CN219403886U

CN219403886U - Metal target grinds adds clamping apparatus

Info

Publication number: CN219403886U
Application number: CN202320672219.0U
Authority: CN
Inventors: 姚力军; 潘杰; 沈学峰; 廖培君; 陈石
Original assignee: Ningbo Jiangfeng Electronic Material Co Ltd
Current assignee: Ningbo Jiangfeng Electronic Material Co Ltd
Priority date: 2023-03-30
Filing date: 2023-03-30
Publication date: 2023-07-25
Anticipated expiration: 2033-03-30

Abstract

The utility model relates to the technical field of target machining and discloses a metal target grinding clamp. The metal target grinding clamp comprises a base and at least two clamping assemblies, wherein a supporting table is arranged on the base and can be accommodated in a groove and is abutted against the bottom of the groove, the two clamping assemblies are arranged on the base at intervals, each clamping assembly comprises a clamping plate, and the clamping plates can be abutted against the upper end face of the back plate. The metal target grinding clamp has good supporting and fixing effects on the backboard, and can effectively avoid backboard deformation, so that the flatness of the processed target is good.

Description

Metal target grinds adds clamping apparatus

Technical Field

The utility model relates to the technical field of target machining, in particular to a metal target grinding clamp.

Background

The metal tungsten target (W target) is mainly used in a high-power sputtering process, high-speed particles bombard the target surface in the sputtering process, and the surface temperature of the target can be rapidly increased, so that copper alloy with better heat conductivity is mostly used as a back plate material, and the welding mode also needs diffusion welding with high welding combination rate, high welding strength and better high-temperature stability. Most of common W targets are round targets, mainly have 2 structures, the problem of abnormal flatness can appear on the W targets with groove structures, and the problem does not exist on the W targets with the plane structures.

Because the diffusion welding type target is adopted, the target is deformed necessarily due to the fact that the difference of thermal expansion coefficients of the target blank and the back plate material is large after welding, and the formed welding internal stress is broken along with the thickness reduction of the back plate and the target blank in the size processing process of the target, so that the problem of dynamic deformation of the target in the processing process can be caused. The W target is hard and brittle in material and poor in processing performance, and a grinding machine is adopted to remove redundant allowance at present; the copper backboard is only required to be turned. The processing of the groove of the backboard becomes a difficult point, if the groove is prefabricated before grinding, the product is subjected to larger pressure due to the grinding, the W target is hard and brittle, and the hollow under the backboard is easy to cause target blank cracking. If the groove processing is arranged after the grinding, the surface of the target blank is finished, and the groove processing process can cause the deformation of the surface of the target blank, so that the final flatness exceeds the specification requirement of the product.

Therefore, a metal target grinding jig is needed to solve the above problems.

Disclosure of Invention

Based on the above, the utility model aims to provide the metal target grinding clamp which has good supporting and fixing effects on the backboard, can effectively avoid the backboard from deforming, and ensures that the flatness of the processed target is better.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a metal target grinds adds clamping apparatus, is applicable to the backplate of lower terminal surface area recess, the up end of backplate is provided with the target groove, and the target is fixed in the target groove, metal target grinds adds clamping apparatus includes:

the base is provided with a supporting table which can be accommodated in the groove and is abutted with the bottom of the groove;

the clamping assemblies are arranged on the base at intervals and comprise clamping plates, and the clamping plates can be propped against the upper end face of the backboard.

As the preferable scheme of the metal target grinding clamp, the position of the clamping plate along the thickness direction of the supporting table is adjustable.

As the preferred scheme of metal target grinds adds clamping apparatus, the centre gripping subassembly still includes branch, branch sets up on the base, and follow the thickness direction extension setting of brace table, splint follow the length direction position adjustable of branch connect in branch.

As a preferable mode of the metal target grinding clamp, the support rod is abutted against the outer periphery of the back plate.

As the preferable scheme of metal target grinds adds clamping apparatus, be provided with the external screw thread on the branch, offered the screw hole on the splint, the screw hole with external screw thread cooperation.

As the preferable scheme of the metal target grinding clamp, in the thickness direction of the supporting table, the height of the top end of the supporting rod is lower than that of the upper end face of the target.

As a preferable scheme of the metal target grinding clamp, the peripheral wall of the supporting table is arranged with a groove wall gap of the groove.

As the preferable scheme of the metal target grinding clamp, the lower end surface of the backboard is arranged with the base in a clearance way.

As a preferable scheme of the metal target grinding clamp, a first buffer layer is arranged on one surface of the supporting table, which is abutted against the bottom of the groove.

As the preferable scheme of the metal target grinding clamp, a second buffer layer is arranged on one surface of the clamping plate, which is abutted against the back plate.

