CN219457528U - High-resolution scanning electron microscope auxiliary device - Google Patents

Abstract

The utility model relates to the technical field of scanning electron microscope, in particular to a high-resolution scanning electron microscope auxiliary device, which has the innovation points that: the intelligent illuminating lamp is fixedly arranged, so that accurate adjustment of different positions and different heights of illumination is realized, the optimal illumination angle is further searched for automatically detecting products, and scanned images are further made clearer.

Description

High-resolution scanning electron microscope auxiliary device

Technical Field

The utility model relates to the technical field of scanning electron microscope, in particular to a high-resolution scanning electron microscope auxiliary device.

Background

Scanning electron microscopes produce an image of the surface of a sample by scanning the surface of the sample with a focused electron beam. The system consists of an electron optical system, a signal collecting and displaying system, a vacuum system and a power supply system, and is applied to the fields of biology, medicine, materials, chemistry and the like.

Among the current high resolution scanning electron microscope's the technique, most all directly put above, inside illumination is fixed moreover, and then can't realize the regulation to different angles and different positions, can't be to the collection of different faces when gathering the image moreover, and then the image sampling effect is relatively poor, the disclosure number: in the patent of CN207233695U, can satisfy the material of depositing different detections, but can't realize the accurate regulation to different angles and different position illumination, and then the definition of image is lower.

Disclosure of Invention

The object of the present utility model is to provide a high resolution scanning electron microscope auxiliary device for overcoming the above-mentioned drawbacks of the prior art.

The utility model relates to a high-resolution scanning electron microscope auxiliary device, which comprises a main box body, wherein a guide frame is fixedly arranged on the upper end face of the main box body, a protective cover is fixedly arranged on the upper end face of the guide frame, a guide cavity is arranged in the guide frame, a limit frame is fixedly arranged on the upper end face of the main box body, the limit frame is annular, a meshing gear is rotatably arranged on the inner circular face of the guide frame, the meshing gear is meshed with the inner circular face of the guide frame, a rotating shaft is fixedly arranged on the inner circular face of the meshing gear, a guide bearing is fixedly arranged on the outer circular face of the rotating shaft, the outer circular face of the guide bearing is in running fit with the limit frame, a rotating frame is fixedly arranged on the upper end face of the rotating frame, a spiral shaft is rotatably arranged in the upper end face of the rotating frame, a pneumatic lifting rod capable of stretching is fixedly arranged on the outer circular face of the spiral shaft, an illumination frame is fixedly arranged on the other end face of the pneumatic lifting rod, and an intelligent illuminating lamp is fixedly arranged on the lower end face of the illumination frame.

Preferably, four groups of sliding shafts which are uniformly distributed are rotationally arranged in the left end face of the main box body, and sliding blocks capable of moving left and right are arranged on the outer circular face of each sliding shaft.

Preferably, the lower end surface of the sliding slide block is fixedly provided with a fixed frame, and the right end surface of the fixed frame is provided with a fixed spring capable of stretching and contracting.

Preferably, the other end face of the fixed spring is fixedly provided with a flexible clamping frame.

Preferably, the upper end surface of the main box body is rotationally provided with lifting shafts which are bilaterally symmetrical and uniformly distributed, and the outer circular surface of the lifting shaft is provided with lifting sliding blocks capable of moving up and down.

Preferably, a power shaft is rotationally arranged on the right end face of the lifting sliding block, an electromagnet is fixedly arranged on the outer circular face of the power shaft, and a magnetic telescopic rod capable of performing telescopic motion is arranged on the right end face of the electromagnet.

Preferably, a permanent magnet is fixedly arranged on the other end face of the magnetic telescopic rod, the permanent magnet is magnetically matched with the electromagnet, and a foam frame is fixedly arranged on the right end face of the permanent magnet.

Compared with the prior art, the utility model has the advantages that:

1. according to the utility model, the pneumatic lifting rod capable of telescopic movement is fixedly arranged on the outer circular surface of the spiral shaft, the illumination rack is fixedly arranged at the other end of the pneumatic lifting rod, and the intelligent illuminating lamp is fixedly arranged on the lower end surface of the illumination rack, so that the accurate adjustment of different positions and different heights of illumination is realized, the optimal illumination angle is further automatically searched for a detected product, the scanned image is further clearer, the working efficiency and the working quality of the scanning electron microscope are further improved, and the optimal definition of the image is further ensured.

