the potential safety hazard of falling of the molecular pump is eliminated.
2) In the later maintenance, the molecular pump is conveniently separated from the swing valve, and the periphery of the separated molecular pump is provided with a larger operation space, so that the maintenance operation is convenient.
Drawings
Fig. 1 is a front view of a support mechanism according to an embodiment of the present utility model.
FIG. 2 is a side view of a support mechanism according to an embodiment of the present utility model.
FIG. 3 is another side view of the support mechanism according to an embodiment of the present utility model.
Fig. 4 is a perspective view of a support mechanism according to an embodiment of the present utility model.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
As shown in fig. 1, 2, 3 and 4, a supporting mechanism according to an embodiment of the present utility model includes:
a chassis 1; one end of the bottom frame 1 is provided with a first mounting part 101 for mounting a swing valve a, and the other end of the bottom frame 1 is provided with a second mounting part 102 for mounting a molecular pump b;
a carrier plate 2, a second mounting portion 102 provided on the chassis 1;
the supporting seat 3 is arranged on the bearing plate 2 and used for bearing the molecular pump b;
a lateral sliding mechanism 4, disposed between the carrying plate 2 and the second mounting portion 102 of the chassis 1, for moving the carrying plate 2 toward or away from the first mounting portion 102 of the chassis 1;
the height adjusting mechanism 5 is disposed between the supporting seat 3 and the carrying plate 2, and is used for adjusting the height of the supporting seat 3 relative to the carrying plate 2.
In the proposed embodiment of the present utility model, the pendulum valve a may be first fixed to the first mounting part 101 at one end of the chassis 1 by bolts; then the bearing plate 2 is moved out in the direction away from the swing valve a, so that a larger operation space is provided when the molecular pump b is installed; then placing the molecular pump b on the supporting seat 3 through hoisting equipment or manpower, wherein the molecular pump b bears the force through the supporting seat 3 and is not easy to fall off; the heights of the supporting seat 3 and the molecular pump b supported on the supporting seat are adjusted through the height adjusting mechanism 5, so that the interfaces of the molecular pump b and the pendulum valve a are approximately aligned in the height direction, then the molecular pump b is moved towards the direction of the pendulum valve a through the moving of the bearing plate 2, the height adjusting mechanism 5 is finely adjusted, so that the interfaces of the molecular pump b and the pendulum valve a are aligned in the height direction, and then the molecular pump b and the pendulum valve a are connected through bolts, the installation process is simple and safe, the butt joint of the molecular pump b and the pendulum valve a is facilitated, and the hidden danger of dropping of the molecular pump b is eliminated; when equipment needs to be maintained, the bolts for connecting the swing valve a and the molecular pump b can be detached firstly, the molecular pump b is separated from the swing valve a by moving the bearing plate 2, and then a larger operation space can be formed around the molecular pump b, so that later maintenance operation is facilitated.
In one embodiment, the underframe 1 adopts a steel frame, the first installation part 101 and the second installation part 102 are steel frame bodies, and according to different types of swing valves a and molecular pumps b, the first installation part 101 can be higher or lower than the second installation part 102 or have the same height as the second installation part 102;
in one embodiment, the lateral sliding mechanism 4 is two sets of sliding block and sliding rail assemblies, which are separately arranged at two sides of the second installation part 102 of the chassis 1; the sliding block and sliding rail assembly comprises a sliding block 401 and a sliding rail 402, the sliding block 401 is arranged on the second installation part 102 of the underframe 1, and the sliding rail 402 is arranged at the bottom of the bearing plate 2; by the cooperation of the sliding block 401 and the sliding rail 402, the supporting seat 3 and the molecular pump b on the bearing plate 2 can relatively smoothly move towards or away from the swing valve a; in this embodiment, the sliding rail 402 is installed at the bottom of the bearing plate 2, so as to significantly improve the bearing capacity of the bearing plate 2; in other embodiments, the sliding rail 402 may be installed on the second installation portion 102 of the chassis 1, and the sliding block 401 is installed at the bottom of the bearing plate 2, but the bearing plate 2 in this conventional installation manner can only obtain a corresponding bearing force by relying on its own strength, and the reinforcing effect of the sliding rail 402 on the bearing plate 2 is absent;
as an optimization of the embodiment, the front side and the rear side of the sliding block 401 are respectively provided with a supporting block 403; after the bearing plate 2 moves towards the direction of the swing valve a, the front end of the bearing plate 2 can be carried on the supporting block 403 at the front side of the sliding block 401, and after the bearing plate 2 moves towards the direction deviating from the direction of the swing valve a, the rear end of the bearing plate 2 can be carried on the supporting block 403 at the rear side of the sliding block 401, so that the bearing plate 2 is prevented from being deformed due to the weight of the molecular pump b;
as a further optimization of this embodiment, the top end of the supporting block 403 is provided with a pulley, which is favorable for reducing the friction force between the supporting block 403 and the carrier plate 2 when sliding;
in the present embodiment, the supporting block 403 on the rear side of the slider 401 is mounted on the top end of the electric box 6, and in other embodiments, the second mounting portion 102 of the chassis 1 may also extend rearward to mount the supporting block 403 on the rear side of the slider 401;
