CN219503288U - Surface cleaning instrument for glass carrier plate - Google Patents

Abstract

The utility model discloses a surface cleaner for a glass carrier plate, which comprises: a frame; the fixing mechanism is used for fixing the glass carrier plate and a wafer bonded to the front surface of the glass carrier plate; the spraying mechanism is arranged on the frame; the spraying mechanism is used for spraying the cleaning solvent towards the back of the glass carrier plate; the brushing mechanism is arranged on the rack; the brushing mechanism is used for brushing the back surface of the glass carrier plate; the rotating mechanism is provided with a rotating end, and the rotating end is connected with the fixing mechanism; the rotating mechanism drives the fixing mechanism through the rotating end to enable the fixing mechanism to rotate relative to the spraying mechanism and the brushing mechanism. Therefore, the glass carrier plate can be efficiently cleaned, and the manual operation process is reduced.

Description

Surface cleaning instrument for glass carrier plate

Technical Field

The utility model relates to the technical field of chip packaging, in particular to a surface cleaner for a glass carrier plate

Background

The wafer needs to be temporarily bonded to a glass carrier plate to support and protect the wafer before the wafer is subjected to the rewiring process. After the rewiring process has proceeded to a certain step, the glass carrier plate needs to be peeled from the wafer by a peeling process, wherein laser peeling is the most common peeling method.

In the process of laser lift-off, in order to prevent contamination on the back surface of the glass carrier plate from affecting the laser projection effect, an operator is generally required to clean the glass carrier plate with a blade and alcohol, but the manual cleaning efficiency is low.

Disclosure of Invention

The utility model aims at the problem that the manual cleaning efficiency of the back surface of a glass carrier plate is lower in the process of temporarily bonding the glass carrier plate by laser stripping, thereby providing a surface cleaner for the glass carrier plate.

To achieve the above object, an embodiment of the present utility model provides a surface cleaner for a glass carrier plate, including:

a frame;

the fixing mechanism is arranged on the rack; the fixing mechanism is used for fixing the glass carrier plate and bonding the wafer on the front surface of the glass carrier plate;

the spraying mechanism is arranged on the frame; the spraying mechanism is used for spraying the cleaning solvent towards the back of the glass carrier plate;

the brushing mechanism is arranged on the rack; the brushing mechanism is used for brushing the back surface of the glass carrier plate;

the rotating mechanism is arranged on the frame; the rotating mechanism is provided with a rotating end which is connected with the fixing mechanism; the rotating mechanism drives the fixing mechanism through the rotating end, so that the glass carrier plate and the wafer which are temporarily bonded together in the fixing mechanism simultaneously rotate relative to the spraying mechanism and the brushing mechanism.

Optionally, the fixing mechanism includes:

the suction disc piece is provided with a suction groove communicated with the upper end and the lower end of the suction disc piece, so that the glass carrier plate and the wafer are covered on the suction groove;

the inner pipe is communicated with the lower end of the suction groove and extends in a direction away from the suction disc piece; the inner tube is connected with the rotating end;

the outer tube is sleeved outside the inner tube, and the connection position of the outer tube and the inner tube is in a rotary sealing state; the outer tube is fixedly connected with the frame;

and the vacuum pump is sequentially communicated with the outer pipe, the inner pipe and the suction groove through the exhaust pipe to form a vacuumizing channel.

Optionally, the spraying mechanism includes:

a mechanical arm;

the spray header is arranged at the front end of the mechanical arm;

the liquid supply device is communicated with the spray header; the liquid supply device is used for providing cleaning solvent for the spray header.

Optionally, the brushing mechanism comprises:

the brush rod is arranged on one side of the fixing mechanism and is positioned above the glass carrier plate;

the brush head is arranged at one end of the brush rod, which is close to the glass carrier plate.

Optionally, bristles are arranged on the brush head along the radial direction of the glass carrier plate.

Optionally, the brushing mechanism further comprises:

the first driving device is provided with a first driving end, and the first driving end is connected with the brush rod; under the driving action of the first driving end, the brush rod is in a state of moving along the vertical direction.