2. According to the utility model, the fixed frame is fixedly arranged on the lower end face of the sliding block, the fixed spring capable of stretching and contracting is arranged on the right end face of the fixed frame, and the other end face of the fixed spring is fixedly provided with the flexible clamping frame, so that the flexible clamping frame is accurately fixed according to sample platforms of different sizes and different types in the sample chamber, so that the sample platforms suitable for different shapes are realized, the sample platforms are further used as auxiliary devices to be convenient to detach and mount, further complicated mounting steps are simplified, a rotating power shaft is arranged in the sample platforms, and a plurality of angles and different positions of materials are detected, so that the detection result is more accurate and stable.

Drawings

FIG. 1 is a side view of the present utility model;

FIG. 2 is a side view of the present utility model;

FIG. 3 is a lower view of the present utility model;

FIG. 4 is a schematic diagram of the whole structure of a high resolution scanning electron microscope auxiliary device according to the present utility model;

FIG. 5 is a schematic view of the exterior of the intelligent lighting lamp assembly of FIG. 4, according to the present utility model;

FIG. 6 is a schematic view of the appearance of the present utility model at the rotating member of FIG. 4;

FIG. 7 is a schematic view of the present utility model at the sliding block component of FIG. 4;

fig. 8 is a schematic view of the present utility model at the lifting slider member of fig. 2.

In the figure:

11. a main case; 12. a guide frame; 13. a protective cover; 14. a guide chamber; 15. a limit frame; 16. a rotating shaft; 17. a meshing gear; 18. a guide bearing; 19. rotating the frame; 20. a screw shaft; 21. a pneumatic lifting rod; 22. an illumination frame; 23. an intelligent lighting lamp; 24. a sliding shaft; 25. a sliding block; 26. a fixed frame; 27. a fixed spring; 28. a clamping frame; 29. a lifting shaft; 30. a lifting slide block; 31. a power shaft; 32. an electromagnet; 33. a magnetic telescopic rod; 34. a permanent magnet; 35. a foam frame.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are exemplary and intended to explain the present utility model and should not be construed as limiting the present utility model

Limitation of the type.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

Example 1

Referring to fig. 1-8, in a first embodiment of the present utility model, an embodiment of a high resolution scanning electron microscope auxiliary device is provided, which includes a main case 11, a guide frame 12 is fixedly disposed on an upper end surface of the main case 11, a protection cover 13 is fixedly disposed on an upper end surface of the guide frame 12, a guide cavity 14 is disposed in the guide frame 12, a limit frame 15 is fixedly disposed on an upper end surface of the main case 11, the limit frame 15 is annular, an engaged gear 17 is rotatably disposed on an inner circular surface of the guide frame 12, the engaged gear 17 is engaged with an inner circular surface of the guide frame 12, a rotation shaft 16 is fixedly disposed on an inner circular surface of the engaged gear 17, a guide bearing 18 is fixedly disposed on an outer circular surface of the rotation shaft 16, the outer circular surface of the guide bearing 18 is in rotation fit with the limit frame 15, a rotation frame 19 is fixedly disposed on an upper end surface of the rotation frame 16, a spiral shaft 20 is rotatably disposed on an outer circular surface of the rotation frame 19, a pneumatic lifting rod 21 capable of moving in a telescopic manner is fixedly disposed on an other end surface of the pneumatic lifting rod 21, and an illumination frame 22 is fixedly disposed on an illumination frame 22 below the illumination frame 23.

The rotation is started through the rotation shaft 16, and then the meshing gear 17 is driven to start rotating, and then the meshing gear 17 and the inner circular surface of the guide frame 12 are driven to rotate, and then the rotating frame 19 is driven to start annular movement, and then the intelligent illuminating lamp 23 is driven to move annularly, and further different positions for adjusting illumination are realized, the best illumination angle is further searched for in the automatic detection of products, the scanned image is further clear, the working efficiency and the working quality of the scanning electron microscope are further improved, the pneumatic lifting rod 21 which moves up and down is arranged in the scanning electron microscope, and then accurate control of illumination at any height is realized, and further the definition is greatly improved.

Example two

Referring to fig. 1-8, in a second embodiment of the present utility model, based on the previous embodiment, specifically, four groups of sliding shafts 24 are uniformly distributed in the left end face of the main case 11 in a rotating manner, a sliding block 25 capable of moving left and right is disposed on an outer circumferential surface of the sliding shaft 24, a fixed frame 26 is fixedly disposed on a lower end face of the sliding block 25, a fixed spring 27 capable of moving in a telescopic manner is disposed on a right end face of the fixed frame 26, and a flexible clamping frame 28 is fixedly disposed on another end face of the fixed spring 27.

At this time, the sliding shaft 24 starts to rotate, and then drives the uniformly distributed sliding blocks 25 to start to move left and right, and then sample platforms of different sizes and different models in the sample chamber are accurately fixed, so that sample platforms applicable to different shapes are realized, and further the auxiliary device is convenient to detach and install, and further complicated installation steps are simplified.