The beneficial effects of the utility model are as follows:

the utility model provides a metal target grinding clamp which comprises a base and at least two clamping assemblies, wherein a groove of a back plate is aligned to a supporting table on the base to be placed, so that the supporting table has a supporting effect on the groove part of the back plate, and deformation caused by the fact that the groove part is too thin and has no support is avoided; and the backboard is clamped through at least two clamping plates, so that the backboard is fixed in position, and grinding failure caused by movement of the backboard when grinding the target material is avoided. By adopting the metal target grinding clamp, the flatness of the processed target is better.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.

FIG. 1 is a schematic diagram of an assembly structure of a backing plate and a target provided by an embodiment of the present utility model;

FIG. 2 is a schematic structural view of a metal target grinding fixture according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a metal target grinding clamp for clamping a backing plate according to an embodiment of the present utility model;

fig. 4 is a cross-sectional view of a metal target grinding clamp clamping back plate provided by an embodiment of the utility model.

In the figure:

1. a back plate; 10. a groove;

2. a target material;

3. a base;

4. a support table;

5. a clamping assembly; 51. a clamping plate; 52. a supporting rod.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1 to 4, the present embodiment provides a metal target grinding jig which is suitable for a back plate 1 having a groove 10 in the lower end surface, the upper end surface of the back plate 1 being provided with a target groove in which a target 2 is fixed. Illustratively, the target 2 is a metal tungsten target and is circular, the back plate 1 is a copper back plate 1, a circular groove 10 is formed in the upper end surface of the back plate 1, and the target 2 is placed in the circular groove 10 and welded and fixed. Of course, in other embodiments, the materials, shapes, etc. of the target 2 and the backing plate 1 are set according to actual requirements.

Specifically, the metal target grinding clamp comprises a base 3 and at least two clamping assemblies 5, wherein a supporting table 4 is arranged on the base 3, the supporting table 4 can be accommodated in a groove 10 and is abutted to the bottom of the groove 10, the two clamping assemblies 5 are arranged on the base 3 at intervals, the clamping assemblies 5 comprise clamping plates 51, and the clamping plates 51 can be abutted to the upper end face of the backboard 1. The groove 10 of the backboard 1 is aligned with the supporting table 4 on the base 3, so that the supporting table 4 has a supporting effect on the groove 10 part of the backboard 1, and deformation caused by the fact that the groove 10 part is too thin and unsupported is avoided; and clamping the backboard 1 through at least two clamping plates 51, so that the backboard 1 is fixed in position, and grinding failure caused by movement of the backboard 1 when grinding the target 2 is avoided. By adopting the metal target grinding clamp, the flatness of the target material 2 after being processed is better.

Preferably, a first buffer layer is arranged on one surface of the supporting table 4, which is abutted against the bottom of the groove 10, so that the supporting table 4 is in flexible contact with the backboard 1, and abrasion of the supporting table 4 on the backboard 1 is avoided, and the product quality is prevented from being influenced. The first buffer layer is optionally, but not limited to, flexible adhesive tape, rubber pad, etc.

Illustratively, two clamping assemblies 5 are provided, and the two clamping assemblies 5 are relatively arranged at two sides of the supporting table 4, so that when the clamping plate clamps and fixes the backboard 1, the backboard 1 is stressed uniformly, and inclination and the like are not easy to occur in the grinding process. Of course, in other embodiments, the clamping assembly 5 may be provided with three or four or the like, specifically according to actual requirements.

Alternatively, the base 3 and the clamping assembly 5 are made of 304 stainless steel materials, grinding fluid is used in grinding machine machining, and the stainless steel base 3 and the clamping assembly 5 can effectively prevent the metal target grinding clamp from rusting. Of course, in other embodiments, the materials of the base 3 and the clamping assembly 5 may be other, and may have a rust-proof function. Preferably, the base 3 has magnetism and is fixed on the grinding machine platform through magnetic force, so that the fixing device and manpower are saved.

Preferably, the peripheral wall of the supporting table 4 is arranged in a gap between the peripheral wall of the supporting table and the groove wall of the groove 10, when the target 2 and the backboard 1 are stressed during grinding, the backboard 1 can slightly move back and forth, the gap between the peripheral wall of the supporting table 4 and the groove wall of the groove 10 provides a moving space for the backboard 1, the backboard 1 is prevented from being deformed due to collision friction between the backboard 1 and the supporting table 4, and the product processing precision is improved.

