CN219390258U - Cooling device of vacuum coating machine - Google Patents
Cooling device of vacuum coating machine Download PDFInfo
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- CN219390258U CN219390258U CN202320854033.7U CN202320854033U CN219390258U CN 219390258 U CN219390258 U CN 219390258U CN 202320854033 U CN202320854033 U CN 202320854033U CN 219390258 U CN219390258 U CN 219390258U
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- cooling
- vacuum coating
- coating machine
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The utility model discloses a cooling device of a vacuum coating machine, which comprises a shell, wherein a water tank is bolted to the left side of the bottom of the shell, a vacuum coating machine cavity is arranged in the inner cavity of the shell, a circulating water cooling mechanism is arranged in the inner cavity of the shell, cooling water is added into the water tank through the cooperation of a water pump, a cooling pipe and a water pipe, the heat of the vacuum coating machine cavity is absorbed, the vacuum coating machine cavity is cooled, the water pipe is cooled by the cooling liquid, the temperature of the cooling water in the water pipe is reduced, a part of cold air is blown to the vacuum coating machine cavity through the cooperation of an air cooler, a three-way pipe, a gas pipe, a first communicating frame and a second communicating frame, the cooling effect of the vacuum coating machine cavity is improved, the other part of cold air is blown to the water pipe and the cooling liquid, the cooling liquid and the water pipe are cooled, and the cooling effect of the cooling water on the vacuum coating machine cavity is further improved.
Description
Technical Field
The utility model relates to the technical field of vacuum coating machines, in particular to a cooling device of a vacuum coating machine.
Background
The vacuum coating machine mainly refers to a type of coating film which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like. The main idea is to divide into two types, evaporation and sputtering.
Through searching, application number CN201920443060.9 discloses a vacuum coating machine cooling device, lets the cooling water form the circulation in the aqueduct and carries out the water-cooling heat dissipation, and the air exhauster lets the inside air of outer casing flow and carries out the forced air cooling heat dissipation simultaneously to fine improvement vacuum coating machine's cooling effect, increased its life.
The device still has the following disadvantages: although the cooling water can radiate heat from the vacuum coating machine cavity of the vacuum coating machine, the cooling water cannot radiate heat rapidly and can be reused along with the circulation of the water, so that the cooling effect is poor and the cooling of the vacuum coating machine is affected.
Disclosure of Invention
The utility model aims to provide a cooling device of a vacuum coating machine, which is characterized in that cooling water is added into a water tank to absorb heat of a cavity of the vacuum coating machine, the cavity of the vacuum coating machine is cooled, the water pipe is cooled by the cooling liquid, the temperature of the cooling water in the water pipe is reduced, part of cold air is blown to the cavity of the vacuum coating machine, the cooling effect of the cavity of the vacuum coating machine is improved, the other part of cold air is blown to the water pipe and the cooling liquid, and the cooling liquid and the water pipe are cooled, so that the cooling effect of the cooling water on the cavity of the vacuum coating machine is improved, and the problems in the background art are solved.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a cooling device of vacuum coating machine, includes the shell, the left side bolt of shell bottom has the water tank, vacuum coating machine cavity is installed to the inner chamber of shell, the inner chamber of shell is provided with circulating water cooling mechanism, the right side of shell inner chamber is provided with jet assembly, the top and the bottom of water tank inner chamber all bolt have the baffle, the left side of water tank has first water pipe and first drain pipe from last to communicating in proper order down, the right side bolt of shell bottom has the base case, the right side of base case has second water pipe and second drain pipe from last to communicating in proper order down, the inner chamber of base case adds the coolant liquid.
Preferably, the circulating water cooling mechanism comprises a water pump, a cooling pipe and a water delivery pipe, the left side bolt of water tank inner chamber bottom has the water pump, the water inlet intercommunication of water pump has the inlet tube, and the right-hand member of inlet tube runs through to the right side of baffle, the delivery port intercommunication of water pump has the outlet pipe, and the one end intercommunication that the water pump was kept away from to the outlet pipe has the cooling pipe, the one end that the inlet tube was kept away from to the cooling pipe runs through the water tank and communicates there is the water delivery pipe, the one end that the cooling pipe was kept away from to the water delivery pipe runs through the base box and communicates with the right side of water tank, the surface at the vacuum coating machine cavity is installed to the cooling pipe.