Optionally, the first driving device comprises a driving motor and a screw guide rail connected with the driving motor, a sliding block is arranged on the screw guide rail, and the sliding block is connected with the brush rod; under the driving action of the driving motor and the lead screw guide rail, the brush rod is in a state of moving along the vertical direction.

Optionally, the brushing mechanism further comprises:

a second drive device disposed on the first drive end; the second driving device is provided with a second driving end which is connected with the brush rod;

under the driving action of the first driving end, the second driving device is in a first state of moving along the vertical direction, and under the driving action of the second driving end, the brush rod is in a second state of rotating relative to the glass carrier plate.

Optionally, the surface cleaner further comprises:

the collecting box is positioned below the fixing mechanism, the spraying mechanism and the brushing mechanism, so that the projections of the fixing mechanism, the spraying mechanism and the brushing mechanism along the vertical direction are all positioned in the collecting box.

Optionally, the surface cleaner further comprises:

the cleaning mechanism is arranged on the frame and is used for spraying cleaning liquid towards the edge of one side of the wafer, which is away from the glass carrier plate.

Compared with the prior art, the technical scheme of the utility model has the following advantages:

1. in the embodiment of the utility model, when in operation, the glass carrier plate bonded with the wafer with the packaging structure is firstly put on the fixing mechanism, and the glass carrier plate is fixed through the fixing mechanism. And then the rotating mechanism transmits force to the glass carrier plate through the fixing mechanism, so that the glass carrier plate rotates relative to the brushing mechanism and the spraying mechanism. The spraying mechanism sprays the cleaning solvent on the glass carrier plate, and the brushing mechanism is abutted to the surface of the glass carrier plate and is matched with the cleaning solvent to clean the glass carrier plate. Thereby realizing the efficient cleaning of the back surface of the glass carrier plate. Meanwhile, the glass carrier plate with the wafer is easy to drop from the workbench in manual operation, stress concentration phenomenon caused by drop impact is introduced into the packaging structure corresponding to the wafer and the wafer, mechanical instability of the glass carrier plate caused by the stress concentration phenomenon is increased, and warping unevenness of the glass carrier plate is further increased; by the automatic operation of the surface cleaner, the risk that the glass carrier plate falls to the ground caused by manual errors can be reduced, and the reject ratio of the chip packaging process is further reduced.

2. According to the utility model, the collecting box is arranged, so that the cleaning solvent sprayed from the spraying mechanism, the water sprayed from the spraying mechanism and the cleaning solvent flowing down from the glass carrier plate are all recovered in the collecting box during working, and the neatness of a working area is ensured. When the water and the cleaning solvent in the collecting box are required to be recovered, the valve is only required to be opened, and the water and the cleaning solvent in the collecting box are discharged into a subsequent wastewater treatment system through the liquid discharge pipe.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person of ordinary skill in the art.

FIG. 1 is a schematic view showing the overall structure of a first embodiment of a surface cleaner according to an embodiment of the present utility model;

FIG. 2 is a schematic structural view of a fixing mechanism according to an embodiment of the present utility model;

fig. 3 is a schematic overall structure of a second embodiment of the surface cleaner according to the embodiment of the present utility model.

Reference numerals:

1. a fixing mechanism; 11. a suction disc member; 12. an inner tube; 121. a communication hole; 13. an outer tube; 131. an annular groove; 14. an exhaust pipe; 2. a spraying mechanism; 21. a mechanical arm; 22. a spray header; 3. a brushing mechanism; 31. a brush bar; 32. a guide rail; 321. a chute; 33. a slide block; 34. a screw rod; 35. a driving motor; 36. a connecting frame; 361. a rotating motor; 362. a connecting rod; 4. a rotating mechanism; 41. a rotating electric machine; 5. a collection mechanism; 51. a collection box; 52. a liquid discharge pipe; 53. a valve; 6. a glass carrier plate; 7. a wafer; 8. a cleaning mechanism; 81. the nozzle is rinsed.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by a worker of ordinary skill in the art without making any inventive effort, are intended to be within the scope of this utility model based on the embodiments of this utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the above terms in the present utility model can be understood in a specific case by a worker of ordinary skill in the art.

In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.