As shown in fig. 3 and 4, in order to ensure that the support stand 4 is in close contact with the bottom of the groove 10, the lower end surface of the back plate 1 is disposed in a gap with the base 3, i.e., the height of the support stand 4 is greater than the depth of the groove 10, so that the support stand 4 is always in close contact with the bottom of the groove 10 to provide a stable supporting force to the back plate 1.

Further, as shown in fig. 2 to 4, the clamping assembly 5 further includes a strut 52, the strut 52 is disposed on the base 3 and extends along the thickness direction of the support table 4, and the clamping plate 51 is connected to the strut 52 in a position adjustable along the length direction of the strut 52. By adjusting the position of the clamping plate 51 on the supporting rod 52, the backboard 1 can be loosened and clamped, and the backboard 1 is suitable for backboard 1 with different thickness, and the use flexibility is high. Of course, in other embodiments, the adjustment of the position of the clamping plate 51 in the thickness direction of the support table 4 may be achieved by other structures, for example, the clamping assembly 5 further includes a driving member provided on the base 3 and driving the connecting clamping plate 51 to drive the clamping plate 51 to move in the thickness direction of the support table 4.

Illustratively, the strut 52 is a threaded rod, i.e. the outer periphery of the strut 52 is provided with external threads, and the clamping plate 51 is provided with threaded holes which are in threaded engagement with the external threads. The height adjustment of the clamping plate 51 on the support rod 52 is achieved by screwing the clamping plate 51. Of course, in other embodiments, the strut 52 may be provided with a slide hole along the length direction, and the clamping plate 51 may be fixed to the slide hole.

Preferably, the height of the tip of the rod 52 is lower than the height of the upper end face of the target 2 in the thickness direction of the support table 4. The bar 52 is prevented from interfering with the grinding tool during the grinding process.

Preferably, the supporting rod 52 is abutted with the periphery of the backboard 1, namely, the supporting rod 52 provides a limiting effect for the backboard 1, so that the influence on machining precision and quality caused by excessive forward and backward movement of the backboard 1 during grinding is avoided.

More preferably, the contact parts of the clamping plate 51 and the supporting rod 52 with the backboard 1 are provided with a second buffer layer, so that the contact between the clamping plate 51 and the supporting rod 52 and the backboard 1 is soft contact, and the backboard 1 is prevented from being worn by the clamping assembly 5. The second cushioning layer is optionally but not limited to soft adhesive tape, rubber pad, etc.

The metal target grinding clamp provided by the embodiment enables the flatness of the processed target material 2 to be controlled within 0.1mm (taking a W target with the size of 400-500mm as an example).

Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.

Claims

1. The utility model provides a metal target grinds adds clamping apparatus, is applicable to backplate (1) of lower terminal surface area recess (10), the up end of backplate (1) is provided with the target groove, and target (2) are fixed in the target groove, its characterized in that, metal target grinds adds clamping apparatus includes:

the base (3), the base (3) is provided with a supporting table (4), and the supporting table (4) can be accommodated in the groove (10) and is abutted with the bottom of the groove (10);

the clamping assemblies (5) are arranged on the base (3) at intervals, the clamping assemblies (5) comprise clamping plates (51), and the clamping plates (51) can be pressed against the upper end face of the backboard (1).

2. Metal target grinding clamp according to claim 1, characterized in that the clamping plate (51) is position-adjustable in the thickness direction of the support table (4).

3. The metal target grinding fixture according to claim 2, wherein the clamping assembly (5) further comprises a supporting rod (52), the supporting rod (52) is arranged on the base (3) and extends along the thickness direction of the supporting table (4), and the clamping plate (51) is connected to the supporting rod (52) in a position-adjustable manner along the length direction of the supporting rod (52).

4. A metal target grinding jig according to claim 3, wherein the struts (52) abut against the outer periphery of the backing plate (1).

5. A metal target grinding clamp according to claim 3, characterized in that the support rod (52) is provided with external threads, the clamping plate (51) is provided with threaded holes, and the threaded holes are in threaded fit with the external threads.

6. A metal target grinding jig according to claim 3, wherein the height of the tip of the strut (52) is lower than the height of the upper end face of the target (2) in the thickness direction of the support table (4).

7. Metal target grinding jig according to any one of claims 1-6, characterized in that the peripheral wall of the support table (4) is arranged in a gap with the groove wall of the groove (10).

8. A metal target grinding jig according to any one of claims 1 to 6, wherein the lower end surface of the back plate (1) is disposed in a gap with the base (3).

9. The metal target grinding fixture according to any one of claims 1-6, wherein a first buffer layer is provided on a surface of the support table (4) abutting against a bottom of the groove (10).

10. Metal target grinding fixture according to any of claims 1-6, characterized in that the side of the clamping plate (51) against the backing plate (1) is provided with a second buffer layer.