Preferably, the jet module includes air-cooler, three-way pipe, gas-supply pipe, first intercommunication frame and second intercommunication frame, the right side bolt of shell has the fixed station, the left side bolt at fixed station top has the air-cooler, the air intake intercommunication of air-cooler has the intake pipe, the air outlet intercommunication of air-cooler has the outlet duct, and the left end of outlet duct runs through the shell and communicates there is the three-way pipe, the top and the bottom of three-way pipe all communicate the gas-supply pipe, the one end that the three-way pipe was kept away from to the gas-supply pipe communicates respectively has first intercommunication frame and second intercommunication frame, the top of second intercommunication frame and the top bolt of base tank inner chamber, the right side of first intercommunication frame and the right side bolt of shell inner chamber, the left side of first intercommunication frame and the bottom of second intercommunication frame all are linked together there are a plurality of shower nozzles.
Preferably, both sides of the top of the inner cavity of the shell are bolted with cooling fans.
Preferably, the top of shell has all seted up the heat dissipation groove from left to right in proper order, the top bolt of shell has first filter screen.
Preferably, the right side bolt of fixed station top has the framework, the top and the bottom of framework inner chamber have the second filter screen all bolt, the left side of framework and the right-hand member intercommunication of intake pipe.
Preferably, the filter plates are bolted to the right sides of the top and bottom of the inner cavity of the water tank.
Preferably, the back of the inner cavity of the bottom box is sequentially bolted with fixing pieces from left to right, and the inner cavity of the fixing pieces is bolted with the surface of the water delivery pipe.
Compared with the prior art, the utility model has the beneficial effects that:
1. the utility model provides a cooling device of a vacuum coating machine, which is characterized in that a water pump, a cooling pipe and a water pipe are matched, cooling water is added into a water tank to absorb heat of a cavity of the vacuum coating machine, the cavity of the vacuum coating machine is cooled, the water pipe is cooled by cooling liquid, and the temperature of the cooling water in the water pipe is reduced.
2. The utility model provides a cooling device of a vacuum coating machine, which is characterized in that a part of cold air is blown to a cavity of the vacuum coating machine through the cooperation of an air cooler, a three-way pipe, an air conveying pipe, a first communicating frame and a second communicating frame, so that the cooling effect of the vacuum coating machine cavity is improved, and the other part of cold air is blown to a water pipe and cooling liquid, so that the cooling liquid and the water pipe are cooled, and the cooling effect of the cooling water on the vacuum coating machine cavity is improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a cross-sectional view of the overall structure of the present utility model;
FIG. 3 is a cross-sectional view of a frame structure of the present utility model;
fig. 4 is an enlarged view of the structure of fig. 2 a according to the present utility model.
Reference numerals in the drawings: 1. a housing; 2. a water tank; 3. a vacuum coating machine cavity; 4. a circulating water cooling mechanism; 41. a water pump; 42. a cooling tube; 43. a water pipe; 5. a jet assembly; 51. an air cooler; 52. a three-way pipe; 53. a gas pipe; 54. a first communication frame; 55. a second communication frame; 6. a bottom box; 7. a fixed table; 8. a heat radiation fan; 9. a first filter screen; 10. a frame; 11. a second filter screen; 12. and (5) a filter plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model provides a cooling device of a vacuum coating machine as shown in figures 1-4, which comprises a shell 1, wherein a water tank 2 is bolted to the left side of the bottom of the shell 1, a vacuum coating machine cavity 3 is arranged in the cavity of the shell 1, a circulating water cooling mechanism 4 is arranged in the cavity of the shell 1, an air injection assembly 5 is arranged on the right side of the cavity of the shell 1, a partition plate is bolted to the top and the bottom of the cavity of the water tank 2, a first water adding pipe and a first water draining pipe are sequentially communicated with the left side of the water tank 2 from top to bottom, a bottom tank 6 is bolted to the right side of the bottom of the shell 1, a second water adding pipe and a second water draining pipe are sequentially communicated with the right side of the bottom tank 6 from top to bottom, and cooling liquid is added into the cavity of the bottom tank 6.