The encapsulation requires temporary bonding of the wafer to a glass carrier to support and protect the wafer before the wafer is subjected to the rewiring process. After the rewiring process has proceeded to a certain step, the glass carrier plate needs to be peeled from the wafer by a peeling process, wherein laser peeling is the most common peeling method. In the process of laser lift-off, in order to prevent contamination on the back surface of the glass carrier plate from affecting the laser projection effect, an operator is generally required to clean the glass carrier plate with a blade and alcohol, but the manual cleaning efficiency is low.

The utility model aims at the problem that the manual cleaning efficiency of the back surface of a glass carrier plate is lower in the process of temporarily bonding the glass carrier plate by laser stripping, so that a surface cleaner for the glass carrier plate and chip packaging equipment are provided.

Example 1

The element after the glass carrier 6 and the wafer 7 with the package structure are temporarily bonded together is set as a package unit, that is, FOP. In the embodiment of the utility model, the surface of the glass carrier 6 close to the wafer 7 is a front surface, and the surface of the glass carrier 6 away from the wafer 7 is a back surface. The wafer is bonded to the front surface of the glass carrier plate.

As shown in fig. 1, an embodiment of the present utility model provides a surface cleaner suitable for the back surface of a glass carrier plate, which comprises a frame, and a fixing mechanism 1, a spraying mechanism 2, a brushing mechanism 3 and a rotating mechanism 4 which are arranged on the frame.

Specifically, in the embodiment of the present utility model, the fixing mechanism 1 is used for fixing the packaging unit, and when the packaging unit is fixed on the fixing mechanism 1, the glass carrier plate faces upwards. The spraying mechanism 2 is used for spraying the cleaning solvent towards the back surface of the glass carrier plate 6.

Further, the brushing mechanism 3 is used for brushing the back surface of the glass carrier plate 6. The rotating mechanism 4 is provided with a rotating end, the rotating end is connected with the fixing mechanism 1, and the rotating mechanism 4 gives power to the fixing mechanism through the rotating end so as to drive the packaging unit to rotate relative to the spraying mechanism 2 and the brushing mechanism 3. The rotation mechanism 4 may be a rotation motor 41, and the rotation end may be an output shaft of the rotation motor 41.

In the embodiment of the utility model, when the surface cleaner is in a working state, the glass carrier plate 6 bonded with the wafer 7 with the packaging structure is firstly placed on the fixing mechanism 1, and the glass carrier plate 6 is firstly fixed by the fixing mechanism 1. The rotation mechanism 4 then transmits force to the glass carrier plate 6 through the fixing mechanism 1, so that the glass carrier plate 6 rotates relative to the brushing mechanism 3 and the spraying mechanism 2. Then, the glass carrier plate 6 is sprayed with the cleaning solvent through the spraying mechanism 2, and the brushing mechanism 3 is abutted against the surface of the glass carrier plate 6 to clean the glass carrier plate 6 in cooperation with the cleaning solvent. In this way, the glass carrier plate 6 can be efficiently cleaned by the linkage of the devices, thereby reducing the manual operation process.

Meanwhile, in the prior art, the glass carrier plate 6 with the wafer 7 is easy to fall off from the workbench due to manual operation, and stress concentration phenomenon caused by falling impact is introduced into the packaging structures corresponding to the wafer 7 and the wafer 7, so that mechanical instability of the glass carrier plate 6 caused by the stress concentration phenomenon is increased, and further warping unevenness of the glass carrier plate 6 is aggravated. By the automatic operation of the surface cleaner, the risk that the glass carrier plate falls to the ground caused by manual errors can be reduced, and the reject ratio of the chip packaging process is further reduced.

Further, in an alternative embodiment of the present utility model, as shown in fig. 2, the fixing mechanism 1 includes a suction disc member 11, an inner tube 12, an outer tube 13, and a vacuum pump. Specifically, suction grooves communicated with two ends of the suction disc 11 are formed in the suction disc 11, and the upper ends of the suction grooves are flared to form a bucket-shaped structure. The upper end of the suction groove is provided with a grid-shaped supporting plate for supporting the packaging unit.

In this embodiment, the inner tube 12 is communicated with the lower end of the suction groove and extends along the axial direction of the suction groove in a direction away from the suction disc, and the inner tube 12 is coaxially connected with the rotating end. That is, the axis of the inner tube 12 and the axis of the suction groove are both coincident with the axis of the output shaft of the rotary electric machine 41.

Further, the outer tube 13 is sleeved outside the inner tube 12 and is fixedly connected to the rotating motor body or the frame, so that the inner tube 12 and the outer tube 13 can rotate relatively. The connection position of the outer tube 13 and the inner tube 12 is in a rotary sealing state. The outer tube 13 is provided with an annular groove 131 in the circumferential direction of the connection position with the inner tube 12. The inner tube 12 is provided with a plurality of communication holes 121 in the circumferential direction, and the communication holes 121 are positioned at positions corresponding to the annular grooves 131 and communicate the annular grooves 131 with the inner cavity of the inner tube 12. Meanwhile, the outer tube 13 is connected with an exhaust tube 14 for communicating with the annular groove 131, and the exhaust tube 14, the annular groove 131 of the outer tube 13, the communication hole 121 of the inner tube 12, the inner cavity of the inner tube 12 and the suction groove form a vacuum-pumping channel. One end of the vacuum pump is connected with the vacuum channel through the connecting exhaust pipe so as to control the pressure in the opposite suction groove.

As shown in fig. 1, when the packaging unit needs to be fixed, the glass carrier plate 6 bonded with the wafer 7 with the packaging structure is placed on the suction cup member 11, and meanwhile, the glass carrier plate 6 and the wafer 7 are covered on the suction groove, and the suction groove is pumped into negative pressure by starting the vacuum pump, so that the packaging unit is stably fixed on the suction cup member. Meanwhile, after the rotary motor 41 is started, the output shaft of the rotary motor 41 transmits power to the suction disc member 11 through the inner tube 12 to drive the suction disc member 11 to rotate, so that the rotary driving of the packaging unit is realized.

Further, in an alternative embodiment of the present utility model, the spraying mechanism 2 includes a mechanical arm 21, a spray header 22, and a liquid supply device. Specifically, the spray header 22 is disposed at the front end of the mechanical arm 21, and a liquid supply device is in communication with the spray header 22 and is configured to supply a cleaning solvent to the spray header 22. In this embodiment, the mechanical arm 21 may be a six-degree-of-freedom mechanical arm, and a base of the six-degree-of-freedom mechanical arm is fixedly connected to the frame. In the actual working process, the position of the spray header 22 relative to the glass carrier plate 6 can be adjusted through the six-degree-of-freedom mechanical arm, so that the cleaning solvent can be sprayed onto the glass carrier plate 6 better. The cleaning solvent may be composed of alcohol, water, etc.

Further, in an alternative embodiment of the present utility model, the fluid supply device includes a fluid reservoir and a power pump. Specifically, a cleaning solvent is stored in a liquid reservoir that communicates with the showerhead 22. And, a power pump is connected with the liquid storage tank, and the power pump is used for pumping the cleaning solvent in the liquid storage tank to the spray header 22.

Further, in an alternative embodiment of the present utility model, the brushing mechanism 3 comprises a brush bar 31 and a brush head. The brush bar 31 is mounted on the frame. Specifically, the brush bar 31 is disposed on the upper side of the fixing mechanism 1 above the glass carrier plate 6. The brush head is arranged at one end of the brush rod 31 close to the glass carrier plate 6, and bristles on the brush head are required to be abutted on the glass carrier plate 6, so that the glass carrier plate 6 can be cleaned through the bristles.

Further, in an alternative embodiment of the present utility model, the brush head is provided with bristles extending radially along the glass carrier plate 6, and the length of the brush head extending radially along the glass carrier plate 6 is greater than the radius of the glass carrier plate 6. Thereby the cleaning range of the brush head can be completely covered with the glass carrier plate 6, and the cleaning efficiency of the brush head is improved.

Further, in an alternative embodiment of the present utility model, as shown in fig. 3, the brushing mechanism 3 further includes a first driving device, and the brush bar 31 is mounted on the frame through the first driving device. The first driving device is provided with a first driving end, and the first driving end is connected with the brush rod 31. The brush bar 31 has a state of moving in a vertical direction under the driving action of the first driving end. Specifically, the first driving device comprises a driving motor 35 and a screw guide rail connected with the driving motor 35, wherein a sliding block 33 is arranged on the screw guide rail, and the sliding block 33 is connected with the brush rod 31. The brush bar 31 has a state of moving in a vertical direction by the driving of the driving motor 35 and the screw guide. During the cleaning process, as shown in fig. 3, the relative rotation between the brush bar 31 and the glass carrier plate 6 is provided with displacement only by the rotation of the glass carrier plate 6, so that the relative rotation speed between the brush bar 31 and the glass carrier plate 6 can be conveniently controlled.

Further, the guide rail 32 on the lead screw guide rail is disposed in the vertical direction and fixedly connected to the frame. The side wall of the guide rail 32 is provided with a chute 321 along the vertical direction, and the sliding block 33 is slidably connected in the chute 321. The screw 34 in the screw guide is arranged in the vertical direction, and the screw 34 passes through the slider 33 and is screwed to the slider 33. Both ends of the screw 34 are rotatably connected to the guide rail 32 via bearings. The body of the driving motor 35 is mounted at the upper end of the guide rail 32, and an output shaft of the driving motor 35 is coaxial with the screw 34 and fixedly connected with the screw 34. In this way, the screw 34 can be driven to rotate relative to the guide rail 32 by the rotating motor 361, so as to drive the sliding block 33 to move along the vertical direction.

Further, in an alternative embodiment of the utility model, as shown in fig. 1, the brushing mechanism 3 further comprises a second drive means arranged on the first drive end. The second driving device is provided with a second driving end, and the second driving end is connected with the brush rod 31. The second driving device has a first state moving in a vertical direction under the driving action of the first driving end, and the brush bar 31 has a second state rotating relative to the glass carrier plate 6 under the driving action of the second driving end. Specifically, the second driving device is a rotating motor 361, and a body of the rotating motor is mounted on the slider. The output end of the rotating motor 361 is connected with the brush bar 31. The output end of the rotating motor 361 can also be connected with the brush rod 31 through a connecting rod 362. The connecting rod 362 is coaxially disposed with the output shaft of the rotating motor 361, and one end of the connecting rod 362 is fixedly connected to the output shaft of the driving motor 35, and the other end of the connecting rod 362 is fixedly connected to the brush bar 31 by a bolt.

Prior to cleaning, the slider 33 slides upwards so that the brush bar 31 is away from the suction disc 11, giving the glass carrier plate 6 sufficient space to place. After the glass carrier plate 6 is stably fixed on the suction disc 11, the brush hair on the brush rod 31 is moved downwards by the sliding block 33 to be abutted against the glass carrier plate 6, so that the glass carrier plate 6 is matched with the cleaning solvent to clean when the glass carrier plate 6 rotates.

Further, in an alternative embodiment of the present utility model, the surface cleaning apparatus further comprises a collecting mechanism 5, and the collecting mechanism 5 specifically comprises a collecting tank 51, and the collecting tank 51 is located below the fixing mechanism 1, the spraying mechanism 2 and the brushing mechanism 3, so that projections of the fixing mechanism 1, the spraying mechanism 2 and the brushing mechanism 3 along a vertical direction are located in the collecting tank 51. Specifically, the lower end of the collection tank 51 is provided with a drain pipe 52 and a valve 53 mounted on the drain pipe 52.

By arranging the collecting box 51, the cleaning solvent sprayed from the spraying mechanism 2, the water sprayed from the spraying mechanism 2 and the cleaning solvent flowing down from the glass carrier plate 6 are all recovered in the collecting box 51 during operation, so that the neatness of a working area is ensured. When the water and the cleaning solvent in the collection tank need to be recovered, the valve 53 is opened, and the water and the cleaning solvent in the collection tank 51 may be discharged to the subsequent wastewater treatment system through the drain pipe 52.

Further, in an alternative embodiment of the present utility model, the surface cleaner further comprises a cleaning mechanism 8, the cleaning mechanism 8 is disposed on the frame, and the cleaning mechanism 8 is configured to spray the cleaning solution to an edge of the wafer 7 facing away from the glass carrier plate 6. Specifically, the cleaning mechanism 8 may include a rinse nozzle 81 and a water supply device for supplying water to the rinse nozzle 81. The rinse nozzle 81 is fixedly mounted in the collection tank 51. The liquid outlet of the rinsing nozzle 81 is directed towards the edge of the wafer 7 facing away from the side of the glass carrier plate 6. The water supply device can be any water source such as a water tank, a tap and the like.

The present utility model can reduce the probability of cleaning solvent flowing onto the wafer 7 along the outer edge of the glass carrier plate 6 and remaining by providing the cleaning mechanism 8. Specifically, during the rotation of the glass carrier plate 6, the wafer 7 can be directly rinsed by the cleaning mechanism 8, so as to avoid the residual cleaning solvent on the wafer 7.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the various aspects of the utility model will be apparent to persons of ordinary skill in the art upon reading the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.

Claims (9)

1. A surface cleaner for a glass carrier plate, comprising:

a frame;

the fixing mechanism is arranged on the rack; the fixing mechanism is used for fixing the glass carrier plate and bonding the wafer on the front surface of the glass carrier plate;

the spraying mechanism is arranged on the frame; the spraying mechanism is used for spraying the cleaning solvent towards the back of the glass carrier plate;

the brushing mechanism is arranged on the rack; the brushing mechanism is used for brushing the back surface of the glass carrier plate;

the rotating mechanism is arranged on the frame; the rotating mechanism is provided with a rotating end which is connected with the fixing mechanism; the rotating mechanism drives the fixing mechanism through the rotating end, so that the glass carrier plate and the wafer which are temporarily bonded together in the fixing mechanism simultaneously rotate relative to the spraying mechanism and the brushing mechanism.

2. The surface cleaner of claim 1, wherein the securing mechanism includes:

the suction disc piece is provided with a suction groove communicated with the upper end and the lower end of the suction disc piece, so that the glass carrier plate and the wafer are covered on the suction groove;

the inner pipe is communicated with the lower end of the suction groove and extends in a direction away from the suction disc piece; the inner tube is connected with the rotating end;

the outer tube is sleeved outside the inner tube, and the connection position of the outer tube and the inner tube is in a rotary sealing state; the outer tube is fixedly connected with the frame;

and the vacuum pump is sequentially communicated with the outer pipe, the inner pipe and the suction groove through the exhaust pipe to form a vacuumizing channel.

3. The surface cleaner of claim 1 or 2, wherein the spray mechanism comprises:

a mechanical arm;

the spray header is arranged at the front end of the mechanical arm;

the liquid supply device is communicated with the spray header; the liquid supply device is used for providing cleaning solvent for the spray header.

4. The surface cleaner of claim 1 or 2, wherein the brushing mechanism comprises:

the brush rod is arranged on one side of the fixing mechanism and is positioned above the glass carrier plate;

the brush head is arranged at one end of the brush rod, which is close to the glass carrier plate; the brush head is provided with brush hair which is arranged along the radial direction of the glass carrier plate.

5. The surface cleaner of claim 4, wherein the brushing mechanism further comprises:

the first driving device is provided with a first driving end, and the first driving end is connected with the brush rod; under the driving action of the first driving end, the brush rod is in a state of moving along the vertical direction.

6. The surface cleaning apparatus of claim 5, wherein the first drive means comprises a drive motor and a lead screw guide rail connected to the drive motor, the lead screw guide rail having a slider disposed thereon, the slider being connected to the brush bar; under the driving action of the driving motor and the lead screw guide rail, the brush rod is in a state of moving along the vertical direction.

7. The surface cleaner of claim 5 or 6, wherein the brushing mechanism further comprises:

a second drive device disposed on the first drive end; the second driving device is provided with a second driving end which is connected with the brush rod;

under the driving action of the first driving end, the second driving device is in a first state of moving along the vertical direction, and under the driving action of the second driving end, the brush rod is in a second state of rotating relative to the glass carrier plate.

8. The surface cleaner of claim 5 or 6, further comprising:

the collecting box is positioned below the fixing mechanism, the spraying mechanism and the brushing mechanism, so that the projections of the fixing mechanism, the spraying mechanism and the brushing mechanism along the vertical direction are all positioned in the collecting box.

9. The surface cleaner of claim 1 or 2, further comprising:

the cleaning mechanism is arranged on the frame and is used for spraying cleaning liquid towards the edge of one side of the wafer, which is away from the glass carrier plate.