Example III

Referring to fig. 1-8, in a third embodiment of the present utility model, the upper end surface of the main case 11 is provided with a lifting shaft 29 that is symmetrically and uniformly distributed in a rotating manner, an outer circumferential surface of the lifting shaft 29 is provided with a lifting slider 30 that can move up and down, a right end surface of the lifting slider 30 is provided with a power shaft 31 in a rotating manner, an outer circumferential surface of the power shaft 31 is fixedly provided with an electromagnet 32, a right end surface of the electromagnet 32 is provided with a magnetic telescopic rod 33 that can move in a telescopic manner, the other end surface of the magnetic telescopic rod 33 is fixedly provided with a permanent magnet 34, the permanent magnet 34 is magnetically matched with the electromagnet 32, and a foam frame 35 is fixedly provided on the right end surface of the permanent magnet 34.

The material to be detected is placed at the designated position of the main box 11, at this time, the electromagnet 32 is magnetically matched with the foam frame 35, so that accurate clamping of materials in various shapes is realized, meanwhile, the lifting shaft 29 starts to rotate, the lifting sliding block 30 is driven to move upwards, the detected material is driven to move upwards, at this time, the power shaft 31 starts to rotate, multiple groups of angles and different positions of the material are detected, and the detection result is more accurate and stable.

The above embodiments are merely illustrative embodiments of the present utility model, but the technical features of the present utility model are not limited thereto, and any changes or modifications made by those skilled in the art within the scope of the present utility model are included in the scope of the present utility model.

Claims (8)

1. The utility model provides a high resolution scanning electron microscope auxiliary device, includes main tank body (11), its characterized in that: the novel multifunctional combined type automatic protection device is characterized in that a guide frame (12) is fixedly arranged on the upper end face of a main box body (11), a protection cover (13) is fixedly arranged on the upper end face of the guide frame (12), a guide cavity (14) is arranged in the guide frame (12), a limit frame (15) is fixedly arranged on the upper end face of the main box body (11), a meshing gear (17) is rotatably arranged on the inner circular face of the guide frame (12), the meshing gear (17) is meshed with the inner circular face of the guide frame (12), a rotating shaft (16) is fixedly arranged on the inner circular face of the meshing gear (17), and a guide bearing (18) is fixedly arranged on the outer circular face of the rotating shaft (16);

the utility model discloses a light illumination device, including spacing frame (15), rotation frame (19), screw shaft (20), pneumatic lifter (21) that can telescopic movement, pneumatic lifter (21) other end is fixed and is equipped with illumination frame (22), illumination frame (22) lower terminal surface is fixed and is equipped with intelligent light (23) in rotation frame (19) up end internal rotation, screw shaft (20) outer disc is fixed.

2. The high resolution scanning electron microscope auxiliary device according to claim 1, wherein: four groups of sliding shafts (24) which are uniformly distributed are rotationally arranged in the left end face of the main box body (11), and sliding blocks (25) capable of moving left and right are arranged on the outer circular face of each sliding shaft (24).

3. The high resolution scanning electron microscope auxiliary device according to claim 2, wherein: the lower end face of the sliding slide block (25) is fixedly provided with a fixed frame (26).

4. A high resolution scanning electron microscope auxiliary device according to claim 3, wherein: the right end face of the fixed frame (26) is provided with a fixed spring (27) capable of moving in a telescopic mode, and the other end face of the fixed spring (27) is fixedly provided with a flexible clamping frame (28).

5. The high resolution scanning electron microscope auxiliary device according to claim 1, wherein: the lifting box is characterized in that lifting shafts (29) which are bilaterally symmetrical and uniformly distributed are rotationally arranged on the upper end face of the main box body (11), and lifting sliding blocks (30) capable of moving up and down are arranged on the outer circular surface of the lifting shafts (29).

6. The high resolution scanning electron microscope auxiliary device according to claim 5, wherein: the right end face of the lifting sliding block (30) is rotatably provided with a power shaft (31), and an electromagnet (32) is fixedly arranged on the outer circular surface of the power shaft (31).

7. The high resolution scanning electron microscope auxiliary device according to claim 6, wherein: the right end face of the electromagnet (32) is provided with a magnetic telescopic rod (33) capable of telescopic movement, and the other end face of the magnetic telescopic rod (33) is fixedly provided with a permanent magnet (34).

8. The high resolution scanning electron microscope auxiliary device according to claim 7, wherein: the permanent magnet (34) is magnetically matched with the electromagnet (32), and a foam frame (35) is fixedly arranged on the right end face of the permanent magnet (34).