The circulating water cooling mechanism 4 comprises a water pump 41, a cooling pipe 42 and a water conveying pipe 43, the water pump 41 is connected to the left side of the bottom of the inner cavity of the water tank 2 in a bolting mode, the water inlet of the water pump 41 is communicated with a water inlet pipe, the right end of the water inlet pipe penetrates to the right side of the partition plate, the water outlet of the water pump 41 is communicated with a water outlet pipe, one end of the water outlet pipe, far away from the water pump 41, of the water outlet pipe is communicated with the water conveying pipe 43, one end, far away from the cooling pipe 42, of the water conveying pipe 43 penetrates through the bottom box 6 and is communicated with the right side of the water tank 2, the cooling pipe 42 is arranged on the surface of the vacuum coating machine cavity 3, when the circulating water cooling machine is used, a user starts the water pump 41, the water pump 41 conveys cooling water in the water tank 2 into the cooling pipe 42, the cooling water flowing in the cooling pipe 42 absorbs heat of the vacuum coating machine cavity 3, then the cooling water is conveyed to the water conveying pipe 43, and at the moment, the cooling water is cooled down to the water conveying pipe 43, thereby cooling the cooling water flowing in the water conveying pipe 43 is cooled down, the cooling effect of the cooling water tank 3 is improved, the cooling effect of the cooling water circulating water is conveyed back to the bottom box 6, and the water tank 2.
The jet assembly 5 comprises an air cooler 51, a three-way pipe 52, an air pipe 53, a first communication frame 54 and a second communication frame 55, wherein the right side of the shell 1 is connected with a fixed table 7 in a bolting mode, the left side of the top of the fixed table 7 is connected with the air cooler 51 in a bolting mode, an air inlet pipe is communicated with an air inlet of the air cooler 51, an air outlet pipe is communicated with an air outlet pipe, the left end of the air outlet pipe penetrates through the shell 1 and is communicated with the three-way pipe 52, the top end and the bottom end of the three-way pipe 52 are communicated with the air pipe 53, one end, far away from the three-way pipe 52, of the air pipe 53 is respectively communicated with the first communication frame 54 and the second communication frame 55, the top of the second communication frame 55 is connected with the top of an inner cavity of the bottom box 6 in a bolting mode, the right side of the first communication frame 54 is connected with the right side of the inner cavity of the shell 1 in a bolting mode, the left side of the first communication frame 54 and the bottom of the second communication frame 55 are all communicated with a plurality of spray heads, a user opens the air cooler 51, the air cooler 51 conveys the air to the three-way pipe 52, the three-way pipe 52 conveys the air to the two air pipes 53, the air pipe 53 conveys the air to the first communication frame 54, the air and the vacuum coating is cooled by the air to the first communication frame 54, the air pipe 53 is cooled by the vacuum coating film 3, the vacuum coating is cooled by the vacuum coating air pipe 3 and the vacuum coating air pipe 3, and the vacuum coating is cooled by the vacuum coating 3.
The two sides of the top of the inner cavity of the shell 1 are both bolted with the cooling fans 8, and when in use, a user starts the cooling fans 8 to cool and dissipate heat of the vacuum coating machine cavity 3.
The heat dissipation groove has all been seted up in proper order from left to right at the top of shell 1, and the top bolt of shell 1 has first filter screen 9, ventilates in the shell 1, has improved the inside radiating effect of shell 1 to block the dust entering shell 1.
The right side bolt at fixed station 7 top has framework 10, and the top and the bottom of framework 10 inner chamber have all been bolted to second filter screen 11, and the left side of framework 10 and the right-hand member intercommunication of intake pipe block the dust, avoid the dust to be carried by air-cooler 51.
The right sides of the top and the bottom of the inner cavity of the water tank 2 are respectively bolted with a filter plate 12, and the circulating cooling water is filtered to remove impurities in the water.