in one embodiment, as shown in fig. 2, the height adjustment mechanism 5 includes an adjustment plate 501 and a plurality of adjustment bolts 502; the bearing plate 2 is provided with an adjusting hole and a bolt hole, the adjusting plate 501 is positioned below the bearing plate 2, the lower end of the supporting seat 3 passes through the adjusting hole on the bearing plate 2 to be connected with the adjusting plate 501, the lower end of the adjusting bolt 502 is connected with the adjusting plate 501, and the upper end passes through the bolt hole on the bearing plate 2 to be connected with a nut; the height of the adjusting plate 501 can be adjusted by adjusting the adjusting bolt 502 and the matched nut, so that the height of the supporting seat 3 relative to the bearing plate 2 can be adjusted; in the present embodiment, four adjusting bolts 502 are provided, and one adjusting bolt 502 is provided on each side of each supporting seat 3;
as an optimization of the embodiment, the bearing plate 2 is also provided with a mounting hole 201; through the mounting hole 201, a cable or a pipeline or the like can be passed;
as optimization of the embodiment, the supporting seat 3 is a V-shaped seat, which can be adapted to molecular pumps with various calibers, has strong adaptability, and the molecular pump a is firmly arranged;
as an optimization of the embodiment, the two supporting seats 3 are arranged at intervals in front and back to firmly support the molecular pump b;
according to the bearing mechanism provided by the embodiment of the utility model, the molecular pump is supported by the supporting seat with the adjustable height, and the molecular pump can be close to or far away from the swing valve by sliding the bearing plate, so that the operation space is large, the butt joint is easy, and the hidden danger of dropping the molecular pump is eliminated when the molecular pump is in butt joint with the swing valve; when the operation and maintenance are needed, the molecular pump is conveniently separated from the swing valve, and a larger operation space is formed around the separated molecular pump.
Finally, it should be noted that the above-mentioned embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same, and although the present utility model has been described in detail with reference to the examples, it should be understood by those skilled in the art that modifications and equivalents may be made to the technical solution of the present utility model without departing from the spirit and scope of the technical solution of the present utility model, and all such modifications and equivalents are intended to be encompassed in the scope of the claims of the present utility model.
Claims (8)
1. A support mechanism, comprising:
a chassis (1); one end of the underframe (1) is provided with a first installation part (101) for installing a swing valve (a), and the other end of the underframe (1) is provided with a second installation part (102) for installing a molecular pump (b);
a carrier plate (2), a second mounting part (102) arranged on the chassis (1);
the support seat (3) is arranged on the bearing plate (2) and is used for bearing the molecular pump (b);
a transverse sliding mechanism (4) arranged between the bearing plate (2) and the second mounting part (102) of the underframe (1) and used for moving the bearing plate (2) towards or away from the first mounting part (101) of the underframe (1);
the height adjusting mechanism (5) is arranged between the supporting seat (3) and the bearing plate (2) and is used for adjusting the height of the supporting seat (3) relative to the bearing plate (2).
2. The support mechanism of claim 1, wherein,
the transverse sliding mechanism (4) is two groups of sliding block and sliding rail assemblies which are respectively arranged at two sides of the second installation part (102) of the underframe (1); the sliding block and sliding rail assembly comprises a sliding block (401) and a sliding rail (402), the sliding block (401) is installed on the second installation part (102) of the underframe (1), and the sliding rail (402) is installed at the bottom of the bearing plate (2).
3. The support mechanism of claim 2, wherein,
the front side and the rear side of the sliding block (401) are respectively provided with a supporting block (403).
4. The support mechanism of claim 3,
the top end of the supporting block (403) is provided with a pulley.
5. The support mechanism of any one of claims 1-4,
the height adjusting mechanism (5) comprises an adjusting plate (501) and a plurality of adjusting bolts (502); the bearing plate (2) is provided with an adjusting hole and a bolt hole, the adjusting plate (501) is located below the bearing plate (2), the lower end of the supporting seat (3) penetrates through the adjusting hole in the bearing plate (2) to be connected with the adjusting plate (501), the lower end of the adjusting bolt (502) is connected with the adjusting plate (501), and the upper end of the adjusting bolt penetrates through the bolt hole in the bearing plate (2) to be connected with a nut.
6. The support mechanism of any one of claims 1-4,
the bearing plate (2) is also provided with a mounting hole (201).
7. The support mechanism of any one of claims 1-4,
the supporting seat (3) is a V-shaped seat.
8. The support mechanism of claim 7,
the number of the supporting seats (3) is two, and the two supporting seats are arranged at intervals front and back.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320490693.1U CN219509847U (en) | 2023-03-15 | 2023-03-15 | Bearing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320490693.1U CN219509847U (en) | 2023-03-15 | 2023-03-15 | Bearing mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219509847U true CN219509847U (en) | 2023-08-11 |
Family
ID=87523288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320490693.1U Active CN219509847U (en) | 2023-03-15 | 2023-03-15 | Bearing mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219509847U (en) |
-
2023
- 2023-03-15 CN CN202320490693.1U patent/CN219509847U/en active Active
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