The back of the inner cavity of the bottom box 6 is sequentially bolted with fixing pieces from left to right, and the inner cavity of the fixing pieces is bolted with the surface of the water conveying pipe 43, so that the water conveying pipe 43 is fixed, the stability of the water conveying pipe 43 is improved, and the water conveying pipe 43 is prevented from shaking.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A cooling device of a vacuum coating machine is characterized in that: including shell (1), the left side bolt of shell (1) bottom has water tank (2), vacuum coating machine cavity (3) are installed to the inner chamber of shell (1), the inner chamber of shell (1) is provided with circulating water cooling mechanism (4), the right side of shell (1) inner chamber is provided with jet module (5), the top and the equal bolt in bottom of water tank (2) inner chamber have the baffle, the left side of water tank (2) has first water pipe and first drain pipe from last to communicating in proper order down, the right side bolt of shell (1) bottom has base case (6), the right side of base case (6) has second water pipe and second drain pipe from last to communicating in proper order down, the inner chamber of base case (6) has added the coolant liquid.
2. The cooling device of a vacuum coating machine according to claim 1, wherein: the water circulation cooling mechanism (4) comprises a water pump (41), a cooling pipe (42) and a water delivery pipe (43), the water pump (41) is bolted to the left side of the bottom of the inner cavity of the water tank (2), a water inlet of the water pump (41) is communicated with a water inlet pipe, the right end of the water inlet pipe penetrates through the right side of the partition plate, a water outlet of the water pump (41) is communicated with a water outlet pipe, one end of the water outlet pipe, far away from the water pump (41), of the water outlet pipe is communicated with the cooling pipe (42), one end of the cooling pipe (42), far away from the water inlet pipe, penetrates through the bottom box (6) and is communicated with the right side of the water tank (2), and the cooling pipe (42) is arranged on the surface of the cavity (3) of the vacuum coating machine.
3. The cooling device of a vacuum coating machine according to claim 1, wherein: jet subassembly (5) are including air-cooler (51), three-way pipe (52), gas-supply pipe (53), first link (54) and second link (55), the right side bolt of shell (1) has fixed station (7), the left side bolt at fixed station (7) top has air-cooler (51), the air intake intercommunication of air-cooler (51) has the intake pipe, the air outlet intercommunication of air-cooler (51) has the outlet duct, and the left end of outlet duct runs through shell (1) and communicates there is three-way pipe (52), the top and the bottom of three-way pipe (52) all are linked together and are had gas-supply pipe (53), the one end that three-way pipe (52) were kept away from to gas-supply pipe (53) has first link (54) and second link (55) to be linked together respectively, the top of second link (55) is bolted with the top of base case (6) inner chamber, the right side of first link (54) and the right side bolt of shell (1) inner chamber, the bottom of left side and second link (54) all are linked together with shower nozzle (55).
4. The cooling device of a vacuum coating machine according to claim 1, wherein: both sides at the top of the inner cavity of the shell (1) are respectively bolted with a cooling fan (8).
5. The cooling device of a vacuum coating machine according to claim 1, wherein: the top of shell (1) has all seted up the heat dissipation groove from left to right in proper order, the top bolt of shell (1) has first filter screen (9).
6. A cooling device for a vacuum coating machine according to claim 3, wherein: the right side bolt at fixed station (7) top has framework (10), the top and the bottom of framework (10) inner chamber have second filter screen (11) all bolt, the right-hand member intercommunication of the left side and the intake pipe of framework (10).
7. The cooling device of a vacuum coating machine according to claim 1, wherein: the right sides of the top and the bottom of the inner cavity of the water tank (2) are respectively bolted with a filter plate (12).
8. The cooling device of a vacuum coating machine according to claim 1, wherein: the back of the inner cavity of the bottom box (6) is sequentially bolted with fixing pieces from left to right, and the inner cavity of the fixing pieces is bolted with the surface of the water delivery pipe (43).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320854033.7U CN219390258U (en) | 2023-04-17 | 2023-04-17 | Cooling device of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320854033.7U CN219390258U (en) | 2023-04-17 | 2023-04-17 | Cooling device of vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219390258U true CN219390258U (en) | 2023-07-21 |
Family
ID=87165563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320854033.7U Active CN219390258U (en) | 2023-04-17 | 2023-04-17 | Cooling device of vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219390258U (en) |
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2023
- 2023-04-17 CN CN202320854033.7U patent/CN219390258U/en active